Dielectric and tunable properties of Pb0.25BaxSr0.75−xTiO3 thin films fabricated by a modified sol-gel method

A modified sol-gel method was used to fabricate (Pb_0.25Ba_x Sr_0.75−x)TiO₃ (PBST) thin films with x = 0.05,0.1,0.15 and 0.2 on Pt/TiO₂/SiO₂/Si substrate. The structure, surface morphology, dielectric and tunable properties of PBST thin films were investigated as a function of barium content (x). X-ray diffraction and scanning electron microscopy analysis showed that we could get pure PBST perovskite phase and relative fine density thin films with smooth surface. It was found that the crystal lattice constant, grain size, room temperature dielectric constant, dielectric loss and tunability of Ba solutionizing PST thin films increased with the increase in Ba content. For (Pb_0.25Ba_0.2Sr_0.55)TiO₃ thin film, it had the highest dielectric constant of 1390 and the largest tunability of 80.6%. The figure of merit parameter reached a maximal value of 28.9 corresponding to the (Pb_0.25Ba_0.05 Sr_0.7)TiO₃ thin film, whose dielectric constant, dielectric loss and tunability measured at 1 MHz were 627, 0.024 and 69.4%, respectively.     

High dielectric tunability of Ba0.6Sr0.4TiO3 thin film deposited by radio-frequency magnetron sputtering

In microwave tunable devices, one of the major challenges encountered is the simultaneous minimization of the material's dielectric loss and maximization of dielectric tunability. In this work, Ba_0.6Sr_0.4TiO₃ thin film with the thickness of 300 nm was deposited on Pt/SiO₂/Si substrates using radio-frequency magnetron sputtering technique, and its dielectric properties were investigated. Due to the high temperature annealing process at substrate temperature of 600 °C, well-crystallized Ba_0.6Sr_0.4TiO₃ film was deposited. The dielectric constant and dielectric loss of the film at 100 kHz are 300 and 0.033, respectively. Due to the good crystallinity of the Ba_0.6Sr_0.4TiO₃ films deposited by radio-frequency magnetron sputtering, high dielectric tunability up to 38.3% is achieved at a low voltage of 4.5 V.     

Improved dielectric properties of chemical solution derived Pb0.5Sr0.5TiO3 thin films by a layer-by-layer annealing method

Pb_0.5Sr_0.5TiO₃ thin films were prepared on Pt/TiO₂/SiO₂/Si and LaNiO₃ (LNO)/Si substrates by using chemical solution deposition technique, and a layer-by-layer annealing method was used in an attempt to improve the dielectric properties of the thin films. The structure, dielectric, and ferroelectric properties of the thin films were investigated. Improved dielectric properties of the thin films were clearly confirmed: the dielectric constant and dielectric loss for the films on Pt/TiO₂/SiO₂/Si substrates annealed at 650 °C were 1064 and 0.027, respectively, at 1 kHz, with a dielectric tunability of more than 50%; similarly, the films prepared on LNO/Si substrates, showed a high dielectric constant of 1280 and a low dielectric loss of 0.023, at 1 kHz. P-E hysteresis loop measurements indicated that the remanent polarization and coercive field for the films on Pt/TiO₂/SiO₂/Si substrates annealed at 650 °C were 15.7 μC/cm² and 51 kV/cm, respectively.     

The roles of B-site ions in lead strontium zirconate titanate thin films for electrically tunable device applications

B-site modification lead strontium zirconate titanate Pb_0.4Sr_0.6Zr_xTi_1 − xO₃ (PSZT, x = 0-0.7) thin films were prepared on Pt/TiO₂/SiO₂/Si substrates by a sol-gel method. The XRD results indicate that paraelectric PSZT thin films at room temperature are obtained as x approaches 0.2. The temperature-dependent dielectric and hysteresis loop measurements reveal that the thin films have diffuse phase transition characteristics and relaxor-like behavior with nano-polar regions in the paraelectric films at room temperature. The Curie temperature of the PSZT thin films varies with the Zr contents, exhibiting a complex trend. This can be attributed to two competitive factors: higher mobility of Ti⁴⁺ than Zr⁴⁺ and smaller open space left for the displacement of Ti ions with the increase of Zr content. The further increase of the Zr contents leads to the simultaneous decrease of dielectric constant, dielectric loss and tunability. PSZT (x = 0.4) thin film shows the largest figure of merit of 24.3 with a moderate tunability of 55.8% and a dielectric loss of 0.023. This suggests that B-site ions have different roles in modifying the electrically tunable performance of PSZT thin films for tunable microwave device applications.     

Bottom electrodes dependence of microstructures and dielectric properties of compositionally graded (Ba1−xSrx)TiO3 thin films

Compositionally graded (Ba_1−xSr_x)TiO₃ (BST) thin films, with x decreasing from 0.3 to 0, were deposited on Pt/Ti/SiO₂/Si and Ru/SiO₂/Si substrates by radio frequency magnetron sputtering technology. The microstructure and dielectric properties of the graded BST thin films were investigated. It was found that the films on Ru electrode have better crystallization, and that RuO₂ is present between the Ru bottom electrode and the graded BST thin films by X-ray diffraction and SEM analysis. Dielectric measurement reveals that the graded BST thin films deposited on Ru bottom electrode have higher dielectric constant and tunability. The enhanced dielectric behavior is attributed to better crystallization as well as smaller space charge capacitance width and the formation of RuO₂ that is more compatible with the BST films. The graded BST films on Ru electrode show higher leakage current due to lower barrier height and rougher surface of bottom electrode.     

The effect of Bi1.5Zn0.5Nb0.5Ti1.5O7 cover layer on the dielectric and tunable properties of Ba0.6Sr0.4TiO3/Bi1.5Zn0.5Nb0.5Ti1.5O7 bilayered thin films

Bi_1.5Zn_0.5Nb_0.5Ti_1.5O₇ (BZNT) thin films with different thicknesses as cover layers were deposited on the Ba_0.6Sr_0.4TiO₃ (BST) thin films on the Pt/Ti/SiO₂/Si substrates by radio frequency magnetron sputtering method. The microstructure, surface morphology, dielectric and tunable properties of BST/BZNT heterogeneous bilayered films were investigated as a function of the thickness of BZNT films and the effect of BZNT films on the asymmetric electrical properties of BST/BZNT bilayered films was discussed. It was found that BZNT cover layer significantly improved the leakage current and the dielectric loss, and the dielectric constant and tunability of BST/BZNT bilayered thin films simultaneously decreased with the increasing thickness of BZNT films. The BST/BZNT bilayered thin film with a 50 nm BZNT cover layer gave the largest figure of merit (FOM) of 33.48 with the upper tunability of 55.38%. The asymmetric electrical behavior of BST/BZNT bilayered films is probably related to an internal electric field caused by built-in voltages at Pt/BST and BZNT/Au interfaces.     

Compositionally graded multilayer Ba<Subscript>x</Subscript>Sr<Subscript>0.95−x</Subscript>Ca<Subscript>0.05</Subscript>TiO<Subscript>3</Subscript> ceramics prepared by tape casting for use as dielectric materials

Compositionally graded multilayer Ba_xSr_0.95−xCa_0.05TiO₃ (BSCT) ceramics were prepared via tape casting method using nanometer powders from co-precipitation. Microstructures and dielectric properties of the BSCT system were investigated. The powders were characterized by using transmission electron microscope and BET surface area measurement. Surface morphologies of the sintered samples and multilayer structure were examined by scanning electron microscopy. BSCT particles were of spherical shape with diameters in the range of 73–93 nm. Their specific surface areas were in the range of 11.7–14.6 m²/g. The graded BSCT ceramics with nine layers laminated in vertical way exhibited a higher sintered density, with an average grain size of 0.4 μm, after sintered at 1,200 °C. Dielectric constant, dielectric loss and tunability of the graded ceramics were 2223.94, 1.5 × 10⁻³ at 2 MHz and 42.9% at 3.0 kV/mm, with good dielectric temperature and frequency stability, which made it a promising candidate used for tunable ceramic capacitors and phase shifters.     

Large area Ba1 − xSrxTiO3 thin films for microwave applications deposited by pulsed laser ablation

Large area Ba_1 − xSr_xTiO₃ (BST) thin films with x = 0.4 or x = 0.5 were deposited on 75 mm diameter Si wafers in a pulsed laser deposition (PLD) chamber enabling full-wafer device fabrication using standard lithography. The deposition conditions were re-optimized for large PLD chambers to obtain uniform film thickness, grain size, crystal structure, orientation, and dielectric properties of BST films. X-ray diffraction and microstructural analyses on the BST films grown on Pt/Au/Ti electrodes deposited on SiO₂/Si wafers revealed films with (110) preferred orientation with a grain size < 100 nm. An area map of the thickness and crystal orientation of a BST film deposited on SiO₂/Si wafer also showed (110) preferred orientation with a film thickness variation < 6%. Large area BST films were found to have a high dielectric tunability of 76% at an electric field of 400 kV/cm and dielectric loss tangent below 0.03 at microwave frequencies up to 20 GHz and a commutation quality factor of ~ 4200.     

Nanograins dependent dielectric constant, tunability, phase transition, impedance spectroscopy and leakage current of (Pb1 − xSrx)TiO3 thin films

Nanostructured (Pb_1 − xSr_x)TiO₃ (PST) (x = 0.1, 0.2 and 0.3) thin films have been prepared by chemical solution deposition process using spin coating technique. The solution as such was deposited on Pt/Ti/SiO₂/Si substrates and annealed at 650 °C/3h. Nanograins dependent dielectric properties of PST films show dielectric constant up to the higher frequency region, low losses, large tunability and phase transition at small temperature. The impedance data has been fitted by Cole-Cole model to study the effect of grain boundaries on the dielectric properties. The current-voltage characteristics have been measured to study leakage current in PST films and described by Poole-Frenkel emission model. It is suggested that the key carrier transport process in PST films is emission of electrons from a trap state near the metal-film interface into a continuum of states associated with each conductive dislocation. The activation energy value for carrier transport in PST films is obtained from temperature-dependent current-voltage characteristics.     

Structural and dielectric properties of barium strontium calcium titanate thick films modified with MnO2 for phased array antennas

(Ba,Sr,Ca)TiO₃ powders, prepared by the sol–gel method, were mixed with an organic vehicle and the BSCT thick films were fabricated by the screen-printing techniques on alumina substrates. All the BSCT thick films, sintered at 1420 °C, showed the typical XRD patterns of a perovskite polycrystalline structure. The average grain size decreased with increasing amounts of MnO₂, and the BSCT(50/40/10) thick film doped with 1 wt.% MnO₂ showed a value of 6.5 μm. The thickness of thick films by four-cycle on printing/drying was approximately 100 μm. The Curie temperature and the relative dielectric constant decreased with increasing Ca content and MnO₂ doping amount. The relative dielectric constant, dielectric loss and tunability of the BSCT(50/40/10) thick films doped with 1.0 wt.% MnO₂ were 1296%, 0.61% and 11.18%, respectively.     

Enhanced dielectric and tunable properties of barium strontium titanate thin films through introducing Nd(Zn1/2Ti1/2)O3 and adjusting Ba/Sr

Ba_0.6Sr_0.4TiO₃ (BST) and 0.06Nd(Zn_1/2Ti_1/2)O₃–0.94Ba _x Sr_1?x TiO₃ (NZT–BST) thin films with x = 0.6, 0.7, 0.75, and 0.8 were fabricated on Pt/Ti/SiO₂/Si substrates by sol–gel method. The structures, surface morphology, dielectric, and ferroelectric properties, and thermal stability of BST and NZT–BST thin films were investigated as a function of NZT and Ba content. It was found that introducing NZT into BST decreased significantly dielectric loss, however, along with the tunability. On this basis, increasing Ba/Sr in NZT–BST thin films led to the simultaneous increase of dielectric constant and tunability of thin films. As a result, optimized dielectric and tunable properties were obtained for 0.06Nd(Zn_1/2Ti_1/2)O₃–0.94Ba_0.7Sr_0.3TiO₃ thin film with the highest FOM value of 43.22. It awakens us that, for reducing dielectric loss, introducing a certain amount of low permittivity oxides or non-ferroelectrics like NZT into weak ferroelectric perovskite tunable materials, not into paraelectric perovskite tunable materials, may obtain more excellent dielectric and tunable performances.     

Microstructure control of (Pb,Sr)TiO3 films on Pt/Ti/SiO2/Si substrates by a TiO2 buffer layer

A thin TiO₂ buffer layer was used to control the microstructure and electrical properties of the polycrystalline (Pb,Sr)TiO₃ (PST) films produced by a Sol-Gel method on Pt(111)/Ti/SiO₂/Si(100) substrates. The PST films included (Pb_0.6Sr_0.4)TiO₃ (PST40) and (Pb_0.4Sr_0.6)TiO₃ (PST60). It was found that a crystallized TiO₂ buffer layer with a thickness of nearly 5 nm was critical for improving the crystallinity and surface morphology of both the thinner (about 40 nm) and thicker (about 330 nm) PST films, which exhibited a (l00) preferred orientation and much smoother surface comparing with those without the buffer layer. The electrical properties of the PST films having TiO₂ buffer layer were also improved. For 330-nm-thick PST40 films, the dielectric constant and its tunability by dc voltage were increased from 482 and 26.8% at 10 kHz to 590 and 51.2%, while the loss and leakage current density were reduced from 0.04 and 4.26 × 10⁻⁴ A/cm² at 100 kV/cm to 0.034 and 7.63 × 10⁻⁶ A/cm², respectively. Similar results were also found in the PST60 films.     

Dielectric and tunable characteristics of Ba0.4Sr0.6TiO3-BaWO4 composite ceramics for microwave applications

Phase compositions, microstructure and microwave dielectric properties, of BaWO₄ (BW)-Ba_0.4Sr_0.6TiO₃ (BST) composite ceramics, prepared by the traditional solid-state route, were systematically characterized. Meanwhile, mechanism of dielectric tunability of those materials was discussed. Dielectric properties of the BW-BST composites at a DC bias field near the phase transition temperature could be interpreted by using Johnson's phenomenological equation. The sample with x = 0.60 exhibited a tunability of 29.5%, a dielectric permittivity of 192 and a Q value of 231 (at 2.700 GHz), which make it a promising candidate for applications in electrically tunable microwave devices.     

Voltage tunable Ba0.6Sr0.4TiO3 thin films and coplanar phase shifters

Not only the ferroelectric properties of Ba_0.6Sr_0.4TiO₃ thin films but also the design, fabrication and microwave properties of coplanar waveguide (CPW) phase shifter were investigated. When the applied voltage changes from zero to 20 V range at a frequency of 1 kHz, the dielectric constant, tunability, remanent polarization (2P_r) and coercive electric field (Ec) of the BST films are 1266, 29.5%, 2.29 μC/cm² and 22.27 kV/cm, respectively. The structure of CPW phase shifter was designed by ANSOFT High Frequency Structure Simulator (HFSS) and Agilent Advanced Design System (ADS). The designed phase shifter consists of 56 same sections. It is observed from the photograph of the fabricated device that the lines of electrodes are regular and the widths of bottom electrodes overlapped by top electrodes are about 5 μm. It was found that the phase shift gradually increases as the voltage increases from 0 V to 20 V, which may be due to the tunability of BST films varies with external dc field. About 168° phase shift was achieved at 28 GHz with a bias voltage of 20 V.     

New dielectric material system of x(Mg0.95Zn0.05Ti)O3-(1 − x)Ca0.8Sm0.4/3TiO3 at microwave frequency

The microstructures and the microwave dielectric properties of the x(Mg_0.95Zn_0.05)TiO₃-(1 − x) Ca_0.8Sm_0.4/3TiO₃ ceramic system were investigated. In order to achieve a temperature-stable material, we studied a method of combining a positive temperature coefficient material with a negative one. Ca_0.8Sm_0.4/3TiO₃ has dielectric properties of dielectric constant ε_r ~ 120, Q × f value ~ 13,800 GHz and a large positive τ_f value ~ 400 ppm/°C. (Mg_0.95Zn_0.05)TiO₃ possesses high dielectric constant (ε_r ~ 16.21), high quality factor (Q × f value ~ 210,000 at 9 GHz) and negative τ_f value (− 59 ppm/°C). Sintering at 1300 °C with x = 0.9, 0.9(Mg_0.95Zn_0.05Ti)O₃ − 0.1 Ca_0.8Sm_0.4/3TiO₃ has a dielectric constant (ε_r) of 22.7, a Q × f value of 124,000 GHz and a temperature coefficient of resonant frequency (τ_f) of − 6.3 ppm/°C.     

Optimized microwave dielectric properties of Co- and Ca-substituted Mg0.6Zn0.4TiO3

The system of (1 − y)(Mg_0.6Zn_0.4)_1−xCo_xTiO₃-yCaTiO₃ was investigated to optimize its microwave dielectric properties by adopting appropriate contents of Co and Ca and by controlling sintering conditions. The effect of Co substitution was to enhance densification and Qf value, while the addition of CaTiO₃ resulted in increases of dielectric constant and TCF. As an optimal compositions, 0.93(Mg_0.6Zn_0.4)_0.95Co_0.05TiO₃-0.07CaTiO₃ successfully demonstrated a dielectric constant of 23.04, a Qf of 79,460 GHz and a TCF value of +1.4 ppm/°C after firing at a relatively lower sintering temperature of 1200 °C. The increase of sintering temperature beyond 1200 °C tended to degrade overall microwave dielectric properties presumably due to Zn volatilization as evidenced by the presence of a Zn-deficient phase (MgTi₂O₅) at 1400 °C. An attempt to establish the correlation between microstructure characteristics and dielectric properties was made in this dielectric system where the extensive range of firing temperature up to 1400 °C was evaluated.     

Structural and electrical characteristics of chemical solution derived (Bi3.2La0.4Nd0.4)Ti3O12 thin films

(Bi_3.2La_0.4Nd_0.4)Ti₃O₁₂ (BLNT) thin films were prepared on Pt/Ti/SiO₂/Si substrates by using chemical solution deposition technique, and the effects of annealing temperatures in the range of 550-750 °C on structure and electrical properties of the thin films were investigated. X-ray diffraction analysis shows that the thin films have a bismuth-layered perovskite structure with preferred (117) orientation. The surface morphology observation by field-emission scanning electron microscopy confirms that films are dense and smooth with uniformly distributed grains. The grain size of the thin films increases with increasing annealing temperature; meanwhile, the structural distortion of the thin films also increases. It was demonstrated that the thin films show good electrical properties. The dielectric constant and dielectric loss are 191 and 0.028, respectively, at 10 kHz for the thin film annealed at 600 °C, and the 2Pr value of the thin film annealed at 700 °C is 20.5 μC/cm² at an electric field of 500 kV/cm.     

Effects of Mn doping on structural and dielectric properties of sol-gel-derived (Ba0.835Ca0.165)(Zr0.09Ti0.91)O3 thin films

We reported the effects of Mn doping on the structure and dielectric properties of (Ba_0.835Ca_0.165)(Zr_0.09Ti_0.91)O₃ (BCZT) thin films prepared by sol-gel method. The (Ba_0.835Ca_0.165)Mn_x(Zr_0.09Ti_0.91)_1 − xO₃ (x = 0, 0.002, 0.005, and 0.01) thin films exhibited a pure pseudo-cubic perovskite structure with random orientation. Scanning electron microscopy and atomic force microscopy observation showed that increasing Mn-doping amount caused a decrease in particle size and a cluster of the particles, while the film surface remained smooth and crack-free. Compared with the undoped film, Mn doped BCZT thin films exhibited smaller dielectric constant and lower dielectric loss. The figure of merit reached the maximum value of 16.7 with a tunability of 53.6% for the film with 0.5 mol % Mn doping, when a bias electric field of 400 kV/cm was applied at 100 kHz. The results indicated that the Mn doped BCZT thin films are suitable for tunable microwave device applications.     

Preparation and characterization of La-doped Ba(1 − x)SrxTiO3 powders and thin films

Ba_(1 − x)Sr_xTiO₃ powders with different Ba/Sr ratios (x = 0.10, 0.25, 0.40, 0.55, 0.70) and La-doped Ba_0.9Sr_0.1TiO₃·yLa powders (y = 0.002, 0.004, 0.006, 0.008, 0.010) have been prepared by sol-gel technology using dehydrated barium-acetate, strontium-carbonate, lanthanum-nitrate, and titanium-isopropoxide as raw materials. The experimental results show that the dielectric properties of Ba_(1 − x)Sr_xTiO₃ powders depend on the Ba/Sr ratios. When the Sr fraction is 0.10, the dielectric constant is relatively higher and the dielectric loss is relatively lower, which are more than 2000 and less than 2.0 × 10^− 2 at 1000 Hz, respectively, the most important is that this kind of powder has better frequency stability. La-doping can increase the dielectric constant distinctly, but the dielectric loss can also be increased. Their dielectric properties at 1.0 × 10³ Hz are better than those at 1.0 × 10⁵ Hz. At 1.0 × 10³ Hz the dielectric constant is much higher, while the dielectric loss is much lower. The dielectric constant of different La-doping contents is nearly 3.5 × 10⁴ and the dielectric loss is less than 0.20 when La fraction is 0.008. The La-doped BST sample also has better frequency stability, especially at high frequency. La-doped BST thin films are successfully deposited on mild steel substrates by using plasma spray system with suspension precursors of Ba_0.90Sr_0.10TiO₃·0.8La powders. The XRD patterns of Ba_0.90Sr_0.10TiO₃ and Ba_0.90Sr_0.10TiO₃·0.8La powders are almost the same. No new peaks appear after La-doping, but the peaks move slightly to a larger degree, which indicates that the element La has entered the lattice of the Ba_0.90Sr_0.10TiO₃ and has made the constant of the crystal cell reduce. The XRD pattern of the thin films is just like that of the Ba_0.90Sr_0.10TiO₃·0.8La powders except a peak corresponding to Fe substrate. The SEM results show that the thin films have a uniform and smooth surface. The morphology of cross-section shows a columnar grain structure indicating smooth surface and uniform thickness of the film. The thickness of the film is about 15 um. The thin films obtained are expected to be prospective material for applications in tunable microwave devices.     

Interfacial characteristics and dielectric properties of Ba0.65Sr0.35TiO3 thin films

Ba_0.65Sr_0.35TiO₃ (BST) thin films were deposited on Pt/Ti/SiO₂/Si substrates by radio frequency magnetron sputtering technique. X-ray photoelectron spectroscopy (XPS) depth profiling data show that each element component of the BST film possesses a uniform distribution from the outermost surface to subsurface, but obvious Ti-rich is present to BST/Pt interface because Ti⁴⁺ cations are partially reduced to form amorphous oxides such as TiO_x (x < 2). Based on the measurement of XPS valence band spectrum, an energy band diagram in the vicinity of BST/Pt interface is proposed. Dielectric property measurements at 1 MHz reveal that dielectric constant and loss tangent are 323 and 0.0095 with no bias, while 260 and 0.0284 with direct current bias of 25 V; furthermore, tunability and figure of merit are calculated to be 19.51% and 20.54, respectively. The leakage current density through the BST film is about 8.96 × 10^− 7 A/cm² at 1.23 V and lower than 5.66 × 10^− 6 A/cm² at 2.05 V as well as breakdown strength is above 3.01 × 10⁵ V/cm.