Fabrication and Characteristics of high-speed oxide-confined VCSELs using InGaAsP-InGaP strain-compensated MQWs

This paper presents the fabrication and characteristics of high-performance 850-nm InGaAsP-InGaP strain-compensated multiple-quantum-well (MQW) vertical-cavity surface-emitting lasers (VCSELs). The InGaAsP-InGaP MQW's composition was optimized through theoretical calculations, and the growth condition was optimized using photoluminescence. These VCSELs exhibit superior performance with characteristics threshold currents /spl sim/0.4 mA and slope efficiencies /spl sim/0.6 mW/mA. The threshold current change with temperature is less than 0.2 mA, and the slope efficiency drops less than /spl sim/30% when the substrate temperature is raised from room temperature to 85/spl deg/C. A high modulation bandwidth of 14.5 GHz and a modulation current efficiency factor of 11.6 GHz/(mA)/sup 1/2/ are demonstrated. The authors have accumulated life test data up to 1000 h at 70/spl deg/C/8 mA.     

Flip-chip bonded 0.85-/spl mu/m bottom-emitting vertical-cavity laser array on an AlGaAs substrate

We report high-performance 0.85-/spl mu/m bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-/spl mu/m bottom-emitting VCSEL array, and confirm all pixels across the 8/spl times/8 VCSEL array operate at a f/sub 3/ dB bandwidth of 2.6 GHz at only 4.2 mA.     

Efficient Modulation of InP-based 1.3-/spl mu/m VCSELs with AsSb-based DBRs

We demonstrate efficient error-free 3.125-Gb/s modulation of InP-based 1.3-/spl mu/m vertical-cavity surface-emitting lasers with AsSb-based distributed Bragg reflectors up to 60/spl deg/C. These devices demonstrated high differential efficiencies [>60% at room temperature (RT)], which resulted in a required bias current for modulation of only 5.9 mA. The measured extinction ratios were greater than 8 dB up to 60/spl deg/C with a peak-to-peak drive voltage of only 800 mV. The 3-dB-down RT small-signal bandwidth was 4.4 GHz at a bias of 5.9 mA.     

MOVPE-grown GaInNAs VCSELs at 1.3 /spl mu/m with conventional mirror design approach

1.3 /spl mu/m oxide confined GaInNAs VCSELs designed using the same design philosophy used for standard 850 nm VCSELs is presented. The VCSELs have doped mirrors, with graded and highly doped interfaces, and are fabricated using production-friendly procedures. Multimode VCSELs (11 /spl mu/m oxide aperture) with an emission wavelength of 1287 nm have a threshold current of 3 mA and produce 1 mW of output power at 20/spl deg/C. The maximum operating temperature is 95/spl deg/C. Emission at 1303 nm with 1 mW of output power and a threshold current of 7 mA has been observed from VCSELs with a larger detuning between the gain peak and the cavity resonance.     

Near room-temperature continuous-wave operation of all-monolithic InAlGaAs/InP 1.3 /spl mu/m VCSELs

InAlGaAs/InP-based all-monolithic 1.3 /spl mu/m VCSELs operating continuous wave up to 18/spl deg/C are demonstrated. The whole structure is grown by a single step of MOCVD. Selective wet etching of an InP layer is used to form an air-gap aperture for the current confinement. The threshold current of an 8 /spl mu/m device at 15/spl deg/C is /spl sim/2.8 mA.     

High-performance 1.3 /spl mu/m InGaAs vertical cavity surface emitting lasers

A report is presented on high-performance InGaAs/GaAs double quantum well vertical cavity surface emitting lasers (VCSELs) with record long emission wavelengths up to 1300 nm. Due to a large gain-cavity detuning these VCSELs show excellent temperature performance with very stable threshold current and output power characteristics. For 1.27 /spl mu/m singlemode devices the threshold current is found to decrease from 2 to 1 mA between 10 and 90/spl deg/C, while the peak output power only drops from 1 to 0.6 mW. Large-area 1300 nm VCSELs show multimode output power close to 3 mW.     

As/sup +/-implanted AlGaAs oxide-confined VCSEL with enhanced oxidation rate and high performance uniformity

We report the utilization of an As/sup +/-implanted AlGaAs region and regrowth method to enhance and control the wet thermal oxidation rate for 850-nm oxide-confined vertical-cavity surface-emitting laser (VCSEL). The oxidation rate of the As/sup +/-implanted device showed a four-fold increase over the nonimplanted one at the As/sup +/ dosage of 1/spl times/10/sup 16/ cm/sup -3/ and the oxidation temperature of 400/spl deg/C. 50 side-by-side As/sup +/-implanted oxide-confined VCSELs fabricated using the method achieved very uniform performance with a deviation in threshold current of /spl Delta/I/sub th//spl sim/0.2 mA and slope-efficiency of /spl Delta/S.E./spl sim/3%.     

Uncooled 1.3-/spl mu/m complex-coupled DFB BH laser diodes with the Fe-doped InGaAsP-InP hybrid current-blocking grating

In this letter, we proposed an alternate method by using the Fe-doped InGaAsP-InP hybrid grating layers to fabricate the 1.3-/spl mu/m current-blocking-grating complex-coupled distributed-feedback (CBG CC-DFB) laser diodes (LDs) grown by metal-organic chemical vapor deposition (MOCVD). By combining the Fe-doped InGaAsP-InP grating layers, the CBG CC-DFB LDs can provide high optical DFB coupling coefficient and high current confining ability. Moreover, the current aperture in the lateral direction can be easily controlled by the self-aligned MOCVD regrowth process. Therefore, the manufacture of CBG CC-DFB buried heterostructure LDs is easy as the ridge-waveguide LDs. The LDs exhibit a low threshold current of 5.3 mA, a high slope efficiency of 0.42 mW/mA, and a stable single mode with a high sidemode suppression ratio of /spl sim/42 dB at two times the threshold (10.5 mA). Even at high temperatures, these LDs still have an extremely low threshold current of 15.8 mA at 90/spl deg/ and a small variation in slope efficient of only -1 dB at the temperatures between 20/spl deg/ and 80/spl deg/. Furthermore, these LDs show a high-speed characteristic of more than 11.8 GHz at 20/spl deg/, which are suitable for 10-Gb/s Ethernet and OC-192 applications.     

Low-threshold high-T/sub 0/ 1.3-/spl mu/m InAs quantum-dot lasers due to p-type modulation doping of the active region

P-type doping is used to demonstrate high-To, low-threshold 1-3 /spl mu/m InAs quantum-dot lasers. A 5-/spl mu/m-wide oxide confined stripe laser with a 700-/spl mu/m-long cavity exhibits a pulsed T/sub 0/ = 213 K (196 K CW) from 0/spl deg/C to 80/spl deg/C. At room temperature, the devices have a CW threshold current of /spl sim/4.4 mA with an output power over 15 mW. The threshold at 100/spl deg/C is 8.4 mA with an output power over 8 mW.     

Single-mode monolithic quantum-dot VCSEL in 1.3 /spl mu/m with sidemode suppression ratio over 30 dB

We present monolithic quantum-dot vertical-cavity surface-emitting lasers (QD VCSELs) operating in the 1.3-/spl mu/m optical communication wavelength. The QD VCSELs have adapted fully doped structure on GaAs substrate. The output power is /spl sim/330 /spl mu/W with slope efficiency of 0.18 W/A at room temperature. Single-mode operation was obtained with a sidemode suppression ratio of >30 dB. The modulation bandwidth and eye diagram in 2.5 Gb/s was also presented.     

Continuous-wave operation of all-epitaxial InP-based 1.3 /spl mu/m VCSELs with 57% differential quantum efficiency

All-epitaxial InP-based 1.3 /spl mu/m VCSELs with a record-high continuous-wave differential quantum efficiency (57%) for single active region long-wavelength devices are demonstrated. Low-loss optical mode confinement is achieved through a selectively etched undercut tunnel-junction aperture. Singlemode continuous-wave lasing was observed up to 87/spl deg/C and the room-temperature output power was 1.1 mW at a current of 4.1 mA and a wavelength of 1.305 /spl mu/m.     

Continuous-wave operation up to 36/spl deg/C of 1.3-/spl mu/m GaInAsP-InP vertical-cavity surface-emitting lasers

We introduced ion-beam assisted deposition in order to improve the quality of Al/sub 2/O/sub 3/ and SiO/sub 2/, which were used as part of the mirrors of 1.3-/spl mu/m GaInAsP-InP vertical-cavity surface-emitting lasers (VCSELs). The refractive index of Al/sub 2/O/sub 3/ was improved to 1.63 from 1.56 and the one of SiO/sub 2/ increased to 1.47 from 1.45. Low-threshold room-temperature continuous-wave (CW) operation of 1.3-/spl mu/m VCSEL with the improved mirrors was demonstrated. The threshold current was 2.4 mA at 20/spl deg/C. The CW operating temperature was raised to 36/spl deg/C, which is a record high temperature for 1.3-/spl mu/m VCSEL.     

Fe-doped InP semi-insulating buried heterostructure for high speed and high power operations in directly modulated semiconductor laser

A buried heterostructure based on Fe-doped InP semi-insulating layers is optimised for both high output power and large modulation bandwidth operations up to 70/spl deg/C in a 10 Gbit/s directly modulated 1.3 /spl mu/m InGaAsP/InP distributed feedback laser. The slope efficiency of 0.19 W/A and -3 dB bandwidth of 10 GHz at 1.5 times threshold current is demonstrated experimentally.     

Cryogenic operation of AlGaAs-GaAs vertical-cavity surface-emitting lasers at temperatures from 200 K to 6 K

We demonstrate for the first time the CW performance of AlGaAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) at cryogenic temperatures from 6 K to 200 K. By detuning the cavity mode with respect to the gain peak so that optimum dc lasing operation is achieved at -100 K, we find that this optimum lasing performance can be maintained down to temperatures as low as 6 K. Across a broad range of temperatures from 200 K to 6 K, the minimum threshold current of a 16-/spl mu/m diameter VCSEL stayed below 4 mA, while its -3-dB modulation bandwidth increased by about 70% to 11 GHz at 6 K, and the external slope efficiency is greater than 70%.     

Damping-limited modulation bandwidths up to 40 GHz in undoped short-cavity In/sub 0.35/Ga/sub 0.65/As-GaAs multiple-quantum-well lasers

We demonstrate record direct modulation bandwidths from MBE-grown In/sub 0.35/Ga/sub 0.65/As-GaAs multiple-quantum-well lasers with undoped active regions and with the upper and lower cladding layers grown at different growth temperatures. Short-cavity ridge waveguide lasers achieve CW direct modulation bandwidths up to 40 GHz for 6/spl times/130 /spl mu/m/sup 2/ devices at a bias current of 155 mA, which is the damping limit for this structure. We further demonstrate large-signal digital modulation up to 20 Gb/s (limited by the measurement setup) and linewidth enhancement factors of 1.4 at the lasing wavelength at threshold of /spl sim/1.1 /spl mu/m for these devices.     

Low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by MOVPE

The structure of the conventional contact 1.3-/spl mu/m GaInNAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) was optimized and low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by metal-organic vapor-phase epitaxy were reported. The idea is to optimize the active region, the doping profiles, and the pairs of p-distributed Bragg reflectors, and the detuning between the emission wavelength and the photoluminescence gain peak wavelength. The continuous-wave 1.0-mA threshold current was achieved for the single-mode VCSEL. For the multiple-mode VCSELs, the below 2-mA threshold currents at 5/spl deg/C-85/spl deg/C , the 1.13-mA threshold current at 55/spl deg/C, and 1.52-mA threshold current at 85/spl deg/C are the best results for 1.3-/spl mu/m GaInNAs VCSELs.     

Design and fabrication of temperature-insensitive InGaP-InGaAlP resonant-cavity light-emitting diodes

Visible InGaP-InGaAlP resonant-cavity light-emitting diodes with low-temperature sensitivity output characteristics were demonstrated. By means of widening the resonant cavity to a thickness of three wavelength (3/spl lambda/), the degree of power variation between 25 /spl deg/C and 95 /spl deg/C for the devices biased at 20 mA was apparently reduced from -2.1 dB for the standard structure design (1-/spl lambda/ cavity) to -0.6 dB. An output power of 2.4 mW was achieved at 70 mA. The external quantum efficiency achieved a maximum of 3% at 13 mA and dropped slowly with increased current for the device. The external quantum efficiency at 20mA dropped only 14% with elevated temperature from 25 /spl deg/C to 95/spl deg/C. The current dependent far-field patterns also showed that the emission always took place perfectly in the normal direction, which was suitable for plastic fiber data transmission.     

192 GHz push-push VCO in 0.13 /spl mu/m CMOS

A 192 GHz cross-coupled push-push voltage controlled oscillator (VCO) is fabricated using the UMC 0.13 /spl mu/m CMOS logic process. The VCO can be tuned from 191.4 to 192.7 GHz. The VCO provides output power of /spl sim/-20 dBm and phase noise of /spl sim/-100 dBc/Hz at 10 MHz offset, while consuming 11 mA from a 1.5 V supply.     

High performance quantum dot lasers on GaAs substrates operating in 1.5 /spl mu/m range

Stacked InAs/InGaAs quantum dots are used as an active media of metamorphic InGaAs-InGaAlAs lasers grown on GaAs substrates by molecular beam epitaxy. High quantum efficiency (/spl eta//sub i/>60%) and low internal losses (/spl alpha/<3-4 cm/sup -1/) are realised. The transparency current density per single QD layer is estimated as /spl sim/70 A/cm/sup 2/ and the characteristic temperature is 60 K (20-85/spl deg/C). The emission wavelength exceeds 1.51 /spl mu/m at temperatures above 60/spl deg/C.     

High-performance single-mode VCSELs in the 1310-nm waveband

High-performance vertical-cavity surface-emitting lasers (VCSELs) emitting in the 1310-nm waveband are fabricated by bonding AlGaAs-GaAs distributed Bragg reflectors on both sides of a InP-based cavity. A 2-in wafer bonding process is optimized to produce very good on-wafer device parameter uniformity. Carrier injection is implemented via double intracavity contact layers and a tunnel junction. A 1.2-mW single-mode output power is obtained in the temperature range of 20/spl deg/C-80/spl deg/C. Modulation capability at 3.2 Gb/s is demonstrated up to 70/spl deg/C. Overall VCSEL performance complies with the requirements of the 10 GBASE-LX4 IEEE.802.3ae standard, which opens the way for novel applications of VCSELs emitting in the 1310-nm band.