沉积温度对ZnO薄膜结构形貌及光学性能的影响

以Zn(NO3)2·6H2O为前驱体,采用超声喷雾热解法在玻璃衬底上沉积了ZnO薄膜,采用X射线衍射(XRD)、扫描电子显微镜(SEM)、紫外光谱仪(UVS)等对所得ZnO薄膜进行表征,研究了沉积温度对ZnO薄膜的结构、微观形貌及光学性能的影响。结果表明,沉积温度为500℃时所制备的薄膜质量最佳,形成的是六角纤锌矿ZnO结构,且薄膜沿(002)晶面择优取向生长显著,薄膜表面光滑致密,晶粒细小均匀,尺寸在50~60nm。薄膜表现出良好的光学性能,可见光透过率可达87%。     

Using HF rather than NH4F as doping source for spray-deposited SnO2:F thin films

Fluorine doped tin oxide SnO₂:F thin films were prepared by the spray pyrolysis (SP) technique on glass substrates by using SnCl₂·2H₂O as a precursor and NH4F and HF as doping compounds. A comparison between the properties of the films obtained by using the two doping compounds was performed by using I–V characteristics in the dark at room temperature, AC measurements, and transmittance. It is found that the films prepared by using HF have smaller resistivity, lower impedance and they are less capacitive than films prepared by using NH₄F. In addition, these films have higher transmittance, higher optical bandgap energy and narrower Urbach tail width. These results are interesting for the use of SnO₂:F as forecontact in CdS/CdTe solar cells.     

超声喷雾热分解制备ZnO薄膜及其光学性能的研究

以醋酸锌水溶液为前驱体,采用超声喷雾热分解方法在普通玻璃衬底上沉积了ZnO薄膜,以X射线衍射（XRD）、场发射扫描电子显微镜（FE-SEM）和紫外-可见光分光光度计（UV—Vis）等手段对所得ZnO薄膜的晶体结构、微观形貌和光学性能进行了分析,着重考察了衬底温度、衬底与喷嘴之间的距离、生长时间对ZnO薄膜晶体结构和光学性能的影响。结果表明,衬底温度大于450℃,载气流量为4L／min,衬底与喷嘴之间的距离为6cm,生长时间为30min下所得的ZnO薄膜较好,衍射峰较强,表面均匀致密,在可见光区域透过率为80％以上。     

注射超声喷雾热分解方法制备ZnO薄膜研究

以乙酸锌为原料加水合成ZnO前驱液,利用注射超声喷雾热分解方法在玻璃衬底上成功制备ZnO薄膜。通过正交选择液体注射速度、注射量、衬底温度、退火温度为实验要素,通过XRD、SEM、可见光透过率分析优化的制备条件为:液体注射速度为0.2 mL/min,注射量为3 mL,衬底温度为450℃,退火温度为500℃。制备的ZnO薄膜透光率达到85%。新的制备薄膜装置采用注射超声雾化手段,克服其雾化不均问题。     

Effect of oxygen partial pressure on epitaxial growth and properties of laser-ablated AZO thin films

Al-doped ZnO (AZO) thin films were grown on c-sapphire substrates by laser ablation under different oxygen partial pressures (P _O2). The effect of PO2 on the crystal structure, preferred orientation as well as the electrical and optical properties of the films was investigated. The structure characterizations indicated that the as-grown films were single-phased with a wurtzite ZnO structure, showing a significant c-axis orientation. The films were well crystallized and exhibited better crystallinity and denser texture when deposited at higher P _O2. At the optimum oxygen partial pressures of 10 - 15 Pa, the AZO thin films were epitaxially grown on c-sapphire substrates with the (0001) plane parallel to the substrate surface, i e, the epitaxial relationship was AZO (000 1) // Al₂O₃ (000 1). With increasing P _O2, the value of Hall carrier mobility was increased remarkably while that of carrier concentration was decreased slightly, which led to an enhancement in electrical conductivity of the AZO thin films. All the films were highly transparent with an optical transmittance higher than 85 %.     

Influence of argon gas pressure on the ZnO:Al films deposited on flexible TPT substrates at room temperature by magnetron sputtering

Aluminium doped ZnO thin films(ZnO︰Al) were deposited on transparent polymer substrates at room temperature by rf magnetron sputtering method from a ZnO target with Al2O3 of 2.0 wt%. Argon gas pressure varied from 0.5 Pa to 2.5 Pa with radio frequency power of 120 W. XRD results showed that all the ZnO︰Al films had a polycrystalline hexagonal structure and a (002) preferred orientation with the c-axis perpendicular to the substrate. The grain sizes of the films were 6.3-14.8 nm.SEM images indicated the ZnO︰Al film with low Argon gas pressure was denser and the deposition rate of the films depended strongly on the Argon gas pressure, increasing firstly and then decreasing with increasing the pressure. The highest deposition rate was 5.2 nm/min at 1 Pa. The optical transmittance of the ZnO︰Al films increased and the blue shift of the absorption edge appeared when the Argon gas pressure increased. The highest transmittance of obtained ZnO︰Al films at 2.5 Pa was about 85% in the visible region. The electrical properties of the films were worsened with the increase of the Argon gas power from 1 Pa to 2.5 Pa. The resistivity of obtained film at 1.0 Pa was 2.79×10-2 Ω·cm.     

Effect of pre-heating temperature on structural and optical properties of sol-gel derived Zn<Subscript>0.8</Subscript>Cd<Subscript>0.2</Subscript>O thin films

Zn_0.8Cd_0.2O thin films prepared using the spin-coating method were investigated. X-ray diffraction, scanning electron microscopy, and UV-Vis spectrophotometry were employed to illustrate the effects of the pre-heating temperature on the crystalline structure, surface morphology and transmission spectra of Zn_0.8Cd_0.2O thin films. When the thin films were pre-heated at 150 °C, polycrystalline ZnO thin films were obtained. When the thin films were pre-heated at temperatures of 200 °C or higher, preferential growth of ZnO nanocrystals along the c-axis was observed. Transmission spectra showed that thin films with high transmission in the visible light range were prepared and effective bandgap energies of these thin films decreased from 3.19 eV to 3.08 eV when the pre-heating temperature increased from 150 °C to 300 °C.     

Effect of air annealing on the optical electrical and structural properties of In2S3 films

The effect of the annealing temperature T _a on the optical, electrical and structural properties of the In₂S₃ films obtained by the spray pyrolysis method at 350°C substrate temperature was studied. All the In₂S₃ films annealed in the range from 100 to 400°C are polycrystalline with (220) preferential orientation. The resistivity decreases as T _a increases until it reaches a value of 25 Ohm-cm for T _a=400°C. The grain size also increases when T _a increases as observed in data calculated from X-ray measurements. XRD data indicates that samples show microstructural perfection improvement as a function of annealing temperature.     

压缩喷雾热分解法制备SnO2薄膜研究

以SnCl2·2H2O为原料,采用压缩喷雾热分解的方法在玻璃衬底和石英片衬底上制得氧化锡薄膜。采用X射线衍射仪（XRD）和扫描电镜（SEM）分别对薄膜的内部结构和表面形貌进行了表征。研究表明,500℃下制备的薄膜比较致密平整;320℃下,喷雾50min制得的薄膜的X射线衍射峰强度较强;相同喷雾时间下,当温度达到380℃时,X射线衍射峰的强度大幅度提高。     

Influence of deposition pressure on properties of ZnO: Al films fabricated by RF magnetron sputtering

Transparent conductive aluminum doped zinc oxide(ZnO:Al,AZO) films were prepared on glass substrates by rf(radio frequency) magnetron sputtering from ZnO: 3wt% Al_2O_3 ceramic target. The effect of argon gas pressure(PAr) was investigated with small variations to understand the influence on the electrical, optical and structural properties of the films. Structural examinations using X-ray diffraction(XRD) and scanning electron microscopy(SEM) showed that the ZnO:Al thin films were(002) oriented. The resistivity values were measured by four-point probe with the lowest resistivity of 5.76×10~(-4) Ω?cm(sheet resistance=9.6 Ω/sq. for a thickness=600 nm) obtained at the PAr of 0.3 Pa. The transmittance was achieved from ultravioletvisible(UV-VIS) spectrophotometer, 84% higher than that in the visible region for all AZO thin films. The properties of deposited thin films showed a significant dependence on the PAr.     

Effect of silver growth temperature on the contacts between Ag and ZnO thin films

Highly c-axis oriented ZnO thin films were deposited on Si substrates by the pulsed laser deposition (PLD) method. At different growth temperatures, 200 nm silver films as the contact metal were deposited on the ZnO thin films. The growth temperatures have great influence on the crystal quality of Ag films. Current-voltage characteristics were measured at room temperature. The Schottky contacts between Ag and ZnO thin films were successfully obtained when silver electrodes were deposited at 150°C and 200°C. Ohmic contacts were formed while the growth temperatures were lower than 150°C or higher than 200°C. After analysis, the forming of Ag/ZnO Schottky contacts was shown to be dependent on the appearance of the p-type inversion layer at the interface between Ag and ZnO layers.     

Growth and characterization of indium doped zinc oxide films sputtered from powder targets

Indium doped Zn O films were grown on quartz glass substrates by radio frequency magnetron sputtering from powder targets. Indium content in the targets varied from 1at% to 9at%. In doping on the structure, optical and electrical properties of Zn O thin films were studied. X-ray diffraction shows that all the films are hexagonal wurtzite with c-axis perpendicular to the substrates. There is a positive strain in the films and it increases with indium content. All the films show a high transmittance of 86% in the visible light region. Undoped Zn O thin film exhibits a high transmittance in the near infrared region. The transmittance of indium doped Zn O thin films decreases sharply in the near infrared region, and a cut-off wavelength can be found. The lowest resistivity of 4.3×10~(-4) Ω·cm and the highest carrier concentration of 1.86×10~(21) cm~(-3) can be obtained from Zn O thin films with an indium content of 5at% in the target.     

ZnO：Al透明导电膜制备工艺及其性能的研究

采用溶胶-凝胶法在载波片上制备了Al^3＋掺杂型ZnO薄膜．所用溶胶以乙二醇甲醚为溶剂,醋酸锌为前躯物,乙二醇胺为稳定剂经反应制得;用甩膜法在基片上甩膜,经热处理后在玻璃基片制备出掺铝ZnO薄膜;利用X射线分析仪、分光光度计、四探针测试仪对薄膜的结构和光电特性进行了研究．     

退火条件对ZnO薄膜结构和光学性能的影响

采用溶胶-凝胶法在单晶硅Si(100)衬底上制备了ZnO薄膜,研究了退火温度对ZnO结构和光学性能的影响。实验发现,退火可以明显地改善ZnO薄膜的结构和光学性能。随着退火温度的升高,ZnO薄膜的晶粒增大,同时在室温下观察到明显的紫外发光现象,其紫外PL谱峰值变强,并有红移现象。     

Influence of annealing temperature on the properties of TiO2 films annealed by ex situ and in situ TEM

TiO₂ thin films were deposited on quartz substrates by DC reactive magnetron sputtering of a pure Ti target in Ar/O₂ plasma at room temperature. The TiO₂ films were annealed at different temperatures ranging from 300 to 800 °C in a tube furnace under flowing oxygen gas for half an hour each. The effect of annealing temperatures on the structure, optical properties, and morphologies were presented and discussed by using X-ray diffraction, optical absorption spectrum, and atomic force microscope. The films show the presence of diffraction peaks from the (101), (004), (200) and (105) lattice planes of the anatase TiO₂ lattice. The direct band gap of the annealed films decreases with the increase of annealing temperature. While, the roughness of the films increases with the increases of annealing temperature, and some significant roughness changes of the TiO₂ film surfaces were observed after the annealing temperature reached 800 °C. Moreover, the influences of annealing on the microstructures of the TiO₂ film were investigated also by in situ observation in transmission electron microscope.     

离子束增强沉积Al-N共掺杂ZnO薄膜的制备

用Al2O3粉体与ZnO粉体均匀混合,压制成溅射靶。在Si和SiO2/Si衬底上,用离子束增强沉积(IBED)方法对沉积 膜作Ar+/N+注入,制备Al-N共掺杂氧化锌薄膜(ANZO)。在氮气氛中作适当的退火,可以方便地获得取向单一、结构致 密、性能良好的共掺杂ZnO薄膜。探索用IBED方法在Si和SiO2衬底上制备优质掺杂薄膜的可能性。初步研究了ANZO共掺 杂薄膜的结构、电学和光学性能。     

Transport properties and microstructure of La0.7Sr0.3MnO3 nanocrystalline thin films grown by polymer-assisted chemical solution deposition

Perovskite-based materials can be widely used in the aerospace and transportation field. Perovskite manganese oxides La_0.7Sr_0.3MnO₃ (LSMO) thin films were grown on LaAlO₃ (100) and Si (100) single crystal substrates by the polymer-assisted chemical solution deposition (PACSD) method. Electronic transport behavior, microstructure, and magnetoresistance (MR) of LSMO thin films on different substrates were investigated. The resistance of LSMO films fabricated on LaAlO₃ substrates is smaller than that on the Si substrates. The magnetic field reduces resistance of LSMO films both on Si and LAO in the wide temperature region, when the insulator-metal transition temperature shifts to higher temperature. The low-field magnetoresistance of LSMO films on Si in low temperature range at 1 T is larger than that of LSMO films on LAO. However, the MR of LSMO film on LAO films at room-temperature is about 5.17 %. The thin films are smooth and dense with uniform nanocrystal size grain. These results demonstrate that PACSD is an effective technique for producing high quality LSMO films, which is significant to improve the magnetic properties and the application of automotive sensor.

     

Improved visible transparency of SIO<Subscript>2</Subscript>/ZNO:AL /CEO<Subscript>2</Subscript>-TIO<Subscript>2</Subscript>/SIO<Subscript>2</Subscript> multilayer films with high UV absorption and infrared reflection rate

New visible transparent, UV absorption, and high infrared reflection properties have been realized by depositing multilayer SiO₂/ZnO: Al/CeO₂-TiO₂/SiO₂ films onto glass substrates at low temperature by radio frequency magnetron sputtering. Optimum thickness of SiO₂, ZnO: Al (ZAO) and CeO₂-TiO₂ (CTO) films were designed with the aid of thin film design software. The degree of antireflection can be controlled by adjusting the thickness and refractive index. The outer SiO₂ film can diminish the interference coloring and increase the transparency; the inner SiO₂ film improves the adhesion of the coating on the glass substrate and prevents Ca²⁺, Na⁺ in the glass substrate from entering the ZAO film. The average transmittance in the visible light range increases by nearly 18%-20%, as compared to double layer ZAO/CTO films. And the films display high infrared reflection rate of above 75% in the wavelength range of 10-25 μm and good UV absorption (> 98%) properties. These systems are easy to produce on a large scale at low cost and exhibit high mechanical and chemical durability. The triple functional films with high UV absorption, antireflective and high infrared reflection rate will adapt to application in flat panel display and architectural coating glass, automotive glass, with diminishing light pollution as well as decreasing eye fatigue and increasing comfort.     

TiO2修饰层对ZnO薄膜结构及发光性质的影响

为了增强ZnO薄膜的发光性能,采用溶胶-凝胶法分别制备3层ZnO基和6层ZnO基底上覆不同层数TiO₂修饰层的透明薄膜,利用X射线衍射仪、紫外-可见光分光光谱仪和荧光光谱仪对薄膜样品的晶体结构、光致发光性能和可见光透过率进行研究。结果表明:所有混合镀膜样品,其结晶性均受到阻碍,所得样品呈现出明显的非晶状态;TiO₂修饰层层数对ZnO薄膜的紫外发光强度有很大的影响,空气退火时3层基的TiO₂修饰层最佳层数为1层,6层基的最佳层数为3层,而真空退火时修饰层的最佳层数均为2层;ZnO薄膜紫外发光强度最多可增强近10倍;所有样品可见光波段平均透过率均达到80%以上,修饰层和退火方式对薄膜透过率影响不大。     

Fe掺杂对ZnO薄膜的微结构与光学性质的影响

采用溶胶一凝胶法在石英玻璃衬底上制备了Fe掺杂的ZnO薄膜,研究了不同的Fe掺杂浓度对ZnO薄膜的微结构与光学性质的影响.利用x射线衍射分析了薄膜样品的晶向和晶相.利用原子力显微镜观测了薄膜样品的表面形貌,利用双光束紫外-可见分光光度计分析了znO薄膜样品的光学性质.实验结果表明:所有ZnO薄膜样品都是六角纤锌矿结构,ZnO晶粒沿c轴择优生长.质量分数为1%fe掺入之后,ZnO薄膜的C轴择优取向进一步增强,薄膜的晶化质量也得到进一步提高.当Fe的掺杂浓度高于1%时,ZnO薄膜(002)衍射峰的强度又降低了,这可能是由于Fe2+(x=2或3)和zn2+具有不同的离子半径,大量的Fe2+进入晶格取代Zn2+导致晶格严重畸变,从而影响了znO晶粒的正常生长.所制备的ZnO薄膜在可见光区都具有高的透射丰,由吸收边估算出来的ZnO薄膜的光学带隙表明:随着Fe的掺杂浓度的提高,光学带隙逐渐展宽.