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化学气相沉积技术与材料制备 总被引:18,自引:0,他引:18
概述化学气相沉积技术是一般原理与技术,总结化学气相沉积技术在材料制备方面的发展与应用状况,着重介绍化学气相沉积技术在制备贵金属薄膜和涂层领域的最新进展。 相似文献
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结合近年来刀具涂层技术的发展状况,介绍了各种刀具涂层材料,结构以及制备方法。将涂层材料分为硬涂层与软涂层进行了介绍。综述了各种涂层结构。刀具涂层的制备方法包括化学气相沉积法(CVD)、物理气相沉积法(PVD)、等离子体化学气相沉积法(PCVD)和溶胶-凝胶法(Sol-Gel)等。介绍了刀具涂层工艺的研究现状,并对刀具涂层的发展方向进行了探讨。 相似文献
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独联体国家的难熔金属氟化物化学气相沉积技术(上) 总被引:4,自引:0,他引:4
李汉广 《稀有金属与硬质合金》1994,(4):59-62
介绍了独联体国家难熔金属氟化物化学气相沉积的工艺、设备及其产品的开发情况和研究进展。 相似文献
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本文简要介绍了世界发达国家PVD(物理气相沉积)涂层刀具的发展趋势。对可用于硬质合金涂层的三种PVD技术、涂层的组织结构特征、性能进行了评述,同时与未涂屡、CVD(化学气相沉积)涂层作了比较。 相似文献
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采用化学气相沉积增密技术制备热解碳增强普通石墨材料。研究沉积温度对增强石墨力学性能的影响,并探讨热解碳增强普通石墨材料的沉积机理。结果表明:随沉积温度升高,增强石墨的抗弯强度提高,在1 600℃沉积时达到最大值39.33 MPa,比石墨基体提高21.7%。其主要原因是随沉积温度升高,热解沉积由CVI过程变为CVD过程。当温度低于1 600℃时,化学气相渗透过程占主导;温度高于1 600℃后热解碳极易沉积在基体表面,形成热解碳膜,化学气相沉积过程占主导。在1 600℃温度下,其抗弯强度随沉积时间的变化不大,这证明高温下(1 600℃)化学气相沉积主要发生在石墨块体表面。 相似文献
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纳米陶瓷粉末的制备方法综述 总被引:1,自引:0,他引:1
纳米陶瓷粉末应具备高纯度、组成可控、成分均匀、具有所需物相、颗粒尺寸小且分布范围窄、无硬团聚体等特性,然而传统的固相反应法已不能满足这些要求,本文综述了纳米陶瓷粉末的制备方法,如水热法、气相沉积法、化学共沉淀法、溶胶-凝胶法等,并从粉末特性、实用性及经济性等方面对制粉方法的优缺点进行了全面讨论,指出,追求高的性能/价格比始终是制粉方法的发展方向。 相似文献
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Bert Scheffel Klaus‐Dieter Ehlers Bernd Schuhmacher Franz‐Josef Floßdorf Josef Hagler Christoph Metzner Robert Steffen Gregor Steinbeck 《国际钢铁研究》2002,73(3):114-122
High‐rate evaporation in combination with plasma processes is a promising approach to obtain new types of steel sheet coating with improved corrosion resistance and application properties. To estimate the potential for the application of PVD‐coatings (physical vapour deposition) different coating systems for steel sheet as well as for hot‐dip or electro‐galvanized steel sheet were designed. The samples were produced on a laboratory scale using PVD processes with very high deposition rates (in the order of 1 μm s‐1) as well as high‐power plasma processes for the pre‐treatment. The relationship between the composition, microstructure and properties of the coating systems, in particular concerning corrosion protection, abrasion during forming, phosphating and paint adhesion, were studied. It was found that the corrosion resistance of galvanized steel sheets can be considerably improved by vapour deposition of metal or inorganic films with a thickness of several hundred nanometers. Investigations on vapour deposition of titanium and stainless steel coatings on steel sheets, for applications in a severely corrosive environment, showed that the corrosion resistance in relation to the coating thickness can be significantly enhanced by means of plasma activation during the vapour deposition process. Finally, an outlook on possible industrial applications including an estimation of the process costs will be presented. For certain coating systems the results look promising. Consequently, these particular coating systems will be investigated in more detail by means of using a large‐scale in‐line deposition plant for metallic strips and sheets. 相似文献
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Reiner Kopp Hideki Shimahara Jochen M. Schneider Denis Kurapov Rainer Telle Simon Münstermann Erich Lugscheider Kirsten Bobzin Michel Maes 《国际钢铁研究》2004,75(8-9):569-576
The experimental set‐up and the results of high temperature compression tests for the characterization of tool materials for steel thixoforming are presented. The scope of this test is to reproduce the load profile of steel thixoforming processes consisting of mechanical, thermal, tribological, and chemical components on the forming mould. Tool materials were chosen following a concept within the Collaborative Research Center ‐ SFB 289 ‐ “Forming of metals in the semi‐solid state and their properties”. Three materials groups are distinguished: thin film deposited by physical vapor deposition (PVD) and plasma assisted chemical vapour deposition (PACVD), thick coatings (thermal spraying), and bulk ceramic materials. Samples were characterized using scanning electron microscopy (SEM), electron‐dispersive spectroscopy (EDS) and X‐Ray diffraction analysis (XRD). The results show varying resistance of the tool materials concerning the load profile. In order to provide an appropriate tool solution for the thixoforming of steels, different load profiles within the forming moulds are identified and the corresponding tool part is made from that material with the best performance. 相似文献
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金属钨涂层制备工艺的研究进展 总被引:2,自引:0,他引:2
金属钨属于难熔金属,具有高的强度和硬度,同时具有良好的化学稳定性,不易受到腐蚀,但其昂贵的价格及难加工特性限制了其应用,因此,用金属钨作为涂层材料来改善基体材料的性能,引起了众多研究者的关注。该文综述纯金属钨涂层的几种重要制备方法,包括:熔盐电镀法,等离子喷涂法,爆炸喷涂法,气相沉积法等。等离子喷涂是钨涂层制备中最为成熟的1种方法,基体材料不受限制,涂层厚度容易控制。熔盐电镀法能够通过电化学反应从化合物中一步获得厚度均匀的金属钨涂层,并且可避免引入氧和碳等杂质。化学气相沉积法获得的钨涂层致密度高;物理气相沉积法可以在任意基材上获得钨涂层。同时介绍这些方法各自的技术特点和目前的研究现状,并对金属钨涂层的制备方法进行展望。 相似文献
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对CVT法制备纯钛的反应热力学及反应体系中卤化物蒸汽压对钛沉积速率影响进行了分析,得出了最佳卤化反应源区和沉积区温度控制范围,实验得出了Ti最大沉积速率时的钛卤化物蒸汽压。 相似文献
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The conditions for obtaining titanium dioxide from the substrates titanium tetrachloride and oxygen and applying this to a surgical stainless steel of the type 316L by the plasma assisted chemical vapour deposition method have been determined. It was established that, during the process, titanium dioxide anatase is created, Crystallizing in a tetragonal lattice. During exposure of the 316L steel with the titanium dioxide coating, in Ringer's solution, protective properties of this covering improve. After 120 h the coating adopts superior barrier characteristics. Titanium dioxide covering increases the resistivity of steel of the type 316L to pitting corrosion and general corrosion. Any damage or partial removal of the coating does not cause an increased galvanic corrosion of the substrate. 相似文献
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Bruno Schmitz 《国际钢铁研究》2001,72(11-12):522-527
To promote continuous dry coatings for steel strip by PVD, CRM develops its own JVD (jet vapour deposition) simulator and applies an economical integration strategy combining continuous annealing of steel and vapour deposition by JVD. The JVD system is a very compact system, characterised by a high productivity, a very high metal yield, possibility of working at high partial pressure (up to 1 mbar), homogeneous metal distribution and alloy composition and good coating adherence. It was verified that continuous annealing is a very efficient surface pre‐treatment for steel strip in a wide range of industrial dew points. No additional thermal energy is needed for strip heating since this PVD system is introduced in the end section just after continuous annealing. Application to the Zn‐Mg system is described. Influence of annealing parameters, residual gas pressure, coating speed, steel strip temperature and chemistry are discussed. 相似文献