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1.
高效率平面磁控溅射器的研制   总被引:1,自引:0,他引:1  
介绍一种新型磁控溅射装置。它采用两块极性相对的环状磁铁的设计方法,通过扩大靶表面的等离子放电区域面积,使传统磁控溅射枪使用中经常受到的两个限制-溅射速率与靶的利用率得到了较大的改善。实验中铜靶在溅射功率密度为11W/cm^3时溅射速率约为800nm/min,如何继续提高功率则可获得更高的速率。而靶的利用率可达64%左右。另外,在认为出射粒子符合cosθ分布的前提下,发现当α=3.3时,实验数据和理  相似文献   

2.
磁控溅射镀膜技术的发展   总被引:10,自引:0,他引:10  
磁控溅射由于其显著的优点应用日趋广泛,成为工业镀膜生产中最主要的技术之一,相应的溅射技术与也取得了进一步的发展.非平衡磁控溅射改善了沉积室内等离子体的分布,提高了膜层质量;中频和脉冲磁控溅射可有效避免反应溅射时的迟滞现象,消除靶中毒和打弧问题,提高制备化合物薄膜的稳定性和沉积速率;改进的磁控溅射靶的设计可获得较高的靶材利用率;高速溅射和自溅射为溅射镀膜技术开辟了新的应用领域.  相似文献   

3.
高靶材利用率的新型磁控溅射器   总被引:1,自引:0,他引:1  
在现代大型薄膜连续生产线中 ,其生产效率主要受以下两因数的影响 :溅射器的沉积速率和靶材的使用周期。本实验研制了一种圆筒形靶材绕溅射器中心轴线匀速旋转 ,并且与溅射器之间用螺丝固定连接的新型磁控溅射器。论述了新型溅射器的结构与组成 ,并给出实验结果与结论。其具有靶材利用率高、使用周期长、换靶时间短等优点。同时在反应溅射时避免在靶面上的形成介质层 ,提高了溅射过程的稳定性。  相似文献   

4.
高靶材利用率的新型磁控溅射器   总被引:1,自引:1,他引:0  
在现代大型薄膜连续生产线中,其生产效率主要受以下两因数的影响;溅射器的速率和靶材的使用周期,本实验研制了一种圆筒形靶材绕溅射器中心轴线匀速旋转,并且与溅射器之间用螺丝固定连接的新磁控溅射器。论述了新型溅射器的结构与组成,并给实验结果与结论。其具有靶材利用率高,使用周期长,换靶时间短等优点。同时在反应溅射时避免在靶面上的形成介质层,提高了溅射过程的稳定性。  相似文献   

5.
在大型薄膜连续生产线中,磁控溅射器的溅射速率、使用周期是影响生产效率与成本的重要因素。本提出一种新型的无马达驱动的具有高溅射速率、高靶材利用率、长的靶使用周期、安装与使用简单的磁控溅射器。可广泛应用于各类大、中型连续生产设备中。  相似文献   

6.
在大型薄膜连续生产线中,磁控溅射器的溅射速率、使用周期是影响生产效率与成本的重要因素.本文提出一种新型的无马达驱动的具有高溅射速率、高靶材利用率、长的靶使用周期、安装与使用简单的磁控溅射器.可广泛应用于各类大、中型连续生产设备中.  相似文献   

7.
旋转式圆柱形磁控溅射靶的磁场计算   总被引:4,自引:3,他引:1  
关奎之 《真空》1997,(3):5-11
类似于矩形平面溅射靶的磁场和旋转式圆柱形的靶筒组成旋转式圆柱形磁控溅射靶。与常规的圆柱形磁控溅射靶相比较,该旋转式靶提高了靶材利用率和膜厚均匀度。本文介绍了旋转式圆柱形靶的结构和磁场计算方法,给出了计算公式、数据及其特性曲线。强度适度和均匀分布的磁场,保证了溅射靶的工作性能,并为靶结构的设计提供了依据。  相似文献   

8.
在中频孪生靶反应磁控溅射实验装置上,用PEM控制沉积TiO2薄膜,实验了靶基距、电流与沉积速率的关系。实验得出,靶基距为112 mm时沉积速率最大,沉积速率与电流基本成线性比例关系。在溅射电流30 A,靶基距112 mm,设置点2.5时,测量了基片随时间的温升变化。然后以自然温升的单晶硅为基片,实验研究了设置点对TiO2薄膜晶体结构、折射率的影响。实验结果表明,设置点越高溅射沉积的薄膜金红石相越多,折射率也越高。  相似文献   

9.
王增为  王善道 《真空》1994,(5):9-12
磁控溅射镀膜设备可以广泛用于镀膜Ti-N膜,从实用观点看,磁控溅射工艺中的溅射速率的溅射原子空间分布是广泛关心的,沉积在试样表面的溅射原子被认为除了与等离子体的参数有关,还与靶-工件的几何分布有关系。本文研究了真空室中Ti-N膜沉积的空间分。在研究中发值得注意的是溅射量与沉积量作为两个不同的概念严格区分。  相似文献   

10.
磁控溅射Ti-N膜沉积的空间分布研究   总被引:1,自引:1,他引:0  
磁控溅射镀膜设备可以广泛用于镀膜Ti-N膜.从实用观点看,磁控溅射工艺中的溅射速率和溅射原子空间分布是被广泛关心的.沉积在试样表面的溅射原子被认为除了与等离子体的参数有关,还与靶──工件的几何分布有关系.本文研究了真空室中Ti-N膜沉积的空间分布.在研究中十分值得注意的是溅射量与沉积量作为两个不同的概念严格区分.  相似文献   

11.
Permeable crystalline materialcan permeate into pores and cracks of concrete and catalyze the reaction between Ca(OH) 2and unhydrated cement to generate a great quantity needle non-soluble crystals, which can stop up the pores and cracks of concrete, and increase the impermeability of concrete. This paper reported the results of a study conducted to evaluate steel reinforcement corrosion of concrete specimens uncoated and coated with permeable crystalline material as well as mixed with the permeable crystalline material. The properties evaluated for corrosion test were water impermeability, water absorption, compressive strength and potential. The results of water impermeability, water absorption, compressive strength clearly showed that the permeable crystalline material could prohibit water, any soluble salts and moisture from penetrating the concrete to cause corrosion, leaking, and other problems, and it did increase the compressive strength, which was favorable for protection of corrosion of reinforcing steel. Moreover, it was concluded from the potential-time curve that the steel reinforcement of uncoated specimen was in the state of activation whereas that of other specimens coated and mixed with the permeable crystalline material was in the state of inactivation. Above all, it was indicated that the permeable crystalline materialis very effective to protect the steel reinforcement of concrete from corrosion.  相似文献   

12.
In this paper, the principle of spurting take off lacquer were introduced; and with orthogonal method the unsaturate polyester was prepared ;it was easy to peel airplane paint layer off with this material and equipment.  相似文献   

13.
Quality Study of Honeycomb Core Shaping Without Wax Stabilization   总被引:1,自引:0,他引:1  
Sandwich panels utilizing honeycomb cores result in lightweight, high-strength units that are very rigid. Indeed, they give honeycomb panels the best strength-to-weight ratio of any construction type available. Conventionally, the wax is poured into the cell of the core to strengthen the structure and prevent the core from being crushed during milling. Much time and labor is required to wax, mill, and clean the cores. In this study, the process of pouring wax into the core was skipped. In other words, the cutter directly milled the core. Experiments showed that the compressive strength of the core produced without wax stabilization was only 3% lower than that of cores produced using the traditional method. In addition, the drum peel strengths of cores produced without wax stabilization were 38.4% higher than cores produced using the traditional method, in which residual wax seriously polluted the adhesive. It was also found that eliminating the wax process can reduce costs.  相似文献   

14.
Polylactic acid (PLA) is one of the most widely used open source fused filament fabrication materials due to its ease of extrusion, biodegradability, and mechanical strength. The mechanical strength of PLA largely depends on the proper growth of its semi-crystalline structure, which can be severely impaired by a low rate of crystallization, particularly in open source printers. This can be further aggravated by the non-uniform thermal distribution of heat that causes improper curing among the extruded beads of the printing material. As a result, PLA printed on open source printers does not achieve the best mechanical properties. This research, for the first time, proposes an additive-free solution implemented through a detailed set of experimentation to improve the curing rate through in-process temperature variations to cure the joints among the beads. Scanning electron microscopy (SEM), differential scanning calorimetry (DSC) and Fourier transform infrared (FTIR) spectroscopy is used to confirm the improvements in the bead joints. This work is conducted in two phases of experiments. In the first phase, a full factorial ANOVA is used to investigate various process parameters and the important variables are used in the second phase to print test specimens in four different sets.  相似文献   

15.
In continuous hot-dip galvanization process the corrosion and chemical stability of the sink roll in the galvanizing bath are important problem which effects on the quality and productivity. In order to protect the sink roll the carbide cermet and/or ceramic coatings were deposited on the surface of the sink roll. The WC-, Cr3 C2-cermet coatings were deposited by high velocity oxygen fuel (HVOF) spray, respectively. The coating samples were immersed in molten Zn-alloy containing 50 wt % aluminum at 833 K for 24 hr and 144 hr, respectively. The inter-diffusion and inter-reaction of Zn, Al and elements in coating and corrosion behaviors of these coatings were investigated by XRD, SEM and EPMA etc. The corrosion mechanisms of the carbide cermet coatings and ceramic coatings in molten High Al-Zn-alloy were approached.  相似文献   

16.
In many situations, ice often adheres to a cooling solid surface, frequently causing serious accidents. It is critical to clarify the mechanism of ice adhesion to the cooling surface in order to prevent ice adhesion. In a past study, the shearing stresses of two kinds of test plates with a copper surface having the higher thermal conductivity were measured. The shearing stress corresponds to ice adhesion force. Both shearing stresses were significantly different; however, the cause remains unclear.Therefore, the present study focuses on an oxide layer as the main factor causing the difference of both shearing stresses; the influence of the oxide layer formed on shearing stress was discussed. And in the removal and reformation processes of the oxide layer, the time variation of the shearing stress was clarified. Moreover, the relationship between the state of the copper surface and the shearing stress was also clarified by surface analysis.  相似文献   

17.
正When you are enjoying the green,energy-saving and healthy lighting of IKEA LED luminaire,you may not realize that most of IKEA’s LED bulbs are produced by the LED luminaire smart manufacturing system of Hangzhou Zhongwei Photoelectricity CO.,LTD(ZVISION).No longer enclosed in the laboratory,the product standards are brought into the factory workshop and even to the entire production process.Thus,the standards are promoted and applied in a favorable way by enterprises,benefitting consumers with high quality products.  相似文献   

18.
正The international standard,ISO 8124-6,Safety of toys–Part 6:Certain phthalate esters in toys and children’s products,was officially issued by ISO worldwide on August 15.It was the first time for Chinese experts to lead the ISO standard development in toys industry.The standard was drafted by a group of Chinese experts from SAC/TC for toys and relevant Chinese departments and finally completed by a dedicated international group of experts.ISO 8124-6 makes a substantive breakthrough in the aspects of the scope of toys,limitation of plasticizer types,control of test cost,accuracy of test,operation convenience,etc.,offering the operational guidance for toy manufactures and testing laboratories.  相似文献   

19.
正Themed on"quality,innovation,development",the first China Quality Conference(Beijing)was held in the Great Hall of the People on September 15.Chinese Premier Li Keqiang delivered an important speech at the conference.State Councilor Yang Jing and Wang Yong attended the conference with over 600 domestic and international representatives from foreign,regional and international quality organizations  相似文献   

20.
正The National Working Meeting on Land and Resources Standardization was held in Beijing on July 15,2014.Wang Min,the Deputy-Minister of the Ministry of Land and Resources,and Yin Minghan,the Chief-Engineer of SAC addressed the meeting.Representatives from relevant competent departments and technical committees were present.The meeting aims to summarize work,discuss existing problems and make clear working thoughts,promoting standardization work of land and resources to a new level.Wang Min pointed out that the standardization work of land and resources should be centered on the basic principles of"protecting land and resources dutifully,intensively and economically utilizing land and resources,and making all-out efforts to safeguard the public’s rights and interests",highlighted the  相似文献   

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