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1.
针对微机电系统中电热微执行器和位移放大机构都具有柔性的事实,从理论上分析了作为负载系统的柔性位移放大机构对微执行器输出位移的影响,并用有限元方法对二者的工作性能进行了仿真.结果表明,电热微执行器外接负载的刚度和执行器本身刚度的比值是影响整个组合器件性能的重要因素.最后用深层反应离子刻蚀技术(DRIE)在硅隔离衬底(SOI)上加工了电热微执行器和柔性位移放大机构,并对其进行了测试,测试结果与有限元分析结果符合得很好.  相似文献   

2.
李东明  王顺 《压电与声光》2016,38(5):717-720
基于压电陶瓷驱动的刀具微进给机构是满足精密加工的重要途径,为进一步增加微进给刀架驱动位移,在微进给刀架中增加一种柔性铰链微位移放大机构,增加压电陶瓷驱动器输出位移。该文设计了4种微位移放大机构,理论计算了静态刚度,利用ANSYS软件对4种微位移放大机构进行了建模和有限元数值仿真分析,对比了不同类型的微位移放大机构的放大倍数、负载能力和应力情况等静态特性,为优化设计刀具微进给机构打下良好基础。  相似文献   

3.
丁严  赖磊捷 《压电与声光》2019,41(4):562-565
该文设计了一种两级放大的新型柔性微夹钳结构,对其位移放大比等特性进行了研究。首先,设计了微夹钳的整体结构,第一级放大机构采用杠杆机构,第二级采用半桥式放大机构。随后,利用刚度矩阵法对微夹钳柔性机构进行建模分析,并建立了平面三自由度的振动微分方程,根据所得方程计算出了微夹钳的位移放大比等特性。最后分别利用有限元和实验方法对模型分析得到的位移放大比进行了验证。结果表明,模型分析、有限元分析及实验的结果较吻合,证明了此微夹钳柔性机构以及建模方法的可行性和有效性。  相似文献   

4.
该文对分布柔度桥式位移放大机构的放大比、刚度特性及固有频率等静动力学性能进行了研究。首先,根据柔性梁单元的刚度矩阵建立了该放大机构的位移放大比及其输入刚度解析模型。随后根据柔性梁的变形曲线方程,通过求解变形曲线对时间的导数,得到梁上任一点速度以获得柔性梁在机构振动过程中动能表达,在此基础上,利用拉格朗日法建立了具有3个广义坐标的桥式放大机构的振动方程,并得到其工作方向的固有频率。最后利用有限元与实验方法对其动力学性能进行了测试。实验结果表明,解析计算结果与有限元分析及实验结果较吻合,证明了所建立的解析模型的准确性。  相似文献   

5.
张泉  尹达一  李清灵   《压电与声光》2017,39(6):903-906
为提高压电驱动的大口径快摆镜控制精度,采用了电阻式应变传感器(SGS)和基于锁定放大信号调理方法来检测压电执行器微位移,该微位移检测电路包括集成在压电内部的电阻式SGS,前端信号调制放大电路、带通滤波去噪电路、相敏解调电路和低通滤波电路等,最后搭建系统验证并利用小波分解重构的方法对微位移信号进行噪声分析。试验结果表明,该系统检测的压电执行器微位移信号良好,噪声满足实际工程中压电陶瓷(PZT)执行器的24nm位置分辨率的要求。  相似文献   

6.
介绍了基于热膨胀效应的V型梁MEMS微执行器并联阵列结构,并对其进行结构设计、仿真和制作;为确定微执行器的结构参数同其位移和驱动力的关系,对V型悬臂梁进行了理论分析;为提高位移和驱动力,运用ANSYS对微执行器进行有限元分析,优化结构参数;根据模拟结果,采用SOI硅片和微细加工DRIE技术制作了这种V型梁微执行器并联阵列。  相似文献   

7.
提出了一种应用于压电制动器的微位移放大机构,该机构以叠层压电陶瓷为驱动元件,通过基于三角形放大原理的柔性铰链放大机构,放大叠层压电陶瓷的输出位移。分析了放大机构的运动及放大机理,建立了制动系统的力学模型,并利用ANSYS软件建立机构有限元模型进行仿真,在试制样机上对其输出特性进行了实验。实验测试结果表明,该机构对叠层压电陶瓷输出位移的放大倍数为3.2倍,与有限元仿真得到的放大倍数4倍相近,一阶固有频率为1 814Hz,最大输出力为44.1N(150V电压下),且该机构线性良好、分辨率高、迟滞效应较小。  相似文献   

8.
菱形压电驱动器是主动控制襟翼(ACF)系统实现直升机减振、降噪的关键。该文基于菱形放大机构的集中参数模型,发展了可用于负载性能计算的电路等效模型和简化模型。建立了分布式和集中式两种柔性放大机构的参数模型,并通过ABAQUS有限元进行了模型的有效性验证。对比分析了3种典型构型菱形框和压电堆的弹性变形对作动器输出位移和力的影响,揭示了其性能差异的原因。弹簧负载性能分析表明,当负载等效弹簧刚度等于作动器刚度时,作动器输出能量达到最大。  相似文献   

9.
刘清惓  黄庆安 《半导体学报》2001,22(12):1543-1545
提出了一种基于权间隙原理的微机械数模转换器 (WGDAC) ,它与电路中的权电阻数模转换器的原理类似 ,利用间隙的长度作为比例因子 ,从而实现由二进制电压输入到模拟位移输出的转换 .给出了有限元方法分析对由热执行器阵列驱动的数模转换器的输出位移分析的结果 .为了减小误差 ,对结构作了优化设计 ,使误差不大于0 .0 0 2 μm  相似文献   

10.
压电膜片的优化设计及在微泵中的应用   总被引:2,自引:0,他引:2  
王蔚  刘晓为  陈伟平  鲍志勇 《压电与声光》2006,28(2):153-155,158
压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一。该文采用ANSYS有限元软件对压电膜片结构参数和在微执行器上的装配方法进行了优化设计,得到PZT/Si,PZT/Cu压电膜片结构的优化数据,将其应用于有阀微泵的研制。经测试,微泵压电驱动效果与仿真结果一致,微泵背压可达836 Pa,流量达1.4 mL/min。  相似文献   

11.
本论文围绕微型热致动器的研制开发,对热致动方式进行较为深入研究,利用硅微细加工工艺制造出多种型热致动器,并进行了理论分析和实验测试。  相似文献   

12.
The dynamic characteristics of micro-optothermal (OT) expansion and novel OT microactuators are theoretically analysed using a heat transient model and finite element modelling thermal simulation. Three different-shaped microactuators are machined by an excimer laser micromachining system using a single layer material; first with a single OT expansion arm; second with a bi-direction microactuator (BDMA); and third with a bi-direction microswitch (BDMS). A red laser diode (650 nm) with a maximum power output of 30 mW and an adjustable frequency of 0?20 Hz is used as an irradiation light source. The experimental results show that the maximum response frequency of the OT microactuators can be at least 15 Hz, and the deflections of the BDMA (about 13 μm at 10 mW, 2 Hz) and the BDMS (about 10 μm at 8 mW, 2 Hz) are significantly magnified compared with the OT expansion (1.32 μm at 10 mW, 2 Hz) of the single arm, proving the feasibility of the enlarged bi-direction deflection/vibration of the microactuators. The expansion and deflection amplitude of the microactuators decrease as the laser frequency increases, and the experimental data and curves greatly agree with the theoretical predictions. The new method of OT microactuators can be widely applied in the fields where simple structure, easy fabrication, large displacement and wireless controlling are required.  相似文献   

13.
Microactuators and micromachines   总被引:4,自引:0,他引:4  
Research and development in microelectromechanical systems (MEMS) have made remarkable progress since 1988, when an electrostatic micromotor the size of a human hair was first operated successfully. Since then, many types of microactuators utilizing various driving forces and mechanisms have been developed. Distinctive features of MEMS (miniaturization, multiplicity of components, and the integration of microelectronics) have led to promising application areas such as fluidic microsystems. In the future, MEMS promises to make contributions to the society of the twenty-first century in three broad areas: (1) offering easier access to information, (2) making human lifestyles more compatible with the environment, and (3) improving people's social welfare. This paper will discuss some of the technological issues pertaining to microactuators, micromachines, and the future development of MEMS  相似文献   

14.
It is highly desirable for liquid crystal elastomer (LCE) based microactuators to activate and actuate in a highly controlled fashion without perturbing the surrounding environment. To reach this goal, in this study, a novel experimental protocol is developed to successfully incorporate gold nanosphere (AuNS) and gold nanorod (AuNR) into polyacrylate based LCE elastomer to fabricate LCE/AuNR and LCE/AuNS micropillars or microactuators. The effect of gold nanoparticle inclusion has been studied by spectroscopy (UV–vis‐near‐infrared), microscopy (transmission electron microscopy), thermal analysis (differential scanning calorimetry and thermogravimetric analysis), and x‐ray scattering (wide‐angle x‐ray scattering and small‐angle x‐ray scattering). Finite element analysis is performed to examine the feasibility of utilizing the photothermal effect of AuNR/AuNS to enable photothermal actuation of LCE/AuNR and LCE/AuNS micropillars. The comparative experimental studies on the thermal and photothermal actuation behavior of the LCE, LCE/AuNS, and LCE/AuNR micropillar suggested that AuNR is an excellent candidate for developing high‐performance LCE actuators with photothermal actuation capability. With inclusion of less than 1 wt% of AuNR, the very high maximum actuation strain (30%) and rapid response (a few seconds) have been achieved in LCE/AuNR micropillar actuators under 635 nm laser irradiation.  相似文献   

15.
This paper reports results on ionic EAP micromuscles converting electrical into micromechanical response in open‐air. Translation of small ion motion into large deformation in bending microactuator and its amplification by fundamental resonant frequency are used as tools to demonstrate that small ion vibrations can still occur at frequency as high as 1000 Hz in electrochemical devices. These results are achieved through the microfabrication of ultrathin conducting polymer microactuators. First, the synthesis of robust interpenetrating polymer networks (IPNs) is combined with a spincoating technique in order to tune and drastically reduce the thickness of conducting IPN microactuators using a so‐called “trilayer” configuration. Patterning of electroactive materials as thin as 6 μm is demonstrated with existing technologies, such as standard photolithography and dry etching. Electrochemomechanical characterizations of the micrometer sized beams are presented and compared to existing model. Moreover, thanks to downscaling, large displacements under low voltage stimulation (±4 V) are reported at a frequency as high as 930 Hz corresponding to the fundamental eigenfrequency of the microbeam. Finally, conducting IPN microactuators are then presenting unprecedented combination of softness, low driving voltage, large displacement, and fast response speed, which are the keys for further development to develop new MEMS.  相似文献   

16.
C.T.  P.J.  C.K.  C.C.   《Microelectronics Reliability》2006,46(8):1369-1381
Out-of-plane polyimide (PI) electromagnetic microactuators with different geometries are designed, fabricated and tested. Fabrication of the electromagnetic microactuators consists of 10 μm thick Ni/Fe (80/20) permalloy deposition on PI diaphragm by electroplating process, electroplating of copper planar coil with 10 μm thick, bulk micromachining, and excimer laser selective ablation. They are fabricated by a novel concept to avoid the etching selectivity and residual stress problems during wafer etching. A simulation model is created by ANSYS software to analyze the microactuators. The external magnetic field intensity (Hext) generated by the planar coil is simulated by this software. Besides, to provide bi-directional and large deflection angles of the microactuators, hard magnet Fe/Pt is deposited at low temperature of 300 °C by sputtering onto the PI diaphragm to produce a perpendicular magnetic anisotropic field. This magnetic field can enhance the interaction with Hext to induce attractive and repulsive bi-directional force to provide a larger displacement. The results of the magnetic microactuators with and without hard magnetic are compared and discussed, respectively. The preliminary result reveals that the electromagnetic microactuators with hard magnet exhibit a greater deflection angle than that without one.  相似文献   

17.
Microfluidic systems enable rapid diagnosis of diseases, biological analysis, drug screening, and high‐precision materials synthesis. In spite of these remarkable abilities, conventional microfluidic systems are microfabricated monolithically on a single platform and their operations rely on bulky expensive external equipment. This restricts their applications outside of research laboratories and prevents development and assembly of truly versatile and complex systems. Here, novel magnetorheological elastomer (MRE) microactuators are presented including pumps and mixers using an innovative actuation mechanism without the need of delicate elements such as thin membranes. Modularized elements are realized using such actuators, which can be easily integrated and actuated using a single self‐contained driving unit to create a modular, miniaturized, and robust platform. The performance of the microactuators is investigated via a series of experiments and a proof‐of‐concept modular system is developed to demonstrate the viability of the platform for self‐contained applications. The presented MRE microactuators are small size, simple, and efficient, offering a great potential to significantly advance the current research on complex microfluidic systems.  相似文献   

18.
微静电驱动器作为MEMS中一个重要的功能实现器,是当前MEMS中研究的热点。文章基于二维模型结合垂直平移刚度及转动刚度两方面综合考虑,对静电微驱动结构单元的面不平稳性及最大静态位移进行了研究分析。其最大静态位移与叉指间距,初始重叠长度以及弹性系数比有关,分析了理论结果并通过FEM进行验证。  相似文献   

19.
微执行器的研究与展望   总被引:3,自引:0,他引:3  
在微机电系统中,微执行器是核心部件。为了优化设计微执行器,通过对比近年来各种微执行器的研究和发展,系统地总结了线性位移微执行器所采用的驱动原理、驱动方式和应用以及存在的优缺点等。针对热执行器,提出了个人的一些见解。  相似文献   

20.
Reports on the design, fabrication, and testing of an electrostatic microactuator for a magnetic hard disk drive (HDD) tracking servo. The design requirements for a microactuator are investigated. These include high Z-directional stiffness, low in-plane stiffness, high structural aspect ratio, large output force, high area efficiency, low cost, and mass batch production. An area-efficient rotary microactuator design was devised, and microactuators were successfully fabricated using innovative processing technologies. The microactuator has a structural thickness of 40 μm with a minimum gap/structure width of approximately 2 μm. Its frequency response was measured and it was determined that it can be modeled as a second-order linear system, up to the 26-kHz frequency range. Moreover, the microactuator will enable the design of a servo system that exceeds a 5-kHz servo bandwidth, which is adequate to achieve a track density of more than 25 kilotrack per inch (kTPI). The microactuator/slider assembly was also tested on a spinning disk, with its position controlled by a PID controller using the magnetic position error signal written on the disk. An accuracy of about 0.05 μm was observed when the servo controller was turned on. Continuous-time dual-stage servos were designed and simulated using the μ-synthesis technique. A sequentially designed SISO and a MIMO control design method have been shown to be capable of meeting prescribed uncertainty and performance specifications  相似文献   

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