Metrology of pulsed radiation for 157-nm lithography

In the framework of current development in 157-nm lithography we have investigated the performance of photodetectors with emphasis to their stability and linearity. The measurements were performed in the radiometry laboratories of the Physikalisch-Technische Bundesanstalt at the Berlin electron-storage rings BESSY I and BESSY II with spectrally dispersed synchrotron radiation as well as with highly pulsed F2 laser radiation at 157 nm in combination with a cryogenic radiometer as the primary detector standard. Relative standard uncertainties of as little as 1% were achieved for the calibration of photodetectors in the spectral range of ultraviolet and vacuum-ultraviolet radiation.     

400～1700 nm绝对光谱响应度校准和量值传递

介绍了高准确度光辐射功率校准原理和方法,利用低温辐射计作为主标准器,以陷阱探测器作为传递标准,激光器作为光源,通过激光功率稳定装置,校准了硅陷阱探测器和铟镓砷陷阱探测器的绝对光谱响应度。选取476.1, 488, 514.7, 521, 568, 632.8, 647.1, 785, 852, 980, 1064, 1550,nm共12条谱线完成了校准实验,绝对光谱响应度测量不确定度均优于0.05%。通过量子效率模型得出了硅陷阱探测器的绝对光谱响应曲线。利用InGaAs陷阱探测器分立波长点的绝对光谱响应度与相对光谱响应曲线进行了验证分析。结果表明,2种陷阱探测器均可用作传递标准进行高准确度的可见光和近红外光辐射功率校准和量值传递。     

New PTB Setup for the Absolute Calibration of the Spectral Responsivity of Radiation Thermometers

The paper describes the new experimental setup assembled at the PTB for the absolute spectral responsivity measurement of radiation thermometers. The concept of this setup is to measure the relative spectral responsivity of the radiation thermometer using the conventional monochromator-based spectral comparator facility also used for the calibration of filter radiometers. The absolute spectral responsivity is subsequently measured at one wavelength, supplied by the radiation of a diode laser, using the new setup. The radiation of the diode laser is guided with an optical fiber into an integrating sphere source that is equipped with an aperture of absolutely known area. The spectral radiance of this integrating sphere source is determined via the spectral irradiance measured by a trap detector with an absolutely calibrated spectral responsivity traceable to the primary detector standard of the PTB, the cryogenic radiometer. First results of the spectral responsivity calibration of the radiation thermometer LP3 are presented, and a provisional uncertainty budget of the absolute spectral responsivity is given.     

Thermodynamic Temperature of High-Temperature Fixed Points Traceable to Blackbody Radiation and Synchrotron Radiation

Absolute spectral radiometry is currently the only established primary thermometric method for the temperature range above 1300 K. Up to now, the ongoing improvements of high-temperature fixed points and their formal implementation into an improved temperature scale with the mise en pratique for the definition of the kelvin, rely solely on single-wavelength absolute radiometry traceable to the cryogenic radiometer. Two alternative primary thermometric methods, yielding comparable or possibly even smaller uncertainties, have been proposed in the literature. They use ratios of irradiances to determine the thermodynamic temperature traceable to blackbody radiation and synchrotron radiation. At PTB, a project has been established in cooperation with VNIIOFI to use, for the first time, all three methods simultaneously for the determination of the phase transition temperatures of high-temperature fixed points. For this, a dedicated four-wavelengths ratio filter radiometer was developed. With all three thermometric methods performed independently and in parallel, we aim to compare the potential and practical limitations of all three methods, disclose possibly undetected systematic effects of each method and thereby confirm or improve the previous measurements traceable to the cryogenic radiometer. This will give further and independent confidence in the thermodynamic temperature determination of the high-temperature fixed point’s phase transitions.     

Absolute measurement of F2-laser power at 157 nm

We report a comparison of laser power measurements at the F2-laser wavelength of 157 nm made at two facilities of the Physikalisch-Technische Bundesanstalt (PTB), the German national metrology institute. At the PTB laboratory at the electron storage ring BESSY II in Berlin, the scale for laser power was directly traced to a cryogenic radiometer operating at 157 nm, whereas at the PTB laser radiometry facility in Braunschweig the calibration of transfer detectors was performed with a newly developed standard for laser power at 157 nm, which is traceable in several steps to a cryogenic radiometer operating at 633 nm. The comparison was performed under vacuum conditions with laser pulse energies of approximately 10 microJ, however with different average powers because different primary standard radiometers were used. The relative deviation for the responsivity of the transfer detector was 4.8% and thus within the combined standard uncertainty.     

Thermodynamic Radiation Thermometry Using Radiometers Calibrated for Radiance Responsivity

Using radiometry, thermodynamic temperatures can be determined by a variety of experimental techniques. Radiometers without imaging optics can be calibrated for spectral power or spectral irradiance responsivity, and radiometers with imaging optics can be calibrated for radiance responsivity. These separate approaches can have different uncertainty components with different uncertainty values. At NIST, thermodynamic radiation thermometry is performed using radiation thermometers calibrated for radiance responsivity using laser-irradiated integrating sphere sources (ISS). The radiance of the ISS is determined using Si-trap detectors whose spectral power responsivity is traceable to the electrical substitution cryogenic radiometer. The radiometric basis of the NIST approach is discussed. The uncertainty budget for the measurements as well as the characterizations to determine the component uncertainty values is listed.     

The Candela and Photometric and Radiometric Measurements

The national measurement system for photometric and radiometric quantities is presently based upon techniques that make these quantities traceable to a high-accuracy cryogenic radiometer. The redefinition of the candela in 1979 provided the opportunity for national measurement laboratories to base their photometric measurements on optical detector technology rather than on the emission from high-temperature blackbody optical sources. The ensuing technical developments of the past 20 years, including the significant improvements in cryogenic radiometer performance, have provided the opportunity to place the fundamental maintenance of photometric quantities upon absolute detector based technology as was allowed by the 1979 redefinition. Additionally, the development of improved photodetectors has had a significant impact on the methodology in most of the radiometric measurement areas. This paper will review the status of the NIST implementation of the technical changes mandated by the 1979 redefinition of the candela and its effect upon the maintenance and dissemination of optical radiation measurements.     

Intercomparison of the LBIR Absolute Cryogenic Radiometers to the NIST Optical Power Measurement Standard

The Low Background Infrared calibration (LBIR) facility at the National Institute of Standards and Technology (NIST) presently maintains four absolute cryogenic radiometers (ACRs) which serve as standard reference detectors for infrared calibrations performed by the facility. The primary standard for optical power measurements at NIST-Gaithersburg has been the High Accuracy Cryogenic Radiometer (HACR). Recently, an improved radiometer, the Primary Optical Watt Radiometer (POWR), has replaced the HACR as the primary standard. In this paper, we present the results of comparisons between the radiometric powers measured by the four ACRs presently maintained by the LBIR facility to that measured by the HACR and POWR. This was done by using a Si photodiode light-trapping detector as a secondary transfer standard to compare the primary national standards to the ACRs maintained by the LBIR facility. The technique used to compare an ACR to the trap detector is described in detail. The absolute optical power measurements are found to be within 0.1 % of the primary standard for all the ACRs examined in this study.     

陷阱探测器面响应均匀性的测量

对陷阱探测器的面响应均匀性进行了测量。在主要灵敏面内 ,面响应均匀性测量结果的重复性达到 4×10 -5。给出了对 S1337、S12 2 7等 4种不同硅光电二极管构成的陷阱探测器的面响应均匀性的测量结果。测量结果表明 ,不同类型探测器之间面响应不均匀性存在显著差异 ,其中 S1337构成的陷阱探测器的面响应均匀性最好。正确选择合适类型探测器 ,对保持和传递低温辐射计达到的很低的不确定度非常重要。     

Improved Near-Infrared Spectral Responsivity Scale

A cryogenic radiometer-based system was constructed at the National Institute of Standards and Technology for absolute radiometric measurements to improve detector spectral power responsivity scales in the wavelength range from 900 nm to 1800 nm. In addition to the liquid-helium-cooled cryogenic radiometer, the system consists of a 100 W quartz-tungsten-halogen lamp light source and a 1 m single-grating monochromator for wavelength selection. The system was characterized and the uncertainty in spectral power responsivity measurements evaluated. A variety of photodetectors, including indium gallium arsenide photodiodes (InGaAs), germanium (Ge) photodiodes, and pyroelectric detectors, were subsequently calibrated. Over most of the spectral range, the spectral power responsivity of the photodetectors can be measured with a combined relative standard uncertainty of 0.4 % or less. This is more than a factor of two smaller than our previous capabilities, and represents a significant improvement in the near infrared (NIR) spectral power responsivity scale maintained at NIST. We discuss the characterization of the monochromator-based system and present results of photodetector spectral power responsivity calibrations.     

Thermodynamic-temperature determinations of the Ag and Au freezing temperatures using a detector-based radiation thermometer

The development of a radiation thermometer calibrated for spectral radiance responsivity using cryogenic, electrical-substitution radiometry to determine the thermodynamic temperatures of the Ag- and Au-freezing temperatures is described. The absolute spectral radiance responsivity of the radiation thermometer is measured in the NIST Spectral Irradiance and Radiance Responsivity Calibrations using Uniform Sources (SIRCUS) facility with a total uncertainty of 0.15% (k=2) and is traceable to the electrical watt, and thus the thermodynamic temperature of any blackbody can be determined by using Planck radiation law and the measured optical power. The thermodynamic temperatures of the Ag- and Au-freezing temperatures are determined to be 1234.956 K (+/-0.110 K) (k=2) and 1337.344 K(+/-0.129 K) (k=2) differing from the International Temperature Scale of 1990 (ITS-90) assignments by 26 mK and 14 mK, respectively, within the stated uncertainties. The temperatures were systematically corrected for the size- of-source effect, the nonlinearity of the preamplifier and the emissivity of the blackbody. The ultimate goal of these thermodynamic temperature measurements is to disseminate temperature scales with lower uncertainties than those of the ITS-90. These results indicate that direct disseminations of thermodynamic temperature scales are possible.     

ACR II: improved absolute cryogenic radiometer for low background infrared calibrations

A second-generation absolute cryogenic radiometer (ACR II) was developed for use at the Low Background Infrared calibration facility at the National Institute of Standards and Technology. The need for spectral calibrations of very sensitive [D* = 10(14) cm (Hz)1/2W(-1)] infrared detectors necessitated the use of a cryogenic infrared monochromator and a more sensitive radiometer. The improved low-power performance of the ACR II compared with the older absolute cryogenic radiometer (ACR) has also made it useful as the primary standard for the calibration of cryogenic blackbody sources that are used as low-power infrared sources. The responsivity of the new radiometer's receiver is 210 K/mW with a type A (random component) standard uncertainty of at most 7 pW when making power measurements of less than 10 nW. The original ACR has a responsivity of 29 K/mW and has a type A standard uncertainty of approximately 100 pW when making a similar low-noise-power measurement. Other properties of the radiometers are also described and compared.     

The NIST High Accuracy Scale for Absolute Spectral Response from 406 nm to 920 nm

We describe how the National Institute of Standards and Technology obtains a scale of absolute spectral response from 406 nm to 920 nm. This scale of absolute spectral response is based solely on detector measurements traceable to the NIST High Accuracy Cryogenic Radiometer (HACR). Silicon photodiode light-trapping detectors are used to transfer optical power measurements from the HACR to a monochromator-based facility where routine measurements are performed. The transfer also involves modeling the quantum efficiency (QE) of the silicon photodiode light-trapping detectors. We describe our planned quality system for these measurements that follows ANSI/NCSL Z540-1-1994. A summary of current NIST capabilities based on these measurements is also given.     

Calibration of a pyroelectric detector at 10.6 microm with the National Institute of Standards and Technology high-accuracy cryogenic radiometer

The National Institute of Standards and Technology (NIST) is establishing an infrared detector calibration facility to improve radiometric standards at infrared wavelengths. The absolute response of the cryogenic bolometer that serves as the transfer standard for this facility is being linked to the NIST high- accuracy cryogenic radiometer (HACR) at a few laser wavelengths. At the 10.6-microm CO(2) laser line, this link is being established through a pyroelectric detector that has been calibrated against the HACR. We describe the apparatus, methods, and uncertainties for the calibration of this pyroelectric detector.     

Multiband fiber optic radiometry for measuring the temperature and emissivity of gray bodies of low or high emissivity

Infrared fiber optic radiometry was used for noncontact thermometry of gray bodies whose temperature was close to room temperature (40-70 degrees C). We selected three gray bodies, one with high emissivity (epsilon = 0.97), one with medium emissivity (epsilon = 0.71), and one with low emissivity (epsilon = 0.025). We carried out optimization calculations and measurements for a multiband fiber optic radiometer that consisted of a silver halide (AgClBr) infrared-transmitting fiber, a dual-band cooled infrared detector, and a set of 18 narrowband infrared filters that covered the 2-14-microm spectral range. We determined the optimal spectral range, the optimal number of filters to be used, and the optimal chopping scheme. Using these optimal conditions, we performed measurements of the three gray bodies and obtained an accuracy of better than 1 degrees C for body temperature and for room temperature. An accuracy of 0.03 was obtained for body emissivity.     

Monochromator-Based Absolute Calibration of a Standard Radiation Thermometer

Centro Español de Metrología (CEM) is disseminating the International Temperature Scale (ITS-90), at high temperatures, by using the fixed points of Ag and Cu and a standard radiation thermometer. However, the future mise-en-pratique for the definition of the kelvin (MeP-K) will include the dissemination of the kelvin by primary methods and by indirect approximations capable of exceptionally low uncertainties or increased reliability. Primary radiometry is, at present, able to achieve uncertainties competitive with the ITS-90 above the silver point with one of the possible techniques the calibration for radiance responsivity of an imaging radiometer (radiance method). In order to carry out this calibration, IO-CSIC (Spanish Designated Institute for luminous intensity and luminous flux) has collaborated with CEM, allowing traceability to its cryogenic radiometer. A monochromator integrating sphere-based spectral comparator facility has been used to calibrate one of the CEM standard radiation thermometers. The absolute calibrated standard radiation thermometer has been used to determine the temperatures of the fixed points of Cu, Co–C, Pt–C, and Re–C. The results obtained are 1357.80 K, 1597.10 K, 2011.66 K, and 2747.64 K, respectively, with uncertainties ranging from 0.4 K to 1.1 K.     

The Double-Wavelength Technique—An Alternative Technique to Determine Thermodynamic Temperature

Filter radiometry provides thermodynamic temperatures traceable to a cryogenic radiometer. An alternative technique is possible which provides absolute thermodynamic temperature through a different traceability chain, with the radiometric measurements purely relative. If this technique could be experimentally realized with similar uncertainties to those associated with filter radiometry, then this would provide a metrologically valuable ‘second opinion’ that would test for systematic effects common to all filter radiometry measurements. This paper describes the theoretical analysis prior to an experimental investigation of this technique. This theoretical analysis implies that with Re-C and Cu as the two blackbodies, the Re-C temperature can be determined with an uncertainty of approximately twice that expected with filter radiometry. For higher-temperature metal-carbide/carbon eutectics, the uncertainty difference would be smaller.     

Stability under vacuum of silicon trap detectors and their use as transfer instruments in cryogenic radiometry

The stability of the responsivity of trap detectors under vacuum has been studied by means of a special chamber designed for the test of photodetectors at low pressure. The first experiments at a wavelength of 647 nm show that the responsivity variations are smaller than the uncertainties of the measurements, approximately 3 parts in 10(5), when the detector operates successively in air, under vacuum, and then again in air. Calculations based on experiments with single windowless photodiodes indicate that the change in trap responsivity that is due to vacuum effects should be smaller than 1 part in 10(5), at least in the visible part of the wavelength range. This stability makes trap detectors suitable for cryogenic radiometry when one uses transfer detectors under vacuum.