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1.
The gas phase reaction of Zn and H2O in a He carrier gas has been used as the basis for the chemical vapor deposition of ZnO on sapphire and MgAl spinel. Deposit characteristics were studied as a function of reactor linear gas stream velocity, Zn/H2O vapor phase ratio, temperature and substrate preparation. It was round that the substrate support can influence the surface morphology significantly and that in situ pretreatment can affect epitaxial relationships between deposit and substrate. Transparent, visually smooth deposits of (11–24) ZnO can be obtained on chemically polished (0001) sapphire at 815°C using average linear gas stream velocities, ν, of 6-12 cm/sec referenced to room temperature in conjunction with a Zn/H2O reactor input-pressure ratio of 0.02–0.09 (using Zn reactor pressures of 1.2–5.0 × 10−3 atm) . The substrates are given an H2O in situ pretreatment at 900°C prior to deposition at ν = 3 cm/sec with the partial pressure of H2O in He = 5.7 × 10 atm.  相似文献   

2.
In this paper, we demonstrate the acetylehe (C2H2) sensor with high sensitivity using a hollow-core photonic bandgap fiber (HC-PCF). Experiments for measuring C2H2 concentrations in gas mixture are performed. Using a 2 m-long HC-PCF as gas cell, the spectrum of acetylene at n1+n3 band has been measured, and the P11-branch has been selected for the purpose of sensing. A minimum detectivity of 143 parts per million by volume (ppmv) for the system configuration is estimated.  相似文献   

3.
Cubic crystalline silicon-carbon nitride (Si1−x−yCxNy) films have been grown successfully using various carbon sources by rapid-thermal chemical-vapor deposition (RTCVD). The characteristics of the Si1−x−yCxNy films grown with SiH3CH3, C2H4, and C3H8 are examined and compared by x-ray photoelectron spectroscopy (XPS) spectra, scanning electron microscopy (SEM) images, and transmission electron microscopy (TEM) patterns. The XPS spectra show that the differences of chemical composition and chemical-bonding state are co-related to the C bonding type of the different carbon source. The SEM images and TEM analysis indicate that the better Si1−x−yCxNy film can be obtained using C3H8 gas as the carbon source. In addition, correlations between the growing stages to the microstructure of the cubic-crystalline Si1−x−yCxNy films have been illustrated in detail.  相似文献   

4.
Nanocrystalline diamond (NCD) films were produced by microwave plasma-enhanced chemical vapor deposition (MPECVD) using gas mixtures of Ar, H2, and CH4. The structural properties, electron emission, and electric discharge behaviors of the NCD films varied with H2 flow rates during MPECVD. The turn-on field for electron emission at a pressure of 2.66 × 10−4 Pa increased from 4.2 V μm−1 for the NCD films that were deposited using a H2 flow rate of 10 cm3 min−1 to 7 V μm−1 for films deposited at a H2 flow rate of 20 cm3 min−1. The NCD film with a low turn-on field also induced low breakdown voltages in N2. The grain size and roughness of the NCD films may influence both the electron emission and the electric discharge behaviors of the NCD cathodes.  相似文献   

5.
Strained-layer SiGex-on-Si heteroepitaxy has been achieved by photolytic decomposition of disilane (Si2H6) and digermane (G e2H6) in an ultra high vacuum (UHV) chamber at substrate temperatures as low as 275°C. An ArF excimer laser (193 nm) shining parallel to the Si substrate was used as the UV light source to avoid surface damage and substrate heating. The partial pressures of the source gases in the reactor were chosen to vary the Ge mole fraction x from 0.06 to 0.5 in the alloy. The Si2H6 partial pressure was kept at 10 mTorr and the Ge2H6 partial pressure was varied from 0.13 to 2 mTorr with the laser intensity fixed at 2.75 × 1015 photons/cm2·pulse. To fit the Si1−xGex growth rate and Ge mole fraction data, the absorption cross section of Ge2H6 at 193 nm was set to 1 × 10−16 cm2, which is 30 times larger than that of Si2H6 (3.4 × 10−18 cm2). For Si1−xGex alloy growth, the deposition rate of Si increases with Ge mole fraction, resulting in increased Si1−xGex alloy growth rates for higher Ge content. The increase of the Si growth rate was attributed to the enhanced adsorption rate of Si2H6 pyrolytically in the presence of Ge, rather than due to photolytic decomposition reaction. The Ge mole fraction in Si1−xGex alloys can be predicted by a new model for Si and Ge pyrolytic and photolytic growth. The model describes the increased growth rate of Si1−xGex alloys due to a Ge2H6 catalytic effect during photo-enhanced chemical vapor deposition.  相似文献   

6.
Wet etch rates at 25°C for Zn0.9Mg0.1O grown on sapphire substrates by pulsed laser deposition (PLD) were in the range 300–1100 nm · min−1 with HCl/H2O (5×10−3−2×10−2 M) and 120–300 nm · min−1 with H3PO4/H2O (5×10−3−2×10−2 M). Both of these dilute mixtures exhibited diffusion-limited etching, with thermal activation energies of 2–3 kCal · mol−1. By sharp contrast, the etch rates for ZnO also grown on sapphire by PLD were much slower in similar solutions, with rates of 1.2–50 nm · min−1 in HCl/H2O (0.01–1.2 M) and 12–54 nm · min−1 in H3PO4/H2O (0.02–0.15 M). The etching was reaction limited over the temperature range 25–75°C, with activation energies close to 6 kCal · mol−1. The resulting selectivity of Zn0.9Mg0.1O over ZnO can be a high as ∼400 with HCl and ∼30 with H3PO4.  相似文献   

7.
We have studied the defect formation energies of the various native (vacancies, interstitials, and antisites) and Au defects in Hg1−xCdxTe using density functional-based total energy calculations with ultrasoft pseudo-potentials. These studies are important for infrared (IR) detection technology where the device performance can be severely degraded because of defects. To calculate formation energies, we modeled the neutral and charged defects using supercells containing 64 atoms. From the formation energies, we have determined the defect concentrations as a function of stoichiometry and temperature. We find the prevalent neutral defects to be Au at the Hg site (AuHg ), Hg vacancies (VHg ), and Te antisites (TeHg ). We have also explicitly studied charged defects and have found Te Hg 2+ , Au Hg 1− , V Hg 1− , V Hg 2− , and V Te 2+ to have low formation energies. We have identified AuHg to be the prevalent Au defect, having concentrations several orders of magnitude greater than the other Au defects. We find that the charge state of VHg is primarily (1−) or (2−) depending on the electronic chemical potential.  相似文献   

8.
Chemical–mechanical polishing of CdTe and Zn x Cd1−x Te single-crystal surfaces by bromine-evolving compositions based on aqueous solutions of H2O2(HNO3)–HBr–solvent has been investigated. The dependences of the chemical–mechanical polishing rate on the dilution of the base polishing etchant for various organic components have been determined. The surface condition after such polishing has been investigated using profilometry. The polishing etchant compositions for CdTe and Zn x Cd1−x Te single-crystal surfaces and the chemical polishing conditions have been optimized.  相似文献   

9.
We have carried out a detailed study of the relationship between the semiconducting, the superconducting, and the metallic region in the system (Tl0.5Pb0.5)Sr2(Ca1−xYx)Cu2O7. The critical density (or concentration), nc, derived from Hall measurement of the titled series compounds at which the transition from insulator to metal place can be given by the well-known Mott formula: nc 1/3aH *=0.26 where aH * is the effective Bohr orbit radius of the isolated donor or acceptor state wavefunction. We propose that the insulator-metal transition in the cuprates generally occurs at a very high hole density (nc∼1020−1021cm−3) as compared to conventional doped semiconductors (nc∼1017−1018cm−3) but rather lower than the critical densities for elemental metals (nc>1021cm−3).  相似文献   

10.
Ti me of flight mass spectrometer(TOF-MS) is verysuccessful apparatus to detect clusterions[1-3].It isknown protonatedions are easy to formedin multipho-tonionization( MPI)[4 ,5].Acetoneis the si mplest molecule in the ketones ,it isvery popularinvestigat…  相似文献   

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