用于同步辐射单色器多层膜的研究

结合Fensnel反射系数公式与Nevot-Croce模型，设计出了可以用于同步辐射单色器的W／B4C周期多层膜，并对其光学性能（反射率）做了模拟计算。采用高真空磁控溅射技术，实现不同周期的W／BaC周期多层膜的制备。利用英国BEDE公司出产的D1高分辨X射线衍射仪，完成W／B4C周期多层膜周期结构的测量。在北京同步辐射荧光束线（4W1B）上，利用W／B4C多层膜获取准单色光，实现材料的荧光分析实验。实验结果证明，W／B4C多层膜对同步辐射白光起到了单色的作用，可以得到高强度的准单色同步辐射X射线。     

上海光源时间分辨超小角散射线多层膜单色器的设计

上海光源二期时间分辨超小角散射线站(BL10U2)需要一台多层膜双晶单色器(Double Multilayer Monochromator,DMM),采用Pd/B4C镀层,能量范围覆盖8～15 keV。分析了基于液氮间接冷却条件下多层膜的热变形,介绍了单色器的结构设计。通过对多层膜晶体姿态调节机构引起的误差及四杆运动机构进行分析,设计了一种基于Pivot和轴承调节的Sinbar机构,以期达到单色器稳定性和超高分辨率等要求。     

CrAlN/TiAlN纳米多层膜界面结构的中子与X射线反射研究

采用反应磁控溅射技术在单晶硅基片上制备了CrN纳米单层膜和CrAlN/TiAlN纳米周期膜,利用非极化中子和X射线反射对膜层厚度、膜层界面粗糙度、界面扩散等表面、界面结构和性质进行了系统研究。中子反射测得的CrN纳米单层膜和CrAlN/TiAlN纳米周期膜的厚度与设计厚度的差别为3.8%～4.2%。散射长度密度（SLD）分析结果表明,膜层间和膜层与基底间界面较为清晰,扩散较少。X射线反射测得的膜层厚度较中子反射测得的膜层厚度偏高,对于较小调制周期的多层膜,界面弥散会对X射线反射结果产生较大误差。     

8.0nnX射线激光反射镜Mo／B4C多层膜制备及其特性

用磁控溅射法制备工作波长约８．０ｎｍ的Ｍｏ／Ｂ４Ｃ的多层膜作为正入射短波长（λ〈１０．０ｎｍ）软Ｘ射线激光反射腔的反射镜,经Ｘ射线衍射仪和ＴＥＭ检测,多层膜周期结构准确,热稳定性高。     

软X射线多层膜技术

软Ｘ射线多层膜技术是目前工程光学和应用光学中的一个热点,用多层膜可以组成类似于可见光波段的各种软Ｘ射线光学仪器,如望远镜,显微镜,投影光刻系统和光谱仪器等,文章简要介绍了长春光学精密机械研究所近年来软Ｘ射线多层膜技术的研究概况。     

离子束辅助沉积TiCN多层膜的研究

利用离子束辅助沉积设备，通过特殊的工艺在45号钢和硅片上生长出具有不同结构的复合多层TiCN膜。通过冷场发射扫描电镜，观察到膜层呈多层晶态和非晶态的复合结构；检测到划痕仪划过的划痕十分平滑，显示出晶态和非晶态膜层与基底具有良好的结合力；用显微硬度计检测膜层的表面硬度，发现不同结构和不同成份的组合对硬度影响很大；在摩擦磨损试验机上进行干摩擦试验，结果表明膜层具有较低的摩擦系数。     

Mo/Si/C多层膜退火后的同步辐射研究

通过对Mo/Si周期多层膜添加碳(C)层、进行高温退火处理,研究了Mo/Si/C多层膜进行热处理后在同步辐照条件下对薄膜相关物理特性的影响。发现Mo/Si周期性多层膜增加C层后不影响薄膜的反射特性,退火前45°入射角92 eV处反射率高达42％;热稳定性也有所提高,在600℃高温退火后仍能保持6.8％(97 eV处)的反射率。同时,由于非晶C在高温条件下的扩散导致薄膜结构发生变化,观测到薄膜的小角衍射曲线中出现并临的双衍射峰结构。     

MEVVA离子注入技术制备DLC:Ni多层厚膜

采用金属蒸汽真空弧（Metal Vapor Vacuum Arc,MEVVA）离子源注入技术,将Ni离子注入到类金刚石（Diamond．1ikeCarbon,DLC）膜中,并重复沉积和注入过程,制备出2个层数分别为10层和15层、厚度达1．0μm和1．5μm、注入剂量不同的DLC：Ni膜样品。性能测试结果显示,膜内应力得到有效释放,膜基结合紧密,仍保持较高sp3含量以及较高硬度和弹性模量,是一种制备DLC厚膜的有效方法。     

8.0nm X射线激光反射镜Mo/B4C多层膜制备及其特性

用磁控溅射法制备工作波长约８０ ｎｍ 的 Ｍｏ／ Ｂ４ Ｃ多层膜作为正入射短波长（λ＜ １０．０ ｎｍ ）软 Ｘ 射线激光反射腔的反射镜。经 Ｘ 射线衍射仪和 Ｔ Ｅ Ｍ 检测,多层膜周期结构准确,热稳定性高。     

离子束辅助沉积TiN/Ag多层膜的抗菌性和抗腐蚀性

用离子束辅助沉积（IBAD）方法在医用不锈钢317L上制备TiN／Ag多层膜。用琼脂平板法测试了样品的抗菌率，测试菌种为革兰氏阴性大肠杆菌（E．coil）和革兰氏阳性金黄色葡萄球菌（S．aureus）；用电化学腐蚀的方法检测了薄膜在Hank’s模拟体液中的耐腐蚀性能；通过X射线光电子能谱（XPS）、X射线衍射（XRD）和俄歇电子能谱（AES）分析研究了薄膜的结构特征和各元素的深度分布。研究结果表明：当多层膜TiN／Ag的调制周期为8nm时（5nm TiN＋3nm Ag），表现出很强的抗菌性，抗菌率达到99％以上；而且抗腐蚀性能比医用不锈钢317L有所提高，接近单层TiN薄膜。     

Development of Wide Band Neutron Monochromator Consisting of a Stack of Multilayers

A wide band neutron monochromator consisting of a stack of four multilayers on two Si wafers has been developed. One multilayer has 201 Ni/Ti layers. The layer thickness is gradually changed in order to extend the neutron reflection wavelength range similar to a supermirror. Multilayers were fabricated by the vacuum evaporation methods on each side of a Si substrate of 225 μm in thickness. Neutron reflectivity was measured by the θ-2θ reflectometer using cold neutrons. The neutron reflection wavelength was broadened to 19–40 nm by this stack from 26–40 nm of one multilayer.     

变间距光栅刻线密度的测试精度分析

介绍了衍射法测量变间距光栅线的测量系统。该测量系统由激光器、淮直镜、光栅转动台（含角度测量仪）、直线工作台、光栅调节架、探测器和待测光栅组成。分析了系统中各种误差测量精度的影响,以及变间距光栅参数的变化对光学系统的影响和补偿方法。计算表明,该系统的测试精度满足光束线对光学系统的性能要求。     

Natural crystals for use with the neutron diffraction technique

The purpose of this work is to develop a selection process for natural crystals that considers the major characteristics and performance as gratings for neutron monochromator and analyzers using the neutron diffraction technique. From the 350 naturally occurring types, 19 crystals have been selected and classified regarding their adequacy for use as neutron diffraction devices. Applying special criteria, method and with the help of the rocking curve determination technique, the measurements were established and the theoretically available values were confronted with experimental results, obtained directly from a Neutron Diffractometer, in operation at the IPEN-R1 (5 MW) nuclear research reactor. Natural occurring crystals allow the use of greater values of interplanar distance, providing measurements in the subthermal neutron energy range. The performance of the Merit Figure, introduced to evaluate the neutron reflectivity, was considered effective regarding the nuclear properties of the component crystalline materials. A total of 12 natural types and the respective main families of planes for neutron diffraction, which have affirmed their theoretical-experimental performance, were appointed for routine applications for complementary use together with the conventional-artificial crystals.     

On the design of a monolithic 4-bounce high resolution X-ray monochromator

A monolithic monochromator (+n, −n, −m, +m) made of a single block of Ge crystal designed for CoK_α1 radiation was developed and tested numerically and experimentally by means of X-ray diffraction. The advantage of monolithic devices is their mechanical stability and the alignment of such optics is much easier than with polylithic optics, but the development of these devices is rather demanding. The presented monochromator belongs to a group of coplanar in-line devices, which means that the input beam is parallel with the output beam. For the estimation of the spectral and angular properties of a diffracted beam of this monochromator (such as bandpass width, output divergence and input acceptance) we used a numerical approach which we call spectral-angular function. It takes into account both the vertical and the horizontal divergence of the input radiation and uses two-beam X-ray dynamical theory of diffraction. Experimentally, the monochromator was tested by means of X-ray diffraction (synchrotron radiation testing) and the results from this characterization are presented. The influence of the vertical divergence on the spectral distribution of the diffracted beam is discussed and compared with previously published analytical results.     

沟槽型X射线两次衍射单色器研究

为获得高能量分辨率、高准直的同步辐射光,应用X射线衍射动力学原理,并依据上海光源小角散射线站光学参数,设计并加工了两次衍射的单晶硅(111)面沟槽型单色器。测量了两反射面平行度、斜切角及摇摆曲线,并对摇摆曲线的测量值进行了误差分析。理论模拟与实验数据对比分析显示:有效减小晶体加工过程中的残余应力导致的晶格畸变、改善晶体形貌、调整斜切角与增加衍射级次可降低晶体的衍射角宽,进而提高出射光的准直性和能量分辨率。经计算,在同步辐射光能量为10keV条件下,单晶硅(111)面沟槽型单色器的本征能量分辨率为1.452×10~(-4)。     

CARR堆HRPD谱仪垂直聚焦单色器的选取和强度增益计算

垂直聚焦单色器技术是提高样品位置中子强度的有效手段。本文应用蒙特卡罗模拟方法对中国先进研究堆（CARR）旁高分辨中子粉末衍射仪（HRPD）的垂直聚焦单色器进行了优化选取，得到了垂直聚焦单色器高度，聚焦曲率半径和倾角等参数值，计算了使用垂直聚焦单色器相对于平板单色器的强度增益和样品处聚焦束尺寸。     

NSRL可变包含角光栅单色器的计算机控制

随着同步辐射光束线技术的发展,单色器的分辨率越来越高,采用的复杂机构要求极高的机械转动和直线运动精度,对光束线控制软件的性能提出了新的要求。另一方面,同就辐射实验室新建光束线的数量逐渐增多,对控制软件设计的压力增大,希望有一种可移植的、标准化的控制软件。变包含角球面光栅单色器使用分层控制技术,层之间用以太网联接。底层是硬件抽象层,直接处理与所有硬件有关操作;上层为高级用户界面层,提供用户控制的指今,可以满足不同用户端软件的需求。同时还介绍了一种变包含角光栅单色器的数值解法。     

中子应力谱仪双聚焦Si单色器设计、模拟与测试

本文对中国先进研究堆中子应力谱仪使用的双聚焦Si单色器进行了设计、模拟和测试。采用SIMRES模拟程序确定了单色器垂直曲率及Si片厚度的最优值,并得到品质因数与散射角、单色器水平曲率和波长的依赖关系。实际测试结果表明,与平板Cu单色器相比,使用双聚焦Si单色器样品处中子强度提高了15倍。     

Cooling of double crystal monochromator with sagittal focus at SSRF

In SSRF, the design of 1st crystal cooling geometry of double crystal monochromator with sagittal focus is mainly reported by China. Our simulation indicates that the broadening of the full width at half maximum of the rocking curve of the double crystal monochromator induced by the heat load is about 3.7 μrad, and is in agreement with the experimental value of 5 μrad. Our scheme showed that the photon flux is reliably linear with electron current of the storage ring, which is extracted from the monochromator.     

北京同步辐射软X射线偏振测量装置及其应用

在北京同步辐射装置(BSRF)设计建造了-套基于多层膜偏振元件的软X射线偏振测量分析装置,可工作在双反、双透、前反后透和前透后反四种工作模式,既可作为偏振测量装置,用于同步辐射光束线和多层膜偏振元件偏振特性测量,也可作为通用反射率计,用于多层膜和薄膜的反射或透射率测量,又可用于磁性材料的磁光效应研究等.利用自行研制的装置和光学元件对BSRF的3W1B光束线的偏振特性进行了系统的测量.测量结果指出,在206 eV时,输出光的线偏振度从起偏前的O.585上升到起偏后的0.995,同步光的线偏振度得到极大改善.利用非周期宽带Mo/Si多层膜开展了铁磁性材料的磁光法拉第效应测量,获得了Ni薄膜3p边附近(60-70 eV)的法拉第旋转角度,最大偏转角度在65.5 eV和68 eV分别为1.85±0.19°和-0.75±0.09°.