细菌驱动微转子马达

日本国家高级工业科学与技术研究所的一个研究组正在利用快速移动的细菌来驱动微转子马达，这是第一个在无机材料中加进了细菌的微机械器件。这种生物分子马达能比传统的马达更有效的将化学能转化为机械能，还能在大型结构中发挥自修复和自组织的潜能，有望用在微型机器人和微小电子系统中。     

硅基微静电马达

本文介绍了硅基微静电马达的设计考虑、制作工艺和测量结果。该马达结构上的改进主要体现在两方面：通过在微马达转子的下面集成光伏器件实现了对马达转速的片内检测，这对于研究微马达动力学和构成ＭＥＭＳ有着重要的意义；利用复合膜牺牲层技术制成了一种锥状轴承，该轴承能够减小马达的摩擦力矩。微静电马达转子直径分１００μｍ和１２０μｍ两种，定子与转子极之间的空气间隙有２μｍ、３μｍ和４μｍ三种。初步测量结果表明该马     

电磁型微马达的微转子研究

简要介绍了直径２ｍｍ电磁型微马达的结构和磁路。对微转子的设计和加工,多微磁极的写（充）入和均匀性进行分析和讨论。测量了不同充磁条件下的微转子剩余磁化强度和微转子之间的吸力。     

一种硅基集成微晃动马达

本文介绍一种硅基集成微晃动马达．该微马达的制作工艺非常简单，主要包括四次光刻（共三块版）、两次ＬＰＣＶＤ多晶硅膜淀积和两次ＬＴＯＳｉＯ２膜淀积．微马达转子和定子由厚度为４．２μｍ的多晶硅膜形成，转子与定子之间的空气间隙为２．０—２．５μｍ，转子的半径为４０—５０μｍ．初步测量结果表明，微晃动马达的最低驱动电压为４９Ｖ，最高转速估计可达６００ｒｐｍ。     

一种结构改进了的硅基微静电马达

本文介绍一种结构改进了的硅基微静电马达。通过在微马达转子下面集成光伏器件实现了对马达转速的片内检测,这对于实现转速自动控制和制作各种传感器有重大意义。利用复合膜牺牲层腐蚀技术制成了一种曲颈状轴承,该轴承能够大大减小马达转动时的摩擦阻力矩。微静电马达转子直径分100和120μm两种,膜厚约2μm,定子与转子的空气间隙为2μm。初始测量结果表明该微马达有良好的性能,具有实用化前景。     

基于SU-8胶转子的非接触压电微马达

研制了一种非接触压电微马达，通过阻抗分析仪对定子进行扫频测试，确定其共振频率，并且详细介绍了SU-8胶转子制作的工艺流程。利用转速仪比较不同形状和尺寸的转子在调频和调压下的转速，从而确立压电微马达的最优转子。转子半径为6mm，叶片宽度为6mm的三叶片转子转速最高为3569r／min。转子的启动电压和最高电压分别为8V和24V。     

压电微马达研究进展

利用网络和图书馆对国际上1996年至今的压电微马达研究进展进行了调研。分别介绍了压电薄膜陶瓷的行波、驻波类微马达的最新研究情况，同时也对一种具有与压电微马达特性相同的静电超声微马达的研究作了说明，最后给出了本实验室研制的压电陶瓷行波微马达的运动机理。     

圆筒型非接触超声马达的实验研究

研制了一种圆筒型非接触超声波马达，其定子圆筒和转子间设置了间隙。文中给出马达的结构及激振方法，并测试了样机的输出性能。实验表明，马达转子的转动方向与接触型马达转子转动方向相反，输出转速与输入电压具有线性关系。     

基于4mm电磁型微马达的管道检测微机器人系统研究

介绍了一种基于 4mm微型马达的微小机器人系统的设计及制作。新颖的电磁型微马达的设计使得微机器人具有较强的驱动能力和一定的负载能力 ;全方位的结构设计使得微机器人具有高机动性 ;同时 ,利用视觉实现机器人与外部环境相互感知 ,并在其基础上对整个机器人系统的控制结构设计进行了探索     

基于4 mm电磁型微马达的管道检测微机器人系统研究

介绍了一种基于4mm微型马达的微小机器人系统的设计及制作。新颖的电磁型微马达的设计使得微机器人具有较强的驱动能力和一定的负载能力；全方位的结构设计使得微机器人具有高机动性；同时，利用视觉实现机器人与外部环境相互感知，并在其基础上对整个机器人系统的控制结构设计进行了探索。     

A capacitive sensing integrated circuit for detection of micromotorcritical angles

The theory, design, and measured performance of an integrated circuit which enables closed-loop control of electrostatic micromotors is presented. The micromotor control integrated circuit (MCIC) consists of low-noise sense electronics designed to detect critical rotor angles to a resolution of 0.5° (0.05 fF) at a 1-MHz sampling rate, and control logic which cycles the micromotor drive state during continuous rotation to maintain maximum torque, independent of loading. Noise due to MOSFET switches and amplifiers in the analog section is modeled and shown to be 32 μV referred to the system input, i.e., about half the desired switching resolution. The MCIC was fabricated using a 2-μm, n-well CMOS process and functions as expected. The noise probability density function was measured using MCIC's digital output for different values of input-to-ground capacitance in order to verify the noise model. Good agreement with theory was observed, although the comparator exhibited some offset and hysteresis     

Variable-capacitance micromotor with levitated diamagnetic rotor

A novel micromotor is described, in which the gear-shaped pyrolytic graphite rotor is levitated, rotated and constrained by the combination of static magnetic, electrostatic forces and torques. Two concentric ring-shaped permanent magnets are presented, which are used for realising the static magnetic field. By the microelectromechanical systems process, the metal electrodes, pads and SU-8 column post were fabricated on the silicon substrate above the magnets. The stator was assembled by the silicon and the magnets. The three-phase axial variable-capacitance motor principle was applied for driving the rotor. The rotor is stably levitated to a height of about 0.70 mm over the magnets. When a 30 V driving voltage was added, the rotor speed was over 10 rpm in atmosphere.     

双向转角电磁铁输出扭矩特性仿真分析

基于电磁场有限元仿真,探讨了双向转角电磁铁的工作机理,分析了其输出扭矩特性.针对工业应用中,双向转角电磁铁在0°位置启动时,需要较大启动电流,且在0°～90°范围内提供的输出扭矩较小,为了获得较大输出扭矩,确定最佳工作区,采用电磁场有限元分析软件Maxwell 2D/3D,对不同安匝数的双向转角电磁铁进行瞬态仿真计算,得到电磁铁转子旋转180°过程中各角度的磁场分布以及输出扭矩,探讨了其实现双向旋转的工作机理.仿真结果表明:双向转角电磁铁的最佳工作区在40°～～140°之间,输出扭矩会随着线圈安匝数的增多而增大.该仿真结果为双向转角电磁铁的工业应用提供了依据.     

Design and analysis of a novel wound rotor for a bearingless induction motor

The traditional squirrel-type bearingless induction motor (BIM) suspension winding generates induced current in its squirrel-cage rotor and affects the phase and amplitude of the suspension force. Based on the analysis of the spatial distribution of torque winding magnetic field and suspension winding magnetic field, a new type of wound rotor BIM is designed. Different from the squirrel-cage rotor, the wound rotor uses a special method of embedding a set of coils at any symmetrical four rotor slot positions, so as to only induce the torque winding magnetic field. The induced current, air-gap magnetic density, magnetic field line distribution, suspension force as well as electromagnetic torque of the traditional squirrel-cage motor and the new wound motor are analysed by Maxwell finite element calculation. The results show that the designed new wound BIM can not only effectively suppress the induced current of suspension winding, eliminating its influence on the suspension force, but also has a better starting performance.     

Analytical and experimental investigation on the magnetic field and torque of a permanent magnet spherical actuator

This paper presents the torque model of a ball-joint-like three-degree-of-freedom (3-DOF) permanent magnet (PM) spherical actuator. This actuator features a ball-shaped rotor with multiple PM poles and a spherical stator with circumferential air-core coils. An analytical expression of the magnetic field of the rotor is obtained based on Laplace's equation. Based on this expression and properties of air-core stator coils, Lorentz force law is employed for the study of the relationship between the rotor torque and coil input currents. By using linear superposition, the expression of the actuator torque in terms of current input to the stator coils can be obtained in a matrix form. The linear expression of the actuator torque will facilitate real-time motion control of the actuator as a servo system. Experimental works are carried out to measure the actual magnetic field distribution of the PM rotor in three-dimensional (3-D) space as well as to measure the actual 3-D motor torque generated by the actuator coils. The measurement results were coincident with analytical study on the rotor magnetic field distribution and actuator torque expressions. The linearity and superposition of the actuator torque were also verified through the experiments.     

An experimental technique and a model for studying the operation ofharmonic side-drive micrometers

The operation of harmonic side-drive micrometers is studied through gear ratio measurements and modeling of the micrometer dynamics. A simple experiment in which the wobble micromotor gear ratio is measured as a function of excitation voltage and pattern is used to characterize micromotor operation. This experiment in conjunction with the micromotor dynamic model presented can be used to study friction at the micromotor bearing and bushing contacts by fitting the model to the experiment. The model accounts for sliding and rolling of the rotor on the bearing, and sliding of the rotor on the bushing. The model can be used in conjunction with the experiment to estimate the bearing coefficient of friction and the bushing friction force. For micromotor operation in nitrogen gas, a polysilicon on polysilicon coefficient of friction of 0.36-0.4 is estimated. The bushing frictional force is found to consist of a constant term and a term that depends on the square of the excitation voltage     

Steady-State Performance and Stability Analysis of Mixed Pole Machines With Electromechanical Torque and Rotor Electric Power to a Shaft-Mounted Electrical Load

This paper presents the steady-state model, performance, and stability analysis of a mixed pole machine with a new operational mode which provides a rotor torque and an n -phase rotor electrical output power to a shaft-mounted rotating electrical load. The machine operated under this mode can be used in applications that require contactless power, such as in robotics, or applications that require independent control of both rotor torque and rotor electric power, such as for contactless rotational antennas and turret systems. The performance assessment includes electromagnetic torque, electrical efficiency, mechanical efficiency, and total efficiency based on both simulation and experimentation. The effect of electrical loading and stator voltage on both rotor torque and rotor electric power is also considered. The machine steady-state stability is introduced by plotting the machine operating characteristics that determine all stable operating regions of the machine under the proposed mode of operation.     

Micromotor with electromagnetically levitated rotor using separated coils

In a novel stator structure, the levitated, stability and rotating coils of a micromotor with an electromagnetically levitated rotor are separated and of multi-loop. This micromotor has improved stability, levitation and rotation performance. With current of appropriate value and frequency in the coils, the rotor of 2.2 mm diameter and 20 /spl mu/m thick is levitated to a height of 300 /spl mu/m, and its rotating speed can reach 1400 rpm.     

微马达转子电镀导磁层的研究

本文推荐一种镀液，用于制作电磁型微电机转子坡莫合金导磁层，研究了该镀液的组成和工作条件对镀层成份和内应力的影响，表明该镀液具有可供选用的电流密度范围宽，允许较高Ｆｅ２－浓度和镀层内应力低等优点。