共查询到20条相似文献,搜索用时 245 毫秒
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该文对分布柔度桥式位移放大机构的放大比、刚度特性及固有频率等静动力学性能进行了研究。首先,根据柔性梁单元的刚度矩阵建立了该放大机构的位移放大比及其输入刚度解析模型。随后根据柔性梁的变形曲线方程,通过求解变形曲线对时间的导数,得到梁上任一点速度以获得柔性梁在机构振动过程中动能表达,在此基础上,利用拉格朗日法建立了具有3个广义坐标的桥式放大机构的振动方程,并得到其工作方向的固有频率。最后利用有限元与实验方法对其动力学性能进行了测试。实验结果表明,解析计算结果与有限元分析及实验结果较吻合,证明了所建立的解析模型的准确性。 相似文献
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提出了一种应用于压电制动器的微位移放大机构,该机构以叠层压电陶瓷为驱动元件,通过基于三角形放大原理的柔性铰链放大机构,放大叠层压电陶瓷的输出位移。分析了放大机构的运动及放大机理,建立了制动系统的力学模型,并利用ANSYS软件建立机构有限元模型进行仿真,在试制样机上对其输出特性进行了实验。实验测试结果表明,该机构对叠层压电陶瓷输出位移的放大倍数为3.2倍,与有限元仿真得到的放大倍数4倍相近,一阶固有频率为1 814Hz,最大输出力为44.1N(150V电压下),且该机构线性良好、分辨率高、迟滞效应较小。 相似文献
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提出了一种基于权间隙原理的微机械数模转换器 (WGDAC) ,它与电路中的权电阻数模转换器的原理类似 ,利用间隙的长度作为比例因子 ,从而实现由二进制电压输入到模拟位移输出的转换 .给出了有限元方法分析对由热执行器阵列驱动的数模转换器的输出位移分析的结果 .为了减小误差 ,对结构作了优化设计 ,使误差不大于0 .0 0 2 μm 相似文献
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The dynamic characteristics of micro-optothermal (OT) expansion and novel OT microactuators are theoretically analysed using a heat transient model and finite element modelling thermal simulation. Three different-shaped microactuators are machined by an excimer laser micromachining system using a single layer material; first with a single OT expansion arm; second with a bi-direction microactuator (BDMA); and third with a bi-direction microswitch (BDMS). A red laser diode (650 nm) with a maximum power output of 30 mW and an adjustable frequency of 0?20 Hz is used as an irradiation light source. The experimental results show that the maximum response frequency of the OT microactuators can be at least 15 Hz, and the deflections of the BDMA (about 13 μm at 10 mW, 2 Hz) and the BDMS (about 10 μm at 8 mW, 2 Hz) are significantly magnified compared with the OT expansion (1.32 μm at 10 mW, 2 Hz) of the single arm, proving the feasibility of the enlarged bi-direction deflection/vibration of the microactuators. The expansion and deflection amplitude of the microactuators decrease as the laser frequency increases, and the experimental data and curves greatly agree with the theoretical predictions. The new method of OT microactuators can be widely applied in the fields where simple structure, easy fabrication, large displacement and wireless controlling are required. 相似文献
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Microactuators and micromachines 总被引:4,自引:0,他引:4
Fujita H. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》1998,86(8):1721-1732
Research and development in microelectromechanical systems (MEMS) have made remarkable progress since 1988, when an electrostatic micromotor the size of a human hair was first operated successfully. Since then, many types of microactuators utilizing various driving forces and mechanisms have been developed. Distinctive features of MEMS (miniaturization, multiplicity of components, and the integration of microelectronics) have led to promising application areas such as fluidic microsystems. In the future, MEMS promises to make contributions to the society of the twenty-first century in three broad areas: (1) offering easier access to information, (2) making human lifestyles more compatible with the environment, and (3) improving people's social welfare. This paper will discuss some of the technological issues pertaining to microactuators, micromachines, and the future development of MEMS 相似文献
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Reversible and Rapid Laser Actuation of Liquid Crystalline Elastomer Micropillars with Inclusion of Gold Nanoparticles 下载免费PDF全文
Xiyang Liu Renbo Wei Phong Tran Hoang Xiaogong Wang Tao Liu Patrick Keller 《Advanced functional materials》2015,25(20):3022-3032
It is highly desirable for liquid crystal elastomer (LCE) based microactuators to activate and actuate in a highly controlled fashion without perturbing the surrounding environment. To reach this goal, in this study, a novel experimental protocol is developed to successfully incorporate gold nanosphere (AuNS) and gold nanorod (AuNR) into polyacrylate based LCE elastomer to fabricate LCE/AuNR and LCE/AuNS micropillars or microactuators. The effect of gold nanoparticle inclusion has been studied by spectroscopy (UV–vis‐near‐infrared), microscopy (transmission electron microscopy), thermal analysis (differential scanning calorimetry and thermogravimetric analysis), and x‐ray scattering (wide‐angle x‐ray scattering and small‐angle x‐ray scattering). Finite element analysis is performed to examine the feasibility of utilizing the photothermal effect of AuNR/AuNS to enable photothermal actuation of LCE/AuNR and LCE/AuNS micropillars. The comparative experimental studies on the thermal and photothermal actuation behavior of the LCE, LCE/AuNS, and LCE/AuNR micropillar suggested that AuNR is an excellent candidate for developing high‐performance LCE actuators with photothermal actuation capability. With inclusion of less than 1 wt% of AuNR, the very high maximum actuation strain (30%) and rapid response (a few seconds) have been achieved in LCE/AuNR micropillar actuators under 635 nm laser irradiation. 相似文献
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Ali Maziz Cedric Plesse Caroline Soyer Claude Chevrot Dominique Teyssié Eric Cattan Frederic Vidal 《Advanced functional materials》2014,24(30):4851-4859
This paper reports results on ionic EAP micromuscles converting electrical into micromechanical response in open‐air. Translation of small ion motion into large deformation in bending microactuator and its amplification by fundamental resonant frequency are used as tools to demonstrate that small ion vibrations can still occur at frequency as high as 1000 Hz in electrochemical devices. These results are achieved through the microfabrication of ultrathin conducting polymer microactuators. First, the synthesis of robust interpenetrating polymer networks (IPNs) is combined with a spincoating technique in order to tune and drastically reduce the thickness of conducting IPN microactuators using a so‐called “trilayer” configuration. Patterning of electroactive materials as thin as 6 μm is demonstrated with existing technologies, such as standard photolithography and dry etching. Electrochemomechanical characterizations of the micrometer sized beams are presented and compared to existing model. Moreover, thanks to downscaling, large displacements under low voltage stimulation (±4 V) are reported at a frequency as high as 930 Hz corresponding to the fundamental eigenfrequency of the microbeam. Finally, conducting IPN microactuators are then presenting unprecedented combination of softness, low driving voltage, large displacement, and fast response speed, which are the keys for further development to develop new MEMS. 相似文献
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Out-of-plane polyimide (PI) electromagnetic microactuators with different geometries are designed, fabricated and tested. Fabrication of the electromagnetic microactuators consists of 10 μm thick Ni/Fe (80/20) permalloy deposition on PI diaphragm by electroplating process, electroplating of copper planar coil with 10 μm thick, bulk micromachining, and excimer laser selective ablation. They are fabricated by a novel concept to avoid the etching selectivity and residual stress problems during wafer etching. A simulation model is created by ANSYS software to analyze the microactuators. The external magnetic field intensity (Hext) generated by the planar coil is simulated by this software. Besides, to provide bi-directional and large deflection angles of the microactuators, hard magnet Fe/Pt is deposited at low temperature of 300 °C by sputtering onto the PI diaphragm to produce a perpendicular magnetic anisotropic field. This magnetic field can enhance the interaction with Hext to induce attractive and repulsive bi-directional force to provide a larger displacement. The results of the magnetic microactuators with and without hard magnetic are compared and discussed, respectively. The preliminary result reveals that the electromagnetic microactuators with hard magnet exhibit a greater deflection angle than that without one. 相似文献
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Versatile Microfluidic Platforms Enabled by Novel Magnetorheological Elastomer Microactuators 下载免费PDF全文
Shi‐Yang Tang Xuchun Zhang Shuaishuai Sun Dan Yuan Qianbin Zhao Sheng Yan Lei Deng Guolin Yun Jun Zhang Shiwu Zhang Weihua Li 《Advanced functional materials》2018,28(8)
Microfluidic systems enable rapid diagnosis of diseases, biological analysis, drug screening, and high‐precision materials synthesis. In spite of these remarkable abilities, conventional microfluidic systems are microfabricated monolithically on a single platform and their operations rely on bulky expensive external equipment. This restricts their applications outside of research laboratories and prevents development and assembly of truly versatile and complex systems. Here, novel magnetorheological elastomer (MRE) microactuators are presented including pumps and mixers using an innovative actuation mechanism without the need of delicate elements such as thin membranes. Modularized elements are realized using such actuators, which can be easily integrated and actuated using a single self‐contained driving unit to create a modular, miniaturized, and robust platform. The performance of the microactuators is investigated via a series of experiments and a proof‐of‐concept modular system is developed to demonstrate the viability of the platform for self‐contained applications. The presented MRE microactuators are small size, simple, and efficient, offering a great potential to significantly advance the current research on complex microfluidic systems. 相似文献
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微静电驱动器作为MEMS中一个重要的功能实现器,是当前MEMS中研究的热点。文章基于二维模型结合垂直平移刚度及转动刚度两方面综合考虑,对静电微驱动结构单元的面不平稳性及最大静态位移进行了研究分析。其最大静态位移与叉指间距,初始重叠长度以及弹性系数比有关,分析了理论结果并通过FEM进行验证。 相似文献
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Hirano T. Long-Sheng Fan Wen Y. Lee Hong J. Imaino W. Patanaik S. Chan S. Webb P. Horowitz R. Aggarwal S. Horsley D.A. 《Mechatronics, IEEE/ASME Transactions on》1998,3(3):156-165
Reports on the design, fabrication, and testing of an electrostatic microactuator for a magnetic hard disk drive (HDD) tracking servo. The design requirements for a microactuator are investigated. These include high Z-directional stiffness, low in-plane stiffness, high structural aspect ratio, large output force, high area efficiency, low cost, and mass batch production. An area-efficient rotary microactuator design was devised, and microactuators were successfully fabricated using innovative processing technologies. The microactuator has a structural thickness of 40 μm with a minimum gap/structure width of approximately 2 μm. Its frequency response was measured and it was determined that it can be modeled as a second-order linear system, up to the 26-kHz frequency range. Moreover, the microactuator will enable the design of a servo system that exceeds a 5-kHz servo bandwidth, which is adequate to achieve a track density of more than 25 kilotrack per inch (kTPI). The microactuator/slider assembly was also tested on a spinning disk, with its position controlled by a PID controller using the magnetic position error signal written on the disk. An accuracy of about 0.05 μm was observed when the servo controller was turned on. Continuous-time dual-stage servos were designed and simulated using the μ-synthesis technique. A sequentially designed SISO and a MIMO control design method have been shown to be capable of meeting prescribed uncertainty and performance specifications 相似文献