利用典型Si(100)微结构对原子力显微镜探针参数进行表征

利用各向异性化学湿法刻蚀工艺在Si(100)上加工了具有本征侧墙角(54.73°)的典型微机电系统(MEMS)梯形结构.用该微结构作为线宽测试结构,对其进行了原子力显微镜(AFM)和扫描电子显微镜(SEM)线宽和轮廓的比对测量.并对AFM探针和样品耦合效应进行了研究,提出了AFM探针参数动态表征的模型,基于几何模型对线宽和轮廓测量中探针针尖形状和针尖位置参数进行了表征,提出了用曲率半径、安装倾角、扫描倾角和针尖半顶角来对原子力显微镜探针针尖进行表征.该方法是对现有AFM探针表征模型的改进和完善.     

AFM扫描过程的模拟及针尖形状反求

纳米栅格和台阶等结构的线宽准确测量,是国内外计量领域的研究热点与难点。采用原子力显微镜(AFM)能获得上述结构的三维形貌信息,但其扫描图像却是探针针尖的形貌和被测样品表面的形貌共同作用的结果,这种作用往往导致线宽边缘测量失真。为了更加精确地获得样品的表面形貌特征,首先需要重建探针针尖形貌,进而从得到的扫描图像中尽可能地消除由探针形貌带来的失真影响。基于数学形态学的盲重建理论,利用Matlab对不同形状参数的探针针尖扫描台阶样品表面进行了仿真,评价了探针形状对扫描结果的影响,初步实现了基于真实粗糙测量表面的探针针尖形状重建。     

用AFM探针诱导局域氧化工艺制备纳米样板的研究

本文介绍了纳米测量系统的组成和纳米样板的研究现状，讨论了AFM探针诱导局域氧化工艺的原理及其影响参数。用该方法进行了一维纳米结构样板的制备，并对实验结果进行了分析。     

典型纳米结构制备及其测量表征

针对纳米器件中的典型几何特征,制备了3种纳米结构,采用扫描电子显微镜(SEM)、原子力显微镜(AFM)等测量工具对所制备的纳米样板进行了测量、分析和表征。提出转换薄膜厚度为线宽的公称值、基于多层薄膜淀积技术制备纳米宽度结构的方法,制备出了具有名义线宽尺寸分别为20 nm、25 nm、35 nm的纳米栅线结构。用离线的图像分析算法对所制备的纳米线宽样板的线边缘粗糙度/线宽粗糙度(LER/LWR)以及栅线线宽的一致性进行了评估。实验表明所制备纳米线宽样板的栅线具有较好的一致性,LER/LWR值小,且具有垂直的侧壁。采用电子束直写技术(EBL)和感应耦合等离子体刻蚀(ICP)制备了名义高度为220 nm的硅台阶样板。实验表明刻蚀后栅线边缘LER/LWR的高频成分减少,相关长度变长,均方根偏差值(σ)增大。采用聚焦离子束(FIB)制备了纳米单台阶和多台阶结构,并对Z方向的尺度与加工能量之间的关系进行了分析。     

纳米样板的制备及其精度分析

介绍了纳米样板的研究现状及制备工艺，特别对扫描探针显微镜(SPM)表面局域氧化反应工艺进行了详述；分析了原子力显微镜(AFM)探针诱导局域氧化工艺的原理及其影响参数，原理为高度局域化的电化学反应，影响参数包括探针上所施加的电压、扫描速度、探针曲率半径、相对湿度以及氧化物厚度等；用该方法分别制备了5条栅线和7条栅线的一维纳米结构样板，并对7条栅线的纳米结构样板的精度和不确定度影响因素进行了分析。     

用于减小控制对测量影响的AFM新工作模式

原子力显微镜（atomic force microscope，AFM）是纳米尺度线宽成像和测量的重要工具．但系统的非线性和控制器参数选择的多样性导致AFM控制的不确定性，影响了AFM测量结果的精确性和重复性．为克服这个缺点，分析了AFM的测量原理和工作模式的特点，在此基础上提出了一种新的工作模式——补偿模式．在这种工作模式中，结合了扫描器和悬臂梁的位置信息而得到被测试样表面的形貌图像．与恒力接触模式相比，在补偿模式下，AFM能够在高速度下以更好的精确性和重复性进行成像和测量．仿真和实验结果证明了这种新工作模式的可行性和适用性．实验结果说明该工作模式可以提高扫描速度16倍或减小均方根误差到约1／5．     

AFM扫描图像重构算法的改进

针对原子力显微镜（AFM）纳米成像中存在的失真问题,研究了通过探针建模实现AFM扫描图像重构方法.目前探针盲建模算法在重构AFM图像时存在较大误差,因此提出基于探针模型预估计的AFM扫描图像重构方法.该方法采用分区探针针尖建模,并通过基于该探针模型的反卷积运算实现AFM扫描图像重构,获得比较接近真实形貌的AFM扫描图像.文中介绍了算法的具体步骤,通过仿真和实验结果证明,该方法能够有效降低AFM图像重构时引入的误差,得到的图像更能反映样品表面真实的形貌.     

纳米测量及纳米样板

介绍了纳米测量系统的组成以及纳米样板的研究现状．提出了两种制备纳米结构样板的方法：Si基底上的原子力显微镜(AFM)探针诱导阳极氧化工艺和Au膜上的AFM探针机械划刻工艺．最后对Si基底上制备的纳米结构样板进行了精度分析．     

AFM线宽测量不确定度的分析与评定

详细分析了P47型原子力显微镜线宽测量不确定度的来源,给出了基于几何形状的线宽测量模型,提出了线宽测量不确定度的评定路线和方法。确定了探针针尖引起的测量不确定度是AFM线宽测量不确定度的主要来源,并对其进行了定量分析。普通Si3N4探针针尖引起的不确定度分量约占线宽总量的5%。     

安捷伦科技有限公司

安捷伦科技致力于为您提供最先进的、适用于多种学科,且可以进行交互平台操作的测量技术和仪器,特别是高精度、模块化的扫描探针显微镜（SPM）和原子力显微镜（AFM）,用于高精度表征纳米力学表征的纳米压痕仪或纳米力学试验机（UTM）,以及最新推出的功能强大、体积小巧的低电压场发射扫描电子显微镜（FE-SEM）。     

Estimation of AFM tip shape and status in linewidth and profile measurement

An atomic force microscopy image is a dilation of the specimen surface with the probe tip. Tips wear or are damaged as they are used. And AFM tip shape and position status make AFM images distorted. So it is necessary to characterize AFM tip shape and position parameters so as to reconstruct AFM images. A geometric model-based approach is presented to estimate AFM tip shape and position status by AFM images of test specimens and scanning electron microscope (SEM) images of AFM tip. In this model, the AFM tip is characterized by using a dynamic cone model. The geometric relationship between AFM tip and the sample structure is revealed in linewidth and profile measurement. The method can easily calculate the tip parameters including half-cone angle, installation angle, scanning tilting angle and curvature radius, and easily estimate the position status of AFM tip when AFM tip moves on the specimen. The results of linewidth and profile measurement are amended accurately through this approach.     

Design and characterization of nanoknife with buffering beam for in situ single-cell cutting

A novel nanoknife with a buffering beam is proposed for single-cell cutting. The nanoknife was fabricated from a commercial atomic force microscopy (AFM) cantilever by focused-ion-beam (FIB) etching technique. The material identification of the nanoknife was determined using the energy dispersion spectrometry (EDS) method. It demonstrated that the gallium ion pollution of the nanoknife can be ignored during the etching processes. The buffering beam was used to measure the cutting force based on its deformation. The spring constant of the beam was calibrated based on a referenced cantilever by using a nanomanipulation approach. The tip of the nanoknife was designed with a small edge angle 5° to reduce the compression to the cell during the cutting procedure. For comparison, two other nanoknives with different edge angles, i.e. 25° and 45°, were also prepared. An in situ single-cell cutting experiment was performed using these three nanoknives inside an environmental scanning electron microscope (ESEM). The cutting force and the sample slice angle for each nanoknife were evaluated. It showed the compression to the cell can be reduced when using the nanoknife with a small edge angle 5°. Consequently, the nanoknife was capable for in situ single-cell cutting tasks.     

应用AFM相位图像分析SiO2颗粒在橡胶中的分布

对原子力显微镜探针与填充SiO2颗粒橡胶之间的相互作用进行了分析,利用"tapping"模式原子力显微镜相位图像研究了橡胶中填充SiO2颗粒的微分布,并对SiO2颗粒的微分布进行了统计分析.     

Robust optimization of the output voltage of nanogenerators by statistical design of experiments

Nanogenerators were first demonstrated by deflecting aligned ZnO nanowires using a conductive atomic force microscopy (AFM) tip. The output of a nanogenerator is affected by three parameters: tip normal force, tip scanning speed, and tip abrasion. In this work, systematic experimental studies have been carried out to examine the combined effects of these three parameters on the output, using statistical design of experiments. A statistical model has been built to analyze the data and predict the optimal parameter settings. For an AFM tip of cone angle 70° coated with Pt, and ZnO nanowires with a diameter of 50 nm and lengths of 600 nm to 1 μm, the optimized parameters for the nanogenerator were found to be a normal force of 137 nN and scanning speed of 40 μm/s, rather than the conventional settings of 120 nN for the normal force and 30 μm/s for the scanning speed. A nanogenerator with the optimized settings has three times the average output voltage of one with the conventional settings.     

Chemomechanical nanolithography: nanografting on silicon and factors impacting linewidth

We present a two-fold extension of previous work on Atomic Force Microscope-based chemomechanical functionalization: (1) chemomechanical nanografting, which extends chemomechanical functionalization to a more stable initial surface, and (2) linewidth studies that show the impact of force and Atomic Force Microscope probe tip wear on patterning resolution. Alkene, alcohol, and alkyl halide molecules were nanografted to silicon and imaged with in situ atomic force microscopy, time-of-flight secondary ion mass spectrometry with Automated eXpert Spectrum Image Analysis, and scanning electron microscopy. Chemomechanical nanografting demonstrated linewidths down to 50 nm. Lines written on hydrogen-terminated silicon were used to explore the impact of tip radius and tip wear on linewidth when using Si3N4 coated tips.     

Electric field and tip geometry effects on dielectrophoretic growth of carbon nanotube nanofibrils on scanning probes

Single-wall carbon nanotube (SWNT) nanofibrils were assembled onto a variety of conductive scanning probes including atomic force microscope (AFM) tips and scanning tunnelling microscope (STM) needles using positive dielectrophoresis (DEP). The magnitude of the applied electric field was varied in the range of 1-20?V to investigate its effect on the dimensions of the assembled SWNT nanofibrils. Both length and diameter grew asymptotically as voltage increased from 5 to 18?V. Below 4?V, stable attachment of SWNT nanofibrils could not be achieved due to the relatively weak DEP force versus Brownian motion. At voltages of 20?V and higher, low quality nanofibrils resulted from incorporating large amounts of impurities. For intermediate voltages, optimal nanofibrils were achieved, though pivotal to this assembly is the wetting behaviour upon tip immersion in the SWNT suspension drop. This process was monitored in situ to correlate wetting angle and probe geometry (cone angles and tip height), revealing that probes with narrow cone angles and long shanks are optimal. It is proposed that this results from less wetting of the probe apex, and therefore reduces capillary forces and especially force transients during the nanofibril drawing process. Relatively rigid probes (force constant ≥2?N?m(-1)) exhibited no perceivable cantilever bending upon wetting and de-wetting, resulting in the most stable process control.     

The interaction of an atomic force microscope tip with a nano-object: a model for determining the lateral force

A calculation of the lateral force interaction between an atomic force microscope (AFM) tip and a nano-object on a substrate is presented. In particular, the case where the AFM tip is used to manipulate the nano-object is considered; i.e., the tip is displaced across the nano-object with the feedback off. The Hamaker equations are used to calculate the force when the tip and sample are not in contact and the Johnson, Kendall and Roberts (JKR) or Derjaguin, Muller and Toporov (DMT) formalisms are used for the contact force. The effect of the material parameters, the choice of contact theory and the shape of the nano-object on the resulting lateral forces are explored. The calculation is applied to an experimental system consisting of a cadmium selenide nanorod on graphite.     

AFM轻敲模式中微悬臂振动的研究

针对原子力显微镜AFM（Atomic torce microscope）在轻敲工作模式下微悬臂在谐振频率附近振动的问题，依据振动学理论和仿真分析的方法，建立了微悬臂的振动模型，仿真出了微悬臂前几阶的振动模态。得到了在保证振幅不变的情况下微悬臂各参数与其自由端偏转角的关系，指出了轻敲模式下减小AFM测量误差的方法。     

基于条件生成式对抗网络的AFM图像盲重构方法

针对原子力显微镜（AFM）成像过程中针尖展宽效应引起的误差,提出一种基于条件生成式对抗网络（CGAN）的AFM图像盲重构方法。首先,以pix2pixHD模型为基础,通过全局生成网络对仿真样本数据进行对抗训练,引入AFM测量数据采用局部提升网络联合训练;最后,特征匹配损失函数以用于提升栅格边缘横向分辨力。实验结果表明:对于线宽8μm一维矩形栅格在AFM下的测量图像进行盲重构,重构图像标准差为0.33μm×0.45μm,具有较高的成像分辨力,有利于提升AFM图像一维栅格测量的准确度。