双声路声表面波质量传感器的研究

在LiNbO3晶片上设计并实现了一种新型的双声路延迟线型声表面波质量传感器。利用光刻工艺在每个声传播路径上构造了一个方形质量沉积区,当有物质沉积到该区时,由于质量沉积效应,声表面波的波速发生变化,使以延迟线作为反馈回路的振荡器的振荡频率发生变化,并通过这一变化反映出沉积物的质量。为了补偿温度对器件传输频谱的影响,该器件采用双声路结构,一路为传感声路,一路为参考声路。介绍了器件的设计、工艺流程和测试方法,最后对测试结果进行了分析和讨论。测试结果表明该传感器的温度系数为7Hz/°C,灵敏度为4.9×10-6cm2/g。     

S型双声路声表面波质量传感器

报道了在128°Y切割X传播方向的LiNbO3基片上设计并研制的中心频率为122MHz的S型双声路质量传感器,它能有效地克服环境温度的影响。阐述了该传感器的器件结构及设计,并采用延迟线振荡的方式对器件的性能进行测试。测试结果表明,该器件相对温度系数良好,仅约为10Hz/°C。器件的质量沉积效应灵敏度约为3.8GHz·cm2/g。     

基于MSC双声路SAW器件的设计仿真平台

利用模块化设计思想,在Matlab编程环境下实现了基于多条耦合器双声路声表面波器件的设计仿真平台。为了提高MSC双声路SAW器件的性能,该平台将多条耦合器、分裂指及假指设计方案融合到器件设计中。多条耦合器不仅实现了两个变迹换能器传递函数的乘积,而且消除了体声波对器件性能的影响。假指消除了通过变迹换能器引起的波前畸变。分裂指可以最小化换能器内部的声波反射问题。通过一个频率为203.559MHz的基于多条耦合器双声路声表面波器件的设计和实际测试结果的对比分析,证明了该设计仿真平台不仅可以进行器件版图结构的设计和模拟,而且设计平台所得到的版图和数据可以用于器件的掩膜版制作和器件封装尺寸参考。另外,该仿真设计平台可以很好地实现对器件的脉冲特性、频率响应特性的模拟和仿真。     

一种新型500 MHz声表面波氨气传感器的研究

介绍了一种新型声表面波氨气传感器的基本工作原理和设计方法,声表面波器件的振动模式为瑞利波模式,工作频率为500 MHz.聚苯胺作为敏感膜材料,电路结构采用参比-差分输出方式.通过优化声表面波器件设计、薄膜制备工艺和气路、电路设计,研制出声表面波氨气传感器,其具有灵敏度高,响应速度快和解吸附快的特点.     

声子晶体对ZnO/41°YX LiNbO3结构Love波器件性能的影响

利用三维有限元法(3D FEM)分析了Ni柱型声子晶体对(110)ZnO/41°YX LiNbO3结构Love波器件声学特性(包括相速度、机电耦合系数和质量灵敏度等)的影响。结果表明，Ni柱的引入对所激发Love波性能的影响较大，Love波1阶模式阈值提前(激发1阶模式Love波所需的导波层厚度减小到0.05)，机电耦合系数提高了约8%。同时，Ni 柱/(110)ZnO/41°YX LiNbO3结构Love波器件的质量灵敏度也得到改善，其Love波0阶和1阶模式的质量灵敏度较无Ni柱结构Love波器件分别提高了3倍和4倍。该研究结果为利用声子晶体结构实现高频声表面波器件的研制及其应用领域的拓宽提供了理论依据。     

光敏型聚酰亚胺对声表面波传输损耗的研究

采用扰动理论推导了聚酰亚胺薄膜作为声表面波的吸声材料时,声表面波的传输损耗模型。利用网络分析仪对表面涂覆厚5μm光敏型聚酰亚胺薄膜的双声路SAW传感器(中心频率165 MH z)的插入损耗进行测试,对理论模型进行了实验验证。理论结果表明,聚酰亚胺薄膜造成SAW的传输损耗和传感器的中心频率的高低、聚酰亚胺薄膜的厚度以及聚酰亚胺薄膜的宽度成正比。实验测试也证明,聚酰亚胺薄膜对声表面波造成的传输损耗和宽度成正比关系,测得传输损耗为9.5 dB/mm。     

谐振式声表面波加速度传感器特性研究

利用压电石英晶体设计并制作了一种谐振器型声表面波加速度传感器,并对其性能进行了测试和分析,特别是针对谐振式传感器的特点进行了动态性能的研究。有针对性地设计了频压转换电路,组建了动态测试系统,对该系统的适用性进行了分析和实验测试,结果表明该系统适合于待测试加速度传感器的动态性能测试,利用该系统对传感器的动态性能进行了实际测试。测试结果和进一步的理论分析表明,声表面波加速度传感器具有很高的灵敏度,其动态响应主要决定于机械结构,而与敏感机理关系不大。     

一种基于WLP封装的声表面波滤波器

以41°Y X切型铌酸锂作为基底材料,选择双T型阻抗元结构,采用晶圆级封装（WLP）技术,制作了一款相对带宽5.8%,最小插入损耗为-2.8 dB,体积为1.1 mm×0.9 mm×0.5 mm的小型化WLP封装声表面波滤波器。并研制了专用探卡,对封装后晶圆完成在线测试。测试结果表明,探卡测试结果与装配到实际电路的测试结果进行对比,两者吻合较好,解决了WLP封装声表面波滤波器测试难题。     

碳纳米管聚苯胺薄膜SAWSO2传感器的实验研究

以128°Y-LiNbO3晶体上实现的双声路声表面波(SAW)器件为载体,在器件的测量声路上制作了对SO2气体具有敏感作用的碳纳米管聚苯胺薄膜,提出了一种基于碳纳米管聚苯胺薄膜的SAW SO2气体传感器.该传感器中的双声路结构消除了因外界测量条件改变引起的测量误差,提高了传感器的可靠性和准确性.利用原位法制备的碳纳米管聚苯胺增加了SO2气体的吸附面积,提高了传感器的灵敏度.实验结果表明,基于碳纳米管聚苯胺薄膜的SAW SO2气体传感器在测量范围内对各种浓度的SO2气体具有好的响应特性;当输入体积分数为1×10-6时,传感器的响应灵敏度约为8.3 kHz,比单一聚苯胺薄膜高1.8 kHz.此外,该传感器也具有更好的线性特性.     

阻抗型无线无源声表面波传感器的研究

介绍了一种新型的阻抗负载型无线无源传感器,该传感器由声表面波器件与作为负载的外接传感器构成,采用声表面波器件进行信号传输。在工作时,外接传感器阻抗值的变化使声表面波器件反射回波特性也得到改变,通过检测该回波特性的变化,实现无线无源传感。基于耦合模模型的分析方法,得出了其级联P矩阵形式。针对电阻型和电容型两种不同类型的负载,分别对传感器进行了仿真分析和实际测试。试验结果表明,当电容型传感器作为负载时,可以以相位作为探测基准。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.     

INTEGRATION OF OPTICAL AND WIRELESS NETWORKS

正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must     

社长序言（英文）

正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-     

云计算专题（英文）

正Cloud computing is a novel computing paradigm that utilizes remote cloud resources to achieve a high-performance computation.Cloud provides infrastructure,platform and software as different on-demand services.China has made remarkable progress in cloudbased products and operating system technology.The government,enterprises and research institutions are all active in the development of cloud computing-related projects.Despite the progress,many important problems     

Call for Papers—Feature Topic,Vol.12,No.3,2015

正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful