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1.
声表面波谐振器传播状态的ANSYS仿真   总被引:2,自引:1,他引:1  
为描述声表面波的传播状态,利用ANSYS软件对声表面波(SAW)谐振器进行了仿真。在对声表面波产生机理和SAW谐振器工作原理分析的基础上,建立了SAW谐振器仿真模型,讨论了网格划分不同对仿真结果精度的影响,得出了在每个SAW波长尺寸内划分30~40个网格可以得到较精确的仿真结果。对不同长度声孔径的声表面波谐振器进行了仿真分析,得出了声表面波只在固体表面1~2个波长深度范围内传播的仿真效果图,与理论分析有很好的一致性。最后对IDT/ZnO/金刚石/Si结构的声表面波器件进行了仿真,得出该结构声表面波器件SAW传播速度与ZnO的厚度成反比,其大小是IDT/ZnO结构器件SAW传播速度的2~3倍。  相似文献   

2.
郭欣榕  谭秋林  李博 《电视技术》2021,45(5):120-124
通过有限元仿真,分析基于ZnO/Diamond不同复合结构的声表面波传播特性,包括机电耦合系数、声表面波波速以及温度敏感系数等,同时分析电极厚度对机电耦合系数的影响机理,为适用于不同场合的高频器件的优化设计提供思路,对基于ZnO/Diamond不同复合结构的声表面波器件的设计具有指导意义.  相似文献   

3.
基于铌酸锂基底的声表面波传感器电极材料设计,采用COMSOL Multiphysics仿真分析软件对声表面波传感器单对叉指进行三维建模,并进行固体力学和静电学物理场的有限元仿真分析。结果表明,不同电极材料和厚度对其反对称模态频率、对称模态频率、导纳特性曲线及阻抗特性曲线的影响较大,且通过改变电极材料的厚度有效抑制寄生谐振为进一步的研究提供了理论依据。  相似文献   

4.
提出了一个研究36°YX-LiTaO3基片短路金属栅中SH型声表面波在金属短路栅中传播时频散特性的理论方法,即根据陈东培和H.A.Haus理论,利用压电晶体中的变分原理和SH型表面波COM模型分析了栅阵中SH型声表面波的传播特性.该方法不需使用复杂的Green's function,其理论分析结果与Hashimoto有限元程序运算结果一致.这为压电晶体基片中SH型声表面波在金属短路栅阵中传播特性的研究开辟了一条新的途径.  相似文献   

5.
提出了一个研究36°YX-LiTaO3基片短路金属栅中SH型声表面波在金属短路栅中传播时频散特性的理论方法,即根据陈东培和H.A.Haus理论,利用压电晶体中的变分原理和SH型表面波COM模型分析了栅阵中SH型声表面波的传播特性.该方法不需使用复杂的Green's function,其理论分析结果与Hashimoto有限元程序运算结果一致.这为压电晶体基片中SH型声表面波在金属短路栅阵中传播特性的研究开辟了一条新的途径.  相似文献   

6.
肖夏  常志刚 《压电与声光》2012,34(4):487-490
耦合理论广泛应用于声表面波器件模拟和设计中。该文利用有限元分析软件与耦合模(COM)理论分析了金属栅阵中声表面波的传播特性,得到栅极厚度为不同值时声表面波在短路栅或开路栅中传播时的频散特性与耦合系数、相对波数以及衰减常数等耦合参数,说明随着栅极厚度的增大,短路栅特性下声表面波的衰减系数与阻带宽度会随之减小,而开路栅则相反。  相似文献   

7.
单兴锰  肖夏  刘亚亮 《半导体学报》2010,31(8):082002-5
激光激发声表面波技术探测薄膜的杨氏模量是一种快速、准确、无损的方法。在薄膜表面,声表面波通过激光短脉冲与介质材料之间的热弹作用被激发。在分层结构的薄膜上传播时,表面波会发生色散现象,通过对实验测得的表面波色散曲线和理论计算的到的色散曲线进行匹配,可以获得薄膜的杨氏模量。在本实验中,采用紫外波段激光脉冲可以产生具有很宽频谱范围的表面波信号,色散曲线的范围可达180 MHz。应用声表面方法对生长于Si(100)衬底上,具有不同厚度的低k纳米多孔黑钻石绝缘薄膜的杨氏模量进行了成功探测。  相似文献   

8.
提出了采用PSPICE仿真声表面波器件的方法,它将叉指换能器一个周期段Mason等效电路复阻抗采用LC串并联网络等效,并以子电路形式由叉指换能器等效电路调用,两换能器间声传播路径采用等延迟时间的无损耗传输线等效,同时考虑外电路影响,仿真得到的异型声表面波器件的幅度特性与实测结果基本相符。  相似文献   

9.
该文采用有限元法研究了基于ScAlN/6H-SiC结构的声表面波传播特性,并分析了4种激励条件下,压电材料厚度变化对ScAlN/6H-SiC结构中声表面波相速度和机电耦合系数的影响,通过改变电极厚度及金属化率再次对机电耦合系数进行优化。结果表明,IDT/ScAlN/6H-SiC结构的机电耦合系数可达到5.4%,对应的相速度为6.36 km/s,添加短路金属后,机电耦合系数值和相速度均有所提高,Metal/ScAlN/IDT/6H-SiC结构下优化的机电耦合系数和相速度分别为15.78%和7.33 km/s。  相似文献   

10.
李志国  姚素英  肖夏  白茂森 《半导体学报》2007,28(11):1722-1728
研究了纳米通孔的分布对于表面波方法测量多孔低介电常数薄膜机械特性的影响,提出了用横观各向同性表征周期性多孔介质材料结构特性的表面波传播理论模型,给出了表面波在low-k薄膜/Si基底分层结构中的传播方程.通过数值算例揭示出表面波在不同传播方向的频散特性,以及low-k薄膜的弹性常数即杨氏模量E,E'和剪切模量G'对频散特性的影响.结果表明E'和G'在垂直于通孔的传播方向不能被测出.  相似文献   

11.
This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.  相似文献   

12.
We have fabricated the white organic light-emitting devices (WOLEDs) based on 4,4' -bis(2,2 -diphenyl vinyl)-1,1' - biphenyl (DPVBi) and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene (rubrene). The device structure is ITO/2T-NATA (20 nm)/NPBX (20 nm)/CBP: x%Ir(ppy)3:0.5% rubrene (8 nm)/NPBX (5 nm)/DPVBi (30 nm)/Alq(30 nm)/LiF(0.5 nm)/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris (2-phenylpyridine) iridium [Ir(ppy)3], acts as a yellow light-emitting layer, and N,N' -bis- (1-naphthyl)- N,N' -diphenyl -1, 1' -biphenyl-4,4' -diamine (NPBX) acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir (PPY)3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.  相似文献   

13.
To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.  相似文献   

14.
本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。  相似文献   

15.
Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.  相似文献   

16.
It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer (LDV).  相似文献   

17.
正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-  相似文献   

18.
Call for Papers     
正Introduction Jointly sponsored by the China Institute of Communications(CIC)and the IEEE Communications Society(IEEE ComSoc)since the year 2013,China Communications,currently,is aiming to gradually realise the transition from journal to magazine content and style.  相似文献   

19.
正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must  相似文献   

20.
正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful  相似文献   

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