Capillary flow in microchannels

The surface of microchannels, especially polymer channels, often needs to be treated to acquire specific properties. This study investigated the capillary flow and the interface behavior in several glass capillaries and fabricated microchannels using a photographic technique and image analysis. The effect of air plasma treatment on the characteristics of capillary flow in three types of microfluidic chips, and the longevity of the acquired surface properties were also studied. It was observed that the dynamic contact angles in microchannels were significantly larger than those measured from a flat substrate and the angle varied with channel size. This suggests that dynamic contact angle measured in situ must be used in the theoretical calculation of capillary flow speed, especially for microfabricated microchannels since the surface properties are likely to be different from the native material. This study also revealed that plasma treatment could induce different interface patterns in the PDMS channels from those in the glass and PC channels. The PDMS channel walls could acquire different level of hydrophilicity during the plasma treatment, and the recovery to hydrophobicity is also non-homogeneous.     

Corona discharge assisted thermal bonding of polymer microfluidic devices

We present a study on the use of corona discharge surface treatment to achieve a fast thermal diffusion bonding process for the creation of microfluidic chips. Wafer scale bonding at 100 mm diameter was attempted. Polymethyl methacrylate (PMMA) wafers were hot embossed to create microchannels before bonding to another blank PMMA wafer. Corona discharge treatment of the PMMA resulted in a more hydrophilic surface. The average water contact angle on PMMA surface decreased from 74.5° before treatment to 35.5° after the treatment. The optimized bonding condition was found to be: 108°C for 4 min at a contact pressure of 3.1 MPa. The bonded chips could withstand an internal gauge pressure in the microchannels of at least seven bars. The rectangular shape of the cross section of the microchannels was conserved with some contraction in the dimensions of 3.7% on the mean widths and 2.1% on the mean depths. Bonding strength was found to increase with the bonding temperature and time while the effect of bonding pressure is evident at lower pressures. At higher pressures, the effect of bonding pressure seemed to have reduced. These effects could be explained by the diffusion mechanisms of the process.     

A low-temperature IC-compatible process for fabricatingsurface-micromachined metallic microchannels

In this paper, a low-temperature integrated-circuit (IC)-compatible process for fabricating metallic microchannels is described. Arrays of 1-100 metallic microchannels have been fabricated on silicon and glass substrates. The process can be extended to many planar substrate materials including polymers and ceramics. The microchannels are formed using microelectro-formed metals. The microchannels demonstrated in this paper use nickel as the structural material and gold as the surface coating on the inside walls of the microchannels. The inner dimensions of the individual microchannels fabricated to date range from 30 μm to 1.5 mm in width, 0.5 mm to several centimeters in length, and 5-100 μm in thickness. The wall thickness ranges from 5 to 50 μm. The microchannel fabrication technology enables the fabrication of surface microchannels with a relatively large cross-sectional area. The metallic microchannels can be fabricated to extend from the substrate edge. Interfacing schemes are given for attaching external pressure feeds     

Surface polishing of quartz-based microfluidic channels using CO<Subscript>2</Subscript> laser

Recently, microgrinding using a polycrystalline diamond tool has been introduced to fabricate microchannels and structures from quartz (fused silica). Compared to wet or dry etching processes, the grinding process is very simple and time-efficient for prototyping. However, the roughness of the machined surface remains an issue, because the surface is covered with many small cracks. Poor surface roughness can affect fluid flow in the microfluidic channels. To reduce the surface roughness of microchannels generated by a grinding process, this study presents the laser polishing of quartz and investigates the effects of the translational speed and pitch of a laser spot on the surface roughness and shape accuracy of microchannels.     

Fabrication of microchannels in single crystal diamond for microfluidic systems

A growth of single crystal diamond (SCD) microchannels on HPHT diamond substrate has been carried out successfully by a simple and novel method. Firstly, aluminum film was patterned on SCD diamond substrate surface by magnetron sputtering, photolithography and dry etching techniques. Secondly, the aluminum patterns were transferred onto diamond substrate via inductively coupled plasma etching to form grooves on diamond surface. Finally, microchannels were achieved by epitaxial lateral overgrowth of SCD on the surface of prepared substrate by microwave plasma chemical vapor deposition system. After that, fluorescent liquid was introduced to check hollowness of the microchannels. This work provides a simple and time saving method to fabricate SCD microchannels for microfluidic system, which offers a great potential for hard environment applications.     

UV Laser Micromachining of Polymers for Microfluidic Applications

We have recently begun to explore the use of UV laser ablation micromachining to construct microfluidic devices in polymers. This technique can create microchannels rapidly and modify the resulting polymer surface in a single step. By ablating under different atmospheres, it is possible to alter both the surface chemistries and physical surface morphologies of the microchannels. We have employed electroosmotic flow measurements, chemical mapping, and optical microscopy to characterize the microfluidic devices. In addition, we have studied the parameters affecting the ablation, such as the laser wavelength, laser fluence, laser firing repetition rate, and the material being ablated.     

Experimental investigations of liquid flow in rib-patterned microchannels with different surface wettability

The effects of rib-patterned surfaces and surface wettability on liquid flow in microchannels were experimentally investigated in this study. Microchannels were fabricated on single-crystal silicon wafers by photolithographic and wet-etching techniques. Rib structures were patterned in the silicon microchannel, and the surface was chemically treated by trichlorosilane to create hydrophobic condition. Experiments with water as the working fluid were performed with these microchannels over a wide range of Reynolds numbers between 110 and 1914. The results for the rib-patterned microchannels showed that the friction factor with the hydraulic diameter based on the rib-to-upper-wall height was lower than that predicted from incompressible theory with the same height. The friction factor-Reynolds number products for the hydrophobic condition increased as Reynolds number increased in the laminar flow regime. The experimental results were also compared with the predictive expressions from the literature, and it was found that the experimental data for the small rib/cavity geometry was in good agreement with those in the literature.     

Flow rate-modified streaming effects in heterogeneous microchannels

A general model based on the Onsager reciprocal relations is developed to study the streaming potential and streaming current in heterogeneous microchannels. The surface heterogeneities may be symmetrically or asymmetrically distributed parallel or perpendicular to the flow axis. Both streaming effects are modified by the flow rate through the heterogeneous channel, to eliminate the possible influence of electrokinetic flow on the streaming potential and streaming current measurements. Although they are still dependent on the distribution of surface heterogeneity, the flow rate-modified streaming effects are demonstrated to provide more consistent results with the traditional linear assumption than do the traditional ones, especially apparent in small microchannels.     

Microfluidic liquid actuation through ground-directed electric discharge

In this article, we present a new technique to actuate liquids in microchannels using ground-directed electric discharge generated by a portable corona device. When an electric discharge is applied, the air in the microchannel is ionized causing a change in the surface energy. The resulting change in the contact angle induces rapid liquid transport through the channel by capillary action. In contrast to established plasma treatment this method employs a ground electrode that guides the electric field. This approach enables rapid treatment of select microchannels and thus provides a means of real-time fluid actuation as opposed to simply a pretreatment process. Instantaneous fluid velocities show power-law dependence with time and fit theoretical models at a contact angle of 65°. Average fluid velocities are on the order of 5 cm/s, and thus channels on the order of 1-cm long are filled in ~0.2 s. To demonstrate the potential of this technique for integrated lab-on-a-chip applications, the method was employed in serpentine channel, for on-demand fluid routing, to initiate a mixing process, and through an on-chip integrated microelectrode.     

Gaseous slip flow in long microchannels

An analytic and experimental investigation into gaseous flow with slight rarefaction through long microchannels is undertaken. A two-dimensional (2-D) analysis of the Navier-Stokes equations with a first-order slip-velocity boundary condition demonstrates that both compressibility and rarefied effects are present in long microchannels. By undertaking a perturbation expansion in ϵ, the height-to-length ratio of the channel, and using the ideal gas equation of state, it is shown that the zeroth-order analytic solution for the streamwise mass flow corresponds well with the experimental results. Also, the effect of slip upon the pressure distribution is derived, and it is obtained that this slip velocity leads directly to a wall-normal migration of mass. The fabrication of wafer-bonded microchannels that possess well-controlled surface structure is described, and a means for accurately measuring the mass how through the channels is presented. Experimental results obtained with this mass-flow measurement technique for streamwise helium mass flow through microchannels 52.25-μm wide, 1.33-μm deep, and 7500-μm long for a pressure range of 1.6-4.2 atmospheres (outlet pressures at atmospheric) are presented and shown to compare favorably with the analysis     

Enhanced wetting properties of silicon mesh microchannels coated with SiO2/SnO2 nanoparticles through layer-by-layer self assembly

The enhanced wetting property of silicon mesh microchannels coated with SiO₂/SnO₂ nanoparticles is presented in this paper. The SiO₂/SnO₂ bi-layers are prepared using layer-by-layer nano self assembly. It is found that the silicon mesh microchannels are super hydrophilic and demonstrated powerful capillary. The capillary rise rate is characterized by measuring the front location of liquid on the silicon mesh surface, laid on a 45° inclined platform. For a silicon mesh sample with an overall dimension of 25 mm × 25 mm, when the microchannel width is 0.5 mm, the liquid front can reach the top edge of the sample in approximately 30 s. The mesh silicon surface with a SiO₂/SnO₂ multilayer film presented in this paper has better wettability and higher capillary pressure than other hydrophilic surfaces reported. The results provide a new way to improve the capillary in microchannels with enhanced super hydrophilic surfaces in microchannels for variety of micro/nanofluidic applications.     

Drop-on-demand inkjet printing of alumina nanoparticles in rectangular microchannels

A procedure has been developed for applying a piezoelectric drop-on-demand inkjet printing technology to deposit metal oxide nanoparticles such as alumina in stainless steel microchannels. The printability of inks having different solid concentrations, co-solvents, hydro-soluble polymers, viscosities, and surface tensions was tested. The effect of piezoelectric activation parameters on properties of generated microdrops such as drop size and velocity was investigated. Depending upon the ink composition, three different types of coated film shapes were observed in rectangular microchannels. A uniform coating in rectangular microchannels was achieved by correctly tuning the directional stability of microdrop, ink composition, and microdrop properties. It is observed that drying effects such as coffee ring effect have a large impact on the final shape of the deposited alumina layers. The adhesion of printed alumina layers was tested after drying and calcination in harsh environments such as ultrasonic baths, and it was satisfactory.     

声表面波辅助实现纸基微流分析

纸基微流器件往往难以实现样品前处理操作.提出了一种简单的纸基微通道制作方法及兼具有前处理操作功能的纸基微流分析方法.采用Protel设计微通道图案,采用印刷电路技术制作铜模板,并涂覆石蜡、覆盖滤纸,而后用电烙铁加热铜模板另一侧,熔融石蜡渗透入滤纸形成纸基微通道.制作的纸基器件放置于128°YX-LiNbO3压电基片上,...     

Improved process flow for buried channel fabrication in silicon

The fabrication of microchannels using MEMS technology always attracted the attention of researchers and designers of microfluidic systems. Our group focused on realizing buried fluidic channels in silicon substrates involving deep reactive ion etching. To meet the demands of today’s complex microsystems, our aim was to create passive microfluidics in the bulk Si substrate well below the surface, while retaining planarity of the wafer. Therefore additional lithographic steps for e.g. integrating circuit elements are still possible on the chip surface. In this paper, a more economic process flow is applied which also contains a selective edge-masking method in order to eliminate under-etching phenomenon at the top of the trenches to be filled. The effect of Al protection on the subsequent etch steps is also discussed. Applying the proposed protection method, our group successfully fabricated sealed microchannels with excellent surface planarity above the filled trenches. Due to the concept, the integration of the technology in hollow silicon microprobes fabrication is now available.     

Seed bubbles trigger boiling heat transfer in silicon microchannels

The smooth channel surface of microsystems delays boiling incipience in heated microchannels. In this paper, we use seed bubbles to trigger boiling heat transfer and control thermal non-equilibrium of liquid and vapor phases in parallel microchannels. The test section consisted of a top glass cover and a silicon substrate. Microheater array was integrated at the top glass cover surface and driven by a pulse voltage signal to generate seed bubbles in time sequence. Each microheater corresponds to a specific microchannel and is located in the microchannel upstream. Five triangular microchannels with a hydraulic diameter of 100 μm and a length of 12.0 mm were etched in the silicon substrate. A thin platinum film was deposited at the back surface of silicon chip with an effective heating area of 4,500 × 1,366 μm, acting as the main heater for the heat transfer system. Acetone liquid was used. With the data range reported here, boiling incipience was not initiated if wall superheats are smaller than 15°C without seed bubbles assisted. Injection seed bubbles triggers boiling incipience and controls thermal non-equilibrium between liquid and vapor phases successfully. Four modes of flow and heat transfer are identified. Modes 1, 2, and 4 are the stable ones without apparent oscillations of pressure drops and heating surface temperatures, and mode 3 displays flow instabilities with apparent amplitudes and long periods of these parameters. The four modes are divided based on the four types of flow patterns observed in microchannels. Seed bubble frequency is a key factor to influence the heat transfer. The higher the seed bubble frequency, the more decreased non-equilibrium between two phases and heating surface temperatures are. The seed bubble frequency can reach a saturation value, at which heat transfer enhancement attains the maximum degree, inferring that a complete thermal equilibrium of two phases is approached. The saturation frequency is about a couple of thousand Hertz in this study.     

Hydrophilicity modification of poly(methyl methacrylate) by excimer laser ablation and irradiation

Because of the micromachining characteristic of excimer laser ablation, the microchannels ablated with this technique on poly(methyl methacrylate) (PMMA) substrate have definite surface roughness. Utilizing this characteristic, the hydrophilicity of PMMA microchannels could be directly modified during fabrication process both by the mechanism of photochemical ablation and the effect of surface roughness. The contact angle is inversely proportional to the surface roughness under ablation with same fluence and could be reduced to 25° by choosing ablation parameters reasonably (7.38 J/cm², 20 Hz, 10 mm/min). Excimer laser irradiation of PMMA substrates for different irradiation times at fluence below the ablation threshold also results in the surfaces becoming more hydrophilic without any marked change in the surface topography. The contact angle decreases with the increase of irradiation times and finally reaches the saturated status after irradiation for 2,500 times. Under same irradiation times, higher fluence led to PMMA substrates more hydrophilic.     

Flow characteristics of polar liquids in microfluidic immunosensors

There is an interest in microfluidic devices for disease detection. In microfluidic immunosensors, the microchannel surfaces are functionalized with a stack of intermediate linker molecules to the specific antibodies. The efficiency of these immunosensors depends on the effective capture of antigens flowing in the carrier fluid by the surface-immobilized antibodies. The diffusion of these antigens to these antibody-immobilized surfaces is governed by the velocity profile, which in turn is governed by the interaction of the carrier fluid molecules with the surface antibodies. We report a systematic study to characterize fluid flow of different polar liquids (water, methanol and isopropyl alcohol) in trapezoidal Si microchannels, of about 100 μm hydraulic diameter, functionalized with intermediate molecular layers along with three different antibodies immobilized via these molecular layers. The friction constants were calculated from the pressure drop measurements. We attempted to understand the solid–liquid interactions in terms of the friction constants as a function of the solid surface free energies of the terminal antibody layers (which are affected by the energetics of the underlying layers) immobilized on to the microchannels, and the polarities of the liquids flowing through these microchannels. Correlations of liquid polarities with the friction constants were seen for almost all the functionalized surfaces. A reasonable correlation of the surface energies with the friction constants was seen for most of the surfaces studied. Possible reasons for the behaviors are discussed. The measured friction constants and the knowledge of the solid–liquid interactions could facilitate improved designs of microfluidic immunosensors.     

Particle transport in patterned cylindrical microchannels

An Eulerian model (convection–diffusion–migration equation) to evaluate particle transport in patchy heterogeneous cylindrical microchannels is presented. The objective of this model is to capture the effect of surface chemical heterogeneity on deposition and particle transport in cylindrical microchannels with fully developed Poiseuille flow velocity profile. Surface heterogeneity is modeled as alternate bands of attractive and repulsive regions on the channel wall to facilitate systematic continuum type evaluation. The results indicate that particles tend to preferentially collect at the leading edge of the favorable sections and the extent of this deposition can be controlled by changing Peclet number. Also, it is shown that particles tend to travel further along the microchannel length for heterogeneous channels compared to homogeneously favorable channels. In addition, the study evaluates the effect of the frequency of these stripes on the transport behavior and provides the average collection rate depending on favorable surface coverage fraction. This analysis shows how the existing microchannel/capillary transport models could possibly be modified by incorporating surface interactions and chemical heterogeneity.     

Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures

A multiwalled carbon nanotube (MWNT) probe was used as a scanning probe in an atomic force microscope (AFM) to obtain surface height maps of micro/nano structures. The surface height maps acquired by the MWNT probe are compared with those by a conventional silicon probe on the four samples: silicon ruler, polymer microchannels, silicon nanomembrane and nanocomposite metal particle (MP) tapes. The results of the silicon ruler, microchannels and membrane samples show that the surface height maps by the MWNT probe have a better resolution than those by a conventional silicon tip due to the sharper tip with the larger aspect ratio of the MWNT. A MWNT probe is especially useful to observe surface height maps of the structures that have larger aspect ratio.Financial support for this work was provided by the National Science Foundation (contract no. ECS-0301056). The authors are grateful to Prof. Derek Hansford and Nick Ferrell of the Micro MD laboratory for providing the samples and fruitful discussions, and Imation Corporation for the samples provided. Work by C.V.N. was supported by a NASA contract to ELORET Corporation.     

Laser polishing and 2PP structuring of inside microfluidic channels in fused silica

This study presents the development of post-processing steps for microfluidics fabricated with selective laser etching (SLE) in fused silica. In a first step, the SLE surface—even inner walls of microfluidic channels—can be smoothed by laser polishing. In addition, two-photon polymerization (2PP) can be used to manufacture polymer microstructures and microcomponents inside the microfluidic channels. The reduction in the surface roughness by laser polishing is a remelting process. While heating the glass surface above softening temperature, laser radiation relocates material thanks to the surface tension. With laser polishing, the RMS roughness of SLE surfaces can be reduced from 12 µm down to 3 nm for spatial wavelength λ < 400 µm. Thanks to the laser polishing, fluidic processes as well as particles in microchannels can be observed with microscopy. A manufactured microfluidic demonstrates that SLE and laser polishing can be combined successfully. By developing two-photon polymerization (2PP) processing in microchannels we aim to enable new applications with sophisticated 3D structures inside the microchannel. With 2PP, lenses with a diameter of 50 µm are processed with a form accuracy rms of 70 nm. In addition, this study demonstrates that 3D structures can be fabricated inside the microchannels manufactured with SLE. Thanks to the combination of SLE, laser polishing and 2PP, research is pioneering new applications for microfluidics made of fused silica.