高性能单光子雪崩二极管在180 nm CMOS工艺中的设计与实现（英文）

为了实现大阵列电路集成,文中设计和实现了一种能与主动淬火电路集成的宽光谱范围和快速的单光子雪崩二极管(SPAD)芯片.一个精确的单光子雪崩二极管电路模型模拟了其在盖革模式下的静态和动态行为.该有源区直径为8μm的单光子雪崩二极管器件是基于上海宏利GSMC 180 nm CMOS图像传感器(CIS)技术实现的.由于采用有效的器件结构,其击穿电压是15.2 V,淬灭时间是7.9 ns.此外,该器件实现了宽的光谱灵敏度,其在低过电压下的光子探测概率(PDP)从470 nm到680 nm光波长段最高可达15.7%.并且它在室温下的暗计数率相当低.     

基于SMIC 0.13μm CIS工艺的单光子TOF传感器像素设计

设计了一种基于SMIC 0.13μm CIS工艺的单光子飞行时间(TOF)传感器像素结构。针对传统单光子雪崩二极管(SPAD)结构的不足,采用p阱和STI共同作为保护环,避免器件提前发生边缘击穿从而减小器件面积,增加深n阱使有源区耗尽层变窄,从而降低雪崩击穿电压,增加硅外延层将器件的光谱响应峰值转移到所需要的光波长,以此提高器件对指定波长光的吸收能力。通过浮动SPAD阳极电压的方式,采用低压CMOS晶体管实现主动式淬灭电路从而快速地控制雪崩电流淬灭,以达到缩短死区时间的目的。通过SILVACO TCAD和Cadence IC设计套件对工艺、像素器件结构以及相关电路进行仿真,验证了该设计的可行性。     

高边缘击穿和扩展光谱的圆形单光子雪崩二极管

介绍了一种0. 18μm互补金属氧化物半导体(CMOS)技术的新型宽光谱荧光相关谱探测器,其为高边缘击穿、扩展光谱和低暗计数率的圆形单光子雪崩二极管(SPAD).该器件由p+/deep n-well结,p-well保护环和多晶硅保护环组成.通过Silvaco TCAD 3D器件仿真,直径为10μm的圆形p+/deep n-well SPAD器件具有较高边缘击穿特性.此外,p+/deep n-well结SPAD比p+/n-well结SPAD具有更长的波长响应和扩展光谱响应范围.该器件在0. 5 V过量偏压下,可在490～775 nm波长范围内实现超过40%的光子探测率.该圆形p+/deep n-well SPAD器件在25℃时具有较好雪崩击穿为15. 14 V,具有较低暗计数率为638 Hz.     

高边缘击穿和扩展光谱的圆形单光子雪崩二极管（英文）

介绍了一种0. 18μm互补金属氧化物半导体(CMOS)技术的新型宽光谱荧光相关谱探测器,其为高边缘击穿、扩展光谱和低暗计数率的圆形单光子雪崩二极管(SPAD).该器件由p+/deep n-well结,p-well保护环和多晶硅保护环组成.通过Silvaco TCAD 3D器件仿真,直径为10μm的圆形p+/deep n-well SPAD器件具有较高边缘击穿特性.此外,p+/deep n-well结SPAD比p+/n-well结SPAD具有更长的波长响应和扩展光谱响应范围.该器件在0. 5 V过量偏压下,可在490～775 nm波长范围内实现超过40%的光子探测率.该圆形p+/deep n-well SPAD器件在25℃时具有较好雪崩击穿为15. 14 V,具有较低暗计数率为638 Hz.     

单光子雪崩二极管猝熄电路的发展

单光子雪崩二极管(SPAD)是工作在击穿电压上的雪崩光电二极管(APD).对于极弱光学信号的探测,例如超高音速飞行器早期预警的应用,SPAD可能是理想的探测器选择.SPAD必须与猝熄电路配套工作.基于pn结等效电路模型,分析了适用于SPAD雪崩猝熄的基本电路结构,例如被动、主动以及混合猝熄电路等.对于SPAD器件测试和...     

SPAD单光子探测器的SPICE模型及其CQC淬火电路研究

在盖革模式下工作的雪崩光子二极管(APD)也称为单光子雪崩光子二极管(singlephoton avalanche photon diode, SPAD)是一种常用于激光测距成像领域的单光子探测器。本文针对SPAD探测应用中的淬火问题,设计了一种电容淬火(capacitive quenching circuit, CQC)电路。首先,根据SPAD器件的性能参数,建立了SPAD的SPICE等效模型,并通过无源淬火电路验证了该模型。其次,基于该等效模型的基础上,仿真验证了所设计的CQC淬火电路的淬火效果。仿真结果表明:所设计的CQC电路不仅具有门控有源淬火电路的优点,而且具有更稳定的偏置电压和击穿电流。本文设计的CQC淬火电路的淬火时间和恢复时间分别为16 ns和41 ns,基本可满足单光子测距的应用需求。     

（英）一种新型低暗计数率单光子雪崩二极管的设计与分析

基于0.18 μm互补金属氧化物半导体(CMOS) 图像传感器工艺提出一种新型的低暗计数率(Dark Count Rate)单光子雪崩二极管(SPAD)器件.该器件是利用P+/LNW(Light N-well doping)结检测光子,并通过低浓度的N型扩散圆形保护环抑制边缘击穿,确保其工作在盖格模式.测试结果表明在室温环境下,直径为8 μm的SPAD器件,雪崩击穿电压为14.2 V,当过调电压设置为2 V时,暗计数率为260 Hz,具有低的暗计数率特性.     

一种新型低暗计数率单光子雪崩二极管的设计与分析（英文）

基于0.18μm互补金属氧化物半导体(CMOS)图像传感器工艺提出一种新型的低暗计数率(Dark Count Rate)单光子雪崩二极管(SPAD)器件.该器件是利用P+/LNW(Light N-well doping)结检测光子,并通过低浓度的N型扩散圆形保护环抑制边缘击穿,确保其工作在盖格模式.测试结果表明在室温环境下,直径为8μm的SPAD器件,雪崩击穿电压为14.2 V,当过调电压设置为2 V时,暗计数率为260 Hz,具有低的暗计数率特性.     

一种宽光谱响应的双结单光子雪崩二极管

基于180 nm BCD工艺提出了一种新型双结雪崩区的单光子雪崩二极管（SPAD）探测器，采用N阱/高压P阱/N+埋层结构形成了两个垂直堆叠的PN结，高压P阱和N+埋层交界面形成较深的主雪崩区，增强对近红外短波光子的探测概率；同时，N阱/高压P阱之间形成浅的次雪崩区，实现对蓝绿光的高效探测，两结同时工作能够有效扩展器件的光谱响应范围。TCAD仿真结果表明，与传统的P阱/深N阱结构相比，双结SPAD器件在300～940 nm的宽光谱范围内有更高的光子探测概率，在800 nm近红外短波段探测概率达到了20.6%。在3 V过偏压下，暗计数率为0.8 kHz，后脉冲概率为3.2%。     

单光子探测器制冷系统研究

负反馈雪崩光电二极管是一款单片集成负反馈电阻的砷化镓铟雪崩光电二极管光子计数器件。在基于负反馈雪崩光电二极管的单光子探测器中,高灵敏度的制冷系统是保障其正常工作的必备条件。采用被动制冷和主动制冷相结合的方式,设计了一套高灵敏度制冷系统。通过理论计算、仿真和实测该制冷系统,表明该系统内部功耗降低58.63%,且在室温25 oC和高温65 oC环境下,该系统均能使负反馈雪崩光电二极管工作温度控制在(-20±0.3) oC,具有环境适应性强、制冷温差大、制冷温度可控等优点。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

Complete approach to automatic identification and sub-pixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.     

社长序言（英文）

正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-     

Call for Papers

正Introduction Jointly sponsored by the China Institute of Communications(CIC)and the IEEE Communications Society(IEEE ComSoc)since the year 2013,China Communications,currently,is aiming to gradually realise the transition from journal to magazine content and style.     

INTEGRATION OF OPTICAL AND WIRELESS NETWORKS

正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must     

Call for Papers—Feature Topic,Vol.12,No.3,2015

正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful