基于频域相位信息的声表面波谐振器回波频率估计

提出一种基于频域相位信息的频率估计算法,利用正弦信号傅里叶变换相位谱中相位与频率的关系实现对声表面波谐振器回波频率的估计,并采用自相关运算消除回波信号初相位对估计结果的影响。通过无线测试系统和仿真回波信号对该算法进行了验证,表明算法的频率估计精度不受激励信号频率变化的影响,并且在整个声表面波谐振器的谐振频率变化范围内都具有较高的精度和稳定性。     

声表面波标签的相参阅读器设计

现有与声表面波标签匹配的阅读器通常采用非相参的超外差结构,并通过开关截断以产生激励脉冲信号。由于开关闭合时刻和本振信号初相位的随机性,该方案所测回波相位为一个不确定的值,无法与距离等待测量建立函数关系。本文设计了一种相参阅读器,在发射链路使用功分器将信号源产生的信号分为两路同相信号,并把其中一路引入接收链路的下混频器作为本振信号,由此可使回波相位为一确定值。实际制作了阅读器电路,测试了发射、接收链路,并结合声表面波标签进行了实验,通过与矢量网络分析仪测量结果对比,表明了该阅读器的有效性。     

声表面波谐振器型振荡器的研制

本文介绍了金属条射栅双端对声表面波谐振器型的原理和结构特点，给出了一种采用声表面波谐振器稳频的低噪声，高稳定性的振荡器电路设计方案。对影响振荡器频率稳定度的因素进行了分析讨论，并探讨改善声表面波振荡器频率稳定性的方法。该声表面波谐振器的中心频率为１２０ＭＨｚ，无载Ｑｖ，大于２０，０００，插入损耗小于６．０ｄＢ，经测试，秒级频率稳定度为１０＾－１０数量级，在自由室温下的日平均波动为１０＾－６／ｄ数量     

基于声表面波技术的室内定位系统

针对现有采用接收信号强度RSSI原理的室内定位系统存在的问题,鉴于声表面波技术的无源、受多径效应影响小等优势,搭建了由声表面波定位标签和阅读器构成的室内定位系统.阅读器分时读取3个阅读器天线接收到的定位标签回波信号,与常规的室内定位硬件系统采用3个信号接收机相比,大幅度降低了成本.标定了系统的信号强度与距离之间的关系,采用基于RSSI原理的三边定位算法测试了系统的定位性能,其有效定位范围为1.6 m×1.6 m,定位精度为13 cm.     

基于ADS半物理平台的声表面波标签测试

提出了一种基于ADS半物理平台的声表面波标签测试方法。采用矢量网络分析仪实际测试声表面波标签实物的S参数,在ADS软件中构建标签的物理抽象模型,并虚拟构建标签激励信号,利用ADS瞬态仿真功能获得标签回波信号,再采用MATLAB对回波进行数字正交解调,从而客观准确地测量标签各反射栅的时延、相位。最后通过搭建的半物理平台对声表面波标签进行了测试,表明了ADS半物理平台的有效性。     

互易法校准压电型声发射传感器的研究与实现

声发射传感器的校准是实现声发射定量技术的前提,依据电声换能器互易原理,在计算互易常数的基础 上,建立了适用于压电型声发射传感器表面波和纵波互易的校准系统。通过设置特定的激励信号波形,依据接收 电压信号与激励电流信号之间的时间延迟,准确获取电流信号与电压信号对应的特征值,实现了声发射传感器的表面波和纵波互易校准。由于传感器的尺寸效应,传感器在高频时的表面波速度灵敏度低于纵波灵敏度,不确定度评定结果表明,声发射传感器速度灵敏度的互易法校准不确定度为1. 2 dB。     

声表面波温度传感器抗干扰技术研究

目的设计一种声表面波(SAW)温度传感器抗干扰技术,以提高温度测量的稳定性。方法分析SAW谐振器(SAWR)回波特性,建立SAWR回波信号熵能量模型,发现SAWR回波信号的衰减过程与熵能量的上升过程对应。当回波信号达到噪声水平时,熵能量的单调上升过程消失。为了抑制正弦干扰设计一种改进型自相关算法,利用该算法对信号进行去噪的同时使谐振器回波信号的衰减特性和正弦干扰的等幅特性得到保持。结果根据模拟仿真结果设置了SAWR回波信号的检测阈值(V_(thre)=1),并对该阈值进行了蒙特卡罗仿真实验。仿真结果表明,当信号信噪比大于4dB时,SAWR回波信号的检测率达到86%,而正弦干扰误检率小于0.5%。最后应用该算法对实际的正弦信号和SAWR回波信号进行了检测,得到的误检率接近于0。结论实验结果显示,所设计的算法可以用作声表面波温度传感器的抗干扰技术。     

中高频声表面波关键材料与应用研究

随着第三代通讯技术的发展,声表面波(SAW)器件的使用频率不断提高,从最初的数MHz发展到现在的数GHz,如应用于1.9GHz的个人通讯服务系统,2.4GHz的无线局域网络系统及高于5GHz无线多端发送系统。这些高频应用系统的不断发展显著增大了高频声表面波器件的市场需求以及对相关材料与器件研究的兴趣。介绍近年来在中高频声表面波材料与应用方面所作的一些研究工作,主要进展有:(1)采用纳米级金属(Ti、Zr、Ni)过渡层,并通过适量添加Mo等微合金元素,研制出多种具有高抗电迁移和功率耐受性的叉指换能器材料,制备的滤波器频率达到2.4GHz;(2)成功解决Si、金刚石、ZnO、Al多层材料间声匹配问题,获得可用于高频声表面波器件制作的高品质材料,ZnO薄膜具有高度C轴取向(类单晶结构),制作得器件频率达3GHz。(3)将藕合模(COM)和镜像耦合理论成功应用于多层复合膜声表面波器件的设计,发展出具有自主知识产权的设计平台和相关软件;(4)针对高频声表亚200纳米密集叉指换能器和毫米级汇流条同时曝光的挑战,发展了一种新的分层分剂量进行临近效应修正电子束直写技术,制备出线宽达0.2μm的声表面波器件(中心频率为3～4G...     

激光致声技术的研究

从热弹与烧蚀机制两个方面，讨论了激光超声表面波的产生。通过对点光源激励声表面波的机理进行分析，出线光源激励的表达式。进行了表面波同线光源能量、方向角、位置、长度关系的实验研究。实验结果验证了激光超声表面波理论模型的合理性，证实了线光源产生的表面波具有信号强、方向性好等优点。     

声表面波器件中叉指换能器及外电路引起的附加相移特性

一般的声表面波器件是由与外电路相联接的两个叉指换能器组成，其中所要处理的信号都要经受电 － 声和声 － 电两次转换。又指换能器的结构和外电路的特性对这些转换的效率和相位变化有着密切的联系。本文从声表面波又指换能器交叉场等效电路模型出发，较详细地讨论了声表面波器件中输入、输出又指换能器的设计参数（中心频率和叉指电极对数等）及外电路负载和匹配网络对信号的转换效率和相移（或延迟时间）的影响。本文还针对某些又指换能器的实际例子，给出了详细的计算数据。文中所给出的公式和计算结果，可作为设计声表面波延迟线和振荡器的参考。     

An interrogation unit for passive wireless SAW sensors based on fourier transform

The application of surface acoustic wave (SAW) resonators as sensor elements for different physical parameters such as temperature, pressure, and force has been well-known for several years. The energy storage in the SAW and the direct conversion from physical parameter to a parameter of the wave, such as frequency or phase, enables the construction of a passive sensor that can be interrogated wireless. This paper presents a temperature-measurement system based on passive wireless SAW sensors. The principle of SAW sensors and SAW sensor interrogation is discussed briefly. A new measurement device developed for analyzing the sensor signals is introduced. Compared to former interrogation units that detect resonance frequency of the SAW resonator by comparing amplitudes of sensor response signals related to different stimulating frequencies, the new equipment is able to measure the resonance frequency directly by calculating a Fourier transformation of the resonator response signal. Measurement results of an experimental setup and field tests are presented and discussed.     

Wireless measurement of temperature using surface acoustic waves sensors

Surface acoustic wave (SAW) devices can be used as wireless sensor elements, called SAW transponders, for measuring physical quantities such as temperature that do not need any power supply and may be accessed wirelessly. A complete wireless sensor system consists of one or more such SAW transponders and a local radar transceiver. The SAW transponder receives an RF burst in the VHF/UHF band transmitted by the radar transceiver. The reader unit performs a radar measurement of the impulse response of the SAW transponder via a high-frequency electromagnetic radio link. A temperature variation changes the SAW velocity and thereby the response pattern of the SAW device. By analyzing the time delay between backscattered pulses with different time delays we get a rough estimation of the temperature of the SAW transponder. By using this information the ambiguity of +/-2pi in the phase differences between the pulses can be eliminated, which provides an overall and unambiguous temperature resolution of +/-0.2 degrees C.     

Chemical sensor based on surface acoustic wave resonator using Langmuir-Blodgett film

A one-port surface acoustic wave (SAW) resonators incorporating Langmuir-Blodgett (LB) films has been investigated. SAW sensors are one potential applications of SAW devices. Most of the work reported on SAW sensor concerns delay lines. In this paper we characterize the mass loading effects of one-port resonators by depositing successive monolayers of LB films onto the surface. A 90 MHz SAW gas-phase sensor has been fabricated on an ST cut quartz substrate, and one-port resonator configurations have been used as the sensing element. Ultra thin monolayers of arachidic acid and arachidic acid ethyl ester have been deposited using the LB method. The resonant frequencies and the Q values have been measured as sensor response. Experimental results show that the Q values and the resonant frequencies of the one-port SAW resonator vary with film mass loading on the SAW device surface.     

Wireless sensing using oscillator circuits locked to remote high-Q SAW resonators

This paper introduces a method of wireless read out of high Q surface acoustic wave (SAW) resonator sensors. The resonator is excited by a short RF pulse and decays after switching off the interrogating signal. In the measurement system, a gated phase locked loop (GPLL) locks to the resonance frequency of the SAW resonator within a few bursts. Then the frequency of the GPLL oscillator is synchronized to the resonance of the sensor and can be measured easily. The concept is intended to yield an alternative to interrogators with expensive signal processing. Considering the inherent limitations, the proposed system presents a low cost solution for temperature, force, torque, etc. measurements. We describe the sensors, the signals, and the implemented system. Results of temperature measurements using quartz resonators are presented, and merits and disadvantages are discussed.     

A review of wireless SAW sensors

Wireless measurement systems with passive surface acoustic wave (SAW) sensors offer new and exciting perspectives for remote monitoring and control of moving parts, even in harsh environments. This review paper gives a comprehensive survey of the present state of the measurement systems and should help a designer to find the parameters required to achieve a specified accuracy or uncertainty of measurement. Delay lines and resonators have been used, and two principles have been employed: SAW one-port devices that are directly affected by the measurand and SAW two-port devices that are electrically loaded by a conventional sensor and, therefore, indirectly affected by the measurand. For radio frequency (RF) interrogation, time domain sampling (TDS) and frequency domain sampling (FDS) have been investigated theoretically and experimentally; the methods of measurement are described. For an evaluation of the effects caused by the radio interrogation, we discuss the errors caused by noise, interference, bandwidth, manufacturing, and hardware tuning. The system parameters, distance range, and measurement uncertainty are given numerically for actual applications. Combinations of SAW sensors and special signal processing techniques to enhance accuracy, dynamic range, read out distance, and measurement repetition rate (measurement bandwidth) are presented. In conclusion, an overview of SAW sensor applications is given.     

Large-area, real-time imaging system for surface acoustic wavedevices

A system for imaging the particle displacement envelope of vibrational (transverse) modes of surface acoustic wave (SAW) devices is described. The modes are being imaged using a schlieren method for visualizing the acoustic power flow with a beam-expanded helium-neon (HeNe) laser. The optical arrangement uses internal reflection from within the quartz substrate to achieve high-efficiency acousto-optic diffraction of the laser light. The use of a CCD camera coupled with a frame grabber and a computer with image calculator software establishes an imaging system for large-area, real-time visualization, recording, accurate measurement, and analysis of vibrational modes of SAW devices. These methods are part of an effort to determine the relationship between acceleration sensitivity and transverse variations in the acoustic-mode shape in SAW resonators. Use of the system in imaging a 98 MHz SAW device is presented as an example     

Applicability of LiNbO3, langasite and GaPO4 in high temperature SAW sensors operating at radio frequencies

The applicability of LiNbO3, langasite and GaPO4 for use as crystal substrates in high temperature surface acoustic wave (SAW) sensors operating at radio frequencies was investigated. Material properties were determined by the use of SAW test devices processed with conventional lithography. On GaPO4, predominantly surface defects limit the accessible frequencies to values of 1 GHz. Langasite SAW devices could be operated up to 3 GHz; however, high acoustic losses of 20 dB/micros were observed. On LiNbO3, the acoustic losses measured up to 3.5 GHz are one order of magnitude less. Hence, SAW sensors capable of wireless interrogation were designed and processed on YZ-cut LiNbO3. The devices could be successfully operated in the industrial-scientific-medical (ISM) band from 2.40 to 2.4835 GHz up to 400 degrees C.     

SAW devices for consumer communication applications

An overview of surface acoustic wave (SAW) filter techniques available for different applications is given. Techniques for TV IF applications are outlined, and typical structures are presented. This is followed by a discussion of applications for SAW resonators. Low-loss devices for mobile communication systems and pager applications are examined. Tapped delay lines (matched filters) and convolvers for code-division multiaccess (CDMA) systems are also covered. Although simulation procedures are not considered, for many devices the theoretical frequency response is presented along with the measurement curve.     

Temperature-stable double SAW resonators

The temperature stability of SAW resonators on quartz can be enhanced by means of double resonators. The turnover temperatures of the double resonators' components, called single resonators, are positioned above and below room temperature. As a consequence, the temperature coefficients of frequency of the 1st order (TCF1) have opposite signs at room temperature, leading to the vanishing TCF1 of the double resonators. Frequently, different turnover temperatures are adjusted by different propagation directions on an ST cut of quartz. An overview of known and new methods for compensating the temperature coefficient of frequency of the 2nd order (TCF2) of two-port and one-port SAW double resonators is given. A concept by means of which temperature-stable circuits of single resonators are found is described. Two types of temperature-stable double resonators found by applying that concept are treated in detail: 1) a two-port resonator composed of two cascaded two-port resonators and a coupling inductance, and 2) a one-port resonator comprising a series connection of one-port resonators with an inductance in parallel with each single resonator. The substrates are 35.5 degrees rotY cuts of quartz. In both cases, the shift of resonance frequency within the temperature range from -30 degrees C to 70 degrees C is smaller than 20 ppm.     

Phase noise in surface-acoustic-wave filters and resonators

Measurements of the phase noise modulation imparted on UHF carriers by surface-acoustic-wave (SAW) filters and resonators have been made using an HP 3047 spectrum analyzer. Three different types of SAW phase noise were observed. One type can be explained by temperature fluctuations. It is characterized by a spectral density of phase fluctuations which decreases as 1/f(2). The predominant noise mechanism in most SAW devices has a 1/f spectral density. The source of this noise is unknown, but it appears to be associated with both acoustic propagation and transduction. In filters fabricated on lithium niobate substrates, a third noise mechanism is evidenced. This mechanism produces nonstationary noise bursts that appear to originate in the transducer region. Experiments have been carried out on substrate materials, transducer metallizations, and over acoustic path lengths. The means by which low-frequency fluctuations are mixed to the carrier frequency have been studied.