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1.
报道了一种利用MEMS技术制备 ,基于双材料悬臂梁结构的非制冷红外焦平面阵列 (FPA)并配有可见光读出部分的红外成像系统 ,可以在 8~ 14 μm光谱区得到成像。基于该结构的非制冷红外成像系统利用的是光力学效应原理。我们采用MEMS表面硅工艺制备FPA ,深入研究了双材料悬臂梁结构成像系统的基本原理 ,工艺制备难点和响应结果  相似文献   

2.
报道了一种利用MEMS技术制备,基于双材料悬臂梁结构的非制冷红外焦平面阵列(FPA)并配有可见光读出部分的红外成像系统,可以在8~14μm光谱区得到成像.基于该结构的非制冷红外成像系统利用的是光力学效应原理.我们采用MEMS表面硅工艺制备FPA,深入研究了双材料悬臂梁结构成像系统的基本原理,工艺制备难点和响应结果.  相似文献   

3.
基于双材料悬臂梁结构的非制冷红外成像系统   总被引:1,自引:0,他引:1  
报道了一种利用MEMs技术制备,基于双材料悬臂梁结构的非制冷红外焦平面阵列(FPA)并配有可见光读出部分的红外成像系统,可以在8~14μm光谱区得到成像。基于该结构的非制冷红外成像系统利用的是光力学效应原理。我们采用MEMS表面硅工艺制备FPA,深入研究了双材料悬臂梁结构成像系统的基本原理,工艺制备难点和响应结果。  相似文献   

4.
针对已提出的光学读出非制冷红外成像系统,设计研制了一种单元尺寸分别是50 μm×50μm和60 μm×60 μm的新型双材料微悬臂梁红外焦平面阵列(FPA),进行了人体红外热成像实验,并对光学读出非制冷红外成像系统的温度-灰度响应曲线及噪声进行了测定.实验结果表明该微梁结构FPA构成的红外成像系统的噪声等效温度差(NETD)约100 mK.和课题组之前的研究结果(微梁单元尺寸120μm×120μm,NETD约300 mK)相比,红外图像的温度分辨率和空间分辨率都得到了明显改善.  相似文献   

5.
利用光力学效应设计研制了非制冷MEMS红外焦平面阵列及图像探测系统,提出并制作了新型间隔镀金的、无Si衬底的非制冷MEMS红外成像焦平面阵列,分析了FPA热响应时间、NETD、像元的一致性等问题,与光学检测系统共同组成红外成像系统,成功得到了室温背景下人体的热像.  相似文献   

6.
热红外探测器的最新进展   总被引:3,自引:0,他引:3  
对基于热敏电阻的微测辐射热计和基于热释电效应的热释电红外探测器在探测元材料、焦平面阵列(FPA)结构和读出电路(ROIC)3个方面进行了分析对比,讨论了这两种非制冷探测器热电材料的选取原则,FPA单元的热绝缘构造和读出电路的组成方式,并介绍了它们的最新进展和发展方向。  相似文献   

7.
给出了一种用于非制冷光学读出红外探测器的核心器件--双材料微悬臂梁阵列的设计和制作.微梁阵列是无硅基底的SiNx/Au双材料单层膜结构,其制作工艺简单、可以直接放在空气中成像.实验使用了设计制作的140×98微梁阵列和高信噪比的12-bit CCD,得到120℃以上的物体热像,噪声等效温度差(NETD)为7K左右,实验结果与热机械模型预测结果一致.  相似文献   

8.
面向非制冷红外成像的低成本高性能应用,二极管原理的红外焦平面阵列的设计和工艺实现得到研究和发展.焦平面和读出电路的设计集成以及CMOS和MEMS工艺集成是此项技术的研究重点.基于SOI的二极管原理焦平面阵列在低成本的利用CMOS工艺实现大规模阵列集成方面有很大的优势.读出电路是基于标准CMOS工艺进行设计的.320×2...  相似文献   

9.
杨国政  唐广 《红外》2004,(8):1-5
针对基于氧化钒(VOx)的非制冷红外焦平面阵列,介绍了非制冷红外成像系统的构成及其原理,并根据焦平面阵列及其读出电路的特点,给出了相应的非均匀性校正及其FPGA设计的实现。  相似文献   

10.
在过去的10年里红外焦平面阵列成像技术逐渐进入了成熟期,从红外焦平面的发展背景出发,简要介绍了一种新颖的非制冷焦平面成像技术,论述了读出电路在红外焦平面信号传输中的作用并介绍了其基本框图,分析了国内外焦平面读出电路的现状,最后提出了一些在红外焦平面阵列读出电路设计中所需要注意的问题。  相似文献   

11.
This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.  相似文献   

12.
We have fabricated the white organic light-emitting devices (WOLEDs) based on 4,4' -bis(2,2 -diphenyl vinyl)-1,1' - biphenyl (DPVBi) and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene (rubrene). The device structure is ITO/2T-NATA (20 nm)/NPBX (20 nm)/CBP: x%Ir(ppy)3:0.5% rubrene (8 nm)/NPBX (5 nm)/DPVBi (30 nm)/Alq(30 nm)/LiF(0.5 nm)/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris (2-phenylpyridine) iridium [Ir(ppy)3], acts as a yellow light-emitting layer, and N,N' -bis- (1-naphthyl)- N,N' -diphenyl -1, 1' -biphenyl-4,4' -diamine (NPBX) acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir (PPY)3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.  相似文献   

13.
To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.  相似文献   

14.
本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。  相似文献   

15.
Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.  相似文献   

16.
It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer (LDV).  相似文献   

17.
正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must  相似文献   

18.
正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-  相似文献   

19.
正Cloud computing is a novel computing paradigm that utilizes remote cloud resources to achieve a high-performance computation.Cloud provides infrastructure,platform and software as different on-demand services.China has made remarkable progress in cloudbased products and operating system technology.The government,enterprises and research institutions are all active in the development of cloud computing-related projects.Despite the progress,many important problems  相似文献   

20.
正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful  相似文献   

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