尺蠖式压电陶瓷驱动电源设计

为了满足尺蠖式压电陶瓷驱动器的控制需要,设计了相应的驱动电源。DSP是控制器,通过网口接收上位机的控制命令,通过异步总线与FPGA进行数据通信,FPGA操作4路D/A生成4路满足相应时序要求的波形,波形经过精密运放前级放大和由分立元器件搭建的功率放大,输出到尺蠖式压电陶瓷驱动器的电源输入端。测试和试验表明,电源带宽高,纹波小,阶跃响应特性和动态特性良好,能够精确的控制尺蠖式压电陶瓷驱动器微位移定位,可以应用在精密工程技术领域中。     

基于Buck电路的高压压电陶瓷驱动电源设计

研究设计一款基于Buck电路的高压大电流压电陶瓷驱动电源。介绍了该驱动电源的设计方案、主要功能、硬件电路、控制软件以及实验结果。该驱动电源通过Buck并联电路,电流反馈调节输出电压电流。输入信号经巴特沃斯滤波器进行最大限度还原,通过归一化算法将计算结果写回寄存器控制电路。当等效电容5μF压电陶瓷为负载时,在5 Hz～2 kHz正弦信号输入,直流电压1 kV输入条件下,该驱动电源输出驱动电压峰值最高为900 V,输出电流峰值最大为6 A,并且增益可变。实验结果表明,该驱动电源具有高电压大电流的驱动性能,动态性能良好,转换效率高达90%以上,满足压电陶瓷驱动电源的要求。     

用于大范围纳米级压电微动台的驱动控制系统

介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。根据其运动原理特点,设计完成了该压电微动台的控制系统。在电压控制下,利用压电陶瓷的逆压电效应,通过机械装置将压电陶瓷的微小位移输出,达到精密定位的目的。最后对该控制系统进行了性能测试。实验表明,该控制系统所产生的三角波、方波信号纹波电压小,信号稳定,其中放大电路部分放大倍数为57,能够驱动所选用的压电陶瓷,满足微动台驱动要求。     

一种新型的压电陶瓷驱动电源研究

为了满足压电陶瓷对驱动电源纹波小的要求,基于两路交错并联电源电路的研究,提出了四路交错并联boost 驱动电源电路的拓扑.四路交错并联boost驱动电源电路中的四条支路可减小输入电流纹波,同时还可减小输出电压纹波,可满足压电陶瓷对驱动电源高稳定性、低纹波、高效率的要求.分析了四路交错并联boost电源电路的基本原理,通...     

高压低纹波纳米驱动器

针对压电陶瓷进行了纳米级驱动技术的研究,优化了传统的直流放大式驱动技术的系统特性。深度分析了以压电陶瓷为驱动元件的纳米级微位移驱动技术的特性,实现了以下两方面的突破:在设计基于压电陶瓷元件实现纳米精度定位的研究中,设计出了数控压电陶瓷驱动器;深入研究了压电陶瓷容性元件特性后设计出电压恒流源式驱动电路,同时在电路中引入负反馈,稳定了驱动器的输出。通过大量实验证明,该设计很好地解决了压电陶瓷驱动高精度、快响应的难点,具有很高的实用价值。     

大容性负载双极性高压功率放大器设计

设计了一种适合压电陶瓷驱动器等大容性负载动态应用的双极性高压功率放大器,它基于误差放大式原理,采用高压集成运放(PA89)驱动多组并联功率放大级的电路结构,在实现双极性高电压输出的同时具有很强的电流驱动能力.该放大器驱动等效电容为2.5μF的压电陶瓷驱动器时,能实现单端到地-500～+500V高压输出,电压增益40dB...     

基于粘滑驱动的精密旋转压电执行器研究

研究了一种基于粘滑驱动原理的旋转式精密压电执行器。运用一种十字交叉型柔性铰链将2个压电陶瓷的直线位移转化为旋转角位移,然后通过与转子之间可调的摩擦接触实现执行器的粘滑运动。在锯齿波电压信号的驱动下,该压电执行器能够输出大行程、高分辨率的角位移。详细介绍了该压电执行器的结构组成与工作原理,并对执行器的运动进行了分析。建立了试验系统对加工的执行器样机的工作性能进行了测试。     

叠层型压电驱动器技术及实验研究

叠层型压电陶瓷利用逆压电效应可以得到精确的微位移量.介绍了叠层型压电驱动器的性能特性.并基于正交三角放大原理设计了一种微位移放大机构,使其将叠层型压电微位移器的位移量放大.实验结果表明,驱动器各项指标均达到设计要求,证明了设计理论的正确性.     

剪切干涉仪精密相移系统的研制

设计了一种用于迈克尔逊干涉仪横向剪切相移测量的精密相移系统。该系统采用压电陶瓷驱动器作为驱动元件,通过柔性铰链平移机构推动反射镜实现无摩擦、无间隙微位移。采用电容传感器进行位移反馈测量,利用单片机系统作为中央处理器进行PID闭环控制以实现高精度相移。对相移系统的行程及定位精度进行了测试,当输入阶跃位移信号为80nm时,相移系统输出位移精度小于3nm。当相移系统连续位移2μm,每步位移为80nm时,其输出位移的定位精度小于5nm。实验结果表明,相移系统的行程与定位精度满足剪切干涉仪设计要求。     

高电压输入双管反激辅助电源驱动研究

高性能的开关管驱动技术是实现辅助电源安全、可靠运行的必要条件。首先,针对高电压输入双管反激辅助电源驱动具有高电压隔离、高频率、低延时和无外接电源等特点,对比各种可行的驱动方案,确定了一种安全、简单的变压器隔离双管驱动电路,并设计了相应的驱动器;其次,通过调整驱动变压器绕组比,实现了开关管在各种控制脉冲下的充分导通,通过增加驱动器输出信号耦合电感,提高了驱动信号的同步性;第三,根据驱动脉冲上升、平顶、下降三个阶段,建立了驱动器等效电路模型,推导了相关公式,分析了驱动器主要参数对驱动性能的影响;最后,在300V~2 500V输入的双管反激辅助电源样机上进行了相关实验,验证了所设计的双管隔离驱动器的正确性、可行性。     

A Piezoelectric-Metal-Cavity (PMC) actuator

A novel piezoelectric-metal-cavity (PMC) actuator has been designed to exhibit a large flexural displacement. This PMC actuator consists of a metal ring sandwiched between two identical piezoelectric unimorphs. The radial contraction of the piezoelectric ceramic is converted into flextensional motion of the unimorph, causing a large flexural displacement in the centre part of the actuator. The metal cavity acts a function of circumferential coupling of the piezoelectric unimorphs. It was found that the effective piezoelectric charge coefficient of the PMC actuator can approach 40,000 pC/N. With its high piezoelectric and electromechanical coupling coefficients, the PMC actuator gives a static displacement 16 μm can be produced under a d.c. driving voltage of ±77 V.     

Development of a piezoelectric pump using hinge-lever amplification mechanism

This paper presents the design, fabrication, and tests of a piezoelectric pump using hinge-lever amplification mechanism. The proposed hinge-lever amplification mechanism consists of a base frame, a lever with contact steel ball, and a multilayer piezoelectric actuator. The lever is in contact with the piezoelectric actuator through hinged steel ball. The extended piezoelectric actuator pushes the contact steel ball; therefore, a small displacement of piezoelectric actuator can be amplified through the movement of the lever. The amplified displacement of 683 μm was measured at the applied voltage of 100 V. These results show the fact that the proposed hinge-lever mechanism can be obtained the amplification ratio of up to ten times. The piezoelectric pump using hinge-lever amplification mechanism was fabricated and pumping performance was experimentally investigated. The pump achieved no-load flow rate, maximum output pressure of 600 ml/min and 6.8 kPa, respectively, at the applied voltage of 100 V and driving frequency of 250 Hz.     

Piezoelectric Ring-Morph Actuators for Valve Application

This paper presents piezoelectric ring-morph actuators designed to produce a large flexural displacement for valve actuation application. The ring-shaped piezoelectric plate in the actuator produces a radial contraction or expansion and causes the center part of the metal disc to generate a large flexural displacement. The PZT ring creates a space under the metal disc which permits it to bend with a curvature larger than that of the conventional bimorph in the axis direction of the ring-morph when the PZT ring under the metal disc contracts. A prototype with diameter of 25.4 mm and thickness of 0.55 mm could produce a total stroke (static displacement) of over 130 m under a driving voltage of ±300 V and a load of 2 N. The maximum generative force of ring-morph actuator was about 30 N.     

非接触式球形转子压电作动器的研究

提出了一种基于近声场悬浮的非接触式球形转子压电作动器,由压电陶瓷激发碗式定子产生两相B04驻波并合成一高声强行波,进而诱发高声强声场来同时悬浮和驱动球形转子。建立了非接触式球形转子压电作动器的有限元模型,对定子进行了动力学分析与优化设计,确定了结构方案,最后加工、制造了样机。通过试验得到了定子的振动参数,搭建了整个样机的测试系统,对其悬浮和驱动特性进行了分析,结果表明球形转子在近声场的作用下成功地实现了非接触式旋转。     

直线型超声波电动机压电作动器的位移特性研究

由于压电作动器的位移特性对直线超声波电动机的性能有较大的影响,以单层和叠堆压电陶瓷作动器为对象,分别通过理论和计算机模拟对其位移特性进行分析,得出了影响压电作动器位移特性的主要因素,为研制新型叠堆压电陶瓷作动器和开发精密直线型超声波电动机提供理论参考。     

A 2-dimensional impact driven precise actuator using piezoelectric bimorphs

A new precise actuator is proposed, which is actuated by the impact force of an end-loaded piezoelectric bimorph cantilever, and bears two degrees of freedom for translation and rotation. The dynamic characteristics of the piezoelectric bimorph were analyzed by FEM, and are further proved by experimental tests. A new control system for the actuator was put forward and tested, which is called the fixed-frequency with adjustable voltage. In addition, the actuator’s performance of translation and rotation were both measured. The results demonstrate that the actuator is characterized by a simple structure, large movement range, strong driving ability and high positioning resolution. Its cost is estimated at only 1% of the traditional impact actuators. __________ Translated from Journal of Jilin University (Engineering and Technology Edition), 2006, 36(1): 67–71 (in Chinese)     

Electromechanical performance of structurally graded monolithic piezoelectric actuator

In this paper, the effect of structural gradients in monolithic piezoelectric actuators is investigated. Different cross-section profiles were micro-machined with a laser into commercial PZT 5H bulk discs with thicknesses of 375 µm and 500 µm (? 25 mm). Profiles and curvatures of the actuators were measured which showed both concave and convex structures, thus indicating pre-stress of the actuators. After poling, the distribution of out-of-plane displacement was scanned by a fibre-optic laser vibrometer. Maximum displacements of ～6.3 µm and ～24.8 µm were obtained from a freely moving and clamped ～375 µm thick actuator, respectively, in a ±0.5 V/µm electric field at 10 Hz frequency without load. Furthermore, deflection in the centre of the actuators was measured up to 184 mN load using the same electric field and frequency. Bending of the bulk actuators without any additional layer was a consequence of the gradient in poling and driving electric field via thickness variation of the material. Hence, different regions produced strain distribution and bending in a similar fashion to other benders. Actuators with the highest arch height exhibited the highest displacement and load bearing capabilities derived from the increased area moment of inertia and enhanced piezoelectric response due to pre-stress. The results show that the monolithic bending actuators can be realised by simple structural designing of the actuator. Such structural gradients can be one reason contributing to the higher displacement of RAINBOW actuators compared to other pre-stressed actuators. In a further development, the structural gradients can be utilized in high displacement pre-stressed actuators and in miniaturized monolithic piezoelectric devices.     

Analysis of primary-on-slider ultrasonic piezoelectric actuators and experiments on multidegree of motion freedom plane actuator

Recently, various machines and tools have been miniaturized, and with this trend, the size of an actuator becomes a very important factor. An ultrasonic actuator is different from other actuators using electromagnet force in the driving principle. The structures of an ultrasonic piezoelectric actuator is simple. An ultrasonic actuator converts the ultrasonic mechanical energy to mechanical thrust force by a friction force. Based on this idea, various ultrasonic actuators have been proposed and experimentally constructed. In this paper, the basic characteristics of a piezoelectric actuator are analyzed theoretically. The relationship between the thrust force and the weight force is clarified and verified by experiments. Various prototypes of plane ultrasonic piezoelectric actuators are constructed experimentally, and the fundamental characteristics are measured.