AlGaAs／InGaAs功率PHEMT用异质材料的计算机优化与器件实验结果

借助一新的工艺模拟与异质器件模型用ＣＡＤ软件──ＰＯＳＥＳ（Ｐｏｉｓｓｏｎ－ＳｃｈｒｏｅｄｉｎｇｅｒＥｑｕａｔｉｏｎＳｏｌｖｅｒ），对以ＡｌＧａＡｓ／ＩｎＧａＡｓ异质结为基础的多种功率ＰＨＥＭＴ异质层结构系统（传统、单层与双层平面掺杂）进行了模拟与比较，确定出优化的双平面掺杂ＡｌＧａＡｓ／ＩｎＧａＡｓ功率ＰＨＥＭＴ异质结构参数，并结合器件几何结构参数的设定进行器件直流与微波特性的计算，用于指导材料生长与器件制造。采用常规的ＨＥＭＴ工艺进行ＡｌＧａＡｓ／ＩｎＧａＡｓ功率ＰＨＥＭＴ的实验研制。对栅长０．８μｍ、总栅宽１．６ｍｍ单胞器件的初步测试结果为：ＩＤｓｓ２５０～４５０ｍＡ／ｍｍ；ｇｍ０２５０～３２０ｍＳ／ｍｍ；Ｖｐ－２．０－２．５Ｖ；ＢＶＤＳ５～１２Ｖ。７ＧＨｚ下可获得最大１．６２Ｗ（功率密度１．０Ｗ／ｍｍ）的功率输出；最大功率附加效率（ＰＡＥ）达４７％。     

2英寸GaAs快速热退火技术研究

为配合２０００门ＧａＡｓ超高速门阵列及ＧａＡｓ超高速分频器等２英寸ＧａＡｓ工艺技术研究，开展了２英寸ＧａＡｓ快速热退火技术研究。做出了阈值电压为０～０．２Ｖ，跨导大于１００ｍＳ／ｍｍ的Ｅ型ＧａＡｓＭＥＳＦＥＴ和夹断电压为－０．４～－０．６Ｖ，跨导大于１００ｍＳ／ｍｍ的低阈值Ｄ型ＧａＡｓＭＥＳＦＥＴ。     

2英寸GaAs快速热退火技术研究

为配合２０００门ＧａＡｓ超高速门列及ＧａＡｓ超高速分频器等２英寸ＧａＡｓ工艺技术研究，开展了２英寸ＧａＡｓ快速热退火技术研究，做出了阈值电压为０～０．２Ｖ，跨导大于１００ｍＳ／ｍｍ的Ｅ型ＧａＡｓＭＥＳＦＥＴ和夹断电压为－０．４～－０．６Ｖ，跨导大于１００ｍＳ／ｍｍ的低阈值Ｄ型ＧａＡｓＭＥＳＦＥＴ。     

P埋层技术研究

介绍了在Ｓｉ￣＋注入的ｎ－ＧａＡｓ沟道层下面用Ｂｅ￣＋或Ｍｇ￣＋注入以形成ｐ埋层。采用此方法做出了阈值电压０～０．２Ｖ，跨导大于１００ｍＳ／ｍｍ的Ｅ型ＧａＡｓＭＥＳＦＥＴ，也做出了夹断电压－０．４～－０．６Ｖ、跨导大于１００ｍＳ／ｍｍ的低阈值Ｄ型ＧａＡｓＭＥＳＦＥＴ。     

X波段1.5W GaAs MMIC研究

介绍了Ｘ波段１．５Ｗ ＧａＡｓ ＭＭＩＣ的设计,制作和性能测试,包括ＭＥＳＦＥＴ大信号模型的建立,电路ＣＡＤ优化,ＤＯＥ灵敏度分析及Ｔ型栅工艺研究等。微波测试结果为：在频率９．４￣１０．２ＧＨｚ下,输出功率大于３２ｄＢｍ,增益大于１０ｄＢ。     

X波段1.5WGaAsMMIC研究

介绍了Ｘ波段１．５Ｗ ＧａＡｓＭＭＩＣ的设计、制作和性能测试,包括ＭＥＳＦＥＴ大信号模型的建立、电路ＣＡＤ优化、ＤＯＥ灵敏度分析及Ｔ型栅工艺研究等。微波测试结果为： 在频率９．４～１０．２ＧＨｚ下, 输出功率大于３２ｄＢｍ , 增益大于１０ｄＢ。     

在1．8GHz频率下功率密度为2．8W／mm的4H－SiCMESFET

本文论述了使用４Ｈ－ＳｉＣ衬底及外延层制作ＭＥＳＦＥＴ的方法，测得了栅长为０．７μｍ、栅宽为３３２μｍ的ＭＥＳＦＥＴ的直流、Ｓ参数和输出功率特性。当Ｖｄｓ＝２５Ｖ时，电流密度约为３００ｍＡ／ｍｍ，最大跨导在３８～４２ｍＳ／ｍｍ之间；当频率为５ＧＨｚ时，该器件的增益为９．３ｄＢ，ｆｍａｘ＝１２．９ＧＨｚ。当Ｖｄｓ＝５４Ｖ时，功率密度为２．８Ｗ／ｍｍ，功率附加效率为１２．７％。     

低压低能耗应用的InGaAs／AlGaAsPHEMT单片微波SPDT开关

提出了微波频率下ＰＨＥＭＴ在作开关运用时一种简化的等效电路模型，其模型参数可从对实际ＰＨＥＭＴ芯片的在片微波测试方便地确定。对于电路中元件采用不同尺寸组合情形下所进行的开关性能（插入损耗，隔离度，输入及输出反射损耗）的模拟计算表明，与实验结果符合良好。在对串／并联ＰＨＥＭＴ型ＳＰＤＴ开关的ＣＡＤ优化设计基础上进行了ＩｎＧａＡｓ／ＡｌＧａＡｓＰＨＥＭＴ单片ＳＰＤＴ微波开关的实验研制。从研制的ＭＭＩＣ芯片上在片测试得到的结果为：对应新的个人通信频段的应用，在０～２ＧＨＺ范围内，插入损耗＜１．０ｄＢ，隔离度＞５０ｄＢ，输入及输出反射损耗均优于２４ｄＢ。研制的这种高性能单片开关还可在低至－２．０Ｖ的控制电压下工作。     

InP衬底上的p—沟和n—沟异质结绝缘栅场效应晶体管

在ＩｎＰ衬底上用通常用晶格匹配（ｙ＝０．５３）和晶格失配（ｙ〉０．５３）Ｉｎ０．５３Ａｌ０．４６Ａｓ／ＩｎｙＧａ（１－ｙ）Ａｓ层结构同时制作ｐ－沟和ｎ－沟增强型异质结绝缘栅场效应晶体管（ＨＩＧＦＥＴ）。获得１μｍ栅长ｅ型ｐ－沟ＨＩＧＦＥＴ，其阈值电压约０．６６Ｖ，夹断尖锐，栅二极管开启电压０．９Ｖ，室温时非本征跨导〉２０ｍＳ／ｍｍ。相邻的（互补的）ｎ－沟ＨＩＧＦＥＴ也显示ｅ型工作（阈值Ｖｔｈ＝０．     

InP衬底上的p－沟和n－沟异质结绝缘栅场效应晶体管

在ＩｎＰ衬底上用通常的晶格匹配（ｙ＝０．５３）和晶格失配（ｙ＞０．５３）Ｉｎ＿（０．５３）Ａｌ＿０．４８Ａｓ／Ｉｎ＿ｙＧａ＿（１－ｙ）Ａｓ层结构同时制作ｐ－沟和ｎ－沟曾强型异质结绝缘栅场效应晶体管（ＨＩＧＦＥＴ）。获得１μｍ栅长ｅ型ｐ－沟ＨＩＧＦＥＴ，其阈值电压约０．６６Ｖ，夹断尖锐，栅二极管开启电压０．９Ｖ，室温时非本征跨导＞２０ｍＳ／ｍｍ。相邻的（互补的）ｎ－小沟ＨＩＧＦＥＴ也显示ｅ型工作（阈值Ｖ＿ｔｈ＝０．１６Ｖ），低的漏电，０．９Ｖ栅开启电压和高跨导（ｇｍ＞３２０ｍＳ／ｍｍ）。这是首次报道在ＩｎＰ衬底上同时制作具有适合作互补电路特性的ｐ＿和ｎ－沟ＨＩＧＦＥＴ。     

Ka波段PHEMT功率放大器

报道了 Ka波段的 PHEMT功率放大器的设计和研制。 PHEMT器件采用 0 .2 μm栅长的 Φ 76 mm Ga As工艺制作 ,并利用 CAD技术指导材料生长和器件制作。单级的 MIC放大器采用0 .3mm栅宽的 PHEMT,在 34GHz处 ,输出功率 10 0 m W,功率增益 4 d B。     

A 9.1–10.7 GHz 10-W, 40-dB Gain Four-Stage PHEMT MMIC Power Amplifier

This letter presents a compact X-band high gain and high power four-stage AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistor (PHEMT) monolithic microwave integrated circuit (MMIC) high power amplifier (PA). This amplifier is designed to fully match a 50-Omega input and output impedance. Based on 0.35-mum gate-length power PHEMT technology, this PA MMIC is fabricated on a 3-mil thick wafer. While operating under 8 V and 2700-mA dc bias condition, the characteristics of 40-dB small-signal gain, a 10-W continuous-wave saturation output power, and 33% power added efficiency at 9.7GHz can be achieved     

14.5～15GHz11W内匹配功率器件

介绍了一种采用GaAs PHEMT管芯设计的超高频内匹配功率器件。为了在更高的频率获得较高的输出功率,采用0.25μm栅长的PHEMT工艺,制作了总栅宽19.2 mm的大功率管芯。采用频带较宽的微带渐变传输线和T型网络共同组成栅极和漏极的匹配电路,并对封装管壳进行优化,有效提高了器件的微波特性。在带内频率14.5～15 GHz、漏源电压Vds为8 V时,器件输出功率大于40.4 dBm(11 W),线性功率增益为7 dB,功率附加效率大于23%。     

An X-Band High-Power and High-PAE PHEMT MMIC Power Amplifier for Pulse and CW Operation

An X-band high-power and high power added efficiency (PAE), two-stage AlGaAs/InGaAs/GaAs psuedomorphic high electronic mobility transistor (PHEMT) monolithic microwave integrated circuit (MMIC) power amplifier is presented. The amplifier is designed to fully match a 50 Omega input and output impedance. Based on a 0.35 mum gate-length power PHEMT technology, the MMIC is fabricated on a 3 mil thick wafer. Under an 8 V DC bias condition, the characteristics of 17.5 dB small-signal gain, 10 W continuous wave mode saturation output power of 42% PAE, and 12.6 W pulse saturation output power of 52.6% PAE at 9.4 GHz can be achieved.     

高功率密度高效率28V GaAs PHEMT技术

报道了采用双场板设计的GaAs PHEMT器件,该器件栅长为0.5μm,工作电压28V,在2GHz下饱和输出功率2.18W/mm,功率附加效率PAE=67%。     

A 4 W K-band GaAs MMIC power amplifier with 22 dB gain

A 4 W K-band AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistor (PHEMT) mono-lithic microwave integrated circuit (MMIC) high power amplifier (PA) is reported. This amplifier is designed to fully match for a 50 Ω input and output impedance based on the 0.15 μm power PHEMT process. Under the condition of 5.6 V and 2.6 A DC bias, the amplifier has achieved a 22 dB small-signal gain, better than a 13 dB input return loss,and 36 dBm saturation power with 25% PAE from 19 to 22 GHz.     

Ku波段固态高速脉冲功率放大器的设计与实现

提出一种Ku波段固态高速脉冲功率放大器的设计方案.通过分析PHEMT器件模型.精心设计GaAs PHEMT功放管的驱动电路和偏置电路,分模块给出了整个系统的实现方法,并提供主要参数的测试结果.该功率放大器的脉冲功率信号上升、下降沿时间为4 ns,开关隔离度达70 dB.系统在调制响应速度、隔离度和稳定性方面的优良性能验证了该设计的可行性.     

2 V-operated InGaP-AlGaAs-InGaAs enhancement-mode pseudomorphic HEMT

A low-voltage single power supply enhancement-mode InGaP-AlGaAs-InGaAs pseudomorphic high-electron mobility transistor (PHEMT) is reported for the first time. The fabricated 0.5/spl times/160 /spl mu/m/sup 2/ device shows low knee voltage of 0.3 V, drain-source current (I/sub DS/) of 375 mA/mm and maximum transconductance of 550 mS/mm when drain-source voltage (V/sub DS/) was 2.5 V. High-frequency performance was also achieved; the cut-off frequency(F/sub t/) is 60 GHz and maximum oscillation frequency(F/sub max/) is 128 GHz. The noise figure of the 160-/spl mu/m gate width device at 17 GHz was measured to be 1.02 dB with 10.12 dB associated gain. The E-mode InGaP-AlGaAs-InGaAs PHEMT exhibits a high output power density of 453 mW/mm with a high linear gain of 30.5 dB at 2.4 GHz. The E-mode PHEMT can also achieve a high maximum power added efficiency (PAE) of 70%, when tuned for maximum PAE.     

A 77-100 GHz power amplifier using 0.1-μm GaAs PHEMT technology

A wideband MMIC power amplifier at W-band is reported in this letter. The four-stage MMIC, developed using 0.1 μm GaAs pseudomorphic HEMT (PHEMT) technology, demonstrated a flat small signal gain of 12.4±2 dB with a minimum saturated output power (Psat) of 14.2 dBm from 77 to 100 GHz. The typical Psat is better by 16.3 dBm with a flatness of 0.4 dB and the maximum power added efficiency is 6% between 77 and 92 GHz. This result shows that the amplifier delivers output power density of about 470 mW/mm with a total gate output periphery of 100 μm. As far as we know, it is nearly the best power density performance ever published from a single ended GaAs-based PHEMT MMIC at this frequency band.     

A Ku band four-stage PHEMT 1W MMIC power amplifier

A successful development of a very high performance and reliable power PHEMT MMIC technology is reported. In this paper, a Ku-Band 1 W AlGaAs/InGaAs/GaAs PHEMT MMIC power amplifier for VSAT ODU application is demonstrated. This four-stage amplifier is designed to fully match for a 50 Ω input and output impedance. With 7 V and 700 mA DC bias condition, the amplifier has achieved 30 dB small-signal gain, 30.8 dBm 1-dB gain compression power with 24.5% power-added efficiency (PAE) and 31.3 dBm saturation power with 27.5% PAE from 14 to 17 GHz.