面向电荷泵的占空比可调四相时钟发生电路北大核心

针对传统四相时钟发生电路产生的时钟波形信号易发生交叠、驱动电荷泵易发生漏电等问题，提出了一种占空比可调四相时钟发生电路。电路在每两相可能出现交叠的时钟信号之间都增加了延时单元模块，通过控制延时时间对输出时钟信号的占空比进行调节，避免了时钟相位的交叠。对延时单元进行了改进，在外接偏置电压条件下，实现了延时可控。基于55 nm CMOS工艺的仿真结果表明，在10～50 MHz时钟输入频率范围内，该四相时钟发生电路可以稳定输出四相不交叠时钟信号，并能在1.2 V电压下驱动十级电荷泵高效泵入11.2 V。流片测试结果表明，该四相时钟发生电路能够产生不相交叠的四相时钟波形，时钟输出相位满足电荷泵驱动需求。     

一种用于3D NAND存储器的高压生成电路

设计了一种应用于3D NAND 存储器的高压生成电路,包括振荡器、时钟生成电路、新型电荷泵及反馈环路。与传统的电荷泵相比,新型电荷泵消除了阈值电压损失与衬底偏置效应,提高了升压效率。通过控制时钟的电压幅度来调节输出电压,减小了输出电压纹波。电路在0.32 μm CMOS工艺模型下进行了仿真验证。结果表明,在3.3 V工作电压下,该电路稳定输出15 V的高压,上升时间为3.4 μs,纹波大小为82 mV,最大升压效率可达到76%。该高压生成电路在各项性能指标之间取得了平衡,其突出的综合性能能满足3D NAND存储器的工作需求。     

MEMS麦克风中新型电荷泵的设计

设计了一款应用于MEMS麦克风的电荷泵电路。在动态的电荷传输开关型电荷泵中,增加了时钟电平倍增电路和负反馈电路,使得电荷泵在工艺偏差、温度以及电源电压变化时能够输出稳定的高压。电路基于0.3 μm CMOS工艺实现,Spectre仿真结果表明,在1.6~3.6 V电源电压范围及所有工艺角下,电荷泵能够输出偏差在±5%以内的14 V高压,与相同条件下的传统静态电荷传输型电荷泵相比,升压单元减少了33%,有效提高了效率,节省了面积。     

一种快速升压的片上电荷泵电路设计

设计了一种快速升压的片上电荷泵电路,该电路由时钟产生电路和电荷泵核组成。电荷泵核基于传统Dickson电荷结构,在前四级引入预充管,增加节点初始电压,提高电荷泵升压速度,时钟产生电路能产生占空比约为30%的稳定时钟信号,用它驱动电荷泵核可以减小充放电流失配等问题,进一步提高电荷泵升压速度。基于华虹NEC 0.35μs CMOS工艺,HSPICE仿真结果显示：在5V电源电压下,电荷泵仅需要57.625μs就可以从0V升压到20V,比传统的MOS管Dickson电荷泵快了20.055μs。     

一种高效率的适合于低功耗应用的电荷泵电路

设计实现了一种高效率的电荷泵电路。利用电容和晶体管对电荷传输开关进行偏置来消除开关管阈值电压的影响。同时,通过对开关管的的衬底进行动态的偏置使得在电荷传输期间当开关管打开时其阈值电压较低,在开关管关断时其阈值电压较高。该电荷泵电路的效率得到了提高。基于0.18μm,3.3V标准CMOS工艺实现了该电路。在每级电容为0.5pF,时钟频率为780KHz,电源电压为2V的情况下,测得的8级电荷泵的输出电压为9.8V。电荷泵电路和时钟驱动电路从电源处总共消耗了2.9μA的电流。该电荷泵电路适合于低功耗的应用。     

新型低压、高速CMOS电荷泵电路

针对电荷泵传统电路中存在的电荷注入、时钟馈通、电荷分享等现象、问题,提出了相应的解决措施,并且提出了一种新型的电荷泵电路。电路按0．18μCMOS工艺设计,Spectre仿真,可以工作在1V电源电压下,频率达到1GHz,输出电压范围为100～980mV,功耗130μW,输出波形连贯无跳跃。该电荷泵具有结构简单、低压低功耗的特性,适合高速锁相环电路的使用。     

适用于低压EEPROM编程的双电荷泵电路系统设计

设计了一款应用于低电源电压EEPROM的双电荷泵电路结构,提供存储单元编程所需的高压。基于传统Dickson结构,设计主次两级电荷泵结构：次级电荷泵为两级升压结构,输出电压可增强时钟的驱动能力、抬高其高电平;主级电荷泵采用传输管栅压提升的结构及驱动能力增强的时钟对内部电容进行充放电,提高主级电荷泵每级的传输能力及整体电路的工作效率,最终实现低电源电压下产生高压的目的。同时,通过使能时序控制稳压系统电路,保证了输出电压的稳定性。仿真结果显示,电荷泵升降压速度快、纹波小、效率高。该双电荷泵电路已实际应用于芯片设计中,采用0.18μm EEPROM工艺流片,输出高压稳定,达到设计要求,并且性能良好。     

一种应用于MEMS麦克风偏置电路的电荷泵设计

MEMS麦克风需要一个高于10 V的偏置电压才能工作,这个高电压一般由内部电荷泵电路产生.在传统Dickson电荷泵结构的基础上,提出一种改进的电荷泵结构.它首先将非重叠时钟的幅度加倍,然后用幅度加倍的时钟作为电荷泵的驱动时钟,取得了明显的升压效果.Hspice仿真结果表明,电源电压为1.4V时,6级二极管-电容升压单元就可以实现10.7674 V的输出电压.与传统的Dickson升压电路相比,改进型电荷泵的升压单元减少了4级,且其核心部分的面积减小了21％,功耗降低了40％(参考SMIC 0.35 μm CMOS工艺).     

一种适用于反熔丝FPGA的高效电荷泵电路

基于Dickson电荷泵结构,提出了一种适用于反熔丝现场可编程门阵列(FPGA)的新型高效电荷泵电路,实现了电荷泵的快速启动。通过采用时钟信号升压电路,减少了电荷泵级数,并减小了电路总体面积和功耗。仿真结果显示,在2.5 V的工作电压和整体电路全负载的条件下,整体电路的启动时间约为20μs,可稳定输出电压5.46 V,工作电流约为618μA。采用0.18μm CMOS工艺流片并对其进行编程和测试,结果显示FPGA电路编程成功,功能正确,与仿真结果一致,表明了此电荷泵结构的可行性和实用性。     

一种低压改进型MOS电荷泵电路的设计

针对使用标准CMOS技术实现的传统电荷泵输出电压较低的不足,文中提出将基本的电荷转移开关进行改进的MOS电荷泵,在泵送增益增加电路的基础上,通过在泵的输出级增加第3个控制信号来提高电荷泵的电压增益,以得到更高的输出电压,将其作为无线传感器的能量收集电路。仿真结果表明,该改进型电荷泵电路适合于低电压设备,并具有较高的泵送增益。其输出电压在同类电荷泵中最高,在1.5 V电源条件下,可高达8.5 V。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.