Curved PVDF airborne transducer

In the application of airborne ultrasonic ranging measurement, a partially cylindrical (curved) PVDF transducer can effectively couple ultrasound into the air and generate strong sound pressure. Because of its geometrical features, the ultrasound beam angles of a curved PVDF transducer can be unsymmetrical (i.e., broad horizontally and narrow vertically). This feature is desired in some applications. In this work, a curved PVDF air transducer is investigated both theoretically and experimentally. Two resonances were observed in this transducer. They are length extensional mode and flexural bending mode. Surface vibration profiles of these two modes were measured by a laser vibrometer. It was found from the experiment that the surface vibration was not uniform along the curvature direction for both vibration modes. Theoretical calculations based on a model developed in this work confirmed the experimental results. Two displacement peaks were found in the piezoelectric active direction of PVDF film for the length extensional mode; three peaks were found for the flexural bending mode. The observed peak positions were in good agreement with the calculation results. Transient surface displacement measurements revealed that vibration peaks were in phase for the length extensional mode and out of phase for the flexural bending mode. Therefore, the length extensional mode can generate a stronger ultrasound wave than the flexural bending mode. The resonance frequencies and vibration amplitudes of the two modes strongly depend on the structure parameters as well as the material properties. For the transducer design, the theoretical model developed in this work can be used to optimize the ultrasound performance.     

新型智能隔振复合结构的动态特性研究

针对精密机械的微位移隔振问题,设计了一种以PVDF压电薄膜为作动器和传感器的新型智能隔振复合结构。根据压电方程推导出了层叠式PVDF压电薄膜作动器厚度变形量表达式,建立了该智能复合结构的隔振理论模型,采用LMS自适应控制算法,以Matlab和有限元混合建模分析方式对本智能隔振复合结构的动态特性进行研究。有限元模型的分析结果与Matlab计算数据一致,验证了本新型智能隔振复合结构对微位移隔振的有效性,其结论将为精密仪器、微纳米设备的微位移智能主动隔振奠定理论基础。     

基于PVDF压电传感器测量振动结构体积位移

控制振动板结构的体积位移是降低结构总声功率的一种有效策略。本文以工程常见四端位移为零的振动板为例，提出一种新的压电式传感器的设计方法测量体积位移。利用正弦函数展开近似表示固定板振动位移，通过设计特殊形状的PVDF压电薄膜，使PVDF输出信号为所需要的振动结构体积位移。结果表明这种体积位移传感器不仅适用四边简支、四边固定以及介于两者之间的边界条件板结构，而且作为一种误差传感器测量振动结构体积位移是可行的。并对实验数据进行了分析比较。     

Theory of curved, clamped, piezoelectric film, air-borne transducers

Differential equations in the cylindrical coordinate system have been solved to calculate vibration mode of a curved, clamped, piezoelectric multilayer film. Type I has two clamps at straight ends with uniform film curvature, and Type II has the same two clamps with nonuniform curvature in which the radii are different for the central region and for side regions. The solutions include a uniform displacement term, flexural waves with sinusoidal terms, and a hyperbolic cosine term. By numerical computations, the vibration modes and frequency response of displacement are shown, as are various transducer performances. Mechanical losses of the layer materials were taken as complex Young's moduli with Q values assumed to be constant with frequency. Numerical calculations for 28-/spl mu/m PVDF with 25-/spl mu/m polyester enforcement have shown that (1) the resonance frequency is not necessarily proportional to the inverse of curvature radius as classical theory describes, and, furthermore, resonance diminishes for a certain range of radii, forming a stop band; (2) a back air cavity thinner than 150 /spl mu/m significantly increases the resonance frequency; (3) Type II generates much higher output pressure than Type I; (4) receiver sensitivities for Type I and Type II are not much different; and (5) the effect of radiation impedance is small leading to /spl sim/7% output reduction.     

A rod-shaped vibro touch sensor using PZT thin film

We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.     

Phase-matched air ultrasonic transducers using corrugated PVDF filmwith half wavelength depth

A new type of large area PVDF film air transducer is proposed. The transducer features a high power output and a sharp beam angle. Conventionally known curved length mode resonators with two clamps at both ends have a resonance frequency determined by the curvature. In the present work, PVDF was formed into alternating concave and convex multiple curved sections, eliminating clamps, i.e., a periodic corrugation structure using a single PVDF film. Each convex and concave section has a common resonance frequency. A common excitation voltage induces vibration for each section, and the vibration direction is normal to the film surface. The vibration phase of convex section is shifted 180 degrees from the concave section. These waves add constructively to form a strong acoustic beam when corrugation height is approximately one-half of the wavelength. The corrugation height controls propagation path difference, canceling excitation phase difference. The design principle based on a uniform vibration mode is presented. Experimental investigations using 8.8×2.5-, 10×5-, and 20×20-cm² transducers are presented. Side lobes unique to this corrugation structure have been observed. A theoretical analysis of the side lobes is also presented. According to the theory, choosing the corrugation height appropriately will reduce side lobes to -15 dB with regard to the main lobe, and the observed side lobe height agreed with the theoretical result     

通过阵列传感器获取固定板声辐射模态伴随系数

以固定支撑板为例,提出一种阵列式压电式传感器的设计方法测量前三阶声辐射模态幅值.在振动板表面布置一组形状相同的矩形PVDF(Polyvinylidene fluoride聚偏氟乙烯)薄膜作为传感器,根据所需要的声辐射模态伴随系数,通过对PVDF传感器阵列输出信号设计的加权系数,使PVDF传感器阵列输出信号为相应的声辐射模态伴随系数.结果表明这种PVDF传感器阵列设计与外激励力性质(如激励力类型、频率以及位置)无关,而且适用任意边界条件板结构.     

通过PVDF传感器测量振动板结构的声辐射模态伴随系数

基于声辐射模态理论进行ASAC控制系统中的一个重要内容就是获得声辐射模态伴随系数。以简支板为例,设计了一种新的PVDF(POLYVINYLIDENE FLUORIDE聚偏氟乙烯)压电传感器,用来测量板的前3阶声辐射模态伴随系数。由仿真计算结果表明,在中低频率,测量第一阶声辐射模态伴随系数时,只需要在板布置两条PVDF传感器即可;测量第二、三阶声辐射模态伴随系数时,可在板上布置多条传感器能得到比较精确的结果。同时PVDF传感器测量的结果与理论相符,说明这种新型PVDF压电传感器的设计是可行的。     

一种采用PVDF压电薄膜的弯张换能器

本文提出了一种采用PVDF压电薄膜代替弯张换能器的金属外壳的新型弯张换能器,即一种采用PVDF压电薄膜的弯张换能器。用阻抗分析仪、激光扫描测振仪和水声测量系统分别测量了采用PVDF压电薄膜的弯张换能器的谐振频率、带宽、发送电压响应、水平指向性。通过对比分析实验结果,可以看出该新型换能器与传统换能器一样可以将压电晶堆纵的振动转化为壳体的径向振动。     

面剪切振动模式弛豫铁电单晶换能器

[011]极化方向、zxt-45°切型的PIN-PMT-PT单晶因其高剪切压电应变常数、高机电耦合系数和高柔顺系数等特点,在水声换能器中存在广阔的应用前景。通过设计中间质量块的方法,将单晶产生的剪切振动转换为换能器的纵向振动,并利用辐射头的弯曲振动和圆环尾质量块振动的耦合拓宽工作频带。通过有限元仿真分析,研究了结构参数对各阶模态振型和谐振频率的影响。最终仿真得到的换能器工作频带6～18 kHz,最大发送电压响应为138 dB,带内起伏小于4 dB。研究结果表明：采用面剪切工作模式有利于实现换能器低频、小尺寸、宽带发射。     

0.1 Hz～50 kHz直线振动幅值和相位国家计量基准系统的研究

描述中国计量科学院在直线振动幅值和相位测量的理论研究和技术实现方面取得的最新进展。简要介绍了国家高、中、低频振动基(副基)准幅相特性测量装置的系统构建、测量原理和技术实现,以及装置达到的主要技术指标。提出振动基(副基)准优化提升中关键的技术创新点,如自主提出了改进的外差正弦逼近法和基于波峰波谷的外差时间间隔法,在压电高频(2kHz～50kHz)振动台上,首次在国内外实现了(1nm～500nm)振幅范围内的纳米级振动传感器灵敏度幅值和相移的测量。中国计量科学研究院(NIM)与德国物理技术研究院(PTB)在10Hz～10kHz范围内开展的标准加速度计灵敏度幅相特性国际双边比对验证了国家基准的测量不确定度。     

压电驱动MEMS光学扫描镜的研制

为实现高速大角度光学扫描,研制了一种新型压电陶瓷驱动MEMS光学扫描镜．将两块压电陶瓷分别放置在扫描镜背面两侧作为驱动,通过简单的扭转梁结构把两块压电陶瓷沿相反方向上下振动转换成镜片的扭转振动．采用MEMS体硅工艺及微装配技术,制备出器件样品．经测试,大气压下,研制出的扫描镜扫描谐振频率可达21．9kHz,施加200V交流电,谐振态的光学扫描角度为21．8°．测试数据表明该器件适用于激光打印、务形码扫描及微型激光投影显示等领域．     

单振子二自由度球面马达的运动机理

利用矩形板形压电振子的两种振动模态,构建了一种采用单片压电振子驱动球形转子,形成两个旋转自由度的压电球面超声马达,对马达的作用机理进行了仿真分析和试验验证.利用有限元法对马达的矩形板压电振子的振动模态、共振频率进行了分析计算,仿真结果表明矩形板压电振子能够形成振型清晰的B32和B23振动模态,模态频率分别为49.127 kHz和49.756 kHz.对压电振子上每个凸起与球形转子之间的接触点的运动轨迹进行了计算机仿真,并对仿真结果进行了试验验证.分析结果表明各接触点能有效形成时序合理的椭圆运动轨迹,作为支撑足的一组凸起的变形量占作为驱动足的一组凸起的变形量的30%,能够用于驱动球形转子形成二自由度转动.仿真分析和试验结果证明了二自由度球面马达球形转子形成二维运动的作用机理.     

Design and Demonstration of a Bulk Micromachined Fabry–PÉrot μg-Resolution Accelerometer

A high resolution, passive, bulk-micromachined accelerometer based on the transmission-type intrinsic Fabry-Perot interferometer has been designed, fabricated and, for the first time, experimentally evaluated via direct inertial characterization. The device characterization includes frequency- and time-domain evaluation. The sensor characteristics of bandwidth, range, sensitivity, and resolution are obtained experimentally and the tradeoffs between these performance parameters are examined. Also, presented is the evaluation of the effects of the excitation of multiple vibration modes in such a sensor. The sensor performance is observed to have a resolution limits below a mug with a demonstrated 30 mug resolution over a sensing bandwidth greater than 2 kHz and better than 1 dynamic range.     

Piezoelectric formation mechanisms and phase transformation of poly(vinylidene fluoride)/graphite nanosheets nanocomposites

The β-phase of poly(vinylidene fluoride) (PVDF) is of great technical importance because of its high dielectric constant and piezoelectric effect. In this work, we exfoliated and dispersed natural graphite to prepare 2D-graphite nanosheets (GNS) and prepared PVDF/GNS nanocomposites with different GNS volumes from 1 to 7 ml as film via solution casting method. The concentration of the supernatant was about 0.3 mg/mL. The effect of GNS on the β-phase formation and mechanisms of piezoelectric formation in the PVDF/GNS nanocomposites were investigated. The results showed that with the varying amounts of GNS, the crystalline structure, the morphology, and the dielectric and piezoelectric properties of PVDF/GNS nanocomposites changed. GNS acts as an effective nucleation agent with the orientation almost parallel to the surface of the film meanwhile increasing the amount of beta phase in the PVDF matrix with increasing amount of GNS, also the relative dielectric constant and dielectric loss of the nanocomposites increased with increasing amount of GNS. The value d₃₃ also increased with increasing amount of GNS, and reached a maximum (6.7 pC/N) with 6 ml GNS. The mechanism of piezoelectric formation was proposed based on experiment results of PVDF/GNS nanocomposites.     

A Novel Threshold Accelerometer With Postbuckling Structures for Airbag Restraint Systems

Based on the postbuckling theory of large deflection beams, the nonlinear stiffness of a postbuckling beam is deduced and in agreement with the results of buckling experiments. Then, a novel post machined threshold accelerometer is designed, which consists of eight oblique post beams with an inertial mass in the middle to ensure its single moving direction and an electrical contact part fabricated on the bottom of the inertial mass. The threshold accelerometer is an integration of a threshold sensor and an inertial driven actuator used in airbag restraint systems. When the acceleration reaches the threshold, the beams buckle and close the threshold accelerometer, and when it gets down to be a certain value, the accelerometer opens quickly under the effect of the elastic force developed by the postbuckling beams. Compared with the design models of other threshold accelerometers with linear beam structures, the nonlinear postbuckling beams are introduced as threshold sensing elements. A number of design factors such as the air film damping and the contact force are taken into full consideration, thus establishing the dynamic equation of the accelerometer under coupled forces. The dynamical simulation for the strong nonlinear system with elliptic integrals indicates its good threshold characteristic and high contact reliability. The threshold accelerometer responds within 4 ms when it is triggered by a threshold acceleration ac = 20 g, and cuts off quickly when the cutoff acceleration is under ad = 5 g. Meanwhile, the unstable contact time is only 0.02 ms for the contact force to reach 50 mN, which guarantees the contact resistance to be less than 20 mOmega. With the results of the dynamic simulation, supported by previous buckling experiments, the accelerometer can provide accurate threshold sensing without false actuations under interferences outside, especially electromagnetic and vibration interferences, and hence their wide applications in safe-arming systems.     

Improving the stability of amorphous silicon ultraviolet sensors

In this paper we present an improved structure of an amorphous silicon/amorphous silicon carbide ultraviolet sensor, previously presented in literature, whose overall performances have been enhanced by growing a very thin layer of chromium silicide film on the top of the sensor. The sensor is a n-type amorphous silicon/intrinsic amorphous silicon/p-type amorphous silicon carbide stacked structure deposited on a glass substrate. The substrate is covered with a chromium film that acts as back metal contact. The top metal contact is a grid shaped chromium/aluminum/chromium metal stack that allows the incident radiation to reach the active p-type layer.The responses of two sets of sensors fabricated with and without the alloy film under ultraviolet radiation have been studied. The role of the very thin chromium silicide layer is to increase the conductivity of the top surface without attenuating the UV radiation absorbed in the device active layer. The increased top-surface conductivity ensures a better collection of the photogenerated carriers and hides the resistivity variation of the underlying p-doped layer under ultraviolet light caused by dopant activation, leading to a stable and linear behavior. Comparing the photocurrent values obtained on sensors with different area and distance between the grid electrodes, we found that the presence of the chromium silicide film extends the charge collection length by a factor of 10, allowing a better device photoresponse.     

A high performance, variable capacitance accelerometer

A variable capacitance acceleration sensor is described. Manufactured using silicon microfabrication techniques, the sensor uses a midplane, flat plate suspension, gas damping, and overrange stops. The sensor is assembled from three silicon wafers, using anodic bonds to inlays of borosilicate glass. Typical sensor properties are 7-pF active capacitance, 3-pF tare capacitance, a response of 0.05 pF/G, a resonance frequency of 3.4 kHz, and damping 0.7 critical. It is concluded that this sensor, with appropriate electronics, forms an accelerometer with an order-of-magnitude greater sensitivity-bandwidth product than a comparable piezoresistive accelerometer, and with extraordinary shock resistance     

Vibration analysis of a circular thin polymeric piezoelectric diaphragm with fluid interaction

This paper presents vibration analysis of a circular piezoelectric micro-plate in fluidic environment. PVDF film is used as the piezoelectric material. PVDF is a material with asymmetric matrix of piezoelectric constants and shows different piezoelectric properties in different directions. The governing equations, which are more complicated compared to piezo-ceramics, are derived. The boundary conditions for the plate are assumed fully clamped at outer edge, as is the case in many micro devices. Liquid is modeled as a damping foundation under the plate. The equations of motion are solved using generalized differential quadrature method to obtain Eigen frequencies and mode shapes of the plate. The results are compared by developed finite element analysis.     

A piezoelectric, flexural-disk, neutrally buoyant, underwater accelerometer

A piezoelectric, flexural-disk accelerometer for underwater use is composed of two PZT-5A lead zirconate-titanate disks that are bonded to an aluminum substrate. The substrate is edge-supported inside an aluminum housing. The housing is enclosed in syntactic foam so that the sensor is neutrally buoyant. The overall height is 1.0 in. (26 mm), the overall diameter is 1.9 in. (49 mm), and the total mass is 0.054 kg. With 25 ft (7.6 m) of (230 pF/m) cable attached, the sensitivity is -42 dB re 1 V-s(2)/m (-22 dB re 1 V/g), the capacitance is 5.0 nF, and the resonance frequency is 11 kHz. When used in conjuction with a Micro Networks MN3210 preamplifier, the spectral noise-equivalent acceleration floor is approximately -171 dB re 1 m/s(2)- radicalHz (-151 dB re 1 g/ radicalHz) at 5 kHz.