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1.
非晶ZrO2-SiO2系薄膜及微细图形的制备   总被引:8,自引:0,他引:8  
采用溶胶-凝胶与化学修饰相结合的方法制备了ZrO2-SiO2系薄膜,研究了这种凝胶薄膜的FT-IR光谱特性及随紫外线照射时的变化,发现在1600-1400cm^-1之间有一些与含锆螯合物相关的峰,这些峰值随紫外线照射而减弱,表明这些螯合物发生分解,伴随着螯合物的分解,薄膜的乙醇中的溶解能力也发生变化,利用这特性,紫外光通过掩膜照射凝胶薄膜,用有机溶剂溶洗后,获得凝胶薄膜的微细图形,再进行热处理,消除薄膜中的有机物就可得到非晶质ZrO2-SiO2系薄膜的微细图形。  相似文献   

2.
溶胶—凝胶法制备YBCO超导薄膜微细图形   总被引:1,自引:0,他引:1  
以甲醇为溶剂,以醋酸铜、醋酸钇和醋酸钡为起始原料,二乙烯三胺、三氟乙酸、丙烯酸为添加剂,采用溶胶 凝胶法制备了具有紫外感光性的YBCO溶胶及其凝胶薄膜,其紫外吸收峰在250nm附近,对应于铜络合物的电子跃迁吸收,随着紫外光的照射,其峰值逐渐降低,凝胶在有机溶剂中的溶解性也发生变化,显示了凝胶薄膜的紫外感光性.基于这一特性,本文提出了一种YBCO 超导薄膜图形制备新方法,即利用凝胶薄膜自身的紫外感光性,使紫外光通过掩模照射薄膜,然后在甲醇中溶洗,进一步热处理,得到了YBCO超导薄膜图形.结果表明,图形化的YBCO薄膜具有较强的c轴取向,超导转变温度TC达到92K.  相似文献   

3.
提出一种利用感光溶胶-凝胶法结合紫外光刻技术制备Al2O3微细图形的方法。以Al(O-SecBu)3为前驱物,β-二酮类配体H(C10H12O2)为化学修饰剂,合成了稳定的、具有良好感光性的含Al金属螯合物,进而制备出相应的感光薄膜。研究了薄膜的紫外和红外光谱特性及其在紫外光辐照条件下的变化过程,结果表明金属螯合物薄膜在251,321和368nm处各存在较强的紫外吸收峰。随着紫外光照时间的增加,吸收峰下降,Al2O3/H薄膜表现出明显的感光特性。结合紫外光刻技术,可制备出不同形状尺寸的Al2O3微细图形,其最小线宽可达437nm。  相似文献   

4.
采用改进的化学修饰的溶胶-凝胶工艺,以聚乙烯吡咯烷酮(PVP)为薄膜开裂抑制剂,以乙酰丙酮为化学修饰剂,利用乙酰丙酮可以与金属盐形成的配位螯合物的特性,制备了具有紫外光感光特性的钛酸锶钡(Bao.8Sr0.2TiO3)前驱溶胶及其凝胶薄膜;结合直接感光法,首先制备图形化凝胶薄膜,再通过后续热处理,在Pt/TiO2/SiO2/Si衬底上最终得到了具有钙钛矿结构的钛酸锶钡图形化薄膜,其图形厚度约为793nm,相对介电常数约为600,介电损耗约为0.03.  相似文献   

5.
化学修饰法制备的ZrO2-SiO2系凝胶薄膜的感光特性研究   总被引:2,自引:0,他引:2  
赵桂荣  赵高扬 《功能材料》2002,33(2):207-208,211
本研究采用溶胶-凝胶与化学修饰相结合的方法制备了xZrO2@(100-x)SiO2系薄膜,进一步研究了这种薄膜的紫外光谱特性,发现了当x>30时,这种凝胶薄膜在335nm附近有较强的吸收峰,这一吸收峰对应于与Zr形成配位体的BzAcH的π-π*迁移.当紫外光照射薄膜后,随着含Zr螯合物的分解,吸收峰也消失,并引起薄膜在有机溶剂中的溶解特性的显著变化,表现出明显的感光特性.这种薄膜经400℃、30min热处理以后,薄膜中的有机物消失,可获得非晶质的ZrO2-SiO2系薄膜,依据这一特性可以用紫外光对这类薄膜进行微细加工.  相似文献   

6.
李大玉  高瑞芳 《材料导报》2016,30(Z2):259-261
采用溶胶-凝胶工艺,以Ni(Ac)_2、La(NO_3)_3为前驱原料,以乙醇和乙二醇甲醚为溶剂,以丙烯酸为稳定剂,乙酰丙酮(AcAc)为化学修饰剂制备了感光性LNO溶胶。通过其溶胶的紫外和红外吸收光谱研究了感光性LNO溶胶的紫外感光机理,并运用溶胶-凝胶直接感光法制备出LNO薄膜的微细图形。  相似文献   

7.
以锆酸丁酯及乙酰丙酮、苯甲酰丙酮为原料,经溶胶-凝胶工艺,制备具有负性光刻胶性质的ZrO2光敏溶胶,在将其与正硅酸乙酯通过水解缩聚反应复合,采用浸渍提拉法在基片上制得折射率在1.463-1.647之间连续可调的SiO2/ZrO2二元光敏凝胶薄膜.其敏感波长在335nm附近.通过FTIR分析,发现凝胶薄膜中含有Si-O-Zr、Zr-O的特征振动峰,证明SiO2与ZrO2两相在分子尺度上形成了微观组分均匀的薄膜.利用掩模板结合紫外曝光及显影工艺在凝胶膜上转移了光栅等表面微结构图形.  相似文献   

8.
赵高扬  赵桂荣 《功能材料》2004,35(Z1):3003-3005
以硅为代表的半导体的微细加工技术已达到了亚微米甚至纳米级的水平,而沿用半导体微细加工技术的功能薄膜的微细加工则远达不到这样的水平,其主要原因之一是由于功能薄膜通常含有多种化学组元,各种元素的抗蚀能力不同,与硅半导体相比,微细图形制备具有更大的难度.本研究结合功能薄膜的特点,研究了感光溶胶-凝胶技术,在薄膜的制备过程中就考虑到薄膜的微细加工.这种方法充分利用了溶胶-凝胶法可精确调控薄膜成分、按照需要对薄膜的结构进行化学裁剪的特点,用化学修饰法赋予薄膜以感光特性,利用薄膜自身的感光特性制备微细图形,简化了薄膜微细图形制备流程,并可以获得具有亚微米级的功能薄膜阵列或二维格子,在光电子或微电子领域有重要应用前景.  相似文献   

9.
采用溶胶凝胶法在叉指型微阵列电极表面制备了TiO2纳米薄膜,并对薄膜形貌、厚度以及溶胶粒子尺寸进行了表征,研究了温度、紫外光照对纳米TiO2薄膜微阵列电极的电阻的影响。结果表明,溶胶粒子平均粒径在9nm,单次提拉制备的TiO2纳米薄膜膜厚为120nm,两次提拉薄膜厚度200nm,纳米TiO2薄膜微阵列电极电阻呈现半导体特性,大气环境中,紫外光照下纳米薄膜微电极的低温电阻较无光照时明显减小,表现出紫外光敏感特性。随着温度的升高,紫外光照下的电阻与无光照时电阻差值逐步减小,表明温度对纳米薄膜电阻有更大的影响。  相似文献   

10.
透明纳米TiO2薄膜的制备及其紫外光电特性研究   总被引:3,自引:0,他引:3  
付姚  曹望和 《功能材料》2006,37(9):1485-1487
采用溶胶-凝胶法于ITO导电玻璃和石英玻璃基底上制备了均匀透明的TiO2多孔纳米薄膜.XRD和AFM测试结果表明,构成薄膜的TiO2粒子为锐钛矿相,粒径约为50nm.紫外-可见(UV-vis)吸收光谱显示,制得的TiO2薄膜对紫外光表现出很强的吸收特性.借助标准三电极体系进行的光电化学测试结果表明,在紫外光照射下,制得的薄膜电极可产生稳定的阳极光生电流,且电流大小显著依赖于照射光的波长(λ),λ=320nm的光产生的光电流最大.另外,薄膜电极中的光电流大小与电极电位(U)有关.高于0.6V的电位可有效抑制光生电子向电解液的注入,并增大光生电子向导电基底的扩散速度,从而提高阳极光电流的大小.实验结果表明,纳米TiO2薄膜在紫外光传感器的制备方面具有较好的应用潜力.  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
13.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

14.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

15.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

16.
A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils.  相似文献   

17.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

18.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

19.
Several researches have been reported about the characteristic of β-Ga2O3 nanowires which was synthesized on nickel oxide particle. But indeed, recent researches about synthesis of β-Ga2O3 nanowires on oxide-assisted transition metal are limited to nickel or cobalt oxide catalyst. In this work, Gallium oxide (β-Ga2O3 ) nanowires were synthesized by a simple thermal evaporation method from gallium powder in the range of 700 - 1000℃ using the iron, nickel, copper, cobalt and zinc oxide as a catalyst, respectively. The β-Ga2O3 nanowires with single crystalline without defects were successfully synthesized at the reaction temperature of 850, 900 and 950℃ in all the catalysts. But optimum experimental condition in synthesis of nanowires varied with the kind of catalyst. As increasing synthesis temperature,the morphology of gallium oxide nanowires changed from nanowires to nanorods, and its diameter increased. From these results, we could be proposed that the growth mechanism of β-Ga2O3 nanowires was changed with synthesis temperature of nanowires. Microstructure and morphology of Synthesized nanowire was characterized by HR-TEM, FE-SEM, EDX and XRD.  相似文献   

20.
Cubic boron nitride(c-BN) film was deposited on a Si (100) substrate by the RF-magnetron sputtering.The mainly problems for fabrication of c-BN films are the low purity and high intrinsic compressive stress. In order to solve the two problems, the c-BN film with the buffer interlayer was deposited on the substrate which had been implanted with nitrogen and/or boron ions. The results show: the implantation of nitrogen ions can obviously increase c-BN content and reduce the internal stress slightly; while the implantation of boron shows no obvious improvement to the content of c-BN, which can reduce the internal stress in the film obviously. In addition, it is suggested that the implantation of nitrogen and boron shows the best result, which not only can increase the content of c-BN, but also reduce the internal stress in the c-BN film obviously.  相似文献   

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