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1.
设计了一种基于多模干涉(MMI)耦合输入/输出结构的跑道型双微环串联谐振滤波器,并采用紫外光敏聚合物材料SU-8作波导芯层,聚合物CYTOP为下包层,在硅基底上完成了器件的制备.器件的波导端面尺寸为2 μm×1 μm,与设计值相符,扫描电镜显示所制备的器件波导侧壁陡直度较高.直波导传输损耗的测试结果表明,在1550 nm波长,直波导传输损耗约为2.0 dB/cm.测试并获得了多模干涉结构和器件的通光及输出光谱图\.测试结果表明,MMI结构在较宽的波长范围内实现了接近50∶50的功分比,微环谐振滤波器的通光性能良好,实现了滤波功能,器件的自由光谱区FSR实际值约为0.94 nm,与设计参数值很接近.研究结果表明采用聚合物SU-8制备小波导尺寸微环谐振器的器件简便可行.  相似文献   

2.
报道了一个新的基于锥形多模干涉的相干光波合波器.对锥形多模波导中的模式行为给出了完整的理论分析,并给出了该锥形合波器在不同结构下的输出特性.在一个绝缘体上硅的基板上实现了该器件.鉴于无后向反射,容易扩展为多口配置,对实验误差有大的允许度和尺寸紧凑等优点,这种锥形多模干涉的合波器是大型光子集成中所用的相干光波合波器的理想选择.  相似文献   

3.
报道了一个新的基于锥形多模干涉的相干光波合波器.对锥形多模波导中的模式行为给出了完整的理论分析,并给出了该锥形合波器在不同结构下的输出特性.在一个绝缘体上硅的基板上实现了该器件.鉴于无后向反射,容易扩展为多口配置,对实验误差有大的允许度和尺寸紧凑等优点,这种锥形多模干涉的合波器是大型光子集成中所用的相干光波合波器的理想选择.  相似文献   

4.
陈直 《半导体光电》2023,44(3):356-362
RGB合波器作为激光扫描显示系统的关键性核心部件,其微小型化和高传输效率是应用于增强现实的必然要求。针对氮化硅、氮化镓、SU8三种可见光波段高透过率材料,对比研究了其波导的折射率差、色散曲线、单模条件,以及所构成的多模干涉型RGB波导合波器的尺寸、传输效率、光场分布。研究结果表明,氮化硅器件的各项性能介于氮化镓与SU8器件之间;氮化镓器件具有最大的芯层与包层折射率差,最小的单模截止尺寸,最短的器件长度(2000μm);SU8器件具有最小的芯层与包层折射率差,最大的单模截止尺寸,但器件长度大于氮化镓,为3600μm。此外,氮化硅、氮化镓、SU8三种器件的RGB平均传输率分别为78%,55%和91%,可见SU8器件占有明显优势。未来,经过进一步优化设计的超紧凑氮化镓多模干涉型RGB波导合波器有望应用于激光扫描单片集成系统中,而具有良好柔性的SU8多模干涉型RGB波导合波器则在可形变系统中具有重要应用价值。这些器件为增强现实系统朝着微小型化和高传输效率的方向发展提供了技术基础。  相似文献   

5.
根据多模干涉器(MMI,multimode interferome ter)的自映像效应,设计了基于2×4MMI 的聚合物相干光混频器,优化光混频器结构参数;采用模式转换设计解 决多模波导的 自映像与单模波导模式失配的问题,从而进一步提高其性能。仿真结果表明,优化后的光混 频器其传输损耗 小于6.3dB,传输不均衡性小于1dB,相位误差小于1°,并且MMI长 度与宽度的设计容差分别达到40μm 和0.5μm。根据设计制备了聚合物光混频器,通过实验表征了此光 混频器的传输性能。在C波段下的测量 结果表明,其传输损耗小于10dB,不均衡性在0.5~1. 5dB之间,相位误差小于10°, 而达到这些性能的MMI长度与宽度的器件容差分别为25μm和0.5μm,均大于制备过程中0.1μm的工艺容差。测 量结果与理论模拟结果基本吻合。本文的聚合物光混频器成本低、容差高,对实现高集成度 相干接收机具有实际意义。  相似文献   

6.
MMI阵列波导光栅复用/解复用器的研制   总被引:2,自引:1,他引:1  
详细分析了基于自镜像效应的 MMI DMUX器件的基本工作原理 ,在此基础上 ,在 SOI材料上完成了对 8信道 MMI DMU X的具体设计 .该器件的输入、输出单模波导采用 Soref的大截面脊形光波导理论进行优化设计 ,最后获得了当输入、输出单模波导宽度为 5 μm,SIE多模波导宽度和长度分别为 72 μm和 6 313.4μm时 ,该器件对8信道波长的隔离度均在 35 d B以上 ,且理论传输损耗 <0 .18d B.  相似文献   

7.
顶部平坦化32通道AWG的设计与研制   总被引:2,自引:2,他引:0  
根据优化输入端多模干涉器(MMI)结构设计,研制出32通道50 GHz通道间隔、顶部平坦化的阵列波导光栅(AWG)器件。该器件的采用6μm×6μm折射率差为0.75%的Si基SiO2埋型波导结构,阵列波导数为130,罗兰圆半径为9 419.72μm,相邻阵列波导长度差为128.42μm。测试结果表明:AWG器件插入损耗(IS)为-5~-8.5 dB,串扰>-25 dB,3 dB带宽>0.25 nm。  相似文献   

8.
超紧凑型SOI基3×3MMI波导光开关的优化设计   总被引:2,自引:0,他引:2  
贾晓玲  高凡  张峰 《半导体光电》2005,26(4):294-298
提出一种基于SOI材料的超紧凑型3×3 MMI波导光开关,开关仅有一个多模波导,且多模波导采用更为紧凑的双曲结构.用FD-BPM方法对其各个状态进行了模拟和分析,并对器件的结构参数进行了优化设计.结果表明,这种光开关可以成功实现任意两输入和输出通道间的开关功能,优化后的开关呈现优良的综合性能,且整个器件的尺寸小于4mm.  相似文献   

9.
提出了利用离子交换技术制作多模干涉(MMI)型光功分器的设计方法.以1×8MMI光功分器为例,采用导模传输分析法分析了器件基本原理,对离子交换制作波导的折射率分布进行了讨论.针对工作波长为0.85μm的1×8MMI光功分器结构参数进行了设计,对器件输出特性、各项技术指标、离子交换决定的折射率差Δn对器件性能的影响均进行了BPM仿真,结果表明:利用离子交换方法制作MMI型光功分器,设计指标可达到均匀性约0.009dB、平均插入损耗约9.111dB和最大插入损耗约9.116dB,均优于现有器件的指标.  相似文献   

10.
基于SOI的2×2 MMI耦合器的设计   总被引:1,自引:1,他引:0  
设计了一种可用于阵列波导光栅(AWG)解调集成微系统的绝缘体上硅(SOI)基2×2多模干涉(MMI)耦合器,用光束传播法(BPM)对MMI耦合器进行了模拟。耦合器输入/输出波导采用倒锥形,多模干涉区尺寸为6μm×57μm。在TE偏振中心波长为1.55μm时,器件附加损耗为0.46dB,不均匀性为0.06dB。在1.49~1.59μm波长范围内耦合器的附加损耗小于1.55dB。仿真结果表明所设计的2×2MMI耦合器体积小、附加损耗低、波长响应范围宽、分光均匀,符合片上集成系统的要求。  相似文献   

11.
This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.  相似文献   

12.
We have fabricated the white organic light-emitting devices (WOLEDs) based on 4,4' -bis(2,2 -diphenyl vinyl)-1,1' - biphenyl (DPVBi) and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene (rubrene). The device structure is ITO/2T-NATA (20 nm)/NPBX (20 nm)/CBP: x%Ir(ppy)3:0.5% rubrene (8 nm)/NPBX (5 nm)/DPVBi (30 nm)/Alq(30 nm)/LiF(0.5 nm)/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris (2-phenylpyridine) iridium [Ir(ppy)3], acts as a yellow light-emitting layer, and N,N' -bis- (1-naphthyl)- N,N' -diphenyl -1, 1' -biphenyl-4,4' -diamine (NPBX) acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir (PPY)3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.  相似文献   

13.
To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.  相似文献   

14.
本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。  相似文献   

15.
Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.  相似文献   

16.
It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer (LDV).  相似文献   

17.
正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must  相似文献   

18.
正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-  相似文献   

19.
正Cloud computing is a novel computing paradigm that utilizes remote cloud resources to achieve a high-performance computation.Cloud provides infrastructure,platform and software as different on-demand services.China has made remarkable progress in cloudbased products and operating system technology.The government,enterprises and research institutions are all active in the development of cloud computing-related projects.Despite the progress,many important problems  相似文献   

20.
正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful  相似文献   

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