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1.
介绍了用高真空中热蒸发镀膜的方法制备并五苯薄膜场效应晶体管. 作为场效应管半导体层的并五苯薄膜沉积在p型Si (100) (14.0~20.0Ω·cm)衬底上. 场效应管中并五苯薄膜厚度为70nm,源极、漏极和栅极(Au)的厚度均为50nm,绝缘层SiO2的厚度为300nm,沟道宽度为190μm,沟道长度为15μm. 用AFM表征了并五苯薄膜表面形貌,并研究了薄膜生长速率对并五苯场效应晶体管电学特性的影响. 在薄膜生长速率为024和136nm/min时,场效应管的载流子迁移率分别为2.7E-4和2.2E-6cm2/(V·s) .  相似文献   

2.
邓金祥  陈光华 《半导体学报》2006,27(z1):214-217
介绍了用高真空中热蒸发镀膜的方法制备并五苯薄膜场效应晶体管.作为场效应管半导体层的并五苯薄膜沉积在p型Si(100)(14.0~20.0 Ω·cm)衬底上.场效应管中并五苯薄膜厚度为70nm,源极、漏极和栅极(Au)的厚度均为50nm,绝缘层SiO2的厚度为300nm,沟道宽度为190μm,沟道长度为15μm.用AFM表征了并五苯薄膜表面形貌,并研究了薄膜生长速率对并五苯场效应晶体管电学特性的影响.在薄膜生长速率为0.24和1.36 nm/min时,场效应管的载流子迁移率分别为2.7×10-4和2.2×10-6 cm2/(V·s).  相似文献   

3.
介绍了用高真空中热蒸发镀膜的方法制备并五苯薄膜场效应晶体管.作为场效应管半导体层的并五苯薄膜沉积在p型Si(100)(14.0~20.0 Ω·cm)衬底上.场效应管中并五苯薄膜厚度为70nm,源极、漏极和栅极(Au)的厚度均为50nm,绝缘层SiO2的厚度为300nm,沟道宽度为190μm,沟道长度为15μm.用AFM表征了并五苯薄膜表面形貌,并研究了薄膜生长速率对并五苯场效应晶体管电学特性的影响.在薄膜生长速率为0.24和1.36 nm/min时,场效应管的载流子迁移率分别为2.7×10-4和2.2×10-6 cm2/(V·s).  相似文献   

4.
优化有机晶体的生长工艺是获得性能优良的有机场效应管(OFET)的重要基础。以热氧化后的硅片为衬底,用真空蒸镀的方法制备了有机半导体材料并五苯薄膜,通过X射线衍射和原子力显微镜对薄膜的生长晶体结构及形貌等进行了分析,讨论了薄膜制备过程中的诸多因素对晶体生长的影响。  相似文献   

5.
并五苯薄膜微结构及光谱分析   总被引:1,自引:0,他引:1  
王耀  吴沛  徐春祥  崔一平   《电子器件》2005,28(2):268-270
我们采用真空热蒸镀的方法,在60℃的SiO2衬底上生长了并五苯薄膜。通过X-射线衍射、原子力显微镜和Raman散射光谱等手段,分析了薄膜的结晶状态和微观形貌,证明了在衬底温度为60℃的条件下,可以用真空镀膜法生长出具有较高结晶度的并五苯薄膜。此外,我们讨论了并五苯薄膜的紫外一可见吸收光谱和光致发光光谱,分析了各个谱峰形成的原因。  相似文献   

6.
用化学气相淀积方法,在Si(100)衬底上生长Si1-x Gex:C合金作为缓冲层、继而外延生长了Ge晶体薄膜,用X射线衍射(XRD)、俄歇电子能谱(AES)、拉曼(Raman)衍射光谱等对所得到的样品进行了表征测量,着重研究了Si1-x Gex:C缓冲层生长温度对样品结构特征的影响.结果表明:Si1-x Gex:C缓冲层中的Ge原子浓度沿表面至衬底方向逐渐降低,其平均组分随着生长温度的升高而降低.这与较高生长温度(760~820℃)所导致的原子扩散效应相关;在Si1-x Gex:C缓冲层上外延生长的Ge薄膜具有单一的晶体取向,薄膜的晶体质量随着温度的升高而降低.  相似文献   

7.
用直流反应磁控溅射法在n Si(111)和玻璃衬底上生长高度择优取向的Zn1-xCdxO合金晶体薄膜,最佳生长温度为45 0℃(x=0 2 ) .当x≤0 6时,Zn1-xCdxO薄膜具有纯ZnO的六角结构,x =0 8时,薄膜是由ZnO六角结构晶体和CdO立方结构晶体组成的混合物.透射光谱测试表明,通过改变合金薄膜中Cd的含量,可以调节Zn1-x CdxO薄膜的禁带宽度.  相似文献   

8.
用直流反应磁控溅射法在n-Si(111)和玻璃衬底上生长高度择优取向的Zn1-xCdxO合金晶体薄膜,最佳生长温度为450℃(x=0.2).当x≤0.6时,Zn1-xCdxO薄膜具有纯ZnO的六角结构,x=0.8时,薄膜是由ZnO六角结构晶体和CdO立方结构晶体组成的混合物.透射光谱测试表明,通过改变合金薄膜中Cd的含量,可以调节Zn1-x-CdxO薄膜的禁带宽度.  相似文献   

9.
详细介绍了在SiO2和高kHfO2介质层上制备并五苯薄膜晶体管方面的研究,特别是利用原子力显微技术(AFM)和静电力显微技术(EFM)研究了并五苯分子初始生长模式,揭示了衬底形貌、表面化学性能(包括化学清洗和聚合物层修饰)对有机半导体成膜结构和薄膜场效应晶体管性能之间的关联,包括晶体管迁移率、开关比和阈值电压等;针对并五苯初始生长成核模式的差异,分析了不同岛(畴)间畴边界对载流子在有机薄膜内输运的影响,有助于理解有机半导体薄膜导电机理。通过优化和控制介电层和有机半导体薄膜层的界面化学性质,在SiO2介质层上成功制备出迁移率为1.0cm2/V.s、开关电流比达到106的OTFT器件;在高kHfO2介质层上获得的OTFT器件的工作电压在-5V以下,开关电流比达到105,载流子迁移率为0.6cm2/V.s;器件性能指标已经达到目前国际上文献报道的最好水平。  相似文献   

10.
在Si(111)衬底上采用金属有机化合物化学气相沉积(MOCVD)技术外延生长GaN薄膜,对外延生长所得GaN薄膜的晶体结构和表面形貌进行表征,并研究SiNx插入层对GaN薄膜的晶体质量和表面形貌的影响.结果表明,在Si衬底上生长GaN薄膜过程中引入SiNx插入层可使GaN薄膜的(10-12)面的X-射线回摆曲线的半峰宽(FWHM)值从974.01减小到602.01arcsec;表面凹坑等缺陷减少、表面平整度提高.可见,SiNx插入层对在Si衬底上外延生长GaN薄膜的晶体质量和表面形貌有着重要的影响.  相似文献   

11.
This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.  相似文献   

12.
We have fabricated the white organic light-emitting devices (WOLEDs) based on 4,4' -bis(2,2 -diphenyl vinyl)-1,1' - biphenyl (DPVBi) and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene (rubrene). The device structure is ITO/2T-NATA (20 nm)/NPBX (20 nm)/CBP: x%Ir(ppy)3:0.5% rubrene (8 nm)/NPBX (5 nm)/DPVBi (30 nm)/Alq(30 nm)/LiF(0.5 nm)/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris (2-phenylpyridine) iridium [Ir(ppy)3], acts as a yellow light-emitting layer, and N,N' -bis- (1-naphthyl)- N,N' -diphenyl -1, 1' -biphenyl-4,4' -diamine (NPBX) acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir (PPY)3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.  相似文献   

13.
To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.  相似文献   

14.
本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。  相似文献   

15.
Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.  相似文献   

16.
It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer (LDV).  相似文献   

17.
正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must  相似文献   

18.
正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-  相似文献   

19.
正Cloud computing is a novel computing paradigm that utilizes remote cloud resources to achieve a high-performance computation.Cloud provides infrastructure,platform and software as different on-demand services.China has made remarkable progress in cloudbased products and operating system technology.The government,enterprises and research institutions are all active in the development of cloud computing-related projects.Despite the progress,many important problems  相似文献   

20.
正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful  相似文献   

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