磁控溅射制备TiN薄膜影响因素的研究

采用磁控溅射法在硅基片表面沉积TiN薄膜,研究了溅射气压、氮气流量、氩气流量、溅射电流等溅射参数对TiN薄膜导电性能的影响.实验参数采用正交设计法选取,经模糊分析得出,所考察的因素对薄膜光催化性能的影响次序由大到小依次为溅射电流、气体流量、溅射气压.进一步研究影响最大的溅射电流对薄膜结构与电学性能的影响,结果发现:溅射电流的增大使溅射粒子的动能随之增大,薄膜生长加快;薄膜的电阻率存在最小值.     

室温直流磁控溅射制备ITO膜及光电性能研究

室温条件下,在玻璃衬底上,采用直流磁控溅射法制备了ITO膜.研究了溅射压强,氧流量和溅射功率等工艺参数对薄膜光电性能的影响.结果表明当Ar流量为44.2 sccm和溅射时间20 min等参数不变时,溅射气压0.7 Pa,氧流量0.62 sccm和溅射功率130 W为最佳工艺条件.并得到了电阻率5.02×10-4 Ω·cm,在可见光区平均透过率80%以上ITO薄膜.     

磁控溅射法制备低电阻率Ta薄膜研究

在无匹配层、常温、溅射气体为纯Ar的条件下,利用直流磁控溅射法在Si表面制备了Ta薄膜,系统研究了工作气压及直流功率对薄膜电阻率及微观结构的影响。分别用四探针测试仪、X射线衍射仪、原子力显微镜对不同条件下制备的Ta薄膜电阻率、相结构及表面形貌进行表征。结果发现,随溅射气压升高,高阻β相出现,薄膜电阻率随之增大;在相同溅射气压下,随着溅射功率的增加,薄膜电阻率先降低后升高。优化溅射工艺后制得的Ta薄膜的电阻率低至29.7μΩ·cm。     

非平衡磁控溅射沉积Ta-N薄膜的结构与电学性能研究

采用直流反应非平衡磁控溅射技术在单晶Si(100)和玻璃表面沉积氮化钽(Ta-N)薄膜,分别测试了薄膜的结构、成分、电阻率和吸收光谱,研究了氮氩流量比(N2∶Ar)变化对Ta-N薄膜的结构和电学性能的影响.研究结果表明随N2∶Ar增加,依次生成六方结构的γ-Ta2N、面心立方结构(fcc)的δ-TaNx、体心四方结构(bct)的TaNx;N2∶Ar在0.2～0.8的范围内,Ta-N薄膜中只存在着fcc δ-TaNx;当N2∶Ar＞1之后,Ta-N薄膜中fcc δ-TaNx和bct TaNx共存.Ta-N薄膜电阻率随N2∶Ar流量比增加持续增加,当N2∶Ar为1.2时,薄膜变为绝缘体,光学禁带宽度为1.51eV.     

反应磁控溅射法制备厚度均匀分布超高导电性TiN电极薄膜

微电子器件的迅速发展对TiN电极薄膜电阻率、表面粗糙度以及厚度均匀性均提出了更高的要求。本文采用半导体工艺兼容的反应磁控溅射技术在单晶硅上制备TiN薄膜。通过XRR、GIXRD、四探针测试仪和AFM等表征手段系统研究了衬底偏压、工作气压和溅射电源对薄膜晶体结构和电阻率的影响规律。结果表明,当采用直流电源进行溅射镀膜时,在-200 V的衬底偏压和0.3 Pa的工作气压下,得到了沿(200)晶面择优生长、表面粗糙度为0.7 nm、电阻率为38.7 μΩ·cm 的TiN薄膜。在该工艺条件下,分别采用直流和射频电源在4英寸单晶硅衬底上制备TiN薄膜。最终采用射频电源可获得高导电性、原子级平滑且厚度均匀分布的薄膜。分析发现:在使用射频电源的放电溅射过程中,高频交变电场使放电空间的电子在电极之间震荡,产生比直流放电更有效的碰撞电离,因此射频磁控溅射比直流磁控溅射沉积的薄膜更致密。     

辉弧共溅射Ar/N2流量比对TiN薄膜结构及硬度的影响

采用辉光弧光协同共放电混合镀方法在A3碳钢基体上沉积氮化钛薄膜,通过改变Ar/N2流量比,研究Ar/N2流量比对TiN薄膜结构及硬度的影响。X射线衍射谱图表明制备的TiN有明显的(111)晶面择优取向;Ti2p的X射线光电子谱谱峰拟合分析表明Ti2p1/2峰和Ti2p3/2峰均有双峰出现,可知氮化物中的Ti存在不同的化学状态,整个膜层是由TiN,TiO2,TiNxOy化合物组成的复合体系,Ar/N2流量比影响各成分的含量。对比硬度的变化和组成成分之间的关系发现,膜层硬度随着含TiN量的增多而增大,当Ar/N2流量比为3∶1时,硬度最大。     

氮流量对TaN薄膜微结构及性能的影响

采用反应直流磁控溅射法在Al2O3陶瓷基片上制备TaN薄膜,研究了氮流量(N2/(N2+Ar))对TaN薄膜微结构及性能的影响。结果表明,随氮流量的增大,TaN薄膜的氮含量、电阻率、方阻以及TCR的绝对值逐渐增大,而沉积速率逐渐降低。当N2流量较低(2%～4%)时,TaN薄膜中主要含有电阻率和TCR绝对值较低的六方Ta2N相(hcp),薄膜的电阻率在344μΩ.cm到412μΩ.cm范围内,薄膜的TCR绝对值约为几十ppm/℃。当氮气流量较高(5%～6%)时,薄膜中Ta2N相消失,薄膜中主要含有TCR绝对值较大的体心四方结构(bct)的TaN和四方结构(bct)的Ta3N5相,薄膜的电阻率在940μΩ.cm到1030μΩ.cm范围内,薄膜的TCR绝对值约为几百ppm/℃。     

磁控溅射法制备CNx薄膜及其结构表征

以Ar/N2混合气体作为溅射气体,利用直流磁控溅射的方法制备子碳氮薄膜.利用X射线衍射和红外光谱对碳氮薄膜进行了结构分析.IR光谱证实了薄膜中碳氮化合物的形成,而XRD的检测结果表明,类石墨相g-C3N4是碳氮薄膜中的主要成分,同时有极少量的β-C3N4晶相生成.同时发现,Ar/N2溅射气体的分压对获取β-CsN4有着明显的影响.本实验中,当N2体积分数为33%,碳氮薄膜中β-C3N4晶相的含量最高.     

反应磁控溅射法制备F掺杂ZnO(FZO)薄膜的结构和透明导电性能

以Zn/ZnO/ZnF2混合物为靶材,在衬底温度(Ts)为150℃和300℃、溅射气氛为Ar+O2和Ar+H2下反应溅射制备F掺杂ZnO(FZO)薄膜,研究气体流量、Ts以及溅射气氛对薄膜结构及透明导电性能的影响.结果表明:对于Ar+O2下制备的FZO薄膜,Ts=300℃时有利于制备出具有(002)择优取向、结晶度高、压应力低且透明导电性能较好的薄膜.对于Ar+H2下制备的薄膜,Ts增大到300℃虽然提高了薄膜结晶度和透光性,降低了压应力,但薄膜厚度明显降低,薄膜导电性能变差.比较两种气氛下制备的FZO薄膜,发现Ar+H2下制备的薄膜可在150℃和0.8～3.2 mL·min-1的H2流量范围内得到更好的透明导电性能(电阻率为3.5×10-3Ω·cm,可见光平均透光率为87％).讨论Ar+H2气氛时H等离子的刻蚀作用与H掺杂、A r+O 2气氛时O离子的轰击作用与薄膜氧缺陷的变化、Ts升高时沉积原子反应活性与迁移能力增强以及Eg与载流子浓度的关系.     

室温下射频磁控溅射制备ZnO∶Al透明导电薄膜及其性能研究

采用射频磁控溅射技术,在室温下,以ZnO∶Al203(2％Al2O3(质量比))为靶材,在石英玻璃基底上,采用不同工艺条件制备了ZnO∶Al(AzO)薄膜.使用扫描电子显微镜观察了薄膜的表面形貌,X射线衍射分析了薄膜的结构,四探针测量仪得到薄膜的表面电阻,轮廓仪测量了薄膜厚度,并计算了电阻率,最后采用分光光度计测量了薄膜的透过率;研究了溅射功率、溅射气压与薄膜厚度对薄膜电阻率及透过率的影响.结果表明:所制备的AZO薄膜具有(002)择优取向,并且发现薄膜厚度对薄膜的光电性能有明显影响,溅射气压和溅射功率对薄膜电学性能有较大影响,但是对薄膜透过率影响不大.当功率为1kW、溅射气压0.052 Pa、AZO薄膜厚度为250nm时,其电阻率为8.38×10-4Ω·cm,波长在550 nm处透过率为89％,接近基底的本底透过率92％.当薄膜厚度为1125 nm时薄膜的电阻率降至最低(6.16×10-4 Ω·cm).     

Effect of Permeable Crystalline Material on Steel Reinforcement Corrosion of Concrete

Permeable crystalline materialcan permeate into pores and cracks of concrete and catalyze the reaction between Ca(OH) 2and unhydrated cement to generate a great quantity needle non-soluble crystals, which can stop up the pores and cracks of concrete, and increase the impermeability of concrete. This paper reported the results of a study conducted to evaluate steel reinforcement corrosion of concrete specimens uncoated and coated with permeable crystalline material as well as mixed with the permeable crystalline material. The properties evaluated for corrosion test were water impermeability, water absorption, compressive strength and potential. The results of water impermeability, water absorption, compressive strength clearly showed that the permeable crystalline material could prohibit water, any soluble salts and moisture from penetrating the concrete to cause corrosion, leaking, and other problems, and it did increase the compressive strength, which was favorable for protection of corrosion of reinforcing steel. Moreover, it was concluded from the potential-time curve that the steel reinforcement of uncoated specimen was in the state of activation whereas that of other specimens coated and mixed with the permeable crystalline material was in the state of inactivation. Above all, it was indicated that the permeable crystalline materialis very effective to protect the steel reinforcement of concrete from corrosion.     

The Research and Application About "Dry Peeling Off" Technology for Airplane Surface Paint Layer

In this paper, the principle of spurting take off lacquer were introduced; and with orthogonal method the unsaturate polyester was prepared ;it was easy to peel airplane paint layer off with this material and equipment.     

Quality Study of Honeycomb Core Shaping Without Wax Stabilization

Sandwich panels utilizing honeycomb cores result in lightweight, high-strength units that are very rigid. Indeed, they give honeycomb panels the best strength-to-weight ratio of any construction type available. Conventionally, the wax is poured into the cell of the core to strengthen the structure and prevent the core from being crushed during milling. Much time and labor is required to wax, mill, and clean the cores. In this study, the process of pouring wax into the core was skipped. In other words, the cutter directly milled the core. Experiments showed that the compressive strength of the core produced without wax stabilization was only 3% lower than that of cores produced using the traditional method. In addition, the drum peel strengths of cores produced without wax stabilization were 38.4% higher than cores produced using the traditional method, in which residual wax seriously polluted the adhesive. It was also found that eliminating the wax process can reduce costs.     

In-process thermal treatment of polylactic acid in fused deposition modelling

Polylactic acid (PLA) is one of the most widely used open source fused filament fabrication materials due to its ease of extrusion, biodegradability, and mechanical strength. The mechanical strength of PLA largely depends on the proper growth of its semi-crystalline structure, which can be severely impaired by a low rate of crystallization, particularly in open source printers. This can be further aggravated by the non-uniform thermal distribution of heat that causes improper curing among the extruded beads of the printing material. As a result, PLA printed on open source printers does not achieve the best mechanical properties. This research, for the first time, proposes an additive-free solution implemented through a detailed set of experimentation to improve the curing rate through in-process temperature variations to cure the joints among the beads. Scanning electron microscopy (SEM), differential scanning calorimetry (DSC) and Fourier transform infrared (FTIR) spectroscopy is used to confirm the improvements in the bead joints. This work is conducted in two phases of experiments. In the first phase, a full factorial ANOVA is used to investigate various process parameters and the important variables are used in the second phase to print test specimens in four different sets.     

Investigation of the Corrosion Behaviors of HVOF-Sprayed Carbide Cernet Coatings in Molten Al-Zn-Si Alloy Bath

In continuous hot-dip galvanization process the corrosion and chemical stability of the sink roll in the galvanizing bath are important problem which effects on the quality and productivity. In order to protect the sink roll the carbide cermet and/or ceramic coatings were deposited on the surface of the sink roll. The WC-, Cr3 C2-cermet coatings were deposited by high velocity oxygen fuel (HVOF) spray, respectively. The coating samples were immersed in molten Zn-alloy containing 50 wt % aluminum at 833 K for 24 hr and 144 hr, respectively. The inter-diffusion and inter-reaction of Zn, Al and elements in coating and corrosion behaviors of these coatings were investigated by XRD, SEM and EPMA etc. The corrosion mechanisms of the carbide cermet coatings and ceramic coatings in molten High Al-Zn-alloy were approached.     

Fundamental study of adhesion of ice to cooling solid surface (Discussion on influence of copper oxide layer on ice adhesion force)

In many situations, ice often adheres to a cooling solid surface, frequently causing serious accidents. It is critical to clarify the mechanism of ice adhesion to the cooling surface in order to prevent ice adhesion. In a past study, the shearing stresses of two kinds of test plates with a copper surface having the higher thermal conductivity were measured. The shearing stress corresponds to ice adhesion force. Both shearing stresses were significantly different; however, the cause remains unclear.Therefore, the present study focuses on an oxide layer as the main factor causing the difference of both shearing stresses; the influence of the oxide layer formed on shearing stress was discussed. And in the removal and reformation processes of the oxide layer, the time variation of the shearing stress was clarified. Moreover, the relationship between the state of the copper surface and the shearing stress was also clarified by surface analysis.     

＂Three Transformations＂ and Standardization

During his inspection in Henan Province in May, Chinese President Xi Jinping stressed to ＂push forward the transformation from China Speed to China Quality, from Made in China to Created in China, and from Chinese Products to Chinese Brand＂. The ＂Three Transformations＂ are the specific requirements and goal of China＇s national development in the context that market should play a decisive role in the allocation of resources.     

重塑标准推行格局 推动LED照明的普及（英文）

正When you are enjoying the green,energy-saving and healthy lighting of IKEA LED luminaire,you may not realize that most of IKEA’s LED bulbs are produced by the LED luminaire smart manufacturing system of Hangzhou Zhongwei Photoelectricity CO.,LTD(ZVISION).No longer enclosed in the laboratory,the product standards are brought into the factory workshop and even to the entire production process.Thus,the standards are promoted and applied in a favorable way by enterprises,benefitting consumers with high quality products.     

Chinese Experts Contribute to ISO＇s New Toy Standards

正The international standard,ISO 8124-6,Safety of toys–Part 6:Certain phthalate esters in toys and children’s products,was officially issued by ISO worldwide on August 15.It was the first time for Chinese experts to lead the ISO standard development in toys industry.The standard was drafted by a group of Chinese experts from SAC/TC for toys and relevant Chinese departments and finally completed by a dedicated international group of experts.ISO 8124-6 makes a substantive breakthrough in the aspects of the scope of toys,limitation of plasticizer types,control of test cost,accuracy of test,operation convenience,etc.,offering the operational guidance for toy manufactures and testing laboratories.     

SAC Delegation Visits AENOR and Signs Cooperation Agreements

正SAC Administrator Tian Shihong led the Chinese delegation to visit the Spanish Association for Standardization and Certification(AENOR)on September 15,2014.Mrs.Begona Cristeto,the Vice-Minister of Industry,Energy and Tourism of Spain,and Mr.Avelino Brito,the President and CEO of AENOR greeted the delegation.The two sides had a deep and friendly discussion on strengthening the cooperation between China and Spain in the standardization field and promoting the standardization work to support the development of economy and trade in the two countries.