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准分子激光微加工技术结合模塑技术加工微流控芯片 总被引:1,自引:0,他引:1
利用准分子激光微加工技术与模塑技术相结合的方法制造微流控芯片。用准分子激光在玻璃基胶层上刻蚀出加工质量较高的微流控生物芯片形貌,通过电铸技术对微流控芯片进行复制,得到反向金属模具。用金属模具通过注塑成型技术用聚碳酸酯注塑出微流控芯片。系统研究了准分子激光的能量密度和工作台移动速度对胶层微通道加工质量的影响;测量并分析了激光刻蚀加工出的微流控芯片原型、电铸的反向金属模板和注塑成型后的微流控芯片的轮廓精度和表面粗糙度,上表面尺度偏差不大于2μm,底面粗糙度小于20 nm。对注塑出的微流控芯片和激光直写刻蚀的几何结构相同的微流控芯片的流动性能进行比较测试。在流速较小时,用激光微加工技术与模塑技术相结合的方法加工的微通道比准分子激光直写法所加工的微通道流动性能更好。 相似文献
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MEMS技术的发展,使得PCR微流控芯片的制备成为了现实。本文采用波长248nm的准分子激光作为一种新型的微加工方法,在19KV电压和18mm/min的激光优化加工参数下,在40mm×63mm的PMMA基片上制备出了20个循环的PCR微流控芯片。芯片上微通道的宽为104μm,深为56μm,长为1040mm,芯片加工耗时57分钟。随后采用自己搭建的热压装置,定量讨论了热压键合的温度、压力和时间对芯片键合质量的影响,得出了PMMA基微流控芯片热压键合的最佳参数:95℃,160N,20min。并在该条件下成功地将PMMA基的20个循环的PCR微流控芯片和相同尺寸的盖片键合在一起,键合后的芯片具有良好的密封性,能够承受的最大压强为0.85Mpa,能满足进行PCR反应的要求。 相似文献
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为解决快速检测识别Android应用下载链接的恶意性,提出了Android应用解析、文件还原方法。在此基础上,提出了基于微流量的Android恶意应用下载链接检测技术。 相似文献
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Jiaqi Li Gaohua Zhu Daniel Kang Wuchen Fu Yongyi Zhao Nenad Miljkovic 《Advanced functional materials》2021,31(4):2006249
Microchannel surfaces are common to microfluidics, biofluidics, thermal management, and energy applications. Due to processing limitations for the majority of metallic materials, the majority of hyperfine microchannels used in microfluidics and thermo-fluids are fabricated on non-metallic substrates, for example, silicon and polydimethylsiloxane. Here, a technique to fabricate ultrasmall microchannels on arbitrary metallic materials is developed using photolithography in combination with electrochemical deposition. The technique is used to prepare copper microchannels and to investigate the pool boiling heat transfer performance with a focus on the three-phase contact line dynamics. The hydrodynamics of nucleating bubbles during boiling are observed in situ using in-liquid endoscopy. The results show that the variation of critical heat flux enhancement has a linear relationship with the contact line increase ratio. The scalable microchannel surfaces exhibit superior heat transfer performance with a maximum heat transfer coefficient) enhancement of 930% with ultra-low wall superheat of 5 ° C. This work not only develops a scalable manufacturing method to develop ultra-small microchannels on metallic materials, it outlines design guidelines for structure optimization of pool boiling heat transfer for temperature sensitive applications, such as electronics thermal management. 相似文献
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Anastasios Petropoulos Grigoris Kaltsas Danijela Randjelovic Evangelos Gogolides 《Microelectronic Engineering》2010,87(5-8):827-829
In this work a micro-flow sensor integrated in the bottom surface of a rectangular microchannel is used in order to evaluate simultaneously both the flow velocity and the pressure in various micro-flow conditions. In this way direct flow rate measurement is achieved while real-time monitoring of the corresponding flow and pressure values are obtained. The effect of the microchannel dimensions in the flow determination is also studied. An almost linear relation of ΔP/L with respect to Re was extracted, which indicates a laminar flow behavior. The friction factor, corresponding to the specific microchannel dimensions was calculated together with the f × Re value. 相似文献
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微流体系统驱动技术的研究进展 总被引:1,自引:1,他引:0
微流体驱动大致可以分为两类:一类是从宏观流体驱动移植过来的驱动方式;另一类是根据微尺度下流体特性设计的驱动方式。对两类不同的驱动方式进行了介绍与比较,前者原理成熟,基本都符合经典流体理论,在亚微米以上级微流体流道尺寸中的应用较广;相比之下,后者设计原理新颖,常用于微米甚至纳米级的微流体系统中,具有更好的发展前景。 相似文献
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采用KrF准分子激光制备聚合酶链式反应微流控芯片 总被引:6,自引:1,他引:5
采用价格便宜的聚甲基丙烯酸甲酯(PMMA)代替价格昂贵的硅或者玻璃作为聚合酶链式反应(PCR)微流控芯片的基片材料,采用柔性大、自动化程度高的准分子激光微加工方法代替加工工艺复杂的光刻化学腐蚀方法。通过对聚甲基丙烯酸甲酯准分子激光加工规律的研究,在19kV和18mm/min的优化加工参量下,在40mm×63mm的聚甲基丙烯酸甲酯基片上制备出了20个循环的聚合酶链式反应微流控芯片。芯片微通道横截面呈倒梯形,底面粗糙度小于0.5μm。微通道宽104μm,深56μm,长1040mm,加工耗时57min。该芯片和相同尺寸的盖片在160N和105℃条件下经过20min热压键合在一起,键合强度为0.85MPa。通过进样实验发现键合后的芯片具有良好的密封性。键合后的芯片和温控系统集成在一起,采用比例积分微分(PID)方法得到的控温精度为±0.2℃,采用红外热像仪得到的相邻温区间的温度梯度分别为16.5℃和22.2℃,即该芯片可以实现聚合酶链式反应扩增。 相似文献
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Oprins H. Van der Veken G. Nicole C.C.S. Lasance C.J.M. Baelmans M. 《Components and Packaging Technologies, IEEE Transactions on》2007,30(2):209-217
In this paper, the capability of a novel cooling system for microchannels based on the principle of electrowetting is examined. To start with, the elcctrowetting effect in microchannels is experimentally investigated. The used electrowetting system consists of a liquid droplet deposited on a conductive Si substrate and electrically insulated from this substrate by a dielectric, layer. Microchannels of 100 mum times 100 mum are etched in the substrate. By applying an ac voltage signal between the droplet and the substrate, the microchannels can be periodically tilled and emptied with the liquid of the droplet. This oscillating liquid flow will be used to cool the chip. For the 100 mum times 100 mum microchannels a voltage of 51 V is required for the actuation. Further, based upon the results of the filling of the channels the cooling capacity of the proposed system is theoretically investigated. The theoretically achievable cooling rate of this enhanced system is compared to the heat transfer by conduction through a silicon substrate. A critical filing period is found; for shorter filling periods, the heat transfer will be improved by inserting microchannels, for higher filling periods the electrowetting deteriorates the cooling. It can be concluded that the proposed system is promising, especially when frequencies in the range of a few Hz can be achieved. 相似文献
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利用移动X射线光刻工艺,制备了六种不同深宽比的等腰三角形结构的聚甲基丙烯酸甲酯(PMMA)微通道。基于毛细管原理,将PMMA微通道与老鼠血液接触,对血液进行了微量采集。该PMMA微通道是中间带有凹槽结构的等腰三角形结构,凹槽结构的宽度为10μm、长度为6.7~39.4μm。将32个高度为35 mm的PMMA微通道的基板垂直插入老鼠血液样品中,通过实验测定了六种不同等腰三角形结构的PMMA微通道的接触角、表面张力及血液上升高度。结果表明,在一定范围内,PMMA微通道的深宽比越大,血液上升越容易,液体提取量也越多。对于通道横截面长度为39.4μm的微通道,样品血液在15 s时的上升高度可达到20.45 mm,达到最终30 s时上升高度的89.9%以上。 相似文献