Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing

A resonant cantilever-based microsystem aimed at biochemical sensing is presented. The sensor system comprises a magnetically actuated resonant cantilever sensor array integrated with the feedback circuitry, digital control circuitry and a serial interface on a single chip in 0.8 $mu{hbox {m}}$ CMOS technology. The sensor system shows a frequency stability of better than 3 Hz in water corresponding to a detection limit of about 30 pg mass loading. The system has been used for the detection of antibody-antigen interaction on the cantilever surface. The possibility to actuate and operate cantilever arrays in a liquid environment opens up a variety of new applications for bio-chemical sensing.      

靶式光纤Bragg光栅流速传感器的研制

设计了一种基于等强度悬臂梁的靶式光纤Bragg光栅（FBG）流速传感器,传感器利用杠杆结构将置于流体中迎流靶片所受的与流速成对应关系的冲击力转化成FBG波长的漂移,利用对称粘贴于悬臂梁上下表面的双FBG结构有效解决了温度与应变的交叉敏感问题。建立了流速与FBG波长变化幅度的关系,并采用流体分析软件FLUENT对放置靶片...     

基于星形金纳米颗粒修饰的81°倾斜光纤光栅生物传感器

提出一种星形金纳米颗粒修饰的81°倾斜光纤光栅(TFG)生物传感器。通过金黄色葡萄球菌蛋白A固定法,将自制的高纯度新城疫病毒(NDV)单克隆抗体固定于81°TFG表面,制成对NDV具有特异性检测功能的生物传感器。结果表明,传感器对NDV的最低探测极限达10~25pg/mL,检测饱和点约为1 000pg/mL;在0~200pg/mL具有较好的线性相关度(R2约为0.911),相应的灵敏度约为1 394pm/(ng/mL)。此外,通过对NDV的特异性和临床性测试,表明该生物传感器对NDV具有高度的特异性和临床有效性。     

基于GMR生物传感器的甲胎蛋白检测

采用磁控溅射、光刻、离子束刻蚀和剥离工艺等工艺和方法,制备了多层膜结构的巨磁阻(GMR)生物传感器件,并利用此种传感器来检测甲胎蛋白。在传感器表面通过生物处理固定甲胎蛋白单克隆抗体(McAb1)作为探针,以捕获目标抗原———甲胎蛋白。用直径1μm的超顺磁磁珠标记目标抗原。当传感器表面抗体将目标抗原捕获后,磁珠标记即被固定在GMR传感器的表面。垂直于传感器表面施加230 Oe(1 Am-1=4π×10-3 Oe)的磁场,即可检测到由磁珠产生的信号。本实验对质量浓度为1 ng/mL的甲胎蛋白进行了检测,得到了信号为0.29～0.34Ω的电阻变化值。此种检测方法可用于诊断原发性肝癌。     

柔性纸基生物传感器及其在肝癌检测中的应用

该文提出了一种由纳米银颗粒（Ag NPs）作为谐振器的柔性超材料生物传感器。与现有技术相比,该传感器首次在纸上实现了纳克级别甲胎蛋白（AFP）的检测。其创新之处在于超材料谐振器制备在低成本的普通纸张上。该柔性纳米银纸基生物传感器在无尘室中通过丝网印刷技术制备而成。当待测AFP吸附于Ag颗粒上时,电磁波中传感器的谐振频率产生频漂,该频漂在生物测试中作为判断标志。通过仿真和实验验证,并以葡萄球菌蛋白（SPA）作为偶联试剂,该新型纸基生物传感器具备检测20 ng/mL甲胎蛋白的能力。由于待测样品是通过电磁场直接被感应,因此,该传感器具有免标记、实时和无损的优点。该文提供了一种柔性、低成本、快速和免标记的生物检测方法,有利于生物检测学的发展。     

一种基于光学杠杆的新型精密角度传感器研究

在精密角度传感器中,灵敏度和噪声性能是影响传感器精度的主要因素.为了提高角度传感器的灵敏度和噪声性能水平,采用以光学杠杆为基础,与萨格纳克效应(Sagnac)干涉仪结合的方法来建立一种新型的精密角度传感器.Sagnac干涉仪的干涉图样在相消干涉时对2个相干光束的光路差很敏感,而光学杠杆又可将光路差放大,从而提高灵敏度.同时,Sagnac干涉仪的相消干涉能抑制某些噪声源,从而提高噪声性能.通过实验仿真,验证了这种方法构建的精密角度传感器具有较高的灵敏度和噪声性能水平.     

A novel method using SiNW to measure stress in cantilevers

A silicon (SiNW) nanowire device, made by the bottom-up method, has been assembled in a MEMS device for measuring stress in cantilevers. The process for assembling a SiNW on a cantilever has been introduced.The current as a function of the voltage applied to a SiNW have been measured, and the different resistances before and after cantilever releasing have been observed. A parameter, η, has been derived based on the resistances. For a fixed sample, a linear relationship between η and the stress in the cantilever has been observed; and, so, it has been demonstrated that the resistance of SiNW can reflect the variation of the cantilever stress.     

基于模态局部化的可调式压电驱动谐振质量传感器的设计

该文提出了一种基于模态局部化现象来检测外部质量扰动的可调式压电驱动谐振质量传感器,质量传感器的检测结构由两个不同长度的悬臂梁通过机械耦合梁连接。首先利用哈密顿原理对压电驱动下的非对称谐振元件进行理论建模,采用伽辽金方法求解,得到前两阶模态下的振动特性;理论求解所得固有频率与COMSOL仿真分析、实验数据基本一致。实验研究表明,无调谐质量的谐振器检测范围为2~10 mg,添加调谐质量后的谐振器检测范围提高至1~13 mg,质量检测的分辨率也得到优化。此外,对传感器的结构进行非线性分析研究发现,超谐振动下的谐振器检测灵敏度提升了80%,这为非线性谐振传感器的设计提供了基础。     

光纤Bragg光栅等强度悬臂梁型称重传感器的标定与不确定度分析

研制了一种等强度悬臂梁结构的光纤Bragg光栅称重传感器.为了确定其称量结果的可靠性,通过分析载荷信息传递过程与光栅敏感元件的感知原理,推演传感器设计的理论依据,设计了采用标准质量块进行标定的静态载荷实验装置,通过MATLAB实现静态传感数据分析,并分析标定过程中存在的不确定因素进而确定了传感器的不确定度指标.实验表明:所研制的光纤Bragg光栅等强度悬臂梁型称重传感器的灵敏度为0.0069 nm/N,非线性误差为4.93％,重复性误差为2.59％,迟滞误差为3.21％FS,称重传感器的测量不确定度为0.409 N.设计的光纤Bragg光栅等强度悬臂梁型称重传感器静态特性良好,在它量程范围内测量不确定度对结果的影响较小,满足性能要求,标定方法有效提高了标定效率和精度,为其他类型传感器综合性能定量分析提供了思路与工程实践.     

新型肺癌压电DNA传感器的研制

在压电石英金电极上自组装半胱胺膜,通过1-乙基-3-(3-甲基氨丙基)碳二亚胺盐酸盐和N-羟基琥珀酰亚胺活化的羧基化碳纳米管交联半胱胺和DNA探针,构建新的压电DNA传感器,实现对肺癌特征DNA的压电检测。该传感器检测灵敏度为27.617Hz/(μg/mL),线性范围为0.02～7.50μg/mL,再生性能好。样本分析结果与聚合酶链式反应(PCR)法无显著差异,可用于临床检测。     

一种基于平膜片挠度的光纤光栅压力传感器

设计并实现了一种基于平膜片挠度的光纤光栅压力传感器,该压力传感器利用一个L型的杠杆机构将膜片的挠度转换为光纤光栅的轴向应变,在提高传感器灵敏度的同时避免了对光纤光栅栅区直接封装造成的应力分布不均匀.实验结果表明,该传感器具有良好的线性度和稳定性,其压力灵敏度系数达10.4 nm/MPa.     

Response Characterization of Electroactive Polymers as Mechanical Sensors

The characterization of the dynamic response (including transfer function identification) of trilayer polypyrrole (PPy) type conducting polymer sensors is presented. The sensor was built like a cantilever beam with the free end stimulated through a mechanical lever system, which provided displacement inputs. The voltage generated and current passing between the two outer PPy layers as a result of the input was measured to model the output/input behavior of the sensors based on their experimental current/displacement and voltage/displacement frequency responses. We specifically targeted the low-frequency behavior of the sensor as it is a relatively slow system. Experimental transfer function models were generated and verified experimentally for sensors with different dimensions. The models can be used to understand the dynamic behavior and sensing ability of the polymers as mechanical sensors. The effect of the active sensor length on the voltage and current outputs has demonstrated that the shorter is the sensor length, the higher are the voltage output and the current passed for the same mechanical input. Also, their current and voltage responses under an impulse displacement stimulus were experimentally measured to show their dynamic sensing response and to estimate the current and voltage sensing bandwidths. Further, an energy balance method has been proposed to estimate the sensor output. Based on the novel experimental and analytical results, the contribution of this study is the first comprehensive investigation into the response analysis and characterization of the PPy-type conducting polymers as mechanical sensors, to the best of authors' knowledge.     

杠杆耦合式微机械陀螺仪特性分析

基于机械杠杆的位移放大效应,提出了一种具有微杠杆结构的电容检测式微机械陀螺结构,所设计的杠杆放大机构设置在陀螺的检测模态中,通过杠杆将科氏质量块的检测位移放大传递到检测框上,以提升检测位移。建立杠杆结构陀螺的二阶振动微分方程,分析了杠杆结构对微机械陀螺结构静刚度和固有频率的影响,探讨了在不同结构条件下杠杆结构对检测位移的放大效果。通过仿真验证了理论的准确性与可行性,结果表明,在陀螺谐振情况下,可有效增大检测框位移60%以上,提升了检测位移,进而提升检测灵敏度。     

Nanogap‐Rich Au Nanowire SERS Sensor for Ultrasensitive Telomerase Activity Detection: Application to Gastric and Breast Cancer Tissues Diagnosis

Telomerase has attracted much attention as a universal cancer biomarker because telomerase is overexpressed in more than 85% of human cancer cells while suppressed in normal somatic cells. Since a strong association exists between telomerase activity and human cancers, the development of effective telomerase activity assay is critically important. Here, a nanogap‐rich Au nanowire (NW) surface‐enhanced Raman scattering (SERS) sensor is reported for detection of telomerase activity in various cancer cells and tissues. The nanogap‐rich Au NWs are constructed by deposition of nanoparticles on single‐crystalline Au NWs and provided highly reproducible SERS spectra. The telomeric substrate (TS) primer‐attached nanogap‐rich Au NWs can detect telomerase activity through SERS measurement after the elongation of TS primers, folding into G‐quadruplex structures, and intercalation of methylene blue. This sensor enables us to detect telomerase activity from various cancer cell lines with a detection limit of 0.2 cancer cells mL^?1. Importantly, the nanogap‐rich Au NW sensor can diagnose gastric and breast cancer tissues accurately. The nanogap‐rich Au NW sensors show strong SERS signals only in the presence of tumor tissues excised from 16 tumor‐bearing mice, while negligible signals in the presence of heated tumor tissues or normal tissues. It is anticipated that nanogap‐rich Au NW SERS sensors can be used for a universal cancer diagnosis and further biomedical applications including a diverse biomarker sensing.     

一种拉杆式的光纤光栅应变传感器

提出了一种拉杆式的光纤光栅应变传感器,并进行了理论分析和传感器标定实验研究。传感器由悬臂梁组成弹性系统,将光纤粘贴于悬臂梁内锥形孔内,利用拉杆传递监测对象表面应变变化。实验结果表明,传感器的应变灵敏度为1pm/με,线性度为0.994;温度灵敏度为16pm/℃,线性度为0.996。可应用于高精度要求下的应变测量。     

Simple low-frequency optical fiber accelerometer with largerotating machine monitoring applications

A simple fiber optic accelerometer with large rotating equipment monitoring applications is presented. The sensor is optimized for detection of mechanical vibrations in the frequency range 0.2-140 Hz. The minimum detectable acceleration is 0.025 m/s² root mean square (rms), and it has low transverse sensitivity. The transducer operating principle, based on a fiber optic cantilever beam without any selamic mass on it, is simple and easy to construct, and the intensity-modulation and compensation techniques developed require simple electronic processing and provide very good stability and accuracy. Other advantages of the system are its robustness, compact size, and cost-effectiveness, which make it appropriate for industrial applications, specially for those where harsh environments are involved. The complete process of research and development of the sensor has been carried out, from the theoretical study of its operation principles, through the design, fabrication, experimental characterization and enhancement, to its starting up in a high-power electric station for hydrogenerator monitoring     

双光纤布拉格光栅磁场传感器

载流导线在磁场中产生的电磁力使等腰三角形悬臂梁变形,从而导致安装在悬臂梁两边的光纤布拉格光栅(FBG)的布拉格波长漂移.通过检测2个FBG的波长漂移差,得到被测磁场的磁感应强度.双FBG通过补偿温度效应,解决了FBG传感器的交叉敏感问题.垂直放置的等腰三角形悬臂梁,确保FBG在传感过程中不出现啁啾现象,又避免了自身重量和导线重量对测量结果的影响,从而减少了测量误差.该系统传感灵敏度为1.11 nm/T,与理论值的相对误差为4.31%,结果表明,该传感器结构是可行的.     

太赫兹辐射的多重反射光杠杆探测方法

提出了一种新型的微光学太赫兹辐射探测方法,以双材料微悬臂梁结构热探测方法为基础,通过多重反射光杠杆系统测量微结构的纵向微位移,从而实现太赫兹辐射量的测量。多重反射光杠杆探测方法微位移理论分辨率小于1 nm。搭建了微位移测量系统,实验结果表明,测试系统理论分辨率小于4 nm,实际分辨率优于10 nm。给出了基于该方法的太赫兹探测器设计方案和参数。因其具有良好的抗空气扰动和光束串扰能力,可以在常温下工作,适用于非制冷、实时、低成本、微小型化的太赫兹探测器和阵列式成像设备。     

固定载荷下光纤光栅应变传感阵列检测裂缝悬臂梁损伤的研究

介绍了光纤光栅分布式传感原理,推导了悬臂梁受载荷时的应变计算公式,以金属悬臂梁为研究对象,以光纤光栅应变传感阵列为传感工具,实验研究了固定载荷下裂缝悬臂梁的光纤光栅检测的新方法.金属悬臂梁上光纤光栅应变传感阵列粘贴的位置和预制裂纹的位置由有限元模拟确定,固定载荷的加载是在金属悬臂梁的自由端悬挂标准砝码.记录金属悬臂梁在无损伤、一条裂缝、两条裂缝和三条裂缝的光纤光栅应变传感阵列检测到的实验数据,以无损伤的实验数据为初始数据,分别与有损伤的实验数据进行比较,得到悬臂梁在各个损伤情况下的应变变化量,根据应变变化量的不同,确定出悬臂梁上损伤的位置.     

Sensitivity enhancement of a flexible MEMS strain sensor by a field effect transistor in an all organic approach

We report a low-cost piezoresistive nanocomposite based organic micro electro mechanical system (MEMS) strain sensor that has been combined to an organic field effect transistor (OFET) with the objective of amplifying the sensitivity of the sensor. When the MEMS cantilever is strained by a mechanical deflection, the resulting variation of resistivity influences the gate voltage (V_GS) of the OFET and, hence, changes the drain current (I_DS) of the transistor. The present combination allows an enhancement of sensitivity to strain by a factor 3.7, compared to the direct detection of resistance changes of the nanocomposite. As a consequence, a low limit of detection of 24 ppm has been estimated in terms of strain transduction efficiency. Furthermore, the organic microsystem exhibits a short response time and operates reversibly with an excellent robustness.