A 47 GHz Cross-Coupled VCO Employing High- Island-Gate Varactor for Phase Noise Reduction

A 47 GHz $LC$ cross-coupled voltage controlled oscillator (VCO) employing the high-$Q$ island-gate varactor (IGV) based on a 0.13 $mu{rm m}$ RFCMOS technology is reported in this work. To verify the improvement in the phase noise, two otherwise identical VCOs, each with an IGV and a conventional multi-finger varactor, were fabricated and the phase noise performance was compared. With $V_{DD}$ of 1.2 V and core power consumption of 3.86 mW, the VCOs with the IGV and the multi-finger varactor have a phase noise of $-$95.4 dBc/Hz and $-$91.4 dBc/Hz respectively, at 1 MHz offset, verifying the phase noise reduction with the introduction of the high-$Q$ IGV. The VCO with IGV exhibited an output power of around $-$15 dBm, leading to a FoM of $-$182.9 dBc/Hz and a tuning range of 3.35% (45.69 to 47.22 GHz).      

2 MHz AO $Q$ -switched ${rm TEM}_{00}$ Grazing Incidence Laser With 3 at.% Neodymium Doped Nd:YVO$_{4}$

We present a detailed experimental and theoretical study of the ultrahigh repetition rate AO $Q$ -switched ${rm TEM}_{00}$ grazing incidence laser. Up to 2.1 MHz $Q$-switching with ${rm TEM}_{00}$ output of 8.6 W and 2.2 MHz $Q$ -switching with multimode output of 10 W were achieved by using an acousto-optics $Q$ -switched grazing-incidence laser with optimum grazing-incidence angle and cavity configuration. The crystal was 3 at.% neodymium doped Nd:YVO$_{4}$ slab. The pulse duration at 2 MHz repetition rate was about 31 ns. The instabilities of pulse energy at 2 MHz repetition rate were less than ${pm}6.7hbox{%}$ with ${rm TEM}_{00}$ operation and ${pm}3.3hbox{%}$ with multimode operation respectively. The modeling of high repetition rate $Q$-switched operation is presented based on the rate equation, and with the solution of the modeling, higher pump power, smaller section area of laser mode, and larger stimulated emission cross section of the gain medium are beneficial to the $Q$-switched operation with ultrahigh repetition rate, which is in consistent with the experimental results.      

Design of Ultrahigh- $Q$ 1-D Photonic Crystal Microcavities

Waveguide based 1-D photonic crystal (PC) microcavities in silicon-on-insulator are investigated by 2-D finite-difference time-domain method. Values up to $6.7times 10 ^{6}$ for the quality factor $(Q)$ are feasible if the cavities are properly designed. The factors that govern $Q$ are analyzed in both real space and momentum space. Etching down into the ${hbox {SiO}}_{2}$ layer is found to give more than 20% improvement in $Q$ compared to the structure in which etching is stopped at the oxide layer. Short air gap mirrors are used to reduce the vertical scattering loss. The addition to the Bragg mirrors of tapered periods optimized to produce a cavity mode with a near Gaussian shaped envelope results in a major reduction in vertical loss. A new tapered structure with varying Si block width demonstrates an ultrahigh- $Q$ and relieves the fabrication constraints compared to the conventional air slots tapered structure.      

A $Q$ -Band Four-Element Phased-Array Front-End Receiver With Integrated Wilkinson Power Combiners in 0.18-$mu{{hbox{m}}}$ SiGe BiCMOS Technology

A four-element phased-array front-end receiver based on 4-bit RF phase shifters is demonstrated in a standard 0.18- $mu{{hbox{m}}}$ SiGe BiCMOS technology for $Q$-band (30–50 GHz) satellite communications and radar applications. The phased-array receiver uses a corporate-feed approach with on-chip Wilkinson power combiners, and shows a power gain of 10.4 dB with an ${rm IIP}_{3}$ of $-$13.8 dBm per element at 38.5 GHz and a 3-dB gain bandwidth of 32.8–44 GHz. The rms gain and phase errors are $leq$1.2 dB and $leq {hbox{8.7}}^{circ}$ for all 4-bit phase states at 30–50 GHz. The beamformer also results in $leq$ 0.4 dB of rms gain mismatch and $leq {hbox{2}}^{circ}$ of rms phase mismatch between the four channels. The channel-to-channel isolation is better than $-$35 dB at 30–50 GHz. The chip consumes 118 mA from a 5-V supply voltage and overall chip size is ${hbox{1.4}}times {hbox{1.7}} {{hbox{mm}}}^{2}$ including all pads and CMOS control electronics.      

Performance Improvement of N-Type $hbox{TiO}_{x}$ Active-Channel TFTs Grown by Low-Temperature Plasma-Enhanced ALD

We report on performance improvement of $n$-type oxide–semiconductor thin-film transistors (TFTs) based on $hbox{TiO}_{x}$ active channels grown at 250 $^{circ}hbox{C}$ by plasma-enhanced atomic layer deposition. TFTs with as-grown $hbox{TiO}_{x}$ films exhibited the saturation mobility $(mu_{rm sat})$ as high as 3.2 $hbox{cm}^{2}/hbox{V}cdothbox{s}$ but suffered from the low on–off ratio $(I_{rm ON}/I_{rm OFF})$ of $hbox{2.0} times hbox{10}^{2}$. $hbox{N}_{2}hbox{O}$ plasma treatment was then attempted to improve $I_{rm ON}/I_{rm OFF}$. Upon treatment, the $hbox{TiO}_{x}$ TFTs exhibited $I_{rm ON}/I_{rm OFF}$ of $hbox{4.7} times hbox{10}^{5}$ and $mu_{rm sat}$ of 1.64 $hbox{cm}^{2}/hbox{V}cdothbox{s}$, showing a much improved performance balance and, thus, demonstrating their potentials for a wide variety of applications such as backplane technology in active-matrix displays and radio-frequency identification tags.      

Fabrication and Characterization of Fused Microfiber Resonators

We fabricate a 2.6-mm-diameter loop resonator from a tapered, step-index silica fiber of thickness $sim$ 7.2 $mu$ m. The resonator has a coupling region that is fused with a CO$_{2}$ laser for reducing structural instabilities and improving the overall stability of the device. We experimentally demonstrate optical resonances with a $Q$-factor ${ge}$25 000 at a free-spectral range of 0.19 nm.      

An Analytical Method to Extract the Physical Parameters of a Solar Cell From Four Points on the Illuminated $J{-}V$ Curve

For a variety of solar cells, it is shown that the single exponential $J{-}V$ model parameters, namely—ideality factor $eta$ , parasitic series resistance $R_{s}$, parasitic shunt resistance $R_{rm sh}$, dark current $J_{0}$, and photogenerated current $J_{rm ph}$ can be extracted simultaneously from just four simple measurements of the bias points corresponding to $V_{rm oc}$, $sim!hbox{0.6}V_{rm oc}$, $J_{rm sc}$, and $sim! hbox{0.6}J_{rm sc}$ on the illuminated $J{-}V$ curve, using closed-form expressions. The extraction method avoids the measurements of the peak power point and any $dJ/dV$ (i.e., slope). The method is based on the power law $J{-}V$ model proposed recently by us.      

A 5-GHz Wireless LAN Transmitter with Integrated Tunable High-Q RF Filter

A tunable, high-$Q$ RF filter suitable for wireless transmitters has been implemented in a standard digital 0.18-$muhbox{m}$ CMOS technology. Active circuits are used to enhance the $Q$ of two independent LC resonators, which are cascaded to form a wide bandwidth filter that can be tuned in both center frequency and bandwidth. A 5.145-GHz stagger-tuned filter with a 200-MHz bandwidth and 0.8 dB of ripple is demonstrated in an 802.11a sliding-IF transmitter. The transmitter provides spectral mask and EVM-compliant output power of $-$8.26 dBm for a 64-QAM OFDM signal. At lower output power, an EVM of $-$ 32.3 dB is achieved.      

Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Compact microracetrack resonator (MRR) devices are presented with small SU-8 polymer strip waveguides. The SU-8 strip waveguide has an SU-8 polymer core $(n {sim} 1.573)$ , a SiO$_{2}$ buffer $(n {sim} 1.445)$, and an air cladding. The fabricated straight waveguide has a low propagation loss of about 0.1 dB/mm. With such a high index-contrast optical waveguide, a compact MRR with a small bending radius ( $sim$150 $mu$m) are designed and fabricated. The measured spectral responses of the through/drop ports show a $Q$-factor of 8000.      

A Quality-Improved Folded Inductor Embedded in MCM-L Organic Packaging Substrate Using an Unfilled Via Process

This paper presents a folded inductor implemented with a multichip module, which involves a laminate organic packaging technology with an unfilled via process. The folded inductor had an increased inductor layer surface area because of the unfilled vias along the inductor layer. Thus, the quality $(Q)$ factor of the inductor improved as the series resistance, resulting from the skin effect, decreased. The $Q$-factor for a folded inductor showed a maximum improvement of 32% by including contact resistances, in comparison with the $Q$ -factors of a normal planar inductor.      

The Performance of Acoustic-Optical $Q$-switched Mode-Locking 1.34 $mu$m Nd:GdVO$_{4}$ Laser

A diode-end-pumped $Q$ -switched mode-locking $hbox{Nd:GdVO}_{4}$ laser operating at 1.34 $mu{hbox {m}}$ with an acousto-optical (AO) Q-switch in a compact V-type cavity was realized in our experiment for the first time. When the AO Q-switch repetition rate was 10 kHz, the maximum average output power of 750 mW and the pulse energy of 75 $muhbox{J}$ were obtained at the maximum incident pump power of 9 W. The mode-locking modulation depth of about 100% was obtained at certain pump power over the threshold. The mode-locked pulse inside in the $Q$-switched pulse had a repetition rate of 341 MHz, and its average pulsewidth was estimated to be about 350 ps. A developed rate equation model for the $Q$ -switched and mode-locked lasers with an AO Q-switch were proposed by using the hyperbolic secant functional methods. The results of numerical calculations of the rate equations were in good agreement with the experimental results.      

Smooth Pole Tracking Technique by Power MOSFET Array in Low-Dropout Regulators

This paper proposes an advanced $Q$-reduction technique of pole-splitting compensations for low dropout (LDO) regulator. The output pole is load dependent and may cause the scenario of complex poles when load current changes. LDO regulators may oscillate because high-$Q$ incurs the less gain and phase margins. The reasons of causing complex poles depend on the design methodology. For the design of capacitor-free LDO regulator, high-$Q$ issue happens when load current changes from heavy to light. Recent literature provides a method to alleviate the high- $Q$ problem. However, large dropout voltage in case of suddenly large loads forces designers to include a small load capacitor as an indispensable component for supplying system-on-chip (SoC) systems. Different to the case of capacitor-free LDO regulators, high- $Q$ issue happens when load current changes from light to heavy. According to our proposed power MOSFET array, the high-$Q$ problem can be alleviated and prevent LDO regulators from oscillating when load changes. Experimental results promise the stability and show the improvement of load and line regulations.      

$hbox{TiN/ZrO}_{2}$/Ti/Al Metal–Insulator–Metal Capacitors With Subnanometer CET Using ALD-Deposited $hbox{ZrO}_{2}$ for DRAM Applications

We provide the first report of the structural and electrical properties of $hbox{TiN/ZrO}_{2}$/Ti/Al metal–insulator–metal capacitor structures, where the $hbox{ZrO}_{2}$ thin film (7–8 nm) is deposited by ALD using the new zirconium precursor ZrD-04, also known as Bis(methylcyclopentadienyl) methoxymethyl. Measured capacitance–voltage ($C$– $V$) and current–voltage ( $I$–$V$) characteristics are reported for premetallization rapid thermal annealing (RTP) in $hbox{N}_{2}$ for 60 s at 400 $^{circ}hbox{C}$, 500 $^{circ}hbox{C}$, or 600 $^{ circ}hbox{C}$. For the RTP at 400 $^{circ}hbox{C}$ , we find very low leakage current densities on the order of nanoamperes per square centimeter at a gate voltage of 1 V and low capacitance equivalent thickness values of $sim$ 0.9 nm at a gate voltage of 0 V. The dielectric constant of $ hbox{ZrO}_{2}$ is 31 $pm$ 2 after RTP treatment at 400 $^{circ}hbox{C}$.      

Multiwavelength $Q$-switched Laser by Incorporating a LiNbO$_{3}$ Phase Modulator in Fabry–PÉrot Cavity

In this letter, we present a simple and compact laser cavity that can be used for $Q$-switching and multiwavelength oscillation. It is shown that a LiNbO $_{3}$ phase modulator with relatively low driven voltage inserted into a Fabry–PÉrot cavity can act simultaneously as an effective component for suppressing the homogeneous line broadening, switching the $Q$ -value of the laser cavity, and a polarizer. Multiwavelength operation of Yb-doped fiber laser is achieved by phase modulation. $Q$-switching is achieved due to the residual intensity modulation of the phase modulator, and the pulse performance is also impacted by the phase modulation amplitude. Three stable wavelengths with identical wavelength spacing of 3.3 nm and pulsed laser of 0.2 $mu$J per pulse energy at the repetition rate of 55.8 kHz are demonstrated. The full-width at half-maximum pulse duration is of 2 $mu$s, and the polarization extinction ratio is $>$23 dB.      

Compact $S$ -/$Ka$-Band CMOS Quadrature Hybrids With High Phase Balance Based on Multilayer Transformer Over-Coupling Technique

This paper presents compact CMOS quadrature hybrids by using the transformer over-coupling technique to eliminate significant phase error in the presence of low-$Q$ CMOS components. The technique includes the inductive and capacitive couplings, where the former is realized by employing a tightly inductive-coupled transformer and the latter by an additional capacitor across the transformer winding. Their phase balance effects are investigated and the design methodology is presented. The measurement results show that the designed 24-GHz CMOS quadrature hybrid has excellent phase balance within ${pm}{hbox{0.6}}^{circ}$ and amplitude balance less than ${pm} {hbox{0.3}}$ dB over a 16% fractional bandwidth with extremely compact size of 0.05 mm$^{2}$. For the 2.4-GHz hybrid monolithic microwave integrated circuit, it has measured phase balance of ${pm}{hbox{0.8}}^{circ}$ and amplitude balance of ${pm} {hbox{0.3}}$ dB over a 10% fractional bandwidth with a chip area of 0.1 mm$^{2}$ .      

A 2.4-GHz Resistive Feedback LNA in 0.13-$mu$m CMOS

A $g_{m}$-boosted resistive feedback low-noise amplifier (LNA) using a series inductor matching network and its application to a 2.4 GHz LNA is presented. While keeping the advantage of easy and reliable input matching of a resistive feedback topology, it takes an extra advantage of $g_{m}$ -boosting as in inductively degenerated topology. The gain of the LNA increases by the $Q$ -factor of the series RLC input network, and its noise figure (NF) is reduced by a similar factor. By exploiting the $g_{m}$-boosting property, the proposed fully integrated LNA achieves a noise figure of 2.0 dB, S21 of 24 dB, and IIP3 of ${- 11}~ hbox{dBm}$ while consuming 2.6 mW from a 1.2 V supply, and occupies 0.6 ${hbox {mm}}^{2}$ in 0.13-$mu{hbox {m}}$ CMOS, which provides the best figure of merit. This paper also includes an LNA of the same topology with an external input matching network which has an NF of 1.2 dB.      

Characterization and Modeling of RF-Performance $(f_{T})$ Fluctuation in MOSFETs

The fluctuation of RF performance (particularly for $f_{T}$ : cutoff frequency) in the transistors fabricated by 90-nm CMOS technology has been investigated. The modeling for $f_{T}$ fluctuation is well fitted with the measurement data within approximately 1% error. Low-$V_{t}$ transistors (fabricated by lower doping concentration in the channel) show higher $f_{T}$ fluctuation than normal transistors. Such a higher $f_{T}$ fluctuation results from $C_{rm gg}$ (total gate capacitance) variation rather than $g_{m}$ variation. More detailed analysis shows that $C_{rm gs} + C_{rm gb}$ (charges in the channel and the bulk) are predominant factors over $C_{rm gd}$ (charges in LDD/halo region) to determine $C_{rm gg}$ fluctuation.      

CMOS Avalanche Photodiode Embedded in a Phase-Shift Laser Rangefinder

This paper presents the design and the characterization of a CMOS avalanche photodiode (APD) working as an optoelectronic mixer. The $hbox{P}^{+}hbox{N}$ photodiode has been implemented in a commercial 0.35-$muhbox{m}$ CMOS technology after optimization with SILVACO. The surface of the active region is $ hbox{3.78} cdot hbox{10}^{-3} hbox{cm}^{2}$. An efficient guard-ring structure has been created using the lateral diffusion of two n-well regions separated by a gap of 1.2 $mu hbox{m}$. When biased at $-$2 V, the best responsitivity $S_{lambda ,{rm APD}} = hbox{0.11} hbox{A/W}$ is obtained at $lambda = hbox{500} hbox{nm}$. This value can easily be improved by using an antireflection coating. At $lambda = hbox{472} hbox{nm}$, the internal gain is about 75 at $-$6 V and 157 at $-$7 V. When biased at $-$6 V, the APD achieves a dark current of 128 $muhbox{A} cdot hbox{mm}^{-2}$ and an excess noise factor $F = hbox{20}$ . Then, the APD is successfully used as an optoelectronic mixer to improve the signal-to-noise ratio of a low-voltage embedded phase-shift laser rangefinder.      

Tunable Linear MOS Resistors Using Quasi-Floating-Gate Techniques

A family of tunable MOS resistors based on quasi-floating-gate (QFG) transistors biased in the triode region is analyzed in this paper. From the study results, a new device that outperforms previous implementations, is presented. By means of a capacitive divider, the ac component of the drain-to-source voltage scaled with a factor $alphaleq 1$ is added to the gate-to-source voltage leading to a cancellation of the nonlinear terms. The effect of $alpha$ on resistor linearity is analytically studied. Simulation results are also provided for different technologies. Finally, a complete transconductor has been built which preserves the linearity of the MOS resistor. Three versions of the transconductor have been fabricated for different values of $alpha$ ($alpha=$ 0, 0.5, and 1) in a 0.5 $mu{hbox {m}}$ CMOS technology with $pm$1.65-V supply voltage. Experimental results show (for $alpha=1$ ) a THD of $-$ 57 dB $({rm HD}2=-70 {hbox {dB}})$ at 1 MHz for 2-V peak-to-peak differential input signal with a nominal ac-transconductance of 200 $muhbox{A/V}$ and a power consumption of 3.2 mW.      

Impacts of $hbox{N}_{2}$ and $hbox{NH}_{3}$ Plasma Surface Treatments on High-Performance LTPS-TFT With High-$kappa$ Gate Dielectric

Low-temperature polycrystalline-silicon thin-film transistors (LTPS-TFTs) with high- $kappa$ gate dielectrics and plasma surface treatments are demonstrated for the first time. Significant field-effect mobility $mu_{rm FE}$ improvements of $sim$86.0% and 112.5% are observed for LTPS-TFTs with $hbox{HfO}_{2}$ gate dielectric after $hbox{N}_{2}$ and $ hbox{NH}_{3}$ plasma surface treatments, respectively. In addition, the $hbox{N}_{2}$ and $ hbox{NH}_{3}$ plasma surface treatments can also reduce surface roughness scattering to enhance the field-effect mobility $mu_{rm FE}$ at high gate bias voltage $V_{G}$, resulting in 217.0% and 219.6% improvements in driving current, respectively. As a result, high-performance LTPS-TFT with low threshold voltage $V_{rm TH} sim hbox{0.33} hbox{V}$, excellent subthreshold swing S.S. $sim$0.156 V/decade, and high field-effect mobility $mu_{rm FE} sim hbox{62.02} hbox{cm}^{2}/hbox{V} cdot hbox{s}$ would be suitable for the application of system-on-panel.