Replication of precise polymeric microlens arrays combining ultra-precision diamond ball-end milling and micro injection molding

A simple and novel combination of ultra-precision diamond ball-end milling and micro injection molding technique is described to produce precise microlens arrays out of polycarbonate (PC), polymethylmethacrylate (PMMA) as well as polystyrene (PS). The microlens arrays consist of 100 lenses in a 10 × 10 array with a lens radius of 273 μm, a lens diameter of 300 μm and a lens depth of 45 μm. Pitch between the lenses is fixed at 800 μm. The injection molding parameters were optimized to get precise microlens geometries with low surface roughness. The results show a precise diamond milled mold insert and injection molded microlens arrays with minor deviations in radius and surface roughness of the microlenses, particularly for microlens arrays out of PMMA.     

A micro roller embossing process for structuring large-area substrates of laminated ceramic green tapes

This paper presents a micro roller embossing process for patterning large-area substrates of laminated green ceramic tapes. The aim of this research is to develop a large-area microstructure formation technique for green ceramic substrates using a thermal roller laminator, which is compatible with screen printing apparatus. A thin film nickel mold was developed via photolithographic patterning and nickel electroplating on a 75-μm-thick nickel film. The mold had an effective panel size of 150 mm × 150 mm with the height of plated protrusive patterns being about 38 μm. Formation of micro patterns was successfully demonstrated over the whole panel area on laminated green ceramic tapes using roller embossing. Micro patterns for inductors, heaters as well as interconnection with 50 μm line-width were embossed on green ceramic substrates. By means of tuning process parameters including roller temperature, applied pressure and feeding speed, we have demonstrated that micro roller embossing is a promising method for patterning large-area green ceramic substrates.     

Resin micromachining by roller hot embossing

The roller hot embossing is an efficient process of manufacture in which patterns are continuously transcribed on film, etc. Recently, the application of the embossing roll to the manufacturing processes of micro parts is paid attention. In this paper, we examined the development of the embossing roll with patterns of micron level and we tried to make the embossing roll mold by using the LIGA process. In this study, instead of producing embossing patterns directly on the roll surface, we fabricated a flexible thin mold with micro-patterns, which was then wrapped onto a cylinder to form an embossing roll, and tested the soft-mold roller hot embossing method. First, by optimizing UV exposure conditions of UV lithography, we prepared a resist pattern of numerous dots with a diameter of 10 μm, a sag height of 8 μm and a pitch of 20 μm. By Ni-electroforming this pattern, a 50 μm-thick thin mold was successfully fabricated. The 50 μm-thick mold was then wrapped onto a cylinder to form an embossing roll. In the roller hot embossing process, the 10 μm-diameter dot shape was successfully replicated on PET sheets.     

Fabrication of microneedle array using LIGA and hot embossing process

We demonstrate a novel fabrication technology of the microneedle array applied to painless drug delivery and minimal invasive blood extraction. The fabrication technology consists of a vertical deep X-ray exposure and a successive inclined deep X-ray exposure with a deep X-ray mask whose pattern has a hollow triangular array. The vertical exposure makes triangular column array with a needle conduit. With the successive inclined exposure, the column array shapes into the microneedle array without deep X-ray mask alignment. Changing the inclined angle and the gap between the mask and PMMA (PolyMethylMetaAcrylic) substrate, different types of microneedle array are fabricated in 750–1000 m shafts length, 15^o–20^o tapered tips angle, and 190–300 m bases area. The masks are designed to 400–600 m triangles length, 70–100 m conduits diameter, 25–60EA/5 mm² arrays density, and various tip shapes such as triangular, rounded, or arrow-like features. In the medical application, the fabricated PMMA microneedle array fulfills the structural requirements such as three-dimensional sharp tapered tip, HAR (High-Aspect-Ratio) shafts, small invasive surface area, and out-of-plane structure. In the skin test, the microneedle array penetrates back of the hand skin with minimum pain and without tip break and blood is drawn after puncturing the skin. Hot embossing process and mold fabrication process are also investigated with silicon and PDMS mold. The processed tetrahedral PMMA structures are fabricated into the microneedle array by the additional deep X-ray exposure. With these processes, the microneedle array can be utilized as the mold base for electroplating process.The author thanks the staff in 9 C LIGA beamline, Pohang Light Source (PLS), Korea for their assistance on the fabrication process.     

Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments

This paper reports that the fabrication of the reflowed microlens by the negative tone JSR THB-130 N photoresist can be treated with different thermal treatments using hotplate and oven. The different disk or thin cylinder arrays with diameters of 40–70 μm and thickness of about 7.4 μm were patterned using photolithography technology, and baked at 220°C by two kinds of thermal treatments using hotplate and oven to form reflowed microlens arrays. The spot size of the refractive microlens was then measured by optical microscopy and the total focal length of refractive microlens was simulated by curve fitting the lens profiles. The resolution of the microlens arrays approaches to 400 dpi as coated with Hexamethyldisilizane material. The smallest spot size of about 2.72 μm at the nominal 40 μm microlensis is obtained by the oven heat treatment, and the shortest total focal length of about 150 μm at the nominal 40 μm microlens is achieved by the hotplate heat treatment. The reduced spot size and total focal length of the microlens could improve the density and performance of optical devices and imaging systems.     

New high fill-factor triangular microlens array fabrication method using UV proximity printing

A simple and effective method for fabricating a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling the printing gap between the mask and substrate. The designed approximate triangle microlens array pattern can be fabricated in photoresist. This is because to the UV light diffraction deflects away from the aperture edges and produces a certain exposure in photoresist material outside the aperture edges. This method can precisely control the geometric profile of a high fill-factor triangular microlens array. The experimental results showed that the triangular photoresist microlens array could be formed automatically when the printing gap ranged from 240 to 840 μm. The gapless triangular microlens array will be used to increase the luminance for the backlight module of liquid crystal displays. An erratum to this article can be found at     

Replication of high-aspect-ratio nanopillar array for biomimetic gecko foot-hair prototype by UV nano embossing with anodic aluminum oxide mold

In this paper, we present a simple and cost-effective replication method of high-aspect-ratio polymer nanopillar array as a biomimetic gecko’s foot hair prototype. A UV nano embossing process was applied for the replication of polymer nanopillar arrays. Highly ordered straight nanoporous AAO (anodic aluminum oxide) templates were utilized as reusable master molds. Densely arranged high-aspect-ratio nanopillar arrays have been successfully fabricated by means of the UV nano embossing process with the AAO mold. Pull-off force measurements were carried out to characterize the adhesive force of the replicated nanopillar arrays on the polymer substrates based on the force–distance curves obtained from the atomic force microscope (AFM) with a modified AFM cantilever. The force measurement results showed that the larger diameter and the taller height of the nanopillars result in the larger adhesive force.     

New high fill-factor dual-curvature microlens array fabrication using UV proximity printing

A new high fill-factor dual-curvature microlens array fabrication method using lithographic proximity printing process is reported. The proposed technology utilizes UV proximity printing by controlling a printing gap between the mask and substrate. The designed microlens array pattern with high density can produce a high fill-factor dual-curvature microlens array in photoresist. Because the UV light diffraction deflects away from the aperture edges and produces exposure in photoresist material outside the aperture edges, this method can precisely control the geometric profile of a high fill factor dual-curvature microlens array. The experimental results showed that the dual-curvature micro-lens array can be formed automatically in photoresist when the printing gap ranged from 360 to 600 μm. The gapless dual-curvature microlens array will be used to enhance the luminance uniformity for light-emitting diodes (LEDs).     

Ferrofluid-molding method for polymeric microlens arrays fabrication

This study proposes a method named as ferrofluid-molding method for polymer microlens array fabrication. In this method, the master of the mother mold for microlens molding is an array of ferrofluid droplets. We generated droplet arrays by inducing the droplet’s magnetic hydrodynamic instability under different magnetic fields, and used the field-dependent droplet dimensions to fabricate numerous mold cavities. By this we could fabricate arrays of microlens with different bottom area, height, radius of curvature, and focal length. From our analysis, all the fabricated microlens arrays possessed good uniformity, and the largest numerical aperture of our microlens array was found as 0.54. In addition, we also designed a light uniformity experiment to demonstrate a potential application of our microlens arrays.     

Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination

Microfluidics on foil is gaining momentum due to a number of advantages of employing thin films combined with the capability of cost-effective high-volume manufacturing of devices. In this work, ultra-thin, flexible Y-microreactors with microchannels of 100 μm width and 30 μm depth were fabricated in thermoplastic polymer foils. The fluidic pattern was hot roll embossed in 125 μm thick poly-methyl-methacrylate (PMMA) and 130 μm thick cyclic-olefin-copolymer (COC) films using a dry-etched microstructured silicon wafer as a flat embossing tool in a laminator. The sealing of the channels was performed with two different techniques, one based on lamination of SU8 dry film resist (DFR) and the other one based on spin-coated poly-dimethylsiloxane (PDMS). Testing of the interconnected microreactor was carried out using two dye colorant solutions to demonstrate mixing.     

Rubber-assisted micro forming of polymer thin films

Polymer thin films patterned with microstructures at a characteristic size greater than the film thickness are difficult to fabricate using the standard hot embossing technology. This study investigated a rubber-assisted embossing process for structuring polymer thin films. The main advantages of a rubber support, instead of a hard counter-tool, include simplification of the embossing tool, protection of the embossing master, buildup of uniform embossing pressure, and ease of demolding. The testing pattern for rubber-assisted embossing was a microgroove pattern with a characteristic size of 100 μm on a 25-μm thick polystyrene film. Results showed that the uniformity and replicability of the embossed pattern were significantly affected by the embossing temperature, the rubber hardness, and the embossing pressure. With an embossing temperature about 20°C above the glass transition temperature and appropriate rubber hardness and embossing force, uniform microgroove patterns were successfully replicated.     

Roll-to-roll hot embossing of microstructures

In this paper we present a new roll-to-roll embossing process allowing the replication of micro patterns with feature sizes down to 0.5 μm. The embossing process can be run in ‘continuous mode’ as well as in ‘discontinuous mode’. Continuous hot embossing is suitable for the continuous output of micro patterned structures. Discontinuous hot embossing has the advantage that it is not accompanied by waste produced during the initial hot embossing phase. This is because in ‘discontinuous mode’, embossing does not start before the foil has reached the target temperature. The foil rests between two parallel heating plates and foil movement and embossing starts only after the part of the foil resting between the heating plates has reached a thermal steady state. A new type of embossing master is used which is based on flexible silicon substrates. The embossing pattern with sub-μm topographic resolution is prepared on silicon wafers by state of the art lithography and dry etching techniques. The wafers are thinned down to a thickness of 40 μm, which guarantees the mechanical flexibility of the embossing masters. Up to 20 individual chips with a size of 20 × 20 mm2 were assembled on a roller. Embossing experiments with COC foils showed a good replication of the silicon master structures in the foil. The maximum depth of the embossed holes was about 70% of the master height.     

Large area micro hot embossing of Pyrex glass with GC mold machined by dicing

Micro/Nano imprinting or hot embossing is currently a target of interest for industrial production of micro and Nano devices for the low cost aspect. In Fluidic MEMS (Micro Electromechanical Systems) applications, polymer materials have been widely employed for their low cost to fabricate the economical products (Becker and Heim in Sens Acuators A 83:120–135, 2000; Becker and Gaertner in Mol Biotechnol 82:89–99, 2001). However glasses are much more suitable for the higher temperature applications or under the stronger chemical environments. Moreover UV absorption of glass materials is much less than that of polymers, which is the advantage for bio-analysis. In Optical MEMS as well, glasses are good candidate materials for the better optical properties, such as high refractive index, low UV absorption and others. Although wet etching of glasses is widely employed for fabrication of fluidic MEMS devices, the wet etching is not satisfactory for the low machining resolution, the isotropic etched profile and poor roughness of the fabricated structures. Dry etching of glasses is then an alternative for Micro/Nano structuring, but the etching rate is extremely low (order of 0.1 μm/min) and the cost is too high because of the expensive RIE (Reactive Ion Etching) facility. Above mentioned is the reason why we are interested in hot embossing or imprinting of glasses of Micro/Nano scale. In our previous study, Micro/Nano imprinting was developed for Pyrex glasses using GC (Glassy Carbon) mold prepared by FIB machining (Takahashi et al. in Symposium on DTIP 2004 pp 441–446, 2004). The disadvantage of FIB machining is limited area of etching. The typical area of FIB is less than several hundreds micrometer square. This is the reason why we tried the large area of embossing using GC mold fabricated by dicing machine. Micro hot embossed test structures were successfully demonstrated with good fidelity. Fabricated micro structures can be applied for fabrication of microchamber array for PCR (Akagi et al. in Sci Techol Adv Mater 5:343–349, 2004; Nagai et al. in Anal Chem 73:1043–1047, 2001).     

Embossing of 3D ceramic microstructures

 An embossing method based on the viscous polymer processed (VPP) ceramic tape has been used to fabricate 3D ceramic microstructures with high aspect ratios. Examples of lead zirconate titanate (PZT) microrod arrays with feature sizes of 10–150 μm and aspect ratios of 3–10 have been demonstrated. Advantages of the embossing technique over conventional casting and moulding methods are discussed. Received: 10 August 2001/Accepted: 24 September 2001     

Collapse-free thermal bonding technique for large area microchambers in plastic lab-on-a-chip applications

Bonding is an essential step to form microchannels or microchambers in lab-on-a-chip applications. In this paper, we present a novel plastic thermal bonding technique to seal and form large area microchambers (planar characteristic width and length on the order of 1 mm and characteristic thickness on the order of 10–100 μm) without collapse by introducing a holed pressure equalizing plate (HPEP) that includes holes of the same size and shape as the microchambers. To demonstrate the proposed technique, two types of large area microchambers [(1) 20 × 10 mm and 40 μm thick and (2) 12 × 2.5 mm and 120 μm thick] with microchannels were designed and replicated on plastic substrates by means of hot embossing and injection molding processes with prepared two nickel mold inserts. The replicated large area microchambers as well as the microchannels in the plastic lab-on-a-chip were successfully sealed (i.e., no leakage) and formed without any collapse by the proposed thermal bonding technique with the help of the HPEP.     

Replication of microlens arrays by injection molding

Injection molding could be used as a mass production technology for microlens arrays. It is of importance, and thus of our concern in the present study, to understand the injection molding processing condition effects on the replicability of microlens array profile. Extensive experiments were performed by varying processing conditions such as flow rate, packing pressure and packing time for three different polymeric materials (PS, PMMA and PC). The nickel mold insert of microlens arrays was made by electroplating a microstructure master fabricated by a modified LIGA process. Effects of processing conditions on the replicability were investigated with the help of the surface profile measurements. Experimental results showed that a packing pressure and a flow rate significantly affects a final surface profile of the injection molded product. Atomic force microscope measurement indicated that the averaged surface roughness value of injection molded microlens arrays is smaller than that of mold insert and is comparable with that of fine optical components in practical use.This paper was presented at the Fifth International Workshop on High Aspect Ratio Microstructure Technology HARMST 2003 in June 2003.The authors would like to thank Korean Ministry of Science and Technology for the financial supports via the National Research Laboratory Program (2000-N-NL-01-C-148) and RAYGEN Co., Ltd. for the technical help in using the 3D profile measuring system.     

Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration

We succeeded to transfer a precise micro-pattern combining with an ultrasonic vibration in an atmospheric hot embossing on the almost same condition as a vacuum hot embossing. This paper reports the effect of the ultrasonic vibration that was verified experimentally. In the conventional method, a metallic mold and a plastic sheet are heated more than the glass transition temperature of the plastic, and the softened plastic is flowed into the pattern only by applying a load. On the other hand, a longitudinal ultrasonic vibration is added in the molding process of an ultrasonic-vibration hot embossing. The synergy effect of the load and the ultrasonic vibration enables flowing of the plastic into a more precise pattern of the metallic mold. The longitudinal wave generated by an ultrasonic vibration system of the frequency 15 kHz and output 900 W. A pattern of the Ni mold used in the experiment was a pyramid hole in which a peak was cut and sidewalls were rounded. Entrance lengths of pyramids were from 100 to 530 μm and its all of the depth were 260 μm. A polycarbonate was chosen with a replication material. Compared with the condition that the ultrasonic vibration was not used, a contact force and a contact time could be reduced to about 1/3 and 1/12, respectively.     

Fabrication of metallic micromolds by laser and electro-discharge micromachining

A method of creating metallic micromolds with features that have high-aspect ratios is described in this paper. The proposed manufacturing process utilizes laser micromachining to cut the negative two-dimensional profiles of the desired microfeatures and fluidic network patterns on a 100 μm thick brass sheet. The positive relief of the cut pattern is then created by using electro-discharge micromachining (micro-EDM) die-sinking the metallic mask onto a brass substrate. The final substrate with the desired relief pattern becomes the molding tool used for either elastomer casting or thermoplastic hot embossing. To validate the proposed fabrication methodology and evaluate the quality of surface finishes, a brass mold master of a T-channel micromixer (50 μm width, 25 μm height) is developed and multiple replicated devices are cast on this mold using poly-di-methyl-siloxane (PDMS). The surface finish of both the original micromold master and final molded channels on PDMS are measured using an optical profiler and found to have a roughness of approximately 400 nm Ra. The ability of the proposed fabrication technique to create high-aspect ratio features is illustrated by manufacturing a Y-channel micromixer with an aspect ratio of 4. Experimental results are discussed and suggestions for improvement are presented.     

Hot roller embossing for microfluidics: process and challenges

We report an initial study on hot roller embossing as a potential process for the mass production of polymer based microfluidic chips. Measurements conducted on 100 μm features showed that the lateral dimensions could be replicated to within 2% tolerance, while over 85% of mould depth was embossed. Feature sizes down to 50 μm and feature depths up to 30 μm had been achieved. Results revealed that the embossing depth increased with an increase in the nip force or a decrease in the rolling speed. There was an optimum temperature for achieving a high embossing depth; this was due to the reflow effect seen at higher temperatures. One observation included an asymmetric pile up of polymer material outside the embossed regions as a result of the orientation of the microchannel with respect to the rolling direction. This directional effect could be due to the dynamics of the roller setup configuration.     

Concave microlens array mold fabrication in photoresist using UV proximity printing

This paper presents a simple and effective method for fabricating a polydimethyl-siloxane (PDMS) microlens array with a high fill factor. The proposed method utilizes the UV proximity printing and photoresist replication methods. A concave microlens array mold is made using a printing gap in a lithography process. Optical UV light diffraction of UV light is used to deflect light away from the aperture edges to produce a certain exposure in the photo-resist material outside the aperture edges. This method can precisely control the geometric profile of a concave microlens array. The experimental results show that a concave micro-lens array can be formed automatically in photo-resist when the printing gap ranges from 240 to 720 μm. A high fill factor microlens array can be produced when the control pitch distance between the adjacent apertures of the concave microlens array is decreased to the aperture size.