共查询到20条相似文献,搜索用时 187 毫秒
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集成光栅器件是光集成电路(OIC)和光电子集成电路(OEIC)中的重要功能器件,真有波导材料中光波长量级的微细周期结构,其制作技术要求极为苛刻,本文侧重介绍在集成光栅器件制备中的全息光刻、电子束和离子束等微细加工技术。 相似文献
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本文从光耦生产使用过程、光耦失效机理、器件内部结构、器件工艺设计、器件应用环境、器件设计质量可靠性等方面进行全面分析。通过器件失效机理、X光、开封性能参数测试分析等对光耦器件本身全方位分析论断,根据分析结果调整光耦内部结构设计以及生产工艺,从器件本身应用环境、器件可靠性设计、光耦内部结构设计全面论证分析整改,从器件本身质量提升着手,进行全面、系统化提升器件质量。 相似文献
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碳化硅电力电子器件在电网中的应用展望 总被引:1,自引:0,他引:1
碳化硅电力电子器件具有高压、高温和高效率等优势,是智能电网中理想的电力电子器件。介绍了近年来碳化硅材料及器件在研发和产业化方面的最新发展。随着6英寸碳化硅单晶和外延产品的问世并日趋成熟,更高电压等级、更大导通电流、更高效的碳化硅电力电子器件将被研发出来。并对其在电网中的应用现状与前景进行了展望:碳化硅器件在诸如分布式发电并网装置、电力电子变压器和电力电子断路器等方面显示了巨大的性能优势和市场前景。 相似文献
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纳米磁性材料及器件的进展 总被引:1,自引:0,他引:1
概述了国内外纳料磁性材料及器件研究与开发的进展。具体介绍纳米磁性粒子、铁基纳米晶软磁合金、稀土永磁快淬磁粉、人工格、纳米磁性丝、射频用复合软磁材料的制备工艺、主要性能及其在磁记录、传感器、磁电子器件中的应用。 相似文献
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氮化镓GaN(gallium nitride)材料非常适合应用于高频、高功率、高压的电子电力器件当中。目前,GaN功率电子器件技术方案主要分为Si衬底上横向结构器件和Ga N自支撑衬底上垂直结构器件2种。其中,横向结构器件由于制造成本低且有良好的互补金属-氧化物-半导体CMOS(complementary metal-oxide-semiconductor)工艺兼容性已逐步实现产业化,但是存在材料缺陷多、常关型难实现、高耐压困难以及电流崩塌效应等问题;垂直结构器件能够在不增大芯片尺寸的条件下实现高击穿电压,具有非常广阔的市场前景,也面临着材料生长、器件结构设计和可靠性等方面的挑战。基于此,主要针对这两种器件综述介绍并进行了展望。 相似文献
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微机电系统(MEMS)的动态表征是为可动MEMS器件的设计和加工过程提供可靠的实验数据反馈.文中构建了一个MEMS动态测试系统,它采用了光学检测方法,具有非接触、快速、高精度等优点.系统分别采用光流技术和显微干涉技术,结合频闪照明的方法,对MEMS器件的面内和离面运动特性进行了测量.通过对一个微加工水平谐振器的运动特性测量实验说明了系统具有的功能. 相似文献
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氮化镓(GaN)作为第三代半导体材料的代表,具有优异的材料物理特性,更加适合于下一代电力电子系统对功率开关器件更大功率、更高频率、更小体积和更恶劣工作温度的要求。为了兼容Si基CMOS工艺流程,以及考虑到大尺寸、低成本等优势,在Si衬底上进行GaN材料的异质外延及器件制备已经成为业界主要技术路线。详细介绍了在6英寸Si衬底上外延生长的AlGaN/GaN HEMT结构功率电子材料,以及基于6英寸CMOS产线制造Si基GaN功率MIS-HEMT和常关型Cascode GaN器件的相关成果。 相似文献
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O. Auciello A. M. Dhote R. Ramesh B. T. Liu S. Aggarwal A. H. Mueller 《Integrated ferroelectrics》2013,141(1):295-306
We review our studies of film growth and interface processes performed using complementary in situ and ex situ characterization techniques that provide valuable information critical to the development of materials integration strategies for the fabrication of electroceramic film-based devices. Specifically, we review our work performed using in situ time-of-flight ion scattering and recoil spectroscopy (TOF-ISARS) / X-ray photoemission spectroscopy (XPS) / spectroscopic ellipsometry (SE), in conjunction with ex situ TEM and other techniques to study film growth and interface processes critical to the fabrication of non-volatile ferroelectric memories (NVFRAMs), dynamic random access memories (DRAMs), and high frequency devices based on high-K thin films. TOF-ISARS involves three distinct but closely related experimental methods, namely: ion scattering spectroscopy, direct recoil spectroscopy and mass spectroscopy of recoiled ions, which provide monolayer-specific information on film growth and surface segregation processes. Spectroscopic Ellipsometry enables investigation of buried interfaces. XPS provides valuable information on the chemistry of surface and interfaces. Specifically, we discuss: a) studies of oxidation of Ti-Al layers and synthesis and properties of La 0.5 Sr 0.5 CoO 9 /Ti-Al heterostructured layers for integration of PZT capacitors with Si substrates, and b) studies of BaSr x Ti 1 m x O 3 layer integration with Si substrates relevant to DRAMs, high frequency devices and high-K gate oxides for integrated circuits. This review shows the power of combined in situ / ex situ analytical techniques to provide valuable information for material integration strategies for electroceramic thin film-based devices. 相似文献
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J. Baborowski 《Journal of Electroceramics》2004,12(1-2):33-51
In this paper we present an overview of processes for fabrication of piezoelectric thin film devices using PZT (Pb(Zr x Ti1 ? x )O3) in planar structures. These structures are used in cantilever-like and membrane configurations for sensing and actuation. Elaboration of a compatible wet and dry etching sequence for patterning of PZT, electrodes, SiO2 and silicon substrate is the key issues. The method for compensation of mechanical stresses to obtain flat, multilayer structures is demonstrated. Definition of membrane thickness and release of the structures are obtained by Deep Reactive Ion Etching of silicon (SOI—silicon on insulator substrates) or by surface micromachining. The complete process has been used for fabrication of cantilever arrays, ultrasonic transducers and pressure sensors. Excellent permittivity and transverse piezoelectric coefficient of PZT have been obtained with the final devices. Other examples of applications like: ferroelectric memories, nanopatterning and local growth of PZT are presented as well. The microfabrication of piezoelectric MEMS was found to be a complex task where all aspects from device design, material properties and microfabrication to assessment of performance are closely interconnected. 相似文献
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碳纳米管场效应晶体管设计与应用 总被引:2,自引:0,他引:2
碳纳米管具有一些独特的电学性质,在纳米电子学有很好的应用前景。随着纳米技术的发展,新的工艺技术也随之产生。纳米器件的"由下至上"制作工艺,是在纳米技术和纳米材料的基础之上发展起来的,在新工艺基础之上,可以利用纳米管、纳米线的性质制作成各种新的电子器件。由于碳纳米管可以和硅在电子电路中扮演同样的角色,随着基于碳纳米管的纳米电路研究的深入发展,电子学将在真正意义上从微电子时代进入纳电子时代。从分析碳纳米管分立场效应晶体管典型结构特点入手,分析阐述了碳纳米管构建的典型纳米逻辑电路结构特征及碳纳米管在柔性纳米集成电路方面的应用。 相似文献
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Precise knowledge of the characteristics of core material Is essential for the design of electromagnetic devices I Ike dynamos, I nstrument transformers and relays. Conventional measurement of the core characteristics Is a tedious process as it Involves collection of voluminous data and corrections thereto. An instrument using linear compensating networks and exploiting the processing capabilities of the popular microprocessor is developed for the measurement of core characteristics such as specific iron loss and the dynamic B-H curve. The necessary corrections are Incorporated In the software so that the end result can be straightaway used in design. 相似文献