Study on AlSb Polycrystalline Films Prepared by Magnetron Sputtering

AlSb polycrystalline thin films were prepared by magnetron sputtering with an improved geometric target, and their structural,electrical and optical properties were studied. The results of XRD measurements suggest that the annealed AlSb thin films are Zinc-blende structure with the average size of about 23～31 nm, and the higher temperature promotes the crystallization of the films. The morphology obtained from the AFM measurements reveals that the surfaces of the films are smooth and the particles are unifo...     

Effect of the Structure and Valence State on the Properties of VO2 Thin Films

VO2 thin films with good switching properties were prepared by controlling the annealing time and the annealing temperature in a vacuum system.The structural,optical and electrical properties of the samples were cahracterized by using XRD,XPS,UV-VIS and electrical measurements.The witching parameters of VO2 thin film were investigated too.The results indicate that before and after phase transition the resistance of VO2 thin films changes aobut three orders of magnitude,the variation of film transmittance of 40% has been carried out with the absorptivity switching velocity of about 0.2607/min at 900 nm.The structural property of samples has been improved but the phase-transition properties have been decreased by increasing the annealing time and annealing temperature.The valence of V ions and the structure of samples have great effect on phase transition properties of VO2 thin films.Discussion on the effecs of annealing time and annealing temperature on the phase-transition temperature and hysteresis width shows that the best reasonable annealing tiem and annealing temperatre can be achieved.     

The structure and magnetic properties of β-(Ga0.96Mn0.04)2O3 thin film

High quality epitaxial single phase (Ga0.96Mn0.04)2O3 and Ga2O3 thin films have been prepared on sapphire substrates by using laser molecular beam epitaxy (L-MBE).X-ray diffraction results indicate that the thin films have the monoclinic structure with a (-201) preferable orientation.Room temperature (RT) ferromagnetism appears and the magnetic properties of β-(Ga0.96Mn0.04)2O3 thin film are enhanced compared with our previous works.Experiments as well as the first principle method are used to explain the role of Mn dopant on the structure and magnetic properties of the thin films.The ferromagnetic properties are explained based on the concentration of transition element and the defects in the thin films.     

Synthesis of In2S3 thin films by spray pyrolysis from precursors with different [S]/[In] ratios

Indium sulfide （InzS3） thin films were prepared by chemical spray pyrolysis technique from solutions with different [S]/[In] ratios on glass substrates at a constant temperature of 250 ~C. Thin films were characterized by X-ray diffraction （XRD）, scanning electron microscopy （SEM）, atomic force microscopy （AFM）, energy disper- sive X-ray spectroscopy （EDS）, Raman spectroscopy and optical transmittance spectroscopy. All samples exhibit a polycrystalline structure with a preferential orientation along （0, 0, 12）. A good stoichiometry was attained for all samples. The morphology of thin film surfaces, as seen by SEM, was dense and no cracks or pinholes were ob- served. Raman spectroscopy analysis shows active modes belonging to j3-1naS3 phase. The optical transmittance in the visible range is higher than 60% and the band gap energy slightly increases with the sulfur to indium ratio, attaining a value of 2.63 eV for [S]/[In] ： 4.5.     

Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition

ZnO thin films are deposited on n-Si（111） substrates by pulsed laser deposition（PLD） system. Then the samples are annealed at different temperatures in air ambient and their properties are investigated particularly as a function of annealing temperature. The microstructure, morphology and optical properties of the as-grown ZnO films are studied by X-ray diffraetion（XRD）. atomic force mieroseope（AFM）, Fourier transform infrared spectroscopy（FTIR） and photoluminescence（PL） spectra. The results show that the as- grown ZnO films have a hexagonal wurtzite structure with a preferred c-axis orientation. Moreover, the diameters of the ZnO crystallites become larger and the crystal quality of the ZnO fihns is improved with the increase of annealing temperature.     

Structure and Magneto-Optical Characteristic Study of Optical Multilayer Thin Films

Based on the design theory of soft X-ray optical multilayer thin films and magneto-optic multilayer thin films, the metal multilayer thin films for the reflection of soft X-ray and ultraviolet ray, as well as the magneto-optic multilayer thin films for the magneto-optical memories were constructed. The metal multilayer thin films and the magneto-optic multilayer thin films were deposited with magnetron sputtering. The detail of optical reflection characteristics, layered-structure, and surface and interface characteristics were studied. At the same time,the static magneto-optical characteristics and dynamic magneto-optical characteristics of the magneto-optical disk were investigated.     

Structure and Magneto-Optical Characteristic Study of Optical Multilayer Thin Films

Based on the design theory of soft X-ray optical multilayer thin films and magneto-optic multilayer thin films, the metal multilayer thin films for the reflection of soft X-ray and ultraviolet ray, as well as the magneto-optic multilayer thin films for the magneto-optical memories were constructed. The metal multilayer thin films and the magneto-optic multilayer thin films were deposited with magnetron.sputtering. The detail of optical reflection characteristics, layered-structure, and surface and interface characteristics were studied. At the same time,the static magneto-optical characteristics and dynamic magneto-optical characteristics of the magneto-optical disk were investigated.     

Optical and electrical properties and phonon drag effect in low temperature TEP measurements of AgSbSe2 thin films

Polycrystalline thin films of silver antimony selenide have been deposited using a reactive evaporation technique onto an ultrasonically cleaned glass substrate at a vacuum of 10-5 torr. The preparative parameters, like substrate temperature and incident fluxes, have been properly controlled in order to get stoichiometric, good quality and reproducible thin film samples. The samples are characterized by XRD, SEM, AFM and a UV-vis-NIR spectrophotometer. The prepared sample is found to be polycrystalline in nature. From the XRD pattern, the average particle size and lattice constant are calculated. The dislocation density, strain and number of crystallites per unit area are evaluated using the average particle size. The dependence of the electrical conductivity on the temperature has also been studied and the prepared AgSbSe2 samples are semiconducting in nature. The AgSbSe2 thin films exhibited an indirect allowed optical transition with a band gap of 0.64 eV. The compound exhibits promising thermoelectric properties, a large Seebeck coefficient of 30 mV/K at 48 K due to strong phonon electron interaction. It shows a strong temperature dependence on thermoelectric properties, including the inversion of a dominant carrier type from p to n over a low temperature range 9-300 K, which is explained on the basis of a phonon drag effect.     

The effect of annealing temperature and the characteristics of p-n junction diodes based on sprayed polyaniline/ZnO thin films

Polyaniline,ZnO and polyaniline/ZnO nanocomposite thin films are coated on glass substrates using the spray pyrolysis technique.The samples are characterized by the XRD,SEM,EDAX,UV-Vis and I-V characteristics. The XRD analyses confirm that the spray-coated polyaniline and ZnO thin films have orthorhombic and hexagonal structures,respectively,and optical bandgap energy decreases from 3.81 to 3.41 eV with the addition of a Zn atom.SEM analysis of the polyaniline/ZnO nanocomposite thin films shows that there is an agglomeration of ZnO particles with uniform distribution in the polyaniline matrix,and the diode characteristics of the polyaniline /ZnO nanocomposite show weak rectification behavior.Parameters such as the ideality factor,reverse saturation current and barrier height are calculated from the I-V characteristics.     

Sensitivity enhancement of OD- and OD-CNT-based humidity sensors by high gravity thin film deposition technique

The humidity sensing properties of the thin films of an organic semiconductor material orange dye(OD)and its composite with CNTs deposited at high gravity conditions have been reported. Impedance, phase angle, capacitance and dissipation of the samples were measured at 1 kHz and room temperature conditions. The impedance decreases and capacitance increases with an increase in the humidity level. It was found that the sensitivity of the OD-based thin film samples deposited at high gravity condition is higher than the samples deposited at low gravity condition. The impedances and capacitance sensitivities of the of the samples deposited under high gravity condition are 6.1 times and 1.6 times higher than the films deposited under low gravity condition.     

纳米VO2薄膜的制备及其可见光透过率的改善

阐述了一种纳米VO2薄膜材料新型结构的制备方法.先用反应离子束溅射和退火工艺在玻璃基底上制备出具有相变特性的薄膜.HRTEM及XRD显示这种薄膜含有纳米量级的VO2颗粒,四探针测试电阻温度关系表明该类材料相变温度已经靠近室温,变化温度下测得的红外透过曲线表明该材料在相变前后具有良好的红外光开关特性.再针对该薄膜材料较低的可见光透过率,提出S iO2减反膜设计,取得了较好的实验效果.为开展VO2薄膜材料在智能窗类光电产品的应用研究打下了基础.     

二氧化钒薄膜制备及其热致变发射率特性研究

通过溶胶-凝胶和真空热处理工艺在石英基底上制备了二氧化钒薄膜,对制备出的薄膜进行了X射线衍射及X射线光电子能谱分析,结果表明所制备出的薄膜价态单一,纯度较高,薄膜为多晶态,晶粒尺寸约为27 nm.利用红外热像仪拍摄了薄膜在不同温度下的红外热图并计算了发射率,结果表明二氧化钒薄膜7.5～14 μm波段发射率在相变时发生突变,突变量可达0.6,具有优异的热致变发射率性能,在红外自适应伪装等领域应用前景广阔.     

VO2(B)薄膜的制备及特性优化研究

采用直流磁控溅射法,在纯氩气氛中溅射V2O5靶材,在覆盖有氮化硅薄膜的P(100)硅基片表面沉积氧化钒薄膜.对沉积的薄膜进行了后续高真空高温退火处理.利用XRD对薄膜的晶相进行了分析,结果表明退火处理前和退火处理后的薄膜都具有VO2各晶面的取向,XPS分析证明了XRD的物相分析结果.对薄膜的方阻特性的测试表明生成的薄膜是典型的VO2(B)薄膜,退火后的薄膜方阻减小,方阻温度系数也降低.在此基础上,利用薄膜晶界散射理论,通过改变薄膜沉积时间和沉积温度使薄膜的方阻和方阻温度系数随薄膜厚度和晶粒大小而变化,从而使薄膜的电性能达到优化.     

激光法制备二氧化钒军事防护薄膜研究

二氧化钒(VO2)具有热致半导体—金属相变特性, 其相变温度为 68益, 最接近室温, 可作为理想的光学功能材料, 在军事上有广泛应用前景。脉冲激光沉积法作为一种新型的制膜方法, 相比其他方法具有粒子能量高、可控性强等优点。介绍了 VO2薄膜的光电特性及其在军事上尤其是激光防护领域的应用前景, 并重点探讨了激光法制备 VO2薄膜的相关问题及解决措施。     

钛酸铋薄膜的室温脉冲激光沉积研究

在室温下,采用脉冲激光沉积（ＰＬＤ）技术在７．６２ｃｍＰｔ／Ｔｉ／ＳｉＯ２／Ｓｉ（１００）衬底上制备了钛酸铋（Ｂｉ４Ｔｉ３Ｏ１２）薄膜。Ｂｉ４Ｔｉ３Ｏ１２薄膜的厚度和组分均匀性采用卢瑟福背散射（ＲＢＳ）和扩展电阻技术（ＳＲＰ）来分析、表征;采用Ｘ射线衍射（ＸＲＤ）技术研究了薄膜的退火特性。研究发现单独用常规退火或快速退火热处理的Ｂｉ４Ｔｉ３Ｏ１２薄膜中较容易出现Ｂｉ２Ｔｉ２Ｏ７杂相;而采用常规退火和快速退火相结合的方法,较好地解决了杂相出现的问题,得到相结构和结晶性完好的Ｂｉ４Ｔｉ３Ｏ１２薄膜。透射电子显微镜实验和扩展电阻实验表明,室温下制备的Ｂｉ４Ｔｉ３Ｏ１２薄膜具有良好的表面和界面特性。     

Research on structure of Cu2ZnSn(S, Se)4 thin films with high Sn-related phases

Cu2ZnSn(S, Se)4 (CZTSSe) thin films were deposited on flexible substrates by three evaporation processes at high temperature. The chemical compositions, microstructures and crystal phases of the CZTSSe thin films were respectively characterized by inductively coupled plasma optical emission spectrometer (ICP-OES), scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman scattering spectrum. The results show that the single-step evaporation method at high temperature yields CZTSSe thin films with nearly pure phase and high Sn-related phases. The elemental ratios of Cu/(Zn+Sn)=1.00 and Zn/Sn=1.03 are close to the characteristics of stoichiometric CZTSSe. There is the smooth and uniform crystalline at the surface and large grain size at the cross section for the films, and no other phases exist in the film by XRD and Raman shift measurement. The films are no more with the Sn-related phase deficiency.     

相变型VO2薄膜的制备及其特性的研究

利用反应离子束溅射和后退火工艺制备一种新的相变型VO2薄膜,对该薄膜进行电学测试、XRD和光学透过率的测试。这种工艺制备出的相变型VO2薄膜相变温度更接近室温,XRD显示这种薄膜中有VO2、V2O5成分的存在。对这种薄膜的光学透过率测试表明,低温下薄膜的透过率是高温下薄膜透过率的近5倍。通过实验可以看出,氧气分压、退火温度、退火时间是影响制备新型相变型VO2薄膜的重要因素。     

二氧化钒薄膜在激光防护上的应用研究

战场上激光武器的不断发展对激光防护提出了更高的要求。由于VO2薄膜的相变温度接近室温,具有良好的光电性能,成为相变材料中最有希望用于红外探测器的激光防护材料。介绍了VO2薄膜的光电特性,并探讨了其在激光防护应用方面的相关问题以及发展前景。     

低温热致变色VO2薄膜的制备及应用

提出了一种制备低温热致变色VO2新型薄膜材料的工艺方法。在玻璃基底的Si3N4薄膜上溅射沉积VOx薄膜，再经还原性气氛退火，最终得到了nm量级的VO2颗粒。四探针测试电阻温度关系表明，该类材料相变温度已经靠近室温。不同温度下测试的红外透过曲线表明，该材料在相变前后有良好的红外开关特性，能够在智能窗等各类光电产品中获得应用。