共查询到20条相似文献,搜索用时 46 毫秒
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采用溶胶-凝胶旋转涂膜工艺,在普通玻璃基片上制备了掺锡氧化铟(ITO)纳米透明导电薄膜。采用紫外-可见透射光谱和四探针技术,研究了不同Sn掺杂量、不同热处理温度和热处理时间以及不同涂层对薄膜光学和电学性能的影响。结果表明薄膜的方块电阻随Sn掺杂量的增大和热处理温度的升高先降低后增加,在适宜的温度范围内薄膜在可见光区平均透过率随热处理温度升高而增加。在一定的温度下,随着热处理时间的延长,ITO薄膜的方块电阻先降低后增加,透射率先增加后降低。在最佳工艺条件下,采用溶胶-凝胶法制备的ITO薄膜平均可见光透过率达86%,薄膜方阻为322Ω/□。 相似文献
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SnO2的含量对ITO透明导电薄膜结构和光电特性的影响 总被引:1,自引:0,他引:1
阐述了射频磁控溅射方法制备的柔性衬底ITO透明导电膜的结构和光电特性与靶材中SnO2含量的关系.ITO靶材中In2O3掺杂SnO2最佳比例(质量比)为7.5%,制备薄膜的霍耳迁移率为89.3 cm2/(V·s),电阻率为6.3×10-4Ω·cm,在可见光范围内相对透过率为85%左右,随着靶材中SnO2含量增大,薄膜的光学带隙展宽.用不同掺杂比例的靶材制备的薄膜均为多晶纤锌矿结构,掺杂比例增大,样品的晶格常数变大,晶格畸变明显. 相似文献
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锡掺杂对ITO膜方阻和结构的影响 总被引:2,自引:2,他引:0
以铟、锡氯化物为前驱物,采用溶胶-凝胶法在玻璃基体上制备不同锡掺杂的ITO膜,在热处理温度为450℃条件下制备不同锡掺杂(质量分数11%~33%)的ITO膜,研究锡掺杂对ITO膜方阻和结构特性的影响。用四探针法测量ITO膜的方阻并对样品进行X射线衍射分析,结果表明:锡掺杂量在20%时ITO膜的方阻最小,不同锡掺杂的ITO膜均为立方铁锰矿结构,锡掺杂会影响ITO膜晶粒尺寸、晶格常数和晶面取向等结构特性,ITO膜的晶粒较大、晶格畸变小、择优取向小时薄膜方阻较小。 相似文献
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射频磁控溅射ITO薄膜中沉积温度对膜特性影响 总被引:11,自引:9,他引:2
采用射频磁控溅射的方法,在溅射过程中改变沉积温度以提高铟锡氧化物(ITO)薄膜的电学和光学特性。采用扫描电镜(SEM)分析了ITO薄膜的表面形貌,发现ITO薄膜的晶粒尺寸随着衬底温度的升高而增大。经过后续退火,ITO薄膜的电学特性得到了较大的提高。在溅射条件为工作气压1 Pa、衬底温度200℃和输入功率200 W沉积的样品经过300℃真空退火2 h获得了12.8×10-4Ω.cm的低电阻率和800 nm波段94%的高透过率。 相似文献
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ITO薄膜的溶胶-凝胶法制备 总被引:2,自引:0,他引:2
介绍了几种用溶胶 凝胶法制备ITO薄膜的工艺方法 ,用其中一种无机的方法成功制备了ITO透明导电膜。当薄膜厚度为 30 0nm左右时 ,所得ITO薄膜在可见光区域内的平均透过率在 85 %以上 ,电阻率最低可达 0 .1 5Ω·cm。 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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GU Min-fen LIANG Zhong-cheng WANG Ren-zhou DONG Xiang-mei ZHANG Pei-ming CHEN Jia-bi 《光电子快报》2008,4(2):150-152
Waveguide multilayer optical card (WMOC) is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling & processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic (VB) language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor. 相似文献
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It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory. 相似文献
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The effect of laser microbeam trapping the bioparticles has been appfied widely in the biology .However the micromechanism of the acting that realizes the laser-microbeam trapping bioparticles is still lacking. In this paper ,the act microchenism of the gradiant force of laser microbeam for the bioparticles is analysed by means of quantum theory ,The result accords with our experiment. 相似文献
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In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal (200) (2d = 0.4027 nm) is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line(w), the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line(x), the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines(y), the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line(z) in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line(q) in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution(λ/△ 2) is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy. 相似文献