长线列CMOS图像传感器的性能优化设计

设计了一种基于电容反馈跨阻放大器(CTIA)的长线列CMOS图像传感器。为减小器件功耗和面积,采用基于单端四管共源共栅运算放大器。为提高信号读出速率,采用没有体效应的PMOS源跟随器,同时减小PMOS管的宽长比,有效减小了输出总线寄生电容的影响。在版图设计上,采用顶层金属走线,降低寄生电阻和电容,提高了长线列CMOS图像传感器的读出速率和输出线性范围。采用0.35μm 3.3V标准CMOS工艺对传感器进行流片,得到器件像元阵列为5×1 030,像元尺寸为20μm×20μm。测试结果表明:该传感器在积分时间为1ms、读出速率为4MHz的情况下工作稳定,其线性度达到98%,线性动态范围为76dB。     

高光谱成像用高帧频CMOS图像传感器北大核心

针对高帧频、全局曝光和光谱平坦等成像应用需求,设计了一款高光谱成像用CMOS图像传感器。其光敏元采用PN型光电二极管,读出电路采用5T像素结构。采用列读出电路以及高速多通道模拟信号并行读出的设计方案来获得低像素固定图像噪声(FPN)和非均匀性抑制。芯片采用ASMC 0.35μm三层金属两层多晶硅标准CMOS工艺流片,为了抑制光电二极管的光谱干涉效应,后续进行了光谱平坦化VAE特殊工艺,并对器件的光电性能进行了测试评估。电路测试结果符合理论设计预期,成像效果良好,像素具备积分可调和全局快门功能,最终实现的像素规模为512×256,像元尺寸为30μm×30μm,最大满阱电子为400 ke^(-),FPN小于0.2%,动态范围为72 dB,帧频为450 f/s,相邻10 nm波段范围内量子效率相差小于10%,可满足高光谱成像系统对CMOS成像器件的要求。     

面向超大面阵CMOS图像传感器的列总线自加速建立方法研究

在超大面阵CMOS图像传感器（COMS Image Sensor,CIS）中，由于像素面阵输出的列总线上存在超大的寄生电阻电容，列总线信号建立速度的主导因素发生改变，严重影响了读出速度.为了解决这一问题，本文提出了一种可应用于超大面阵CIS列并行读出机制的列总线自加速建立方法，基于电流增益增强理论，在不引入额外总线的前提下，通过对模拟信号建立过程的实时跟踪，加快列总线信号的变化过程，在列总线终端实现了自加速，将超长列总线的读出速度提升了一个数量级. 55 nm工艺下的测试与实验结果显示，采用本文提出的方法后，在亿级像素规模CIS列总线引入的寄生电容与寄生电阻分别为47 pF和20 kΩ的情况下，光电信号从像素节点到列级电路采样节点的上升建立时间由4μs缩短至790 ns，下降建立时间由22.43μs缩短至1.17μs，将亿级像素规模的CMOS图像传感器帧频提升至100帧，压缩了相关双采样的取样间隔时间，从而拓宽了噪声抑制的频率范围.本文方法实现了在保持低噪声和高速读出的同时，单列功耗仅有6.6μW.     

基于可编程开窗IP核的低功耗读出电路研究EI北大核心CSCD

红外焦平面探测器正朝着更大规模、高帧频、高集成度的方向发展。在高速目标跟踪探测、感兴趣区域成像等应用场景,需要解决高速读出时面临的功耗较高的难点。文中提出了一种数字IC的可编程开窗IP核设计,并通过采用列级分时选通技术,实现对640×512读出电路列模块的超低功耗优化。像素单元电路包含CTIA输入级、双采样保持结构和跟随输出,折衷优化了面积、噪声和增益等因素。相较于传统用门级电路定制设计实现的开窗方式,可编程开窗数字IP核对于不同面阵规格具有良好的可扩展性,并且可以借助后端软件综合优化版图布局,从而缩短设计周期。实际研制中采用0.18μm标准CMOS工艺完成了中心距15μm的640×512读出电路设计及流片验证,并与640×512元短波红外InGaAs探测器芯片进行了耦合测试,结果表明分时选通技术有效降低了列级电路功耗,电路读出总功耗小于80 mW,列级功耗仅为15 mW,读出速率达到15 MHz,可编程开窗IP核功能正常,可以实现指定区域的开窗功能。     

一种用于CMOS图像传感器的Column-Level模数转换器

设计了一种用于CMOS图像传感器(CIS)的column-level模数转换器(ADC)。它由一种新型斜坡发生器构成,具有分辨率可调的特点,而且以简单的结构实现了高精度和低功耗,占用较小的版图面积。基于0.35μm2P4M标准CMOS工艺,8bit ADC转换时间约50μs,最大线性误差小于±0.5LSB。在分辨率为640×480pixel的CIS中,每列共用1个比较器,提高了传感器的吞吐速率,帧频约40fps;3.3V电压下ADC总功耗不超过27mW,占用版图面积约0.5mm2。     

基于FPGA的高速大面阵成像系统设计

为了获取高帧频大面阵图像数据,设计了一套基于FPGA结合CMOS图像探测器的成像系统。首先,介绍了国产GSENSE6060图像探测器的特性和设计方法;然后提出了成像系统的供电等硬件设计;最后,重点研究了基于Xilinx公司Virtex-5型FPGA的CMOS图像数据训练算法,保证了数据采集的准确性。试验结果表明,所设计的成像系统在6144*6144分辨率时,帧频达20f/s,图像数据峰值速率16Gbps,且读出噪声优于4e-。目前,系统已经工程应用,其功能、性能满足了项目实际需要。     

一种用于电容型体硅微陀螺的低噪声读出电路芯片

读出电路位于微传感器系统信号通路的最前端,是决定系统性能的关键因素。本文针对音叉式体硅微陀螺的具体应用,提出了一种低噪声电容读出电路,芯片采用斩波技术降低了电路的低频1/f噪声、失调电压以及参考电压失配的影响,提高了读出电路的分辨率和动态范围;提出一种噪声电荷转移的分析方法,用于分析和预测读出电路的噪声性能;建立一种简化的微陀螺传感器仿真模型,用于模拟读出电路对微传感器的响应。读出电路在0.35 m 2P4 M 标准CMOS工艺下设计流片,并与微传感器进行了联合应用,芯片面积为22.5 mm2,在5 V电源电压,100 kHz的时钟频率下,实现了4 aF的电容分辨率和94 dB的动态范围。     

基于AM41V4传感器的高清高速CMOS相机系统设计

为满足国防、科研及工业中快速变化场景拍摄时,更高帧频、更大分辨率的要求,研发了一款高清高速相机。该文介绍了高分辨率高帧频CMOS图像传感器芯片AM41V4的功能与特点,并基于该芯片设计了一套高分辨率高帧频的相机系统,该系统使用FPGA作为整个系统的时序控制核心,以DDR动态存储器作为成像暂存器,可以依据试验场合的具体拍摄要求实现灵活多变的工作模式。相机系统在图像分辨率为1 920×1 080时帧频可达1 000fps,并具有实时监视功能。该系统具有拍摄速度快、成像清晰、高性能、灵活性好等优点,适用于高速运动目标的快速捕获与拍摄记录。     

高光谱成像用高速CMOS图像传感器设计

针对高帧频、全局曝光、通道数可选等成像应用需求,提出了一种高光谱成像用CMOS图像传感器,重点分析了8T像素结构和读出电路的设计方案与电路原理,完成了芯片的整体仿真和流片验证。结果表明:设计符合预期,成像效果良好,像素具备较高的满阱和全局快门功能,读出电路实现了输出通道数可选功能,同时保证了模拟信号在大面阵、低输出通道数条件下的高速、低噪声输出,最终实现的像素阵列为2048×256,像素尺寸为24μm×24μm,单通道最大输出频率为40×10⁶pixel/s,最高帧频为4000f/s,可满足高光谱成像系统对图像传感器的需求。     

CMOS图像传感器内置电源模块的研究与设计

电源模块是CMOS图像传感器芯片的一个重要组成部分,其性能直接影响着芯片的功耗以及所拍摄画面的质量.文中从CMOS图像传感器的像素结构和列读出电路原理出发,提出了一种低功耗、可编程控制的电源模块设计思想,并采用0.18μm CMOS工艺完成了电路设计.Hspice仿真结果表明,电源模块在启动70ms后能够生成稳定、正确的电压,其平均功耗小于1mW.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.