基于金属背支撑刻蚀技术的柔性AlGaInP/AlGaAs/GaAs三结太阳电池研制

对柔性GaAs基太阳电池的制备方法进行研究,报道了一种用于制备柔性倒置生长的AlGaInP/AlGaAs/GaAs三结太阳电池的剥离和转移方法——金属背支撑选择性湿法刻蚀技术.在GaAs/GaInP选择性腐蚀的基础上进行了GaAs衬底层的腐蚀,研究了不同类型和体积比的溶液对GaAs/GaInP/AlInP结构腐蚀的选择特性,最终选用不同配比的H2 SO4-H2 O2系腐蚀液,获得快速、可控制、重复性好的去除衬底的两步腐蚀法.原子力显微镜测试结果表明,通过此方法能够成功地将电池外延层薄膜转移到Cu衬底上,并且在剥离和转移过程中外延层薄膜没有受到损伤.柔性AlGaInP/AlGaAs/GaAs三结太阳电池的开路电压超过3.4V.     

GaAs表面旋转超声雾化清洗新技术

研究了一种新型湿法化学清洗半导体GaAs表面的方法。通过简单设计清洗工艺能使GaAs表面产生最低的损伤。GaAs表面清洗必须满足三个条件：(1)清除热力学不稳定因素和表面粘附的杂质,(2) 除去GaAs表面氧化层,(3)提供一个光滑平整的GaAs表面。本文采用旋转超声雾化方式用有机溶剂除去GaAs表面的杂质,再用NH4OH:H2O2:H2O= 1:1:10和HCl:H2O2:H2O=1:1:20顺次腐蚀非常薄的GaAs层,去除表面的金属污染,并在GaAs表面形成一个非常薄的氧化层表面,最后用NH4OH:H2O= 1:5溶液来清除GaAs表面氧化层。测试GaAs表面的特性,分别用X射线光电光谱仪、X射线全反射荧光光谱仪和原子力显微镜测试了GaAs表面氧化的组分、GaAs表面金属污染和GaAs表面形貌,测试结果表明通过旋转超声雾化技术清洗可提供表面无杂质污染、金属污染和表面非常光滑的GaAs衬底,以供外延生长。     

弱碱性抛光液中FA/O 螯合剂和H2O2对Ru CMP的影响研究

Ru作为一种新型阻挡层材料已经应用到了先进的集成电路生产中。但由于金属钌特殊的物理化学性质使其化学机械抛光(CMP)还存在很多问题。为了提高Ru的去除速率,本文研究了FA/O螯合剂和H2O2对Ru的抛光去除速率(RR)和静态腐蚀速率(SER)的影响。实验结果表明,随着H2O2浓度的增加,在抛光过程中,Ru表面形成了致密氧化层,导致Ru的抛光去除速率(RR)和静态腐蚀速率(SER)先增加后减少。通过电化学方法对Ru表面的腐蚀情况进行了分析研究。结果表明,FA/O螯合剂能通过与Ru的氧化物((RuO4)2- 和RuO4 )形成可溶性胺盐([R(NH3)4] (RuO4)2) 提高Ru 的去除速率。同时,为了降低金属Ru CMP后表面粗糙度,在抛光液中加入了非离子表面活性剂AD。     

片上太赫兹天线集成器件LT-GaAs外延转移工艺

提供了一种实现片上太赫兹天线集成器件光电导开关材料低温GaAs(LT-GaAs)外延层的转移工艺,使用HNO_3-NH_4OH-H_2O-C_3H_8O_7·H_2O溶液-H_2O_2-HCl腐蚀体系化学湿法腐蚀分子束外延(MBE)生长的外延材料,Hall测试表明MBE生长的此外延材料电阻率在106Ω·cm量级.剥离半绝缘GaAs(SI-GaAs)衬底层与Al_(0.9)Ga_(0.1)As牺牲层得到1.5μm LT-GaAs与环烯烃聚合物(COP)键合的结构.原子力显微镜(AFM)、扫描电子显微镜(SEM)、高倍显微镜形貌表征表明剥离后的结构表面平整光滑,表面粗糙度(RMS)为2.28 nm,EDAX能谱仪分析显示该结构中不含Al组分,满足光刻形成光电导开关的要求.     

GaAs表面处理及其椭圆偏振仪、俄歇电子能谱与X-光电子谱的特性测定

用椭圆偏振仪、俄歇电子能谱仪(AES)和X-光电子谱仪(XPS)等对经pH=7±0.05的H_2O_2-NH_40H溶液化学腐蚀或用NH_4OH:H_20=1:10和HCl:H_2O=1:1进行清洗后的GaAs表面残余氧化层厚度、折射率、纵向组分分布和Ga(3d)与As(3d)结合能变化等进行测定.三者实验结果对应很好.化学腐蚀后的GaAs表面有一层氧化物层,然后是氧化物与GaAs混合的过渡层,直至GaAs衬底.从NH_4OH:H_2O=1:10清洗后GaAs表面残余氧化层厚度,表面C吸附量和Ga/As的波动看,它均比用HCl:H_2O=1:1清洗为优,故用它作为GaAs在化学腐蚀后的清洗是可取的.     

一种封装后释放的准LIGA加工工艺研究

研究了一种准LIGA加工工艺.该工艺利用无氰电铸制作金结构层,采用PECVD制作的无定形硅作为牺牲层,利用二氟化氙(XeF2)干法腐蚀对材料选择性好的特点,采用先部分封装然后腐蚀牺牲层释放结构的工艺流程,避免了封装工艺对可动敏感结构造成的破坏.研究了无氰电铸结构中的应力梯度,发现应力梯度存在随时间缓慢释放的现象,利用热退火消除了结构中的应力梯度.同时还对厚胶光刻、类特氟隆防粘附层制备等关键工艺作了探讨.     

用于MEMS的选择性形成多孔硅技术的研究

提出了一套采用扩散工艺在低掺杂的硅衬底上选择性形成多孔硅牺牲层,并制作了MEMS器件结构的工艺流程,进行了工艺流水.对得到的结果进行了详细的讨论.对于KOH溶液释放多孔硅牺牲层技术进行了研究.     

用于MEMS的选择性形成多孔硅技术的研究

提出了一套采用扩散工艺在低掺杂的硅衬底上选择性形成多孔硅牺牲层,并制作了MEMS器件结构的工艺流程,进行了工艺流水.对得到的结果进行了详细的讨论.对于KOH溶液释放多孔硅牺牲层技术进行了研究.     

RF/MW MEMS开关中聚酰亚胺的牺牲层技术研究

目前,聚酰亚胺已成为MEMS开关中一种主要的牺牲层材料.在涂胶前,对聚酰亚胺进行低温和高温两步热处理,使其满足光刻的要求.光刻腐蚀后固化处理,使其固化表面平坦、耐腐蚀.显影后选择不同固化处理温度和时间,对聚酰亚胺的性质有不同的影响.MEMS开关的梁结构完成后,聚酰亚胺需通过刻蚀的方法去除.实验结果表明,固化温度小于170℃,可采用碱性溶液湿法腐蚀的方法去除;固化温度大于200℃,需采用O2等离子刻蚀方法.     

用于释放已粘连MEMS悬臂梁的超临界CO2释放工艺

在湿法腐蚀牺牲层工艺中,由于液体毛细力的作用,MEMS悬臂梁易与衬底粘连从而引起器件失效。本文提出了一套利用超临界CO2释放干燥技术释放已粘连悬臂梁的工艺流程。结合自主研发的超临界CO2半导体工艺平台,深入研究了超临界CO2释放工艺。实验结果表明该超临界CO2释放干燥工艺可以成功释放已粘连的高宽长比MEMS悬臂梁。     

A comparative investigation of the oxidation of silicon using H2/O2, TCA/O2 and HCl/O2 mixtures

The oxidation of single-crystal silicon wafers has been investigated using an industrial thermal oxidation system. The growth characteristics and electrical properties of the oxides resulting from pure hydrogen/oxygen (H₂/O₂), trichloroethane/oxygen (TCA/O₂) and hydrogen chlorid/oxygen (HCl/O₂) mixtures have been investigated and compared. The addition of both HCl and TCA to oxygen produces higher growth rates and improved electrical characteristics. It is shown that the oxidation rate for TCA/O₂ is approximately 30%–40% higher than for HCl/O₂ and that comparable electrical properties can be readily obtained. A TCA/O₂ ratio of 1 mol% gives the optimum process for VLSI applications, though 3 mol% HCl/O₂ gives comparable results. It is suggested that the overall mechanisms governing the processes are similar. However, the TCA process is a safer and cleaner alternative because it generates HCl in situ in the oxidation chamber.     

A Robust ROS Generation Strategy for Enhanced Chemodynamic/Photodynamic Therapy via H2O2/O2 Self-Supply and Ca2+ Overloading

The efficacy of cancer therapy with reactive oxygen species (ROS) as the main therapeutic medium suffers from a deficiency of oxy-substrates, for example, insufficient endogenous hydrogen peroxide (H₂O₂) in chemodynamic therapy (CDT) and inherent hypoxia in photodynamic therapy (PDT). Herein, a smart polyethylene glycol (PEG)-ylated nanosystem CaO₂@ZIF-Fe/Ce6@PEG (abbreviation as CaZFCP) is constructed to achieve H₂O₂/O₂ self-supply and Ca²⁺ overloading in tumor cells simultaneously for enhanced CDT/PDT. Under the weakly acidic tumor microenvironment, the activity components inside CaZFCP, that is, CaO₂ nanoparticles, Fe²⁺, and photosensitizer Chlorin e6 (Ce6) are released by the degradation of zeolitic imidazole framework-90 (ZIF-90). Thereinto, CaO₂ nanoparticles are further decomposed to generate H₂O₂ and O₂, which alleviates both the insufficient endogenous H₂O₂ and hypoxia in tumor area, thus enhancing the efficiency of CDT and PDT by producing more hydroxyl radicals and singlet oxygen. Furthermore, Ca²⁺ overloading induced by the decomposition of CaO₂ is available for amplifying intracellular oxidative stress, resulting in mitochondrial dysfunction, which further improves the efficacy of combined CDT/PDT. In vitro and in vivo experimental results confirm excellent tumor inhibition effect, which also provides a facile paradigm in ROS-involved cancer therapies.     

同时测量氢氧CARS光谱确定火焰温度和氢氧浓度的研究

利用YAG激光器和一台染料激光器同时测量了氢／空气预混平面火焰中氢氧CARS光谱。从氢的S（5）和S（6）支统转动线的强度比获得火焰温度，并与由氮的CARS光谱得到的温度进行了实验校验。氢和氧的浓度分别由氢的S（6）支和氧的Q支光谱求得，并利用红／空气预混平面火焰的局部热力学平衡计算对所得浓度进行了校验。温度的校验误差为4％，而氢氧浓度的校验误差分别为14％和12％。     

The sensitivity of Pt/InP Schottky barrier diode to H2 and O2

Gas sensitivity of Pt/InP Schottky barrier diode was characterized byI–V, C–V and complex impedance under different gas phase composition. The results show that the barrier height decreased when the device was exposed to a hydrogen-containing atmosphere, and the barrier height increased in an oxygen-containing atmosphere. The sensing mechanism was analyzed.     

An O2 Self‐Supplementing and Reactive‐Oxygen‐Species‐Circulating Amplified Nanoplatform via H2O/H2O2 Splitting for Tumor Imaging and Photodynamic Therapy

Conventional photodynamic therapy (PDT) has limited applications in clinical cancer therapy due to the insufficient O₂ supply, inefficient reactive oxygen species (ROS) generation, and low penetration depth of light. In this work, a multifunctional nanoplatform, upconversion nanoparticles (UCNPs)@TiO₂@MnO₂ core/shell/sheet nanocomposites (UTMs), is designed and constructed to overcome these drawbacks by generating O₂ in situ, amplifying the content of singlet oxygen (¹O₂) and hydroxyl radical (?OH) via water‐splitting, and utilizing 980 nm near‐infrared (NIR) light to increase penetration depth. Once UTMs are accumulated at tumor site, intracellular H₂O₂ is catalyzed by MnO₂ nanosheets to generate O₂ for improving oxygen‐dependent PDT. Simultaneously, with the decomposition of MnO₂ nanosheets and 980 nm NIR irradiation, UCNPs can efficiently convert NIR to ultraviolet light to activate TiO₂ and generate toxic ROS for deep tumor therapy. In addition, UCNPs and decomposed Mn²⁺ can be used for further upconversion luminescence and magnetic resonance imaging in tumor site. Both in vitro and in vivo experiments demonstrate that this nanoplatform can significantly improve PDT efficiency with tumor imaging capability, which will find great potential in the fight against tumor.     

XF—884酸性蚀刻氯酸钠取代双氧水的优势

前言:在铜箔积层板PCB或PWB制造中,以化学反应方式将不要部分的铜箔除去,使之形成回路图形即电路者,称为蚀铜。抗蚀剂图形,可以图形转移方式或网板印刷方     

TEOS-H_2O等离子CVD新技术

介绍了用正硅酸乙酯和水混合物进行等离子体增强化学汽相淀积制备氧化硅膜的原理和工艺, 对膜质量进行了分析和讨论     

Synthesis of MoSe2/CoSe2 Nanosheets for NIR-Enhanced Chemodynamic Therapy via Synergistic In-Situ H2O2 Production and Activation

Currently, the limited intratumoral H₂O₂ level restricts the development of chemodynamic therapy (CDT). Herein, MoSe₂/CoSe₂@PEG nanosheets are prepared to reveal NIR-photocatalytic H₂O₂ generation to insure the intracellular H₂O₂ supplement. The formation mechanism is investigated, showing the dissolved O₂ and photo-excited electrons to determine H₂O₂ production via sequential single-electron transfer process. The experimental data and density functional theory calculation further display their typical-II heterostructure, which possesses the effective charge separation and nearly four times H₂O₂ generation than MoSe₂@PEG. In addition, the nanocomposites also reveal the peroxidase/catalase activity, making the in-situ H₂O₂ activation and ·OH generation. And, the O₂ production derived from catalase-mimic activity not only relieves hypoxia but also offers the source for H₂O₂ production. Because of the decreased resistance for charge transfer, MoSe₂/CoSe₂@PEGs also reveal more than three times enzyme-activity for MoSe₂@PEG. With the narrow band gap and high NIR-harvest, MoSe₂/CoSe₂@PEG exhibits the great photothermal converting ability (62.5%). MoSe₂/CoSe₂@PEG reveals the novel biodegradation, and most of them can be eliminated via urine and feces within 2 weeks. Here, the computed tomography/magnetic resonance imaging/photothermal imaging and the synergistic photothermal therapy/CDT treatments further make sure potential application on anticancer.     

H2O2催化多孔硅的光致发光研究

采用H2O2催化的电化学法制备多孔硅,用原子力显微镜观察了样品的形貌,并测量了在不同电流密度下制得的多孔硅和在不同氧化时间高温氧化的多孔硅的光致发光谱。实验结果表明,采用H2O2催化的电化学法制备的多孔硅与常规电化学法制备的多孔硅相比,其表面更平整、细密、均匀。随着电流密度和氧化时间的增加,多孔硅的发光谱峰位蓝移。此实验结果符合量子限制模型。     

钙铝硼硅玻璃/氧化铝复合材料性能研究

通过高温熔融法制备的CaO-Al2O3-B2O3-SiO2玻璃粉末与α-Al2O3粉末按照质量分数50:50混合,烧结制备了钙铝硼硅玻璃/氧化铝系低温共烧陶瓷材料,研究了烧结温度对复合材料的物相组成、微观结构、力学性能及介电性能的影响.结果表明,875℃烧结制备的复合材料性能最佳,抗弯强度为164 MPa,介电常数为7.8,介电损耗为0.001 3,热膨胀系数为5.7×10-6/℃,具有良好的综合性能,可用作低温共烧陶瓷基板材料.