基于软件误差修正的通用直线工作台的纳米级定位控制

提出了一种用于通用压电陶瓷线性马达(PLCM)驱动平台的纳米级定位数控方案,该平台上配有栅距20μm的线性光栅.传统的信号细分多数基于硬件电路,无法对纳米级误差进行灵活的调整.本项研究开发了基于Labview的数字控制系统,该系统具有失真波形的调整、1/4栅距脉冲计数、基于Lissajous圆环的波形细分、后传神经网络和PID控制以及平台的位置反馈控制等特征.介绍了定位控制的3个步骤,即用于长行程连续移动控制的AC模式,用于低速短行程的开关模式控制马达驱动,以及以压电激励方式使马达工作的DC模式,这些步骤能够实现几纳米的精确定位.在每种运动模式下采用了专门的信号处理技术.实验结果表明,此方法可以很容易地应用于线性平台,取得小于31 nm的定位精度,9 mm行程的标准误差小于30 nm.相比于原来移动台±1μm的重复性和±1μm/25 mm的精度,该数字控制系统能够将定位精度提高一个数量级.     

Piezoelectric stepper motor with direct coupling mechanism to achieve high efficiency and precise control of motion

The paper describes a piezoelectric motor that combines the merits of piezoelectric materials, such as high power density generated at electromechanical resonance, and a precise control of displacement. In the motor, a standing shear wave is excited at the resonance in the piezoelectric tube, and it produces high-frequency torsional vibrations of the stator. The vibrations are converted into unidirectional rotation of a rotor by using a direct coupling mechanism between the stator and the rotor in which a clutch drives the rotor via locking it. The direct coupling makes it possible to transmit the whole power generated in the piezoelectric tube to the rotor, and thus achieve the high efficiency of the motor. It also allows combining two regimes of operation: continuous rotation and a stepwise motion within a 360 degrees interval with a high resolution of angular displacement.     

Dynamic Modeling and Control of a Piezo-Electric Dual-Stage Tape Servo Actuator

We present a data-based approach for modeling and controller design of a dual-stage tape servo actuator. Our method uses step response measurements and a generalized realization algorithm to identify a multivariable discrete-time model of the actuator. The data acquisition and modeling can be implemented in the servo firmware of a tape drive. We have designed a dual-stage controller, based on the model, using loop shaping techniques adopted for multivariable control problems. We applied the procedure to the prototype of a dual-stage actuator tape head to reduce the effect of lateral tape motion. The prototype consists of a conventional voice coil motor for coarse positioning and a micro-actuator for fine positioning. The micro-actuator, which is mounted on the voice coil motor, uses a piezo crystal to follow high-frequency lateral tape motion (up to the kilohertz regime), while the voice coil motor follows only low-frequency lateral tape motion. Compared to a single-stage design, the dual-stage servo design provides a 25% bandwidth improvement and a voice coil motor control signal that is much smaller in magnitude.      

Design and implementation of spherical ultrasonic motor

We present a mechanical design and implementation of spherical ultrasonic motor (SUSM) that is an actuator with multiple rotational degrees of freedom (multi-DOF). The motor is constructed of 3 annular stators and a spherical rotor and is much smaller and simpler than conventional multi-DOF mechanisms such as gimbals using servomotors. We designed a novel SUSM using experimental data from a single annular stator and a finite element method. The SUSM using a spherical rotor of diameter 20 mm without any reduction gear has demonstrated advantages of high responsiveness, good accuracy, and high torque at low speed. The dynamic implementation of SUSM was consistent with the driving model of SUSM based on a friction drive.     

单振子二自由度球面马达的运动机理

利用矩形板形压电振子的两种振动模态,构建了一种采用单片压电振子驱动球形转子,形成两个旋转自由度的压电球面超声马达,对马达的作用机理进行了仿真分析和试验验证.利用有限元法对马达的矩形板压电振子的振动模态、共振频率进行了分析计算,仿真结果表明矩形板压电振子能够形成振型清晰的B32和B23振动模态,模态频率分别为49.127 kHz和49.756 kHz.对压电振子上每个凸起与球形转子之间的接触点的运动轨迹进行了计算机仿真,并对仿真结果进行了试验验证.分析结果表明各接触点能有效形成时序合理的椭圆运动轨迹,作为支撑足的一组凸起的变形量占作为驱动足的一组凸起的变形量的30%,能够用于驱动球形转子形成二自由度转动.仿真分析和试验结果证明了二自由度球面马达球形转子形成二维运动的作用机理.     

大行程超精密二维运动平台定位系统的研制

为了解决光学二维线纹标准器的量值溯源和校准以及掩膜板的高精度测量,设计了高精度激光二坐标标准装置.在装置中研制了一套超精密二维运动定位平台,该平台利用双频激光干涉仪测长作为位置反馈,直流力矩电机回转轴作为摩擦轮,通过滑动摩擦力驱动滑动光杆前后移动X-Y气浮平台,该运动定位系统具有运动平稳、重复定位精度高、测量行程大于300 mm以及最小步距分辨力为10 nm的特点,可以满足高精度激光二坐标标准装置要求的大行程、微进给和纳米级定位精度的要求.     

Numerical analysis of the symmetric hybrid transducer ultrasonicmotor

In this paper, operation of a symmetric hybrid transducer ultrasonic motor with output produced by two rotors connected together via a drive shaft is numerically analyzed and compared with the traditional asymmetric hybrid transducer motor design that produces its output from only one rotor. A one-dimensional finite element model for torsional vibration in the stator and a Coulomb friction model for rotor/stator contact associated with the longitudinal vibration of the motor are introduced. The calculation results demonstrate that the symmetric design is capable of performance comparable with the traditional asymmetric design when an optimum static spring force in the rotor/stator contact interface is applied during operation     

Modeling of a piezoelectric rotary ultrasonic motor

A piezoelectric rotary ultrasonic motor is modeled for the purpose of predicting, a priori, motor performance as a function of design parameters. The Rayleigh-Ritz assumed mode energy method is used to model the distributed piezoceramics and the traveling wave dynamics of the stator. Natural frequencies and modeshapes are obtained for a generally configured motor. Nonlinear normal and tangential interface forces between the rotor and stator are incorporated into the forcing function along with the linear piezoelectric forcing. Given the applied torque, applied axial loading, and piezo drive voltages as inputs to the model, general motor performance measures are obtained-namely speed, input power, output power, and efficiency. The approach presented here provides a general framework for modeling these motors as well as a design tool for optimizing prototypes with the added flexibility of allowing for a wide variety of geometries and materials     

大行程高精度宏/微双重驱动机器人系统的研究

研究了具有宏／微双重驱动定位工作台的控制技术。该工作台采用直线电机进行大行程位移驱动,来保证较大的工作行程和较快的响应速度,采用压电陶瓷微位移器完成精密位移驱动,利用光栅尺实现闭环位移反馈,可以实现lOOmm的工作行程,10nm的重复定位精度。     

Elastic contact conditions to optimize friction drive of surface acoustic wave motor

The optimum pressing force, namely the preload, for a slider to obtain superior operation conditions in a surface acoustic wave motor have been examined. We used steel balls as sliders. The preload was controlled using a permanent magnet. The steel balls were 0.5, 1, and 2 mm diameter, with the differences in diameter making it possible to change contact conditions, such as the contact pressure, contact area, and deformation of the stator and the slider. The stator transducer was lithium niobate, 128 degrees rotated, y-cut x-propagation substrate. The driving frequency of the Rayleigh wave was about 10 MHz. Hence, the particle vibration amplitude at the surface is as small as 10 nm. For superior friction drive conditions, a high contact pressure was required. For example, in the case of the 1 mm diameter steel ball at the sinusoidal driving voltage of 180 V(peak), the slider speed was 43 cm/sec, the thrust output force was 1 mN, and the acceleration was 23 times as large as the gravitational acceleration at a contact pressure of 390 MPa. From the Hertz theory of contact stress, the contact area radius was only 3 mum. The estimation of the friction drive performance was carried out from the transient traveling distance of the slider in a 3 msec burst drive. As a result, the deformation of the stator and the slider by the preload should be half of the vibration amplitude. This condition was independent of the ball diameter and the vibration amplitude. The output thrust per square millimeter was 50 N, and the maximum speed was 0.7 m/sec. From these results, we conclude that it is possible for the surface acoustic wave motor to have a large output force, high speed, quick response, long traveling distance, and a thin micro linear actuator.     

Rotor Design and Finite Element Analysis of Traveling Wave Rotaty Ultrasonic Motor

The dynamic transfer mechanism of the traveling wave rotary ultrasonic motor rotor-stator' s contact surface is studied in the paper and the key parts stator and cone flexible rotor of ultrasonic motor are designed.The three-dimensional contact model and finite element model considering the radial sliding between the rotor and the stator are established. The relation between the stator surface particle that amplitude frequency characteristics,resonance speed,radial displacement of ultrasonic motor and the tooth height are analyzed. Mass point radial relative displacement of contact surface between the cone flexible rotor,flexible rotor and the stator are contrasted. The cone flexible rotor is better placed on the surface of the stator tooth through its elastic deformation is interpreted. The cone flexible rotor reduces the radial slip between the stator and the output efficiency of ultrasonic motor is improved. The displacement trajectory of the stator surface is synthesized in a row wave cycle. The method of the stator mass point elliptical motion drives the rotor rotation is verified.     

A flexure-based electromagnetic linear actuator

This paper introduces a novel nano-positioning actuator with large displacement and driving force, termed a flexure-based electromagnetic linear actuator (FELA). It mainly comprises an electromagnetic driving scheme and flexure-supporting bearings that provide infinite positioning resolution and highly repeatable motion. In this work, analytical modeling of the proposed electromagnetic scheme and flexure mechanism is presented. Solutions obtained from each model are evaluated by the experimental studies conducted on a FELA prototype. This prototype achieves a stroke of 4?mm with a positioning accuracy of ± 10?nm. With direct force control, it generates various force profiles with a force-current ratio of 60?N?A(-1) and an accuracy of ± 0.3?N. Such capabilities make FELA a promising solution for realizing ultra-high precision layer-over-layer fabrication in the nano-imprinting process.     

Improvement of the longitudinal vibration system for the hybrid transducer ultrasonic motor

This paper presents a symmetric hybrid transducer ultrasonic motor designed to produce large longitudinal vibration stress in the rotor/stator contact interface for high-torque operation. The nodal plane of the longitudinal vibration mode was adjusted to match the rotor/stator contact interface, and the piezoelectric ceramic disks for the longitudinal vibration were installed at the nodal plane of the longitudinal vibration mode for effective excitation. An experimental motor, 20 mm in diameter, using the first torsional vibration mode and the second longitudinal vibration mode was manufactured. A maximum torque of 0.8 N.m was achieved in the prototype, an improvement over previous versions.     

Development of a radial-torsional vibration hybrid type ultrasonic motor with a hollow and short cylindrical structure

A longitudinal-torsional hybrid-type ultrasonic motor has larger torque and lower revolution speed compared with other kinds of ultrasonic motors. It drives devices directly and precisely, so it is adaptable to many fields, especially aeronautics and astronautics, as a servo actuator. Due to the different sound propagation speeds of longitudinal and torsional vibrations in the stator, it is difficult to match resonant frequencies of longitudinal and torsional vibrations. In this paper, a new radial-torsional vibration hybrid-type ultrasonic motor is put forward, which utilizes longitudinal vibration derived from radial vibration by the Poisson effect. The short, hollow cylindrical structure easily makes resonant frequencies of first-order radial and torsional vibrations into degeneracy. First, the new structure of the motor is presented. Second, the principle of matching the resonant frequencies is developed, and the motor geometry is optimized by ANSYS software. Finally, a 60-mm diameter prototype is fabricated, which performs well. The no-load velocity and maximum torque are 25 r/min and 5 N·m, respectively. This kind of motor is small, light, and noiseless.     

X Y parallel compliant stage with compact configuration

This paper presents a piezo-driven compliant stage for nano positioning with two degree-of-freedom parallel linear motions. Nano positioning is one of the most important factors in completion of nanotechnologies. It can be accomplished by flexure-based compliant stages driven by piezo-actuators. For compact configuration, the compliant stage is stacked by two-layered compliant mechanisms. The upper layer contains a motion guide mechanism, and the lower layer two displacement amplification mechanisms. The motion guide mechanism consists of four prismatic-prismatic parallel compliant joint chains for two translational motion guides. The displacement amplification mechanism is adopted by a flexure-based flextensional amplification mechanism driven by a stack-type piezo actuator. Due to the parallel compliant joint chains, the stage has the same dynamics in the x and y axes. In this study, through design and analysis, the mechanisms were machined via wire electro-discharge machining and are were then integrated with two stack-type piezoelectric elements for actuation, and two capacitive sensors for ultra-precision displacement measurement. Finally, experiments were carried out to demonstrate the performance of the compliant stage.     

微量注射泵用直线超声电机的结构设计

改进了一种螺纹杆直线超声电机,并用于驱动微量注射泵。螺纹杆直线超声电机具有体积小、精度高、推力足、无磁干扰等特点。为了满足微量注射泵推力要求,针对螺纹杆直线超声电机不能施加预压力问题,提出了一种可施加预压力的螺纹杆直线超声电机。该直线超声电机包括底座、柱状定子、分体式螺纹杆动子。动子由动子主轴、套筒、预压力施加装置组成。当预压力调至33.9 N时,电机达到最大堵推力21 N,此时空载最大速度为4.5 mm/s。并设计了一款微量注射泵,该微量注射泵结构简单、抗磁干扰,分辨率达到nl级别,满足各种微量药物注射要求。     

A double-mode piezoelectric single-crystal ultrasonic micro-actuator

Ternary Pb(In(1/2)Nb(1/2))O(3)-Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PIN-PMN-PT) single crystals with higher coercive field (E(C) ~9 kV/cm) and higher ferroelectric-transition temperature (T(R-T) = 108°C) were grown, and correspondingly, a double-mode piezoelectric ultrasonic micro-actuator made of PIN-PMN-PT crystal brick (5 x 1.5 x 1.32 mm) and operated in the first longitudinal and the second bending modes was developed. The ferroelectric, dielectric, electromechanical, and resonance displacement properties of the micro-actuator were characterized for miniature linear piezo-motor applications. The longitudinal displacement of the actuator is ~0.11 μm (with an applied voltage of 5 V), which is comparable to that of a multilayer piezoelectric-ceramic actuator of the same size. This crystal micro-actuator was successfully used to drive a slider moving linearly.     

集成线性编码器的高精度大行程原子力显微镜探针结构的设计和构建

提出了一种高精度、大行程的原子力显微镜探针结构,可用于测量大面积的微观结构表面.该探针结构包括一个硅悬臂梁和一个环形的预压型电(PZT)执行器,执行器沿Z轴的行程为70μm,其内部集成了一个具有纳米级分辨率的小型线性编码器,可用于测量PZT执行器的位移,编码器的刻度沿执行器的轴向(Z轴)排列以消除阿贝误差.此线性编码器使原子力显微镜探针PZT执行器的行程范围内具有1nm的分辨率,原子力显微镜探针结构联接有两个线性平移台,可用于X和Y方向扫描样本,扫描面积为50mm(X)×40mm(Y).X向平移台和Y向平移台的移动量可由线性编码器测得,分辨率为纳米级.进行了正弦曲面的测量实验.     

大口径光学镜面超精密加工机床的研制

设计制作了最大加工直径为φ880 mm的光学镜面超精密加工机床.该机床采用大理石床身、4轴数控联动、全气浮支承和零传动结构,以实现光学球、非球及自由形面的超精密切削.介绍了机床整体结构特点和性能参数,描述了气浮电主轴、气浮直线导轨、直驱回转工作台等关键技术及部件.该机床主轴回转精度0.05μm,直线伺服轴分辨力1.25 nm,回转工作台角位移分辨力0.009.″在硬铝和无氧铜材料上分别加工出了面形精度0.5μm、表面粗糙度5 nm的φ400 mm球面和面形精度0.5μm/φ100 mm、表面粗糙度8 nm的非球形面.     

新型形状记忆合金驱动器与三指灵巧手设计

针对现有形状记忆合金（shape memory alloy,SMA）温度反馈控制难以实现及SMA应变量小导致实际应用中存在驱动位移小的问题,提出了一种基于电阻反馈控制的新型SMA驱动器,并采用这种驱动器研发了一种绳索传动的三指灵巧手。新型SMA驱动器由滑轮、空心螺柱、SMA丝和弹簧拉伸装置等组成,通过采用滑轮绕线的方式增长SMA丝的使用长度以提高驱动位移输出量;利用SMA自身的电阻特性得到SMA电阻变化与相变的关系,设计了基于电阻反馈的开关控制系统;采用模块化思想设计了三指灵巧手,3根手指共有8个自由度,并通过实验验证三指灵巧手对物品的抓取能力。结果表明：新型SMA驱动器不需要通过测温来判断SMA丝相变进程,省去了外部温度传感器;SMA驱动器输出的驱动量可达驱动器总长的8%以上;通过监测SMA丝的电阻变化可实现驱动器通电加热的控制,防止SMA丝过热烧毁。研究结果为提高SMA驱动器驱动位移和降低SMA驱动器控制难度提供了一种思路。