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1.
论述了气体摆的机理,分析了密闭腔中自然对流气体的浮升力及浮升力与温度变化的关系式.该文给出了二维微机械气体摆式加速度计与倾角传感器的结构原理和信号处理电路,并通过对实际制作的两维微机械气体摆式加速度计和倾角传感器样机进行测试.结果表明,在±7 g和±25°时,两维微机械加速度计和微机械倾角传感器的非线性度均小于1%FS.  相似文献   

2.
全方位气体摆式倾角传感器的结构原理   总被引:1,自引:1,他引:0  
介绍了全方位气体摆式倾角传感器的敏感原理,并对几种敏感元件的结构设计方案进行了详细的分析。在影响传感器主要性能的基础上,比较了不同敏感元件的优劣,找出最合适的敏感元件结构设计,最后通过对实际制作的全方位倾角传感器进行测试,表明所介绍的全方位气体摆式倾角传感器的灵敏度达到0.1°,方位角测量范围达到360°,倾斜角度测量范围可达到25°,达到了预期的设计目的。  相似文献   

3.
研究了气体摆式水平姿态传感器的工作原理、结构、信号获取电路及补偿技术。采用铂电阻丝作为热源,在密闭腔中使气体产生自然对流,用硬件电路和数字化软件补偿技术提取载体姿态信号并进行处理。研制出测量范围为±45°,非线性度小于1%FS,分辨率小于0.01°的气体摆式水平姿态传感器。  相似文献   

4.
研制了一种压电射流倾斜仪,它由一个压电射流角速率传感器和一个气体摆式倾角传感器组成。该倾斜仪能克服外界短周期干扰加速度时倾角测量的影响,并具有成本低、可靠性高等特点。  相似文献   

5.
气体摆式倾角传感器敏感机理的有限元分析   总被引:5,自引:0,他引:5  
解释了气体摆式倾角传感器的敏感机理。采用有限元方法,利用ANSYS-FLOTRAN CFD软件,通过建模、划分网格、加载和求解等途径,计算了在不同倾斜状态下二维密闭腔中两点热源引起的对流场。计算结果表明:在水平状态时,两热源处的气流速度相等,两热电阻丝上的电流相等,电桥电路输出为零;在倾斜状态下时,两热源处的气流速度之差随着倾斜角度而变化,引起两热电阻丝上电流之差也随之变化,电桥输出一个对应于倾斜角度的电压。有限元计算方法为气体摆式倾角传感器的优化设计,开辟了一条有效的研究途径。  相似文献   

6.
密闭腔中自然对流气体摆特性的有限元分析   总被引:3,自引:0,他引:3  
论述了采用有限元法分析密闭腔中自然对流气体的摆特性。利用ANSYS-FLOTRAN CFD软件,通过建模、划分网格、加载和求解等途径,计算了在不同倾斜状态下二维密闭腔中点热源引起的对流场和温度场。结果表明,在浮升力作用下,二维密闭腔中气流的方向总是垂直向上,有摆的特性。密闭腔倾斜时,腔体中各点处的温度分布随倾斜角度而变化,气体摆式倾角传感器就利用这一特性敏感倾斜角度。  相似文献   

7.
介绍了卟啉有机气体传感器的工作原理,基于计算机图像处理技术,通过制作敏感阵列、建立图像数据库,以及设计有效的图像识别算法,将传感器对检测气体的颜色响应转变成可处理的图像信号,实现了对多种有机气体的有效识别。  相似文献   

8.
抗加速度干扰的气流式水平姿态传感器的研究   总被引:1,自引:1,他引:0  
提出了一种能够抗加速度干扰的气流式水平姿态传感器。根据气流式倾角敏感元件和气流式倾角敏感元件的输出特点,建立了抗加速度干扰的数学模型;根据抗加速度干扰的数学模型,设计了抗加速度干扰的程序,实现了载体振动、角振动和摇摆等在运动状态下抗加速度干扰的目的,抗加速度干扰能力在95%以上。该传感器不仅能够进行静态倾角测量,而且能够抗动态情况下加速度对摆式倾角传感器的干扰。  相似文献   

9.
简述气流式惯性器件的国内外现状,压电射流速率陀螺与气体摆式线性加速度传感器的原理、结构、性能和用途。文中提出该惯性器件的关键技术及实用化的技术途径。  相似文献   

10.
消除环境温度对倾角传感器性能影响的方法   总被引:2,自引:1,他引:1  
在气流式倾角传感器的研制过程中,环境温度对传感器性能有不可忽视的影响。根据气流式倾角传感器的敏感机理和流动相似律,设计了一种温度补偿电路,使环境温度与传感器内部热源温度之差保持不变,从而消除环境温度对传感器性能的影响。试验结果表明,这种方法能够实时地对气流式倾角传感器进行补偿,有效地消除了环境温度对气流式倾角传感器性能的影响。  相似文献   

11.
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.  相似文献   

12.
The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.  相似文献   

13.
Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.  相似文献   

14.
The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.  相似文献   

15.
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.  相似文献   

16.
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's.  相似文献   

17.
Waveguide multilayer optical card (WMOC) is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling & processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic (VB) language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.  相似文献   

18.
It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.  相似文献   

19.
The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.  相似文献   

20.
An insert layer structure organic electroluminescent device(OLED) based on a new luminescent material (Zn(salen)) is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn(salen)/Liq/LiF/A1/CuPc/NPD/Zn(salen)/Liq/LiF/A1. Effective insert electrode layers comprising LiF(1nm)/Al(5 nm) are used as a single semitransparent mirror, and bilayer cathode LiF(1 nm)/A1(100 nm) is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.  相似文献   

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