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1.
SPM通用平台是一套扫描探针显微镜开发工具系统 ,它提供了一种开发生产SPM新的思路和方法 ,使SPM成为通用、开放、兼容的仪器体系。本文介绍了SPM通用平台的原理、指标和在其上扩展扫描隧道显微镜、原子力显微镜等功能模块的方法 ,以及智能型SPM通用平台的研究思路  相似文献   

2.
SPM通用平台是一套扫描探针显微镜开发工具系统,它提供了一种开发生产SPM新的思路和方法,使SPM成为通用、开放、兼容的仪器体系.本文介绍了SPM通用平台的原理、指标和在其上扩展扫描隧道显微镜、原子力显微镜等功能模块的方法,以及智能型SPM通用平台的研究思路.  相似文献   

3.
SPM通用平台是一套扫描探针显微镜开发工具系统,它提供了一种开发生产SPM新的思路和方法,使SPM成为通用、开放、兼容的仪器体系。本文介绍了SPM通用平台的原理、指标和在其上扩展扫描隧道显微镜、原子力显微镜等功能模块的方法,以及智能型SPM通用平台的研究思路。  相似文献   

4.
基于SPM技术的表面纳米计量   总被引:1,自引:0,他引:1  
用扫描探针显微镜(SPM)技术观察三维表面形态,可以达到纳米级甚至原子量级的分辨率,所以SPM技术在计量方面有着广阔的应用前景。20年来,人们采用各种理论和方法来提高SPM的精度和稳定性,以适应表面计量领域不断提出的新要求。本文在总结表面规范与建模、高分辨率和高时间稳定性测量、图像解释与表面重建、SPM误差和校准以及纳米对准技术等研究结果的基础上,对今后发展的趋势作了展望。  相似文献   

5.
扫描探针显微镜(SPM)的发明和发展,促进了纳米科技和纳米医学等新学科的诞生和发展.如今,SPM已经形成了一个庞大的、高度自动化的探针显微镜家族,在纳米科技和纳米医学研究中发挥着重要作用.  相似文献   

6.
应用SPM技术开展纳米切削加工   总被引:3,自引:1,他引:2  
纳米科技发展和应用的一个重要问题是:解决纳米尺度上的操作,加工和控制,本文针对目前传统机械加工方法在纳米量级加工能力上存在的不足,以及利用SPM探针针尖进行纳米加工在工程应用中所面临的技术问题,提出应用SPM原理和技术,直接使用金刚石丸具进行材料的纳米量级去除加工方法。文中应用该方法对石墨以及金属材料进行了微去除加工实验,研究和考察了纳米切削加工时,切削形成和良好加工表面的形成,结果显示,这是一种好的纳米加工方法,既可作为材料加工过程的研究手段,又具有良好的实际应用前景。  相似文献   

7.
孙涛  董申 《电子显微学报》2001,20(5):669-672
本文介绍了所研制的二维微定位柔性系统和一维精密转动系统,进行了相关技术的研究并给出了设计参数,使SPM能够满足高精度下的大尺寸平面样品以及球形被测样品的全范围检测,扩大了扫描探针显微镜(SPM)在超精密工程中的应用范围。  相似文献   

8.
随着纳米技术研究的进一步深入,对其研究工具SPM的精度已提出了更高的要求。文中针对这一课题,提出了基于DSP的数字扫描探针显微镜的硬件解决方案。该方案和以往基于PCI的SPM的系统相比,无论是在数据处理速度,还是在扫描精度或性能上都有明显提高.其发展空间和应用前景十分广阍。  相似文献   

9.
SPM图像模拟、表面重建及探针估计   总被引:2,自引:0,他引:2  
扫描探针显微镜获得的图像是样品和探针共同作用的结果,它只是被测样品实际形貌的近似描述,所以进行定量的SPM图像模拟,探针估计和表面重建工作十分必要,本文分析比较了几种SPM图像处理的算法,且应用数学形态学方法给出了一些典型表面的图像模拟,表面重建以及探针估计的结果,这在样品表面形貌的精确探测以及纳米计量中均有重要意义。  相似文献   

10.
为了解决传统扫描探针显微镜(SPM)控制器中参数难以设定的难题,提出了一种SPM的PI参数自整定控制器的设计,并给出了控制器的硬件结构和软件设计.该控制器基于DSP,通过引入扫描式参数优化算法来实现.结果表明,该控制器能自动完成PI参数的测算,并给出最优的PI参数,提高了SPM扫描图像的质量.  相似文献   

11.
This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.  相似文献   

12.
We have fabricated the white organic light-emitting devices (WOLEDs) based on 4,4' -bis(2,2 -diphenyl vinyl)-1,1' - biphenyl (DPVBi) and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene (rubrene). The device structure is ITO/2T-NATA (20 nm)/NPBX (20 nm)/CBP: x%Ir(ppy)3:0.5% rubrene (8 nm)/NPBX (5 nm)/DPVBi (30 nm)/Alq(30 nm)/LiF(0.5 nm)/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris (2-phenylpyridine) iridium [Ir(ppy)3], acts as a yellow light-emitting layer, and N,N' -bis- (1-naphthyl)- N,N' -diphenyl -1, 1' -biphenyl-4,4' -diamine (NPBX) acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir (PPY)3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.  相似文献   

13.
To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.  相似文献   

14.
本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。  相似文献   

15.
Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.  相似文献   

16.
It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer (LDV).  相似文献   

17.
正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must  相似文献   

18.
正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-  相似文献   

19.
正Cloud computing is a novel computing paradigm that utilizes remote cloud resources to achieve a high-performance computation.Cloud provides infrastructure,platform and software as different on-demand services.China has made remarkable progress in cloudbased products and operating system technology.The government,enterprises and research institutions are all active in the development of cloud computing-related projects.Despite the progress,many important problems  相似文献   

20.
正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful  相似文献   

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