压阻变换压力传感器的性能预测模型

热、压环境下压阻变换压力传感器的性能可以通过有限元方法预测．这里研究了简化的1／8模型,模型考虑了二氧化硅和氮化硅生成过程及堆阳极键合和胶粘结合过程．结果发现有限元预测结果和实验数据具有可比性．范例研究表明,硼硅堆导致产生一定的非线性,但它隔离了硬环氧树脂的非线性．在包装过程中最好使用柔性环氧黏合或软黏胶性结合．黏合材料的黏弹性和黏塑性将会导致传感器输出的滞后和漂移误差．然而,在相对稳定的环境下。软黏合剂对传感器的影响可以忽略．此外,详细的设计和过程信息有助于提高模型的适用性．     

X型横向压阻式硅压力传感器

本文介绍一种新型压力传感器的基本结构、特性参数，提供了三种简单的温度补偿线路，以扩宽传感器的工作温度范围．最后还介绍了一种波传感器的应用实例。     

微压压力传感器的结构改进

硅压力传感器具有小型和高灵敏等的优点,近年来小型高灵敏度的压力传感器的量程已低到１ｋＰａ。在这一发展过程中硅弹性体结构的改进起了很大的作用,本文介绍了作者首先提出了适用于微压压力传感器的梁膜（岛）结构以及以后几年来出现的相近的结构,用这些结构都已制成量程为１ｋＰａ的压力传感器 。     

基于单晶硅的压阻效应的超小型压力传感器

利用单晶硅的压阻效应原理,采用先进的半导体平面工艺、微机械加工工艺、温度补偿及固态集成工艺研制了一种超小型压力传感器.该传感器采用敏感元件与信号处理电路一体化结构,产品在制作过程中经过严格的工艺检验和环境性能试验.证明具有体积小、精度高、稳定性好、测量范围宽等特点,可以广泛用于石油、冶金、化工、航空、航天、武器装备等领域压力的测量和控制.     

热激励硅谐振式微结构压力传感器若干关键参数设计

针对一种以方形硅膜片为一次敏感元件、硅梁为二次谐振敏感元件的热激励硅微结构压力传感器的实际结构,分析了其工作机理和产生热特性的机制.给出了考虑热特性情况时的传感器的被测压力与输出频率的特性方程;给出了传感器稳定可靠工作的条件;给出了梁谐振子的几何结构参数和激励、拾振电阻几何参数选择与位置设置的原则.     

轧机专用压力传感器的研制

本介绍了利用铁磁性材料的压磁效应研制成功的轧机专用压力传感器及其基本工作原理，结构特点和设计方法，并给出有关设计参数，计算公式。     

小量程高灵敏度压阻式表压压力传感器的设计

针对飞机供氧、液压、环控和燃油等系统故障预测与健康管理（PHM）对小量程压力传感器的重大需求,设计了一种新型梁膜复合结构微电子机械系统（MEMS）压阻式压力传感器,该研究通过小量程、高灵敏度的压力传感器力学机理分析和力学仿真建模,提出一种具有弧形膜和米字梁复合型结构,采用弧形硅杯支撑,通过结构和尺寸的优化设计以及压敏电阻位置的确定,在-2~12 KPa的量程内具有较高的灵敏度和线性度。利用ANSYS软件仿真分析得到设计的压力传感器灵敏度为21.801 mV/KPa,非线性度为0.02%。然后基于MEMS加工工艺设计了SOI表压压力传感器的工艺流程。     

微机电系统( MEMS)硅压阻式压力传感器分析研究

本文对MEMS硅压阻式压力传感器进行了相应理论的分析,并对其优缺点进行了论述.通过对微压力传感器芯片的探索,提出了一种新型结构:四岛平膜结构.运用仿真软件对四岛平膜型微压力传感器芯片进行了静力学分析.通过分析应力和形变平面云图及沿特定的路径分布图,发现该结构在边缘四边中点位置处出现应力的极大值,同时在芯片的四个凸起中间部位应力出现了明显的应力集中效应.将电阻放置在应力集中的区域,使其构成一个惠斯通全桥,可获得最大的电压输出.形变极大值远远小于传感器有效膜片的厚度,本文设计的传感器芯片的线性度良好.     

制动系统气压传感器测试平台研究

为满足实际应用要求,设计一种新的制动系统气压传感器测试平台。该平台以DSP系统为核心,包括气压传感器、制动系统气压模拟装置、汽车气压仪表以及上位机。DSP接受上位机的实验指令后,气压传感器通过调理电路送给DSP系统板以实时测量当前实际气压值,并传递给上位机进行同步显示。测试结果表明:该平台人机界面友好,操作简单方便,可应用于气压仪表及气压传感器的参数测试、标定及相关的培训教育等领域。     

低温压力传感器校准系统研制与应用

介绍了一种用于低温压力传感器校准装置,该装置能在试验室对低温压力传感器进行校准,可满足压力传感器复杂低温环境的要求,准确、客观地反映低温压力传感器的性能指标,具有较高的测量精确度.利用该校正装置在20 K、77 K条件下成功对某压力传感器进行标定,证明此套校验装置的有效性和可靠性.     

用于微纳米几何量尺寸测量的三维微接触式测头

为实现微纳尺度器件三维几何形貌测量及表征,基于电容和压阻原理,开发了两种三维微接触式测头。其中电容测头测量范围4.5μm,轴向分辨力和横向分辨力分别为10 nm和25 nm;压阻测头测量范围4.6μm,轴向分辨力和横向分辨力分别为5 nm和10 nm。两种测头均可集成到纳米测量机,实现微结构几何参数的测量。     

Self-powered pressure sensor for ultra-wide range pressure detection

The next generation of sensors should be self-powered,maintenance-free,precise,and have wide-ranging sensing abilities.Despite extensive research and development in the field of pressure sensors,the sensitivity of most pressure sensors declines significantly at higher pressures,such that they are not able to detect a wide range of pressures with a uniformly high sensitivity.In this work,we demonstrate a single-electrode triboelectric pressure sensor,which can detect a wide range of pressures from 0.05 to 600 kPa with a high degree of sensitivity across the entire range by utilizing the synergistic effects of the piezoelectric polarization and triboelectric surface charges of self-polarized polyvinyldifluoride-trifluoroethylene (P(VDF-TrFE)) sponge.Taking into account both this wide pressure range and the sensitivity,this device exhibits the best performance relative to that of previously reported self-powered pressure sensors.This achievement facilitates wide-range pressure detection for a broad spectrum of applications,ranging from simple human touch,sensor networks,smart robotics,and sports applications,thus paving the way forward for the realization of next-generation sensing devices.Moreover,this work addresses the critical issue of saturation pressure in triboelectric nanogenerators and provides insights into the role of the surface charge on a piezoelectric polymer when used in a triboelectric nanogenerator.     

用于水下微机器人驱动的智能执行材料的制备和驱动特性研究

智能材料具有感知和执行功能,近年来受到广泛研究。在微机器人领域智能材料作为微驱动器,有着广泛的应用前景。本实验制备了一种铁磁性智能执行材料．并研究了该材料在磁场下的形变特性。采用该材料作微执行器制作出了水下微机器人模型。实验表明,该模型在交变磁场的作用下．微执行器将做高频率划动．使水下微机器人模型能够在水中产生运动。这种外场驱动方法和材料在医学领域有着良好的应用前景。     

Passively mode-locked fiber laser sensor for acoustic pressure sensing

The development is reported of a multi-longitudinal mode fiber laser sensor based on passive mode locking employing carbon nanotubes in the laser cavity. A polymer membrane is employed beneath the pre-strained erbium-doped fiber (EDF) to convert the sound pressure disturbance into axial strain, alter the cavity length, and induce a shift of the longitudinal modes beat. Hence, acoustic pressure measurement can be carried out by detecting the shift of the beat frequency. Experimental results show comparable strain and sound pressure sensitivity of ~0.5 kHz/με and 147.2 Hz/Pa, respectively. The proposed sensor is an alternative for the measurement of acoustic pressure and possesses the advantages of good stability and ease of interrogation.     

常压放电低温等离子体辐射特性测量实验

本文在自行设计的放电电极板上实现常压下的空气辉光放电(APGD),产生出一薄层的低温等离子体,利用光栅单色仪及测试声强和温度的仪器对所产生的等离子体的光辐射、声辐射和热辐射特性进行实验测量.数据处理后的分析结果表明,该APGD等离子体的光辐射强度及声辐射和热辐射强度,以及总辐射能量基本上都与电极板的加载功率呈线性关系,而且各种形式的能量各占比例是一定的.研究结果表明可以通过沿面APGD的辐射特性与加载功率之间的关系来描述APGD等离子体的特性,以及控制等离子体的产生量.     

A novel optical pressure sensor based on surface plasmon polariton resonator

We propose a Metal–Insulator–Metal structure consists of two surface plasmon polaritons (SPPs) and an H-shaped resonator. The reflectance spectrum is numerically simulated by the two-dimensional finite-difference time-domain method. The results show that this structure can act as a pressure sensor. To our knowledge, this is the first proposal to utilize the SPP resonator to form a pressure sensor. The size of the SPP resonator can be as small as a few hundred nanometers. The nano-scale pressure sensor opens a wide field for potential applications in biological and biomedical engineering.     

Characteristics of a silicon pressure sensor in superfluid helium pressurized up to 1.5 MPa

It is known that a piezo-resistive pressure sensor, FPS-51B manufactured by Fujikura Ltd., is available for in situ pressure measurement in superfluid helium. The sensor covers a pressure range of zero to 103.4 kPa. The maximum rated pressure is 202.6 kPa at room temperature. The characteristics of the pressure sensor in a pressure range up to approximately 0.2 MPa were reported in detail for use in superfluid helium. We measured the pressure characteristics of this sensor up to 1.5 MPa to determine its availability to be used under much higher pressure. Measurements were taken using a cryostat, which can be pressurized up to 1.5 MPa at room temperature and superfluid helium temperatures. It was found that the sensor could be used in a superfluid helium environment at pressures up to 1.5 MPa, without any damage and with good reproducibility.