Deep X-ray lithography using mask with integrated electrothermal actuator

We present a deep X-ray mask with integrated bent-beam electrothermal actuator for the fabrication of 3D microstructures with curved surface. The mask absorber is electroplated on the shuttle mass, which is supported by a pair of 20-m-thick single crystal silicon bent-beam electrothermal actuators and oscillated in a rectilinear direction due to the thermal expansion of the bent-beams. The width of each bent-beam is 10 m or 20 m and the length and bending angle are 1 mm and 0.1 rad, respectively, and the shuttle mass size is 1 mm × 1 mm. For 10-m-wide bent-beams, the shuttle mass displacement is around 15 m at 180 mW (3.6 V) dc input power. For 20-m-wide bent-beams, the shuttle mass displacement is around 19 m at 336 mW (4.2 V) dc input power. Sinusoidal cross-sectional PMMA microstructures with a pitch of 40 m and a height of 20 m are fabricated by 0.5 Hz, 20-m-amplitude sinusoidal shuttle mass oscillation.This research, under the contract project code MS-02-338-01, has been supported by the Intelligent Microsystem Center, which carries out one of the 21st centurys Frontier R & D Projects sponsored by the Korea Ministry of Science & Technology. Experiments at PLS were supported in part by MOST and POSCO.     

Mesh Selection for a Nearly Singular Boundary Value Problem

In this paper, we investigate the numerical solution of a model equation u _xx = exp(– ) (and several slightly more general problems) when 1 using the standard central difference scheme on nonuniform grids. In particular, we are interested in the error behaviour in two limiting cases: (i) the total mesh point number N is fixed when the regularization parameter 0, and (ii) is fixed when N. Using a formal analysis, we show that a generalized version of a special piecewise uniform mesh 12 and an adaptive grid based on the equidistribution principle share some common features. And the optimal meshes give rates of convergence bounded by |log()| as 0 and N is given, which are shown to be sharp by numerical tests.     

Context-free text grammars

A text is a triple=(, ₁, ₂) such that is a labeling function, and ₁ and ₂ are linear orders on the domain of ; hence may be seen as a word (, ₁) together with an additional linear order ₂ on the domain of . The order ₂ is used to give to the word (, ₁) itsindividual hierarchical representation (syntactic structure) which may be a tree but it may be also more general than a tree. In this paper we introducecontext-free grammars for texts and investigate their basic properties. Since each text has its own individual structure, the role of such a grammar should be that of a definition of a pattern common to all individual texts. This leads to the notion of ashapely context-free text grammar also investigated in this paper.     

Separating complexity classes related to bounded alternating ω-branching programs

We develop a theory of communication within branching programs that provides exponential lower bounds on the size of branching programs that are bounded alternating. Our theory is based on the algebraic concept of -branching programs, : , a semiring homomorphism, that generalizes ordinary branching programs, -branching programs [M2] andMOD _p-branching programs [DKMW].Due to certain exponential lower and polynomial upper bounds on the size of bounded alternating -branching programs we are able to separate the corresponding complexity classesN _ba ,co-N _{ba ba} , andMOD _p - _ba ,p prime, from each other, and from that classes corresponding to oblivious linear length-bounded branching programs investigated in the past.     

Conditions for the Light-Traffic Insensitivity to Loss Probability in a GI/G/m/0 Queueing System

A loss queueing system GI/G/m/0 is considered. Let a(x) be a p.d.f. of interarrival intervals. Assume that this function behaves like cx^-1 for small x. Further let B(x) be a d.f. of service time; (1/) be the mean service time. Conditions are derived for the light-traffic insensitivity of the loss probability to the form of B(x) as (/ ) 0. In particular, the condition = 1 is necessary. Estimates for the loss probability are obtained.     

Systems of Strings with High Mutual Complexity

Consider a binary string x ₀ of Kolmogorov complexity K(x ₀) n. The question is whether there exist two strings x ₁ and x ₂ such that the approximate equalities K(x _i x _j ) n and K(x _i x _j , x _k ) n hold for all 0 i, j, k 2, i j k, i k. We prove that the answer is positive if we require the equalities to hold up to an additive term O(log K(x ₀)). It becomes negative in the case of better accuracy, namely, O(log n).     

Logic Based Abstractions of Real-Time Systems

When verifying concurrent systems described by transition systems, state explosion is one of the most serious problems. If quantitative temporal information (expressed by clock ticks) is considered, state explosion is even more serious. We present a notion of abstraction of transition systems, where the abstraction is driven by the formulae of a quantitative temporal logic, called qu-mu-calculus, defined in the paper. The abstraction is based on a notion of bisimulation equivalence, called , n-equivalence, where is a set of actions and n is a natural number. It is proved that two transition systems are , n-equivalent iff they give the same truth value to all qu-mu-calculus formulae such that the actions occurring in the modal operators are contained in , and with time constraints whose values are less than or equal to n. We present a non-standard (abstract) semantics for a timed process algebra able to produce reduced transition systems for checking formulae. The abstract semantics, parametric with respect to a set of actions and a natural number n, produces a reduced transition system , n-equivalent to the standard one. A transformational method is also defined, by means of which it is possible to syntactically transform a program into a smaller one, still preserving , n-equivalence.     

Property preserving abstractions for the verification of concurrent systems

We study property preserving transformations for reactive systems. The main idea is the use of simulations parameterized by Galois connections (, ), relating the lattices of properties of two systems. We propose and study a notion of preservation of properties expressed by formulas of a logic, by a function mapping sets of states of a systemS into sets of states of a systemS'. We give results on the preservation of properties expressed in sublanguages of the branching time -calculus when two systemsS andS' are related via (, )-simulations. They can be used to verify a property for a system by verifying the same property on a simpler system which is an abstraction of it. We show also under which conditions abstraction of concurrent systems can be computed from the abstraction of their components. This allows a compositional application of the proposed verification method.This is a revised version of the papers [2] and [16]; the results are fully developed in [28].This work was partially supported by ESPRIT Basic Research Action REACT.Verimag is a joint laboratory of CNRS, Institut National Polytechnique de Grenoble, Université J. Fourier and Verilog SA associated with IMAG.     

A short note on simultaneous splitting

We show that for any alphabet there is a setL ^* such that ifC is any infinite co-infinite context-free language over , thenL splitsC (i.e., each ofL C,L , C, and is infinite).Preparation of this paper was supported in part by the National Science Foundation under Grant No. MCS77-11360.     

The dynamic clusters method in nonhierarchical clustering

Given a finite setE R ⁿ, the problem is to find clusters (or subsets of similar points inE) and at the same time to find the most typical elements of this set. An original mathematical formulation is given to the problem. The proposed algorithm operates on groups of points, called samplings (samplings may be called multiple centers or cores); these samplings adapt and evolve into interesting clusters. Compared with other clustering algorithms, this algorithm requires less machine time and storage. We provide some propositions about nonprobabilistic convergence and a sufficient condition which ensures the decrease of the criterion. Some computational experiments are presented.     

A geometric view of parametric linear programming

We present a new definition of optimality intervals for the parametric right-hand side linear programming (parametric RHS LP) Problem () = min{c ^t x¦Ax =b + ¯b,x 0}. We then show that an optimality interval consists either of a breakpoint or the open interval between two consecutive breakpoints of the continuous piecewise linear convex function (). As a consequence, the optimality intervals form a partition of the closed interval {; ¦()¦ < }. Based on these optimality intervals, we also introduce an algorithm for solving the parametric RHS LP problem which requires an LP solver as a subroutine. If a polynomial-time LP solver is used to implement this subroutine, we obtain a substantial improvement on the complexity of those parametric RHS LP instances which exhibit degeneracy. When the number of breakpoints of () is polynomial in terms of the size of the parametric problem, we show that the latter can be solved in polynomial time.This research was partially funded by the United States Navy-Office of Naval Research under Contract N00014-87-K-0202. Its financial support is gratefully acknowledged.     

Chains of full AFL's

If a full AFL is not closed under substitution, then ô , the result of substituting members of into, is not substitution closed and hence generates an infinite hierarchy of full AFL's. If ₁ and ₂ are two incomparable full AFL's, then the least full AFL containing ₁ and ₂ is not substitution closed. In particular, the substitution closure of any full AFL properly contained in the context-free languages is itself properly contained in the context-free languages. If any set of languages generates the context-free languages, one of its members must do so. The substitution closure of the one-way stack languages is properly contained in the nested stack languages. For eachn, there is a class of full context-free AFL's whose partial ordering under inclusion is isomorphic to the natural partial ordering onn-tuples of positive integers.This paper was completed while the author was in the Division of Engineering and Applied Physics of Harvard University. Research sponsored in part by the Air Force Cambridge Research Laboratories, Office of Aerospace Research, USAF, under contracts F-1962870C0023 and F-1962868C0029, and by the Air Force Office of Scientific Research, Office of Aerospace Research, USAF, under AFOSR Grant No. AF-AFOSR-1203-67A and the Division of Engineering and Applied Physics of Harvard University.     

Records of turing machines

Suppose a Turing machine is equipped with an extra tape. At each step of a computation being performed, it prints symbol read move symbol symbol printed on a square of the extra tape. It then moves the extra tape one square to the left. This procedure yields arecord of the computation.If is a finite alphabet, let be the set of triples (a, b, c) wherea ,c , andb {–1, 0, 1}. We will characterize those sequences of symbols of that are records of computations of Turing machines.This research was supported in part by AFOSR Grant GP-68-1402.     

On characterizations of recursively enumerable languages

Summary Geffert has shown that earch recursively enumerable languageL over can be expressed in the formL{h(x) ^–1 g(x)x in ⁺} ^* where is an alphabet andg, h is a pair of morphisms. Our purpose is to give a simple proof for Geffert's result and then sharpen it into the form where both of the morphisms are nonerasing. In our method we modify constructions used in a representation of recursively enumerable languages in terms of equality sets and in a characterization of simple transducers in terms of morphisms. As direct consequences, we get the undecidability of the Post correspondence problem and various representations ofL. For instance,L =(L ₀) ^* whereL ₀ is a minimal linear language and is the Dyck reductiona, A.     

Assessing the Changeability of two Object-Oriented Design Alternatives--a Controlled Experiment

An important motivation for the object-oriented paradigm is to improve the changeability of the software, thereby reducing lifetime development costs. This paper describes the results of controlled experiments assessing the changeability of a given responsibility-driven (RD) design versus an alternative control-oriented mainframe (MF) design. According to Coad and Yourdon's OO design quality principles, the RD design represents a good design. The MF design represents a bad design. To investigate which of the designs have better changeability, we conducted two controlled experiments--a pilot experiment and a main experiment. In both experiments, the subjects were divided in two groups in which the individuals designed, coded and tested several identical changes on one of the two design alternatives.The results clearly indicate that the good RD design requires significantly more change effort for the given set of changes than the alternative bad MF design. This difference in change effort is primarily due to the difference in effort required to understand how to solve the change tasks. Consequently, reducing class-level coupling and increasing class cohesion may actually increase the cognitive complexity of a design. With regards to correctness and learning curve, we found no significant differences between the twodesigns. However, we found that structural attributes change less for the RD design than for the MF design. Thus, the RD design may be less prone to structural deterioration. A challenging issue raised in this paper is therefore the tradeoff between change effort and structural stability.     

Linear Interval Tolerance Problem and Linear Programming Techniques

In this paper, we consider the linear interval tolerance problem, which consists of finding the largest interval vector included in ([A], [b]) = {x R ⁿ | A [A], b [b], Ax = b}. We describe two different polyhedrons that represent subsets of all possible interval vectors in ([A], [b]), and we provide a new definition of the optimality of an interval vector included in ([A], [b]). Finally, we show how the Simplex algorithm can be applied to find an optimal interval vector in ([A], [b]).     

A bidirectional shortest-path algorithm with good average-case behavior

The two-terminal shortest-path problem asks for the shortest directed path from a specified nodes to a specified noded in a complete directed graphG onn nodes, where each edge has a nonnegative length. We show that if the length of each edge is chosen independently from the exponential distribution, and adjacency lists at each node are sorted by length, then a priority-queue implementation of Dijkstra's unidirectional search algorithm has the expected running time (n logn). We present a bidirectional search algorithm that has expected running time (n logn). These results are generalized to apply to a wide class of edge-length distributions, and to sparse graphs. If adjacency lists are not sorted, bidirectional search has the expected running time (an) on graphs of average degreea, as compared with (an) for unidirectional search.     

Types with intersection: An introduction

This paper is an informal introduction to the theory of types which use a connective for the intersection of two types and a constant for a universal type, besides the usual connective for function-types. This theory was first devised in about 1977 by Coppo, Dezani and Sallé in the context of-calculus and its main development has been by Coppo and Dezani and their collaborators in Turin. With suitable axioms and rules to assign types to-calculus terms, they obtained a system in which (i) the set of types given to a term does not change under-conversion, (ii) some interesting sets of terms, for example the solvable terms and the terms with normal form, can be characterised exactly by the types of their members, and (iii) the type-apparatus is not so complex as polymorphic systems with quantifier-containing types and therefore probably not so expensive to implement mechanically as these systems.There are in fact several variant systems with different detailed properties. This paper defines and motivates the simplest one from which the others are derived, and describes its most basic properties. No proofs are given but the motivation is shown by examples. A comprehensive bibliography is included.     

On the Axioms of Scale Space Theory

We consider alternative scale space representations beyond the well-established Gaussian case that satisfy all reasonable axioms. One of these turns out to be subject to a first order pseudo partial differential equation equivalent to the Laplace equation on the upper half plane {(x, s) ^d × | s > 0}. We investigate this so-called Poisson scale space and show that it is indeed a viable alternative to Gaussian scale space. Poisson and Gaussian scale space are related via a one-parameter class of operationally well-defined intermediate representations generated by a fractional power of (minus) the spatial Laplace operator.     

The conjoinability relation in Lambek calculus and linear logic

In 1958 J. Lambek introduced a calculusL of syntactic types and defined an equivalence relation on types: x y means that there exists a sequence x=x₁,...,x_n=y (n 1), such thatx _i x _i+1 or x_i+ x _i (1 i n). He pointed out thatx y if and only if there is joinz such thatx z andy z. This paper gives an effective characterization of this equivalence for the Lambeck calculiL andLP, and for the multiplicative fragments of Girard's and Yetter's linear logics. Moreover, for the non-directed Lambek calculusLP and the multiplicative fragment of Girard's linear logic, we present linear time algorithms deciding whether two types are equal, and finding a join for them if they are.The author was sponsored by project NF 102/62-356 (Structural and Semantic Parallels in Natural Languages and Programming Languages), funded by the Netherlands Organization for the Advancement of Research (N.W.O.).