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1.
利用铝阳极氧化方法对微晶玻璃基板上的多层铝膜进行选择性氧化,制备了4层布线的高密度MCM—D基板,对氧化得到的多孔型氧化铝介质膜的绝缘及介电性能进行了研究。实验结果表明:多层布线铝与氧化铝结合性好,层间和同层多孔氧化铝绝缘电阻分别达到10^9Ω和10^11Ω以上;多孔型氧化铝的相对介电常数和损耗分别为5.73和0.022(1MHz);导带、互连通孔与绝缘层所形成的层间通孔互连结构共面性好,具有良好的电互连性能。多孔型氧化铝介质膜适用于制备高密度MCM—D基板。  相似文献   

2.
铝阳极氧化膜的扩孔处理   总被引:6,自引:2,他引:4  
徐洮  陈建敏 《材料保护》1994,27(9):18-22
铝多孔质阳极氧化膜是制备自润滑阳极氧化铝的基础,其技术关键之一是在不破坏氧化膜结构与性能的前提下,尽可能扩大微细孔的孔径。本文用透射电镜(TEM)、显微硬度仪、SRV摩擦实验机等设备,系统考察了草酸溶液中生成铝阳极氧化膜的微观多孔质结构以及经扩孔处理后该氧化膜多孔质结构的变化和对氧化膜机械性牟的影响,重点探讨了扩孔处理对氧化膜表面硬度和耐磨性的影响,并由此确定了最佳扩孔时间及最佳孔径,为制备纳米量  相似文献   

3.
纳米微孔铝阳极氧化膜的制备及性能   总被引:8,自引:1,他引:7  
阎康平  涂铭旌 《功能材料》2000,31(3):294-295
研究了作为功能膜使用的微孔铝阳极氧化膜的制备及性能。在 4%磷酸阳极氧化铝膜基础上 ,3 .5 %盐酸电解浸蚀得到支撑氧化铝的基体 ,2 %碱处理去除无孔阻挡层 ,3 5 0℃热处理脱水氧化膜 ,制备了具有纳米级孔径和较好机械强度的复合氧化铝分离膜。  相似文献   

4.
本研究采用剧烈–温和阳极氧化(hard anodization-mild anodization,HA-MA)结合快速制备高度有序多孔阳极氧化铝(porous anodic alumina,PAA)膜的方法,即先利用HA在铝表面快速形成有序凹坑阵列,然后再对表面留有有序凹坑的铝基进行温和阳极氧化,制备出有序PAA膜。研究了剧烈阳极氧化时氧化电压、氧化时间对所制备PAA膜有序度的影响。研究结果表明,HA-MA结合法制备PAA膜的优化HA参数为:0.3 mol/L硫酸、80 V、10 min。HA-MA结合法所制备PAA膜的有序性和机械稳定性与二步温和阳极氧化法的相近,但形成有序PAA膜所需的时间为4.5 h,约为温和阳极氧化法的1/4,极大地提高了高度有序PAA膜的制备效率。  相似文献   

5.
铝阳极氧化已经研究了五十多年,涉及铝阳极氧化膜的实验数据十分丰富,然而阳极氧化过程的本质特别是多孔氧化膜的生长机制迄今为止还远未认识清楚。近些年,随着纳米技术的兴起,多孔氧化铝膜作为理想的纳米结构模板材料倍受国内外学者的关注,对多孔氧化铝膜形成机理的研究显得尤为重要。本文对多孔阳极氧化铝的结构、形成机制方面的历史发展和现状进行了综述。指出了大多数学者认同的“酸性场致溶解”理论的缺陷。作者认为铝多孔氧化膜形成机理的研究具有重大的理论意义和实际应用价值,同时也会促进其他多孔阳极氧化物形成机理的认识。  相似文献   

6.
铝阳极氧化的回顾与展望   总被引:40,自引:3,他引:37  
郭鹤桐  王为 《材料保护》2000,33(1):43-45
简单介绍了半个多世纪以来铝阳极氧化技术在理论与应用方面取得的进展,重点民法了如何充分利用铝阳极氧化膜的多孔性,借助膜的纳米级规范有序的微孔,开发制备新型超精细分离膜以及具有光学特性,磁性,太阳能吸收,催化性能等多种功能的新型材料的美好前景。有望使铝阳极氧化膜成为新型纳米材料中的一员。  相似文献   

7.
两步阳极氧化法制备多孔阳极氧化铝膜   总被引:5,自引:1,他引:5  
直流恒压下,在酸性溶液中对铝实施两步阳极氧化制备了多孔氧化铝膜。采用扫描电镜(SEM)、原子力显微镜(AFM)对制备的多孔氧化铝膜进行形貌分析,孔径在纳米级且孔分布具有高度均匀性。采用SEM对试样进行观察,分析了工艺对多孔氧化铝膜形貌的影响。利用阳极氧化初期电流密度的变化并结合阳极氧化过程中的试样的SEM照片,分析了多孔氧化铝膜的形成机理。  相似文献   

8.
高度有序多孔阳极氧化铝模板的制备   总被引:1,自引:0,他引:1  
为了得到纳米孔排列高度有序的多孔阳极氧化铝模板,以0.3 mol·L-1的草酸为电解液研究了模板的制备工艺.采用场发射扫描电子显微镜(FE-SEM)对多孔氧化铝模板的表面形貌进行表征,X射线衍射分析高纯铝及氧化膜的结构.实验结果表明,铝基体不经过高温退火处理,同样能够得到高度有序的氧化铝膜,简化了多孔氧化铝膜的制备工艺.分别讨论了阳极氧化电压和电解液温度对多孔阳极氧化铝膜的形貌及孔径的影响,并对一步法和两步法制得的多孔氧化铝膜进行比较,结果表明,两步阳极氧化法制备的多孔氧化铝模板的有序性优于一步氧化法.XRD分析证实,多孔氧化铝膜由非晶态的Al2O3组成.  相似文献   

9.
阳极氧化法制备有序多孔材料具有工艺简单、孔径可控以及稳定性高等特点,具有广阔的应用前景.系统介绍了阳极氧化法制备有序多孔氧化铝和氧化钛的研究进展.重点介绍了阳极氧化法制备小孔径有序多孔氧化铝和氧化铝光子晶体的研究,特别介绍了有序多孔氧化钛膜的结构特点及该领域未来的发展方向.此外还简略介绍了阳极氧化法制备ZrO2、HfO2等有序多孔材料.  相似文献   

10.
干涉着色阳极氧化铝   总被引:1,自引:0,他引:1  
本文主要介绍了利用光干涉效应原理的工艺着色阳极氧化铝,并对干涉色涂层的微观结构进行了初步分析。将经过常规硫酸阳极氧化后的铝试样,在磷酸溶液中作短时间的阳极氧化扩孔处理,再置于普通电解着色液中进行电解着色,即可获得性能优异的干涉色涂层。阳极氧化铝中的干涉着色效应,来源于沉积金属层表面和阳极膜/铝基体界面的两束散射光的相互作用。  相似文献   

11.
Enhancement of naturally-occurred self ordering nanopores in anodic aluminum oxide membrane by performing three-step anodic oxidation process has been reported. Naturally-occurred self ordering of nanopores in anodic aluminum oxide membrane has brought it into the applications of template for fabrication of nanoscale materials. Three-step anodic oxidation method was used to achieve self-ordering of nanopores. Effect of duration of first and second steps on the ordering of nanopores was investigated. The current-time curves recorded during anodization elucidate an almost same behavior for all three steps. Scanning electron micrographs show hexagonally arranged 45 nm pores in a manner which contribute into the formation of highly ordered areas, called domains. Larger ones are clearly observed over the surface, for samples with longer first and second anodization steps.  相似文献   

12.
Doped exfoliated graphite has been prepared via anodic oxidation of natural dispersed graphite in solutions of magnesium, lanthanum, and silver nitrates, followed by heat treatment. The physicochemical properties of the carbon materials thus prepared have been shown to depend on the nature and concentration of the metal nitrate and the electrochemical oxidation and heat-treatment conditions. The thermal behavior of imperfect oxidized graphite, a precursor to exfoliated graphite, has been studied. A method has been proposed for the fabrication of exfoliated graphite/M(O) (M = La, Mg, Ag) composites containing 1–7 at % M and having a large specific surface area: 80–110 m2/g.  相似文献   

13.
We investigate the fabrication of nanometric patterns on silicon surfaces by using the parallel-local anodic oxidation technique with soft stamps. This method yields silicon oxide nanostructures 15?nm high, namely at least five times higher than the nanostructures made with local anodic oxidation using atomic force microscopy, and thanks to the size of the stamp enables one to pattern the surface across a centimetre length scale. To implement this technique, we built a machine to bring the metallized polydimethylsiloxane stamp in contact with the silicon surface, subsequently inserted in a sealed chamber with controlled relative humidity. The oxide nanostructures are fabricated when a bias voltage of 36?V is applied between the stamp and the silicon for 2?min, with a relative humidity of 90%. The flexibility of the stamp enables a homogeneous conformal contact with the silicon surface, resulting in an excellent reproducibility of the process. Moreover, by means of two subsequent oxidations with the same stamp and just rotating the sample, we are able to fabricate complex nanostructures. Finally, a detailed study of the oxidation mechanism, also using a finite element analysis, has been performed to understand the underlying mechanism.  相似文献   

14.
Large size anodic alumina film has not been used in the industry due to that the fabrication parameters are very difficult to control, but the fabrication of large size anodic alumina is exigent as a template in the fabrication of diverse nano-devices oriented to the industrialization. In this paper, large size (width length = 80 mm × 80 mm) porous ordered anodic alumina film was fabricated by using two-step anodization process as compared to the small size (diameter = 40 mm) anodic alumina film in the structures. Pore size and film thickness of anodic alumina film are strongly related to the size of the anodization film. The large size anodic alumina film has an ideally ordered pattern by applying low voltage. However, with the increase of voltage, the ordered pattern of the PAA films was gradually disrupted, especially in the 70 V due to the local thermal imbalance.  相似文献   

15.
In this work we report on very thin (10 to 100 nm) tantalum oxide fabricated by anodic oxidation of tantalum nitride and tantalum silicide to be used as the dielectric of high density MIM and MIS capacitors. These films exhibit greatly improved leakage currents, breakdown voltage and very low defect density, thus allowing the fabrication of large area capacitors. Several counter and bottom electrodes have been used and compared. The effects of the different processing conditions (top-electrode metals, annealing conditions, bottom electrode stoichiometry) on the capacitor performances are extensively discussed throughout this work. The nitrogen content of tantalum nitride films seems to have an important influence on the insulator quality. Leakage currents in the insulator have been carefully studied in order to determine the nature and physical origin of the dominant conduction mechanisms in the insulator. The electrical behaviour of the resulting high-density MIM capacitors has been extensively characterized. Finally, we describe a new method to fabricate MIS diodes with anodic tantalum oxide as insulator.  相似文献   

16.
采用阳极氧化法制备了TiO2和Al2O3有序多孔阵列,并通过X射线衍射(XRD)、场发射扫描电子显微镜(FESEM)、莱茨光学显微镜对制备的TiO2和Al2O3有序多孔阵列进行表征。结果表明,随着氧化电压的增大,TiO2和Al2O3纳米孔的直径增加,孔密度减小。随着氧化时间的延长,TiO2和Al2O3多孔膜厚度增加,到一定时间后膜厚不变。同时讨论了阳极氧化机理,无论是制备TiO2还是Al2O3有序多孔阵列,阳极氧化过程主要由3个阶段组成:阻挡层的形成、阻挡层的溶解、多孔层的稳定生长。  相似文献   

17.
酒石酸-硫酸阳极氧化(Tartaric sulfuric anodizing,TSA)作为铝合金六价铬阳极氧化的有效替代工艺之一,近些年在研究和应用方面均取得了较大的进展。为了改善TSA阳极氧化膜的耐蚀性,通过均匀设计方案及试验,对TSA阳极氧化处理工艺参数进行了详细的研究,得到了阳极氧化参数与膜层耐蚀性之间的联系,并通过试验验证了优化的处理工艺。结果表明:最佳工艺参数是电解液组成为55 g/L硫酸+88 g/L酒石酸的混合液,阳极氧化的电压、时间、温度分别为14.0 V、23 min、37.0℃和17.5 V、20 min、35.5℃。  相似文献   

18.
With an aim of the precise control of the anodic oxidation process by atomic force microscopy, the technical improvement has been carried out based on the mechanism studies. The accuracy and reliability of the nanofabrication have been improved by the combination of ambient humidity control, improvement of instrumental performance and meniscus lifetime control. In parallel, the mechanism study has been proceeded through the detection of Faradaic current. The in situ Faradaic current detection of the nano-oxidation process can actually work as a sensitive monitor for the nano-oxidation process with a high reliability. From an engineering viewpoint with an eye to practical applications, controllable physical parameters which affect on the product size are enumerated to consider what we should do to raise the precision of nano-oxidation. Then the fast fabrication in a large area by a patchwork method, Faradaic current detection during oxidation-reduction reaction, and nanofabrication by current-control are shown as examples.  相似文献   

19.
矿浆电解过程的浸出机理   总被引:3,自引:0,他引:3  
介绍了高铅铜型难处理金矿矿浆电解浸出机理的研究结果。金精矿在矿浆电解时,铅的浸出可通过化学溶解、化学氧化、阳极氧化三种途径;铅浸出的主要途径是靠化学溶解,矿粒与阳极接触而被氧化对浸出的贡献不大。  相似文献   

20.
许宁  刘旭俐  陈嘉琳  陈小芳 《材料导报》2011,(Z2):358-359,377
以草酸为电解液,采用二次阳极氧化法制备多孔有序氧化铝模板,研究了氧化电压、电解液浓度、去一次氧化膜时间和二次阳极氧化时间对多孔氧化铝膜结构的影响。结果表明,退火后在60V电压、0.6mol/L的草酸溶液中、去一次阳极氧化膜5h、二次阳极氧化15h制备的膜结构孔洞均匀有序、孔径达80nm、孔密度达8.2×109个/cm2。  相似文献   

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