REVO五轴测量系统探针变形量标定及光栅值提取（英文）

REVO~(TM)是基于正交式坐标测量机设计和应用的、能够同时实现高效高精度测量的动态测头系统。针对REVO五轴测量系统在非正交式坐标测量机中应用的问题,提出了REVO测头探针变形量的标定方法,并从测量系统返回的有限数据中分离出了各主轴的光栅数据,实现了测量点三维坐标数据的重构。实验验证了所提出标定方法和各主轴光栅值提取的有效性和正确性。实验结果表明,经过探针变形量补偿后,测量误差最大值从0.202 1mm降低到0.000 9mm,所提取出的各主轴光栅值变化量降低了两个数量级。     

关节式坐标测量机热变形误差及修正

关节式坐标测量机工作温度范围宽,可以在线测量,应用领域越来越宽.这也使得其热变形误差随着对测量机测量精度要求的提高越来越受到关注,并且对其必须加以修正.简要分析关节式坐标测量机主要部件由于温度变化对测量的影响.关节式坐标测量机热变形误差模型用单隐层带反向传播前馈神经网络建立,网络的输入是测量机两个温度参数和测头的坐标值,输出为测头坐标相对于20℃该点的变化量.通过试验获得数据样本,训练所建模型并进行仿真.试验结果表明所建模型对关节式坐标测量机热变形误差修正是有效的.     

关节臂式坐标测量机测量力误差分析及补偿

针对接触测量力对关节臂式坐标测量机(AACMM)测量精度的影响展开研究。对测量力引起的长度测量误差进行理论和实验分析,得到测头与被测件的局部变形、测杆的弯曲变形是影响关节臂式坐标测量机测头精度的主要因素。建立了关节臂式坐标测量机测头与被测件的局部变形、测杆的弯曲变形的数学模型,并对测量结果进行了测量力误差补偿。实验结果研究表明,测量力引起的误差对接触式关节臂式坐标测量机测量精度影响很大。通过本研究成果,可在很大程度上补偿测量力引起的误差:平均长度测量误差降低82%左右,最大误差降低约47μm,有效地提高了关节臂式坐标测量机的测量精度。     

雷尼绍REVO五轴测量系统

REVO是雷尼绍推出的新一代动态测座和测头系统。这一革命性新产品的设计不仅使坐标测量机能够发挥最高测量效率,而且可保持极高的系统精度。     

MTMM—211小型台式三坐标测量机

MTMM-211小型台式三坐标测量机是在普通万能工具显微镜的基础上,分别在仪器x、y轴上加装长光栅位移传感器,在立柱上加装光栅阿贝头,在阿贝头的活动测杆上固定三维触发式测头并配置全微机化坐标测量与数据处理系统后构成的。全微机化坐标测量系统采用先进的插件式个人仪器结构,四块具有光栅位移测量。三维测头触测信号处理和通讯功能     

亚微米级高精度复合式坐标测量机的研制

坐标测量机(CMM)是最常用的长度测量仪器,但在面对复杂结构工件的高精度测量时,配备单一接触式测头的坐标测量机往往无法完全满足测量需求。针对这种情况,本文研制了一种亚微米级的高精度复合式坐标测量机。该仪器集成接触式测头、影像测头和光谱共焦测头,充分利用每种测头各自的优势,实现复杂工件的快速高精度测量。本文介绍了高精度复合式坐标测量机测量精度影响因素的处理方法,完成了测量机的机械结构设计,进行了几何误差和热误差补偿,对测量机3种测头进行了独立标定及融合标定。精度验证测试结果表明,所研制的复合式坐标测量机测量精度可达到亚微米级水平。     

三坐标测量机驱动的摄像机标定技术

为了降低摄像机的标定费用和提高标定精度,提出了一种基于三坐标测量机平动的摄像机标定技术,对该技术的原理、数学模型、标定步骤和标定精度进行了研究。根据摄像机标定的基本原理,利用三坐标测量机沿X、Y、Z轴移动和正交精度都很高的特点,以三坐标测量机带动待标定摄像机产生和白色陶瓷标准球球心(标定特征点)在X、Y、Z轴方向上的相对平动,得到标定特征点在测头坐标系中不同位置的坐标;在每一个确定位置,摄像机拍摄标定特征点的像,经图像处理后,计算出像点在计算机帧存坐标系中的坐标。引入测头坐标系,建立了该项摄像机标定技术的数学模型,给出了标定步骤,组建了标定系统。比对标定实验结果表明,基于三坐标测量机平动的摄像机标定系统与专用标定系统的标定精度相当,数据相差在±1μm以内,满足工程实际精度要求,成本低、标定效率高。     

3-PSS并联机构正解及其在坐标测量机中的应用

针对传统坐标测量机和关节臂测量机存在的技术局限,基于3-PSS并联机构原理,提出了只需一只长光栅、一条精密导轨即可实现三维空间精密测量的坐标测量机,并研究了测量系统的测量模型、测量误差模型及并联机构误差平均效应.根据并联机构基本理论建立了测量机的六杆测量模型,在此基础上进行了杆长制造、装配误差和光栅读数误差的理论分析.然后,从理论上展示和说明了并联机构存在误差平均效应的数学本质和依据.最后,介绍了样机的设计及制造,并给出初步的实验结果.在没有进行误差修正和系统标定的前提下,该样机在X,Y,Z3个坐标方向上的测量误差分别为0.029 mm,0.045 mm和0.058 mm.得到的结果可指导新样机的优化设计.     

平行双关节坐标测量机的标定及不确定度评价

借鉴国外ScanMax测量机所具有的优势,研发了RRP结构(即两个转动和一个直线运动)的平行双关节坐标测量机,并研究了该仪器的误差模型、标定方法和不确定度评定方法。首先,根据平行双关节坐标测量机的机械结构建立了仪器的数学模型和误差模型。然后,基于全误差分析技术设计了仪器的标定方案并分别介绍了对重力和扭矩变形、平行度、臂长、零位等参数的标定。最后,根据国家坐标测量机校准规范,提出了通过评价测量重复性和长度测量精度的方法来评定测量不确定度。实验结果表明:在1 000mm×250mm(直径×高度)的测量范围内,平行双关节坐标测量机的测量不确定度可达到12μm(k=2)。得到的结果验证了平行双关节坐标测量技术及全误差分析技术的可行性,为非正交坐标测量机的标定探索了新的方法。     

面向机床在线测量系统的测头预行程求解算法

依据机床本身结构特点,提出了一种在直角坐标系下,基于最小二乘求圆原理的触发式测头预行程值求解算法.利用坐标测量机(CMM)与标准圆柱模拟机床在线测量系统的工作过程,控制测头始终保持统一姿态,在相同测量速度下自动地采取圆柱体某一平面内半圆上的数据点坐标,利用所得算法求解测头预行程值.通过对不同直径值的圆柱进行采点实验,对比计算结果,验证了该预行程算法对不同对象具有一致的测头特性,且在同一测量速度下产生相同的测头预行程值.     

NON-CONTACT MEASUREMENT OF SCULPTURED SURFACE OF ROTATION

A method for measuring the sculptured surface of rotation by using coordinate measuring machine (CMM) and rotary table is proposed. The measurement is realized during the continuous rotation of the workpiece mounted on the rotary table while the probe moves along the generatrix of the surface step by step. This method possesses lots of advantages such as simplicity of probe motion, high reliability and efficiency. Some key techniques including calibration of the effective radius of the probing system, determination of the position of axis of rotation, auto-centering of the workpiece, data processing algorithm, are discussed. Approaches for determining the coordinates on measured surface, establishing workpiece coordinate system and surface fitting are presented in detail. The method can be used with contact or non-contact probes. Some fragile ceramic and plaster parts are measured by using the system consisting of a CMM, rotary table, motorized head and non-contact laser triangulation probe. The measurin     

Error separation in CMM coordinate metrology

测量形状误差是精密制造业质量控制的关键部分。坐标测量机(CMM)是自动化精确测量维度尺寸和几何形状的机器。本文选用两种类型的坐标测量机触发探针进行标准工件测量,旨在研究不同的每转波数(UPR)时不可预见的动态固有误差的影响。整个实验过程使用探针类型和探针速度参数,采用快速傅立叶变换分析实验结果,得到受CMM机械结构和探针扫描速度影响而可预见的几何误差。实验结果表明,UPR的数量在进行圆形测量时对CMM准确度水平起非常重要的作用。本文对探针系统和坐标测量机结构响应的具体误差公式也进行了假设与分析,以经验数据来预测PRISMO-Bridge-CMM在NIS中的准确度。     

Measuring large 3D structures using four portable tracking laser interferometers

A new concept that allows measuring 1D–3D objects in the range of several centimeters to 5 m × 5 m × 5 m is presented. In general terms the concept can be seen as a task specific correction of geometrical errors of coordinate measuring machines (CMMs). The developed system comprises a commercial CMM, its measurement and its evaluation software and a set of at least four high accurate tracking laser interferometers. The CMM is simply used as a mover which allows to capture points on the surface of a measuring object. In parallel the tracking laser interferometers follow a retro-reflector located close to the stylus tip of the tactile probe of the CMM. Based on a multi-lateration algorithm 3D-positions are calculated from the measured interferometric distances. Finally, two sets of coordinates emerged, namely, one by the CMM and the second from the metrological frame of the tracking laser interferometers. The interferometrically measured positions are usually more precise than the positions measured by the CMM. This is due to the high accuracy of the interferometric system and also due to the fact that the measurement positions are taken in a manner which almost avoids Abbe errors. Because of that, the measurement positions of the CMM are substituted with the more accurate measurement points calculated from distance measurements of the tracking interferometers. The position coordinates thus obtained are used for the further computerized evaluations, which yield the geometric parameters of the object measured. First measurements under laboratory condition show very promising results. It has been demonstrated that the concept is suitable for the high precision calibration of large workpieces with small tolerances, for instance, for the calibration of large gears for the windmill industry.     

基于三维激光扫描的移动大尺寸圆柱体工件长度快速检测系统

针对移动大尺寸圆柱体工件两端的表面形貌特征,利用三维激光扫描仪设计了一种快速长度在线检测系统。基于三维激光扫描仪可在短时间内连续高速获取大量测量数据的特点,系统在虚拟环境下构造出自适应测量形状的虚拟测量基准面,采用二维误差分离方法抑制系统误差和运动误差,识别定位工件两端端点并计算其到虚拟测量基准面的位移;最后结合多传感器融合模型获取三维位移场测量结果。另外,测试前用三坐标测量机精密测量过的相似形状圆柱体工件对系统进行了校准修正。为验证系统的精度和可靠性,分别对处于（1 000±25）mm内不同直径的圆柱体工件进行了长度检测。结果显示,系统可在1 s完成直径约为50 mm工件的长度测量,检测分辨力为0.010 mm,检测精度达到0.050 mm。实际运行结果表明,该设计系统具有高自动性和高效性,可满足在线生产中对大尺寸工件控制和检测的要求。     

电容传感器线性度标定平台

设计了一种电容位移传感器在线标定平台,用于位移的高精度调节和检测。该平台的运动对称中心轴、测量光路的对称中心轴和传感器的传感轴共轴,故从测量原理上减小了阿贝误差。标定平台具有z/tip/tilt调节功能,保证了传感器的传感面和被测面板的被测面之间的装调对准。介绍了标定平台的组成和标定方法的原理,采用对称平行四边形机构实现了微位移调节,基于柔度矩阵法(CMM)分析了导向机构的输出柔度和行程。试验测得动平台行程为735.162μm,和有限元法(FEM)、CMM计算结果的误差分别为7.410%和4.633%,满足行程误差要求。经过标定补偿后,传感器的线性度由0.014 21%提高至0.006 231%。实验结果显示,该线性度标定方法精度高,标定后的传感器满足位移精密调节机构使用要求。     

Measuring external profiles of porous objects using CMM

Coordinate measuring machine (CMM) has been extensively used in surface measurement and inspection. CMM produces more accurate and reliable results compared with non-contact measurement devices, since CMM measures target surfaces in a tactile way and is not affected by surface reflection quality. However, when there is porosity on the outside surfaces, CMM measurement will have errors because part of the probing stylus will come into the porosity spaces. This paper presents a method of using CMM to measure external profiles of objects with external porosity spaces. The center of a CMM probing stylus will be compensated to avoid porosity spaces and located above external surface areas along surface normal directions. Such a probing strategy can be implemented in both computer-aided design (CAD)-guided mode and non-CAD-guided mode. When the CAD model is available, the probing styli are guided to approach the surface along its normal directions successively to identify and avoid porosity spaces. When the CAD model is unavailable, surface normal directions will be estimated first and then adjusted. The presented method is able to avoid porosity spaces in CMM measurement regardless of the availability of CAD models.     

Automatic inspection of turbine blades using a 3-axis CMM together with a 2-axis dividing head

Turbine blades are widely used in turbo-engines and generators. The complex geometry of turbine blades and the limited space between two adjacent blades cause difficulties in both machining and inspection. This paper is focused on the use of a 3-axis coordinate measurement machine (CMM), together with a dividing head with two rotational axes, to undertake the task of precision inspection of turbine blades that surround the periphery of an axial wheel. Based on the geometrical relationship between the probe stylus and the turbine blades, a methodology is proposed to find the angle of rotation of the axial wheel when a collision is likely to occur between them. Other issues related to system implementation are also discussed in this paper, including: (1) Data transformation from the turbine blade’s geometric model to the CMM control codes, (2) Planning of the traveling paths of the stylus, and (3) Analysis of the measured data.     

基于球形目标的激光位移传感器光束方向标定

搭建了非接触式的三坐标测量系统以便精密测量三维型面。将激光位移传感器通过具有两个回转轴的回转体安装在测量机的Z轴上,从而可根据待测表面的形状来调整传感器的方位。为了使传感器在各个方位上实现测量功能,提出了基于球形目标的光束方向标定方法,并详细阐述了其数学原理。标定时,驱动测量机使传感器分别沿测量机的X,Y和Z轴做等间距步进,根据步长和激光束长度的变化建立方程组求解出激光束所在直线的单位方向向量。最后,多次测量尺寸参数已知的六面体标准块规,检验了该测量系统的重复性。结果显示,该系统的测量不确定度为0.048mm;测量另一直径已知的被测球时,传感器在各个方位上的误差小于0.05mm,表明所提出的标定方法使测量系统达到了逆向工程的使用要求。得到的数据表明,本文所提出的方法有较高的标定精度和较好的重复性,为实现三维型面的快速扫描测量奠定了基础。     

Robot calibration using an automatic theodolite

The Vision Based Automatic Theodolite (VBAT) is an automatic partial pose measurement system for robot calibration. It uses low resolution rotation stages and resolution enhancement from a vision system to determine the line-of-sight to a spherical illuminated target. Automatic tracking, focusing, and centring provide the calibration system with speed, reliability, and repeatability. A kinematic model of the VBAT is described which includes both the mechanical parts of the system and the optics, using a modified Denavit-Hartenberg approach. All parameters in the VBAT model are identified and embedded into the system controller producing an instrument of 2 arc second accuracy. The system is then used in a conventional manner to calibrate a six degree of freedom PUMA robot, and the results compared to another calibration of the same arm by a coordinate measuring machine with repeatability and accuracy of 0.02 mm. The calibration using the VBAT enhances the accuracy of the PUMA to within 0.2 mm of that produced by the CMM calibration, compared to an accuracy of 14 mm prior to calibration.