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1.
提出了一种新颖的光读出红外热成像系统设计 .该系统利用光学读出技术将红外图像直接转化为可见光图像 ,其核心部件是一个基于微电子机械技术 (MEMS)制作的法布里 泊罗 (Fabry Perot)微腔红外探测器列阵 (F PMCIRDA) .通过对Au/SiNx双材料体系的理论分析 ,得出了可动微镜的最大热 机械灵敏度、机械 光灵敏度及其温度响应分别为 6 .4 7× 10 -9m/K、1.5 3× 10 8m-1、2 .0 5× 10 -4.对系统噪声分析表明 :在目前的设计中 ,系统的噪声等效温差 (NETD)为 5 .1K ,而其极限值有望达到 5 8mK .采用体硅MEMS工艺 ,制作出了 5 0× 5 0的Fabry Perot微腔列阵 .实验表明 ,在红外辐射作用下 ,可动微镜有明显的位移 ,验证了工作原理  相似文献   

2.
红外焦平面器件读出电路技术   总被引:8,自引:0,他引:8  
甘文祥 《红外》2003,222(9):1-8
本文是一篇关于红外焦平面阵列器件的综述性文章。主要介绍了红外焦平面阵列器件的分类、定义、应用、组成部分、发展趋势,其中重点对红外焦平面器件读出电路技术作了详尽的论述。  相似文献   

3.
光学读出热成像是一种新型的红外成像技术,它基于双材料效应和光学原理实现像转换与像增强,具有高性价比的潜在优势.光学读出热成像焦平面阵列由可动微镜阵列构成,其制作技术是光学读出热成像技术的重要研究内容之一.目前,国内外的研究者已发展了基于表面微机械、体微机械以及表面,体微机械工艺的3种制作技术,前两者各有优缺点,而基于表面/体硅微机械工艺的制作技术则兼顾了前两者的优点.  相似文献   

4.
利用一种近似理论--悬臂梁理论对光读出热成像芯片进行了优化设计,所采用的Al/SiO2双材料体系,其关键性能指标--热-机械灵敏度可达6.60×10-8m/K,与之相对应的最优厚度比为0.6.同时ANSYS模拟表明,可动微镜热-机械灵敏度为2.80×10-8m/K.芯片实测热-机械灵敏度为2.02×10-8m/K,测试结果进一步证实了理论分析与ANSYS模拟的结果.理论计算表明,可动微镜热响应时间常数为4.45×10-4s.  相似文献   

5.
光读出热成像芯片的优化设计与ANSYS模拟   总被引:1,自引:0,他引:1  
利用一种近似理论——悬臂梁理论对光读出热成像芯片进行了优化设计 ,所采用的 Al/ Si O2 双材料体系 ,其关键性能指标——热 -机械灵敏度可达 6 .6 0× 10 - 8m/ K,与之相对应的最优厚度比为 0 .6 .同时 ANSYS模拟表明 ,可动微镜热 -机械灵敏度为 2 .80× 10 - 8m/ K.芯片实测热 -机械灵敏度为 2 .0 2× 10 - 8m/ K,测试结果进一步证实了理论分析与 ANSYS模拟的结果 .理论计算表明 ,可动微镜热响应时间常数为 4 .4 5× 10 - 4s.  相似文献   

6.
针对已提出的光学读出非制冷红外成像系统,设计研制了一种单元尺寸分别是50 μm×50μm和60 μm×60 μm的新型双材料微悬臂梁红外焦平面阵列(FPA),进行了人体红外热成像实验,并对光学读出非制冷红外成像系统的温度-灰度响应曲线及噪声进行了测定.实验结果表明该微梁结构FPA构成的红外成像系统的噪声等效温度差(NETD)约100 mK.和课题组之前的研究结果(微梁单元尺寸120μm×120μm,NETD约300 mK)相比,红外图像的温度分辨率和空间分辨率都得到了明显改善.  相似文献   

7.
读出电路是红外焦平面器件研究的关键技术之一.文中首先介绍了可编程逻辑器件用于红外焦平面阵列读出电路信号源中的优点及红外焦平面读出电路信号源的特殊性,然后介绍了用于测试所研制的两种读出电路的信号源设计.  相似文献   

8.
论文提出了一种可用于大面阵红外焦平面阵列的智能化读出电路的设计方法,所设计的读出电路具有放大、读出、片上模数转换以及智能控制等功能。论文主要介绍该面阵电路的组成结构、核心电路的工作原理、电路的仿真方法和结果。通过对该面阵读出电路进行版图设计、流片和性能测试,得到了符合设计要求的面阵规模为128X128的大面阵红外焦平面阵列智能读出电路。  相似文献   

9.
采用1.2 μm DPDM n阱CMOS工艺设计并研制成功320×240热释电非制冷红外焦平面探测器读出电路.该读出电路中心距为50 μm,功耗小于50 mW,主要由X、Y移位寄存器、列放大器、相关双采样电路等构成,采用帧积分工作方式.经测试,研制的读出电路性能指标达到设计要求.给出了单元读出电路的电路结构、工作过程和参数测试结果.采用该读出电路和热释电红外探测阵列互联后,获得了良好的红外热像.  相似文献   

10.
红外焦平面器件的信息获取电路技术   总被引:1,自引:0,他引:1  
方丹 《红外》2003,168(3):1-8
红外焦平面阵列器件是现代红外成像系统的关键器件,它包括红外探测器阵列和读出电路两部分。其信号获取电路是处理焦平面输出信号的部分,主要指与读出电路接口的放大电路。本文主要综合了红外焦平面器件的信息获取电路及其相关技术,并就其中的关键技术进行简要分析。  相似文献   

11.
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.  相似文献   

12.
The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.  相似文献   

13.
Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.  相似文献   

14.
The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.  相似文献   

15.
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.  相似文献   

16.
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's.  相似文献   

17.
Waveguide multilayer optical card (WMOC) is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling & processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic (VB) language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.  相似文献   

18.
It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.  相似文献   

19.
The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.  相似文献   

20.
An insert layer structure organic electroluminescent device(OLED) based on a new luminescent material (Zn(salen)) is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn(salen)/Liq/LiF/A1/CuPc/NPD/Zn(salen)/Liq/LiF/A1. Effective insert electrode layers comprising LiF(1nm)/Al(5 nm) are used as a single semitransparent mirror, and bilayer cathode LiF(1 nm)/A1(100 nm) is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.  相似文献   

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