共查询到19条相似文献,搜索用时 46 毫秒
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场发射压力传感器的研究进展 总被引:2,自引:0,他引:2
对现有场发射压力传感器的各种结构形式和研究现状进行了综合比较;从压力测量范围、阴极发射电流强度及阴阳极对准键合等方面分析传感器的改进途径;讨论了在阴极发射体阵列上沉积纳米硅薄膜,提高器件灵敏度的设想。 相似文献
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场发射真空传感器 总被引:2,自引:0,他引:2
场发射真空传感器是采用MEMS加工工艺研制一种新型的基于硅尖阵列场发射原理的微型真空传感器.通过理论分析,确立了该种传感器中硅尖场发射电流与真空度的关系.并利用干法刻蚀工艺,在硅片上制作了高3.2μm,曲率半径小于70nm的200 ×42硅尖阵列.保持阳极与硅尖距离为1μm的情况下,可以观察到阳极电压为10V左右时开始有明显的场发射电流.实验结果表明,在10V-15V的输入电压范围内,通过测试场发射电流所得到的真空度值,其最大误差不超过10%.该真空传感器具有制作简单、易于集成、信号测量容易、自身不带密封腔等优点,具有潜在的应用前景和市场潜力. 相似文献
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碳纳米管因其独特而优异的电学、力学、热学、化学及电子特性等在很多领域上展现应用的潜力,而近年来碳纳米管在压力传感器方面的应用成为研究热点之一.本文综述了碳纳米管压力传感器的基本原理以及研究进展,并对不同类型的碳纳米管压力传感器进行了比较. 相似文献
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金刚石薄膜电子场发射研究进展 总被引:2,自引:0,他引:2
综述了近来金刚石和类金刚石薄膜电子场发射性能的研究进展,金刚石薄膜是出色的场发射材料,由于其很低的或者是负的电子亲和势(导带能级粒于真空能级之上)和良好的化学稳定性,在真空微电子和场发射显示领域具有广阔的应用前景。 相似文献
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本文采用热灯丝CVD法在硅尖上制备了纳米金刚石膜,并研究了硅尖上纳米金刚石膜的场发射性质,实验结果表明,硅尖上纳米金刚石膜的场发射特性与硅平面上生长的多晶金刚石膜比较,有了极大的提高,硅尖上纳米金刚石膜场发射开启电场最小为2.7V/μm,而多晶金刚石膜为4.5V/μm。利用电子隧穿模型对实验结果进行了理论分析,研究表明实验结果与理论分析相符合。 相似文献
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温度传感功能薄膜技术 总被引:4,自引:0,他引:4
随着科学技术的不断进步,人们对温度信息获取的手段提出了新的要求,对温度传感器超小型化的要求越来越迫切,薄膜传感器的出现满足这一要求。薄膜温度传感器由于其优异的性能,在工业生产中越来越得到广泛应用。本文介绍了薄膜温度传感器的特点、种类、应用、测温机理、膜系及其主要制备工艺等,并探讨了薄膜热敏电阻、薄膜热电偶的标定方法,最后论述了温度传感功能薄膜的国内外发展现状及其目前需要解决的关键技术。 相似文献
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Discontinuous and continuous diamond films with different morphologies and qualities were deposited on n2+-type Si(100) substrates, using the hot-filament chemical vapor deposition (CVD) technique from CH4–H2 gas mixtures. The field-emission characteristics of these diamond films were investigated. The turn-on fields at a 0.01mA/cm2 current density were recorded for all the tested CVD-diamond films. It was found that discontinuous diamond films showed a much lower turn-on field (1.2 V/μm) than continuous ones (20 V/μm). The effective working function of continuous diamond films was around 0.1 eV, while that for discontinuous diamond films is about 0.03 eV. O2 plasma post-deposition sharpening of thick diamond films indicated that the geometrical-field enhancement, caused by the surface topographic changes, has no significant influence on the turn-on field. 相似文献
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阐述了声发射检测的基本原理,介绍了国内外压力容器声发射检测技术的发展历程和现状,给出了压力容器声发射检测方法的优点和压力容器用钢的声发射特性,最后指出了目前声发射检测需解决的问题和发展趋势。 相似文献
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Piezoresistive pressure sensors are being widely used for various industrial applications, such as in automobiles and process control. But conventional MEMS piezoresistive pressure sensors possess low sensitivity in the lower pressure range for biomedical applications. Alternative structures of MEMS pressure sensors include the use of bossed diaphragms and nanocrystalline piezoresistors. In this paper, four different diaphragm structures—flat diaphragm, standard bossed diaphragm, complementary bossed diaphragm, and nanocrystalline porous silicon-silicon composite diaphragm—have been analyzed in terms of sensitivity and nonlinearity. 相似文献
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A. Vaseashta 《Materials and Manufacturing Processes》2006,21(7):710-716
The dimensionality of a system has a profound influence on its physical behavior, especially for nanostructured materials where at least one of the dimensions is less than 100 nm and, in many instances, the size is comparable with the size of many fundamental physical quantities. Carbon-based nanostructured materials exhibit unique mechanical, electrical, and optical characteristics that may result in many unique device designs. The materials are biocompatible, chemically inert, yet capable of altering electronic properties in presence of some chemical species, dimensionally compatible with bio-molecules, and have interesting electronic characteristics; hence, rendering them as potential chemical and biosensors. A recent heightened awareness of the potential for inadvertent or deliberate contamination of environment and food and agricultural products has made decentralized sensing an important issue for several federal agencies. Recent progress in nanostructured materials and its possible applications in chemical and biological sensors could have a significant impact on data collection, processing, and recognition. Our present and ongoing investigation is aimed towards evaluating the applications of carbon-based nanotubes, nanowires, and nanoporous materials in unique devices and sensors, based on its unique characteristics, morphological flexibility, and biocompatibility. 相似文献