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1.
以MEMS滤波器中的MEMS开关牺牲层的工艺为例,通过同时运用聚酰亚胺和正胶作为牺牲层材料的方法,避免了牺牲层单独使用聚酰亚胺做材料难于去除,或单独使用光刻胶做材料,叠层旋涂光刻胶时会出现龟裂的缺点.改善了牺牲层固化和刻蚀的效果,减小了刻蚀的时间.此研究应用在表面微细加工工艺中,对MEMS加工工艺具有一定的参考价值.  相似文献   

2.
制作了一种以聚酰亚胺作为牺牲层的低下拉电压开关,聚酰亚胺牺牲层采用反应离子刻蚀(RIE)工艺进行刻蚀。研究了刻蚀功率对刻蚀时间的影响,检验了不同刻蚀功率与刻蚀时间组合条件下开关梁的结构完整性,优化了该RIE工艺。实验结果表明,聚酰亚胺牺牲层的去除效果较好,其侧向刻蚀率为1.3 μm/min。最终获得了具有2 μm以下间隙、结构完整的MEMS开关梁。  相似文献   

3.
RF MEMS工艺中牺牲层的去除方法研究   总被引:1,自引:0,他引:1  
陶佰睿  苗凤娟 《微电子学》2007,37(4):511-514
研究了MEMS开关聚酰亚胺牺牲层的去除,通过添加少许碳粉,能够减少刻蚀时间。讨论了在这种刻蚀情况下刻蚀温度和刻蚀时间之间的关系。此研究应用在表面微细加工工艺中,对MEMS加工具有重要的参考价值。该研究还可应用于RF MEMS开关、可调电容、高Q值悬臂电感、MOSFET等制造工艺中。  相似文献   

4.
目前,现代化半导体制造工业的工艺技术不仅需要简化操作,经济易行,而且还应是高可靠和高性能的。最近推出的新系列光敏性聚酰亚胺产品同时具有聚酰亚胺的高温稳定性和负性光刻胶性能的特点。由于这类聚酰亚胺具有感光性,因此使用时不需单独进行光刻,使用者不需多次操作就能在聚酰亚胺膜上形成精细的微电路图形。聚酰亚胺之所以在微电子工业中引起人们的极大兴趣,是由于它具有介电常数低、高温稳定性好及理想的平坦性等优点。其耐热温度可达400℃。表Ⅰ列出了一种经充分固化后的光敏性聚酰亚胺的典型物理参数。  相似文献   

5.
大功率晶体管刻槽与钝化工艺研究   总被引:1,自引:1,他引:0  
万积庆  廖晓华 《半导体学报》1989,10(10):775-780
本文介绍一种光刻刻蚀造型和聚酰亚胺钝化方法.这一新方法称耗尽层刻蚀,它可以使平面型晶体管达到理想击穿电压,而只需用负角斜面所占面积的一部份,且其实际击穿电压取决于对刻蚀深度的细心控制. 实验证明:采用这一新方法可以改善功率晶体管的击穿特性;减少低压击穿;抑制小电流H_(FE)退化;减小表面漏电和改善高温反向特性.  相似文献   

6.
在100℃、150℃、200℃和270℃下固化得到四种聚酰亚胺薄膜,随着固化温度的提高,聚酰亚胺薄膜的残留溶剂量减少,表面粗糙度增大、玻璃化转变温度显著提高.采用波长355nm的紫外脉冲激光,在四种聚酰亚胺薄膜表面成功制备了纳米微条纹结构,观察到微结构的形成分为孵化期和自增长期.随着固化温度的提高,条纹形成的孵化期明显延长.在34 mJ/cm2激光强度下,100℃固化的聚酰亚胺薄膜表面200个脉冲后就能够观察到比较清晰的条纹结构;而150℃和200℃下固化得到的聚酰亚胺薄膜在此时只能观察得到孵化期的不规则结构,在300个脉冲以后才能形成较稳定的条纹结构;而270℃下固化得到的聚酰亚胺薄膜在700个脉冲以后才能观察到清晰条纹结构的形成.随着固化温度的提高,薄膜承受高能量激光的能力增强.当激光强度在22 mJ/cm2~98 mJ/cm2之间时,能够在100℃固化的聚酰亚胺薄膜得到微条纹结构,当激光强度大于98 mJ/cm2时,100℃固化的聚酰亚胺薄膜表面的结构完全被破坏,但仍能够在固化温度大于150℃的薄膜表面得到微条纹结构,并且随着激光能量的增大,条纹周期下降.(PH4)  相似文献   

7.
基于光刻版的无留膜紫外纳米压印技术研究   总被引:1,自引:0,他引:1  
针对纳米压印光刻技术中压印脱模后的留膜去除问题,提出了一种基于光刻版的无留膜紫外纳米压印技术.采用传统的光刻版作为紫外压印模版,由于模版上铬层的遮蔽作用.使得铬层下面的光刻胶不被曝光,从而可以轻易地被去除.实验结果表明,该技术综合了压印与光刻各自的优点,可以获得无留膜厚度的压印图形,省去了压印后的留膜刻蚀工艺.从而避免了由于留膜厚度不均匀所带来的过刻蚀或欠刻蚀的问题.  相似文献   

8.
<正> 在硅器件和集成电路生产中,广泛采用金属膜(如Al,Au等)做电接触的互连线,常规的刻蚀方法是采用化学溶液腐蚀,叫湿法.本文报道了一种新的金属膜干法刻蚀技术——气相刻蚀.图1是该技术的刻蚀反应室,整个系统由一个带有加热器的反应室和输入反应气体的装置组成.刻蚀前后的工序与常规光刻技术相似,但曝光显影后无需坚膜即可放入反应室中,在一定温度和气体流量下完成刻蚀.实验发现,通过选择输入适宜  相似文献   

9.
多层高深宽比Si深台阶刻蚀方法   总被引:1,自引:1,他引:0  
通过干法刻蚀,在Si衬底上制备出高深宽比的台阶结构是MEMS加工的基础工艺之一。多层台阶的刻蚀,是一种重要的折线断面制备方法,使实现结构更加复杂的器件成为可能。利用LPCVD生长1μm厚SiO2作为钝化层,围绕多层台阶掩膜的制备方法和移除方法展开实验,以3层台阶为例,开发出一套使用一块光刻版制造任意宽度的台阶掩膜的方法。该方法节约成本、操作简便、重复性好,为加工复杂的三维结构提供了一种新的手段。另外,针对在深刻蚀过程中残留的掩膜会破坏Si台阶完整性的问题,研究了刻蚀过程中SiO2掩膜的去除方法对台阶的表面形貌造成的影响。通过实验发现,采用干湿腐蚀结合的方法可以有效地去除台阶掩膜,获得良好的Si深台阶结构。  相似文献   

10.
简讯     
为了改善聚酰亚胺树脂钝化工艺中聚酰亚胺树脂与半导体以及金属表面的粘附性问题,不久前日本富士通有限公司提出了一种新的方法来解决这一问题.其具体做法是:(1)在刻铝后的片子上涂聚酰亚胺树脂前,先涂一层正性光刻胶;(2)对正性光刻胶进行高温热处理,(这时需用N_2保护)使之趋于热稳定;(3)把聚酰亚胺树脂涂在正性光刻胶之上,这样就把正性光刻胶做为永久层保留下来;(4)对聚酰亚胺树脂进行高温热处理,使之固化.(5)光刻引线孔,去掉引线孔处的聚酰亚胺树脂,露出压焊点.由于在片子表面与聚酰亚胺树脂之间加入了一层正性光刻胶的过渡层,从而使聚酰亚胺树脂与表面的粘附性大大提高.  相似文献   

11.
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.  相似文献   

12.
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's.  相似文献   

13.
The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.  相似文献   

14.
Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.  相似文献   

15.
The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.  相似文献   

16.
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.  相似文献   

17.
Waveguide multilayer optical card (WMOC) is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling & processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic (VB) language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.  相似文献   

18.
It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.  相似文献   

19.
The effect of laser microbeam trapping the bioparticles has been appfied widely in the biology .However the micromechanism of the acting that realizes the laser-microbeam trapping bioparticles is still lacking. In this paper ,the act microchenism of the gradiant force of laser microbeam for the bioparticles is analysed by means of quantum theory ,The result accords with our experiment.  相似文献   

20.
In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal (200) (2d = 0.4027 nm) is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line(w), the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line(x), the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines(y), the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line(z) in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line(q) in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution(λ/△ 2) is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.  相似文献   

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