Rückseitenmetallisierung Wafer‐basierter Si‐Solarzellen mittels EB‐PVD

Back Side Metallization of Wafer Based Silicon Solar Cells by Means of Electron Beam Evaporation Electron beam evaporation is an innovative vacuum deposition technology regarding the wafer backside metallization of crystalline silicon solar cells. The motivation for the consideration of electron beam evaporation as cell finishing step is based on the one hand on the competition with thin film photovoltaic modules and on the other on the remarkable cost reduction potential by applying EB‐PVD (Electron Beam Physical Vapor Deposition). This article presents a highly productive coater concept and gives an explanation of important aspects for the adaption of the coater concept to typical solar cell features. Various PVD technologies are compared concerning their possible use as wafer backside metallization method. Challenges and chances of the introduction of EB‐PVD in the wafer based solar cell production are considered.     

SSRF增强器真空系统设计和真空室研制

为减少增强器弯转磁铁的交变磁场在真空室内感应的涡流对主磁场的干扰，SSRF增强器采用了椭圆截面的薄壁不锈钢真空室，并成功研制出样机，本文描述了增强器真空系统总体设计、真空室的材料选择、结构设计和物理计算（如涡流对主磁场的影响、真空室的真空负载变形、同步辐射光对真空室温升影响和真空室内压强分布），介绍了加工工艺。     

Backstreaming of pump oil vapors in vacuum systems

Backstreaming, or back‐migration, of vacuum pump oils can prevent a vacuum system from reaching its lowest possible pressure and may contaminate vacuum‐enable processes, such as thin film deposition. There are several circumstances which may lead to backstreaming, methods to measure the rate of oils reaching a vacuum chamber, and techniques to reduce or eliminate the problem. This article serves as an introduction to these issues and provides support on causes, measurement and mitigation.     

国产镀膜机实现多层膜自动化晶振控制

介绍了改造国产镀膜机的继电器控制线路的方法，从而实现其与INFICONIC／5晶振薄膜沉积监视器之间接口电路的转接。生产试验表明，采用此法改造后的装置可实现对多层光学薄膜的高精度、快速自动化监控。     

低温真空腔体结构设计及传热分析

为适应未来航天低温光学系统的需要，研制了1套测量光学元件低温场和低温变形的系统。该系统由真空机组、低温真空腔体、防振系统、测量装置等主要部分组成。其中低温真空腔体是该系统中关键的装置，为光学元件的低温真空实验提供了必要的条件。对低温真空腔体的结构设计、真空度和传热进行了分析探讨，并且对梯形薄壁绝热支撑进行了详细结构热分析和COSMOSWORK软件的传热分析，结果表明可以满足低温真空的实验要求。     

CoCr-sputtering in large scale roll coating systems

CoCr-layers have been DC-magnetron sputtered onto Polyimide web in a 2 side sputter roll coater for 1.2 m web width. Magnetic as well as crystallographic properties have been investigated as function of the deposition parameters: layer thickness, coating drum temperature, background pressure and angle of incidence. First measurements of electro-magnetic properties also have been made. The influence of different protective layers on the lifetime of a CoCr floppy disk has been checked in first experiments.     

一种双真空室结构磁控溅射台的研制

本文研制了一种较高档的磁控溅射镀膜设备,用于微电子器件规模化生产过程中的基片表面镀膜.该设备采用双真空室结构,使溅射室始终维持较高的真空度和洁净度,提高镀膜质量和镀膜效率.环绕溅射室设计了3个直流靶和1个射频靶,能够溅射金属膜、介质膜、混合物和化合物薄膜.文中详述了该设备的设计原理、总体结构及工艺控制方法.该磁控溅射台已开发成功并投入使用,替代了同类进口设备.     

Modelling vacuum cooling process of cooked meat—part 1: analysis of vacuum cooling system

A mathematical model is developed to analyse the performance of a vacuum cooler. The model is based on the mass conservation of air and vapour in the vacuum chamber. In the chamber, the vapour evaporated from foods under the vacuum and the vapour removed by the vapour-condenser and vacuum pump contribute to the variation in the vapour partial pressure, and the ingress air and the air released by the pump cause the change of air partial pressure. Experiments were carried out on vacuum cooling of water to validate the model. The predicted vacuum pressure and temperature histories are compared with the measured values. The maximum deviation between the predicted and measured vacuum pressure is within 110 Pa (for the chamber pressure between 12,000 and 2200 Pa), while the maximum deviation between the predicted and measured temperature of water is less than 2 °C. The model can, therefore, be used to predict the transient vacuum pressure profiles for analysing the vacuum cooling process of foods such as cooked meat.     

一种新型的幅宽1500 mm的卷绕式真空镀膜机

幅宽1500mm卷绕式真空镀膜机，是为了满足1500mm幅宽的聚脂薄膜（PET）、定向聚丙烯薄膜（OPP）、聚丙烯流涎薄膜（CPP）、聚乙烯薄膜（PVC）的真空镀铝而设计的。和通常的卷绕式真空镀膜机相比，具有真空度高，抽真空的时间短，卷取性能好，镀膜幅度宽，镀膜速度快。跑偏量小，镀膜层牢固、均匀等优点。是一种理想的卷绕式真空镀膜机。     

真空舱几何结构对离子推力器背溅射沉积影响的计算研究

有效降低溅射沉积影响是离子推力器地面寿命试验需要解决的关键技术问题。本文建立了真空舱壁上溅射物沉积到离子推力器表面的计算模型。结合LIPS-200推力器束流特性和石墨材料内衬,应用该模型分别计算和分析了平面靶圆柱型、平面靶圆锥台型、球面靶圆柱型、凸锥靶圆柱型、凹锥靶圆柱型五种真空舱几何形状与尺寸对离子推力器背溅射沉积的影响关系规律,得到了对具体设计LIPS-200推力器寿命试验真空舱具有指导作用的重要结论。     

Video tape manufacture by high vacuum evaporation—aspects of machine technology

The next generation of video tapes will use evaporated thin films with their superior properties such as recording density, output level, frequency characteristics and signal-to-noise ratio. This paper describes the metal layer formation by a simple model for the growth of microcolumns at oblique incidence deposition. The most relevant process parameters are discussed. The layout of a production coater is described.     

HWCVD of polymers: Commercialization and scale-up

GVD Corporation specializes in process development and equipment design for the production of ultra-thin polymer coatings using hot wire chemical vapor deposition (HWCVD, also known as initiated chemical vapor deposition, iCVD). HWCVD allows many coating compositions to be produced, including fluorocarbon and silicone polymers, copolymers, and vinyl hydrocarbon polymers. It is especially valuable for creating ultra-thin layers of insoluble, infusible polymers which are hard to process by conventional means, such as polytetrafluoroethylene (PTFE, Teflon^®). HWCVD PTFE coatings are chemically robust, comprised of essentially 100% CF₂, resistant to solvents, conformal to complex surface geometry, and have excellent adhesion to a wide range of substrates. Since the part to be coated remains at room temperature, fragile materials like plastics and fabrics can be coated with ease. GVD has focused on scale-up of the process equipment and has developed several standard coating systems, which will be discussed in this paper. These include laboratory-scale batch coating systems, a medium sized production batch coating system, a large scale custom batch coater, and a pilot scale roll-to-roll web coater. All of GVD's systems are complete with fully automated, computer based control systems and include options for effluent monitors and an exhaust scrubber.     

Balanceregelung für reaktives Magnetronsputtern zur optischen Großflächenbeschichtung

Best prerequisites for long term stable optical coating are given by reactive Dual Magnetron Sputtering. Requirements for components and techniques for architectural Low‐E coating and TCO coating are discussed. Reliable process stabilization at high deposition rates is possible using Plasma Emission Monitor (PEM) control circuits. The use of multichannel PEM control allows a balance control to improve both the film thickness uniformity and reproducibility of working points for large area coating on glass or web. Examples of horizontal and vertical glass coater for deposition of optical multilayers for different applications are presented.     

New Free Margin Oil Evaporator for Capacitor Film Metallizers (CAP/M)

This paper reports an innovative solution for a masking oil evaporator, Free Margin Evaporator (FME), based on flash evaporation. Particular emphasis is based on oil consumption and free margin quality. The device has been validated by data obtained under experimental and production conditions as a function of total nozzle width (m), metal layer thickness (Ohm/sq) and coating drum speed (m/s). The desired oil thickness on the web has been calculated for different coating processes. Specific advantages of the FME such as process security, oil quality, chamber contamination and cost‐savings using the new free margin evaporator are discussed. Regarding these aspects, the flash evaporator offers advantages to the web coater compared to conventional free margin oil evaporators.     

甘露醇冷冻干燥室内真空压力特性的研究

冷冻干燥室的真空系统为冷冻干燥提供了真空环境,真空压力特性对冷冻干燥过程顺利进行至关重要,本文以甘露醇溶液的冷冻干燥过程为例,从三个方面对冷冻干燥室内真空压力特性进行了研究:一、真空度对冷冻干燥物料质量称量的影响;二、真空度对冷冻干燥物料瓶内温度的影响;三、真空度对冷冻干燥物料一次干燥速率的影响.通过实验,得出结论:真...     

Design of metallization equipment for web coating

As a result of the increasing demands created by the wide range of such applications as decorative, packaging, energy conservation and electronic materials, the continuous web metallizing process has become sophisticated and exacting. High system reliability and precise quality control are required to achieve the continuous deposition of thin metallic coatings onto polyester films, paper and cloth in roll form. An in-depth discussion of the critical areas in the design and operation of equipment, together with the various deposition processes, is presented, with emphasis on the significance of vacuum level, uniformity of coating thickness and web transport properties, such as tension and temperature control.     

Simple low-vacuum coating of paraffin wax on carbonaceous gas sensing layers

A simple low-vacuum coater has been fabricated by using a vacuum resin degassing chamber, in which an aluminum effusion cell is heated by a soldering iron. Our developed vacuum coater presents the versatile methods for depositing paraffin wax for skin-coating the sensing layers of quartz crystal microbalance (QCM). As the increase of the cell temperature, the thickness and inhomogeneity of the wax films were increased. Impedance analyses revealed that the energy dissipation of the QCM was remarkably enhanced with the amount of wax. It was also revealed that the as-deposited wax was fluidic until coagulation by heat radiation. This surface skin coating enhanced the ethyl acetate (EA) sorption capabilities of the polyethylene-sputtered QCM sensor, whereas, it reduced the EA sorption capacity of the d-phenylalanine-sputtered QCM sensor.     

浅析离子辅助光学薄膜镀膜机的特性

真空镀膜产品的质量问题，一直是应用镀膜技术人员探索的课题。人们经过长期探索，采用离子束辅助沉积镀膜技术，改善了镀膜层牢固性，提高了反射率。本技术在通讯技术、太阳能应用、汽车、装潢等领域应用十分广泛。本文介绍了真空离子束辅助沉积镀膜设备特性。     

真空比对标准装置的研究

真空比对标准装置是由真空泵、校准室、真空管道、各种阀门及真空规组成的。根据实际使用情况,从四个方面对真空比对标准装置进行了详细的分析,包括:校准室的研究、微调阀性能的研究、标准规计量学特性的研究、比对校准技术的研究和应用。     

Design of the vacuum system for Diamond, the UK third generation light source

The Diamond synchrotron, which is due to come into operation with beam for users in 2007, is being constructed at the Rutherford Appleton Laboratory, Oxford. The design status of the vacuum system of the storage ring as at 31st December 2002 will be reported.Diamond is based on a 24 cell 3 GeV electron storage ring of 561.6 m circumference. As is the case for most such machines, the operational pressure has been specified as 10⁻⁹ mbar to give a beam lifetime >10 h at the design current of 300 mA. The storage ring vacuum system will use conventional technology and most of the vacuum vessels will be constructed of stainless steel. With the exception of the insertion device (ID) vacuum chambers, the ring has not been designed to be baked in situ, but all components will be vacuum baked as sub assemblies before installation. The vacuum system is designed to achieve the required pressure after 100 A h of beam conditioning using the pumping scheme, which will be described.Twenty-one ID straights are available for ID, of which seven will be installed at the start of operations. Three types of vacuum vessel will be used in these straights, a stainless-steel make-up pipe, a NEG coated narrow-gap vacuum chamber for conventional IDs and a wider vacuum chamber to house in vacua IDs. The ID straights have an isolation valve installed at each end, and in situ baking can be used in these restricted locations, for example to activate the NEG coatings.The vacuum system for the beam line front ends has been designed to provide good vacuum isolation between the storage ring and the experimental beam lines, whether or not an interposing window is fitted.Pumping schemes, pressure measurement and calculated pressure profiles will be described.