A multichannel power supply for high power magnetrons

The paper describes characteristics and design principles of a multichannel power supply for CW magnetrons with RF power up to 3 kW. An advanced control system implemented in the power supply has resulted in its good operational properties as well as allowed providing adaptive procedures for the regulation of magnetron operation. A modular approach based on utilization of novel electronic components increases reliability and lowers weight and dimensions of the power supply.     

A power supply for magnetron sputtering systems

A design and electric circuits of the power supply for magnetron sputtering systems with a power of up to 5 kW are described. The power supply is intended for operation in direct-current (DC) or pulse modes with a pulse repetition rate of up to 100 kHz. The arc suppression system limits the energy delivered to the arc discharge at about 110 mJ in the DC mode and 9 mJ in the pulse mode, respectively. The possibilities of optimizing coatings by selecting working parameters of the power supply were demonstrated by the example of thin-film coatings of two types (Ag and Ga-doped ZnO thin films).     

A Transistor-Based Modulator for a Microwave Magnetron

A modulator designed as a power supply for a microwave magnetron with an output peak power of 3 MW and mean power of 10 kW is described. The 100 transistors used in the modulator are connected in parallel, and their capacitors are switched to the primary winding of a pulse transformer. Across the secondary winding, pulses are generated with a peak voltage of 50 kV, a current of 100 A, a duration of 0.6–6 s, and a repetition frequency of up to 2 kHz.     

磁控溅射中频电源仿真研究

磁控溅射中频电源及其辉光放电负载是一个典型的强非线性时变系统，对该系统建模并求其解析解是相当困难的。使用Simulink对磁控溅射中频电源建模，对电源工作时各种工况下输出电流波形进行了研究，研究表明，这种仿真方法对电源系统设计有效，可以推广应用。     

基于DSP的直流磁控溅射电源设计

该文通过研究磁控靶工作时的负载特性,设计了以全桥逆变开关电源技术为基础的高效、大功率磁控溅射电源。利用Matlab搭建的模型对电路的参数、输出波形进行了仿真,在仿真的基础上完成了主回路、控制电路硬件及软件程序的设计及样机测试,并在JTP-1400型磁控溅射镀膜机上进行了实验。实验结果证实该电源具有恒流控制效果好,电流截止负反馈反应迅速,工作稳定等优点。     

交流脉冲式磁控溅射靶极电源的研制

本文介绍了一种中频交流脉冲式磁控溅射靶极电源。该电源采用全桥逆变拓扑电路、PWM控制方式、输出功率叠加的方案，具有快速的过流检测与保护功能。在等离子体负载下进行了抑制弧光放电和空心阴极效应的实验，同低频直流脉冲电源相比，交流脉冲放电对其抑制是非常有效的。这表明该电源作为磁控溅射靶极电源是完全可行的，也为进一步探索交流磁控溅射新工艺提供了可靠的研究设备。     

Stable microwave coaxial cavity plasma system at atmospheric pressure

We present a systematic study of the development of a novel atmospheric microwave plasma system for material processing in the pressure range up to 760 torr and the microwave input power up to 6 kW. Atmospheric microwave plasma was reliably produced and sustained by using a cylindrical resonator with the TM(011) cavity mode. The applicator and the microwave cavity, which is a cylindrical resonator, are carefully designed and optimized with the time dependent finite element Maxwell equation solver. The azimuthal apertures are placed at the maximum magnetic field positions between the cavity and the applicator to maximize the coupling efficiency into the microwave plasma at a resonant frequency of 2.45 GHz. The system consists of a magnetron power supply, a circulator, a directional coupler, a three-stub tuner, a dummy load, a coaxial cavity, and a central cavity. Design and construction of the resonant structures and diagnostics of atmospheric plasma using optical experiments are discussed in various ranges of pressure and microwave input power for different types of gases.     

A low-frequency high-power arbitrary-shape voltage pulse generator

A circuit diagram and design of the arbitrary-shape bipolar voltage pulse generator with amplitudes up to 800 V and a peak output on a matched load of 400 kW are described. The generator is based on car rechargeable batteries and power insulated-gate bipolar transistors (IGBTs). Results of the experiments aimed at producing high-power harmonic signals with frequencies of 50 Hz and 1 kHz are presented.     

离子渗氮用脉冲电源的研制

本文通过对比,论述了离子渗氮用直流电源的缺点以及脉冲电源在克服相应问题上的优势,研制了100kW离子渗氮用脉冲电源,介绍了其电路原理.此电源具有很大的推广应用价值.     

ILU-14 industrial electron linear accelerator with a modular structure

A new high-power (up to 100 kW) industrial electron linear accelerator ILU-14 for energies of 7.5–10.0 MeV has been developed by the Budker Institute of Nuclear Physics. The operating frequency of the accelerator is 176 MHz, and the total efficiency is 26%. Owing to the modular structure of the accelerator, the electron energy and the beam power can be varied within certain limits by changing the modular arrangement. A 5-MeV prototype of this accelerator has been produced and successfully tested. Its design parameters verified in the experiments are as follows: the beam current averaged over the RF period is 600 mA, the beam pulse power is 2.5 MW, and the electron efficiency of the accelerating structure is 68%. By applying an additional RF voltage to the electron gun cathode-grid gap, a 96% transmittance of the beam current has been attained at a minor beam energy spread. The prototype of the ILU-14 accelerator can be used as an accelerator with a beam power of 50 kW.     

2.5 kW开关电源模块监控系统设计

介绍了在一个2.5 kW自冷式通信高频开关电源模块中监控系统的功能和其硬件、软件的设计。其中功能包括运行信息的显示、输出电压电流的实时监控以及其他参数的采集,并实时与监控系统模块进行串行通信。最终实现了多模块通信电源系统的无人值班运行。     

一种10kW/50kV电子束焊机用高压电源

介绍电子束焊机对高压电源的技术要求,针对高压直流电源存在的问题,研制了一种基于谐振的高频逆变的大功率高压直流电源;从主电路、驱动电路等给出电源的设计过程。最后,给出实验结果,表明研制的电源能够达到10kW,50kV的输出。     

新的超声波振动电源控制模型设计与应用

设计了基于BP神经网络的超声波振动电源控制模型,并应用到新的超声波振动电源中。在730℃铝合金熔体铸造实验过程中,新的超声波振动电源输出频率为19.259kHz~20.086kHz,超声波平均振幅为15.93μm,输出功率为1.073kW~1.203kW,晶粒的平均尺寸为143.63μm,晶粒尺寸大小均匀。系统仿真与实验结果表明,使用新的超声波振动电源控制模型可以提高电源输出功率和频率的精度,有助于超声波振动电源的稳定工作,提高了铝合金的铸造质量。     

100kV输出的2kW直流高压电源

介绍一种 10 0kV输出的 2kWDC高压电源。它以晶闸管变流和以变压器升压实现高压输出 ,而且 ,电压可连续调节。     

基于移相控制的高频感应加热电源的研究

随着大功率半导体器件的发展,高频感应加热电源的研制已取得了很大的进展。基于PWM移相控制原理,对20 kW/100 kHz的高频感应加热电源进行了整体设计。电源主电路采用全桥串联谐振逆变器,以MOSFET为逆变器的功率器件。同时给出了移相功率控制电路、驱动电路以及频率跟踪电路等的实现方法,并且用PSpice进行了仿真验证。     

大功率伺服驱动器的优化设计

介绍一种110kW的交流伺服驱动系统,其中伺服驱动器主电路开关元件采用绝缘栅双极晶体管IGBT。文中从吸收电路、过流保护和直流母线等方面对大功率伺服驱动器进行了优化设计。     

基于单片机的磁控溅射稳压开关电源设计

磁控溅射真空镀膜技术与传统的化学电镀技术相比,具有环保、降耗、减排等优点,磁控电源是这种镀膜装置的关键部件之一。该文研究和设计了以高频开关电源技术为基础的高效率、大功率磁控稳压电源。文中介绍了主电路、控制电路的原理设计,用Matlab仿真软件搭建了电路模型,并进行了仿真实验,在此基础上完成了硬件电路、软件程序设计。通过AT89C51单片机实现了在不同工作方式下电源输出电压和电流的调节。实际应用证明该电源具有恒流控制效果好,可靠性高,工作稳定等优点。     

数字化变频工业微波设备电气控制系统的设计

新型数字化变频微波电源与传统的工频变压器升压式微波电源相比,具有效率高、电网适应范围广、功率连续可调的优点,而且可以反馈微波电源和磁控管的工作状态和故障信息。该文开发了一套基于新型数字化变频微波电源的工业微波整机智能控制系统,提高了工业微波设备的自动化水平、稳定性及可靠性,对于工业微波设备的推广及应用具有重大意义。     

大功率DPSSL的高性能驱动电源的设计

根据半导体激光二极管的工作特性,设计了基于全开关拓扑的大功率DPSSL驱动电源。为了提高开关电流源输入电压的波形质量和整个电源的供电可靠性,驱动电源的前级采用单相BOOST—PFC加ZVS移相全桥电路的拓扑结构组成精密电压源,并搭建了一台3kW的实验样机验证设计方案的可行性,实验证明该驱动电源具有比较高的综合性能,能够满足材料加工工业大功率DPSSL的需要。     

Frequency Tuning of a Magnetron of the 3-mm Wavelength Range Using an Additional Output

The frequency tuning of a magnetron that operates on a spatial harmonic of the π/2–1 oscillation type was investigated. The mechanisms that limit the frequency-tuning range upon a change in the electric length of an additional (second) energy output were clarified and the possibilities of creating preferable conditions for exciting an operating oscillation mode by changing the external quality factor via rotation of the electromagnetic-field structure were determined. Based on calculations, experimental prototypes of magnetrons were manufactured and investigated. Long-term stable oscillations with a power of up to 11.5 kW were achieved. The tuning range using the second output is 300 MHz with a decrease in the output power down to 68% relative to the maximum power. The tuning range is up to 600 MHz at a power level of ~30% of the maximum and a reduced anode voltage.