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1.
CH_4离子束增强沉积对TiC薄膜显微硬度的影响机制SCIEI   总被引:1,自引:0,他引:1  
刘长洪  李文治 《金属学报》1994,30(7):B318-B322
研究了双离子束沉积TiC薄膜的形成.离子束反应溅射膜的显微硬度比CH_4高子束增强沉积膜的显微硬度高.XPS,TEM和AES分析表明后者硬度低的一个重要原因是CH_4离子束轰击引入过量的自由碳原子.  相似文献   

2.
刘长洪  李文治  李恒德 《金属学报》1994,30(19):318-322
研究了双离子束沉积TiC薄膜的形成.离子束反应溅射膜的显微硬度比CH_4高子束增强沉积膜的显微硬度高.XPS,TEM和AES分析表明后者硬度低的一个重要原因是CH_4离子束轰击引入过量的自由碳原子.  相似文献   

3.
采用俄罗斯UVN0.5D2I离子束辅助电弧离子镀沉积设备,在高速钢W18C14V基材上沉积TiAlN膜层;利用N离子束对膜层沉积之前的预处理和膜层沉积时的辅助轰击,并用SEM、X射线衍射和力学测试等手段研究了N离子束轰击对膜层表面形貌、相结构、显微硬度影响.结果表明:N离子束的预处理在基材表面形成了一定厚度N的过渡层;N离子束对膜层的辅助轰击,明显地降低了膜层表面“大颗粒”的密度,改善了膜层的表面形貌;同时,形成了由过渡层成分与膜层成分动态混合的扩散层;无N离子轰击时,TiMN膜层是由(TiM)N相和Ti:A1N相组成;轰击能量为7.5keV时,TiMN膜层也是由(TiAl)N相和Ti:MN相组成,但(TiM)N(111)取向减弱,而(200)和(220)取向均增强;Ti,A1N(211)及(301)取向均减弱.N离子束辅助轰击,使膜层的显微硬度由原来的21GPa提高到25.3GPa.  相似文献   

4.
离子束沉积类金刚石膜是钢表面改性的一项新技术,类金刚石改性膜层显微硬度和表面电阻率在特定轰击能量下出现了峰值;双离子呸轰击混合界面可以提高膜层显微硬度并使峰值向低能量方向偏移,而且大大增强膜基结合强度。在大气环境中,改性膜层对钢的摩擦系数达到0.080~0.180,在摩擦过程中起减摩作用。另一方面。类金刚石膜层显著提高钢的耐磨性,试验表明,40Cr钢表面镀膜后其磨损量是镀膜前的1/274。类金刚石  相似文献   

5.
低能离子束轰击对Ti和Ti—N膜组织与性能的影响   总被引:1,自引:0,他引:1  
研究了用能量为3.0keV-4.0keV,束流为80mA-200mA的低能氮和氩离子束对Ti膜进行轰击的作用以及用低能氮离子束对真空电弧沉积Ti-N膜层辅助沉积作用。结果表明:用低能氮离子束对Ti膜进行轰击可以形成Ti2N相,在(204)晶面出现一定的择优取向,并对Ti膜层有一定的强化作用;在低能氮离子束对真空电弧辅助沉积过程中,膜层表现为较高的显微硬度;随低能离子束能量的增大,真空电弧沉积膜层中Ti2N相增多,在(002)晶面出现择优取向,膜层晶粒有粗化的趋势,但显微硬度却增加,这与Hall-Petch公式不符。  相似文献   

6.
葡萄牙的科研人员采用反应磁控溅射工艺进行研究,具体工艺多数为:功率密度10W/cm2,负偏压为70V,靶材分别用W、W-10%Ti、W-10%Ni(质量百分比),CH4/Ar分压比为1/5,真空室压力为10-4Pa.涂前基体表面用离子轰击清洗.开始时,表面加热到450℃,然后用Ar~+轰击8min(离子枪在20A,40V下调节,基体偏压为-120V),沉积时间选择在涂层厚度达到4μm为止.然后对获得的W-C-M(M=Ni,Ti)涂层的化学成分、结构、形貌及抗氧化性能进行了研究. 结果表明,W-C-…  相似文献   

7.
吴隽 《贵金属》1998,19(3):10-15
采用高角X射线衍射(HXRD)和TEM研究用离子束溅射(IBSD)技术制备的Co/Pt多层膜的晶体结构和显微组织形貌,结果表明:Co/Pt多层膜的晶体结构与Co、Pt层厚度tCo、tPt密切相关。当tCo<tPt<210时,Co、Pt层为共格fcc结构,随tCo、tPt增加,逐渐向非共格关系转变,同时,Pt、Co层晶格发生了严重畸变。TEM发现Co/Pt多层膜的组织形貌明显受基底影响,与沉积在Si基底表面上的Co/Pt多层膜相比,沉积在NaCl上的Co/Pt多层膜的晶粒出现择优取向且呈条纹状分布,晶粒明显粗化  相似文献   

8.
用扫描电镜,X射线衍射仪、X射线能谱仪和透射电镜研究了GCr15钢表面在超塑变形过程中Ni、Cr合金化形成的组织结构。结果表明,合金化白亮层由α-Fe、γ、Ni2Fe、(Fe,Cr)7C3等组成,白亮层具有很高的硬度。  相似文献   

9.
利用透射电子显微镜(TEM)、能谱仪(EDX)和电子探针显微分析仪(EPMA)研究了珠光体钢/奥氏体钢(Cr5Mo/Cr21Ni12)异质焊头在高温儿和长期服役中元素C,Cr,Ni,Fe的扩散行为。结果表明:时效时奥氏体钢中Cr,Ni原子向熔合界面方向扩散,Fe原子向相反的方向扩散;增碳层中析出碳化物M23C6的成分与时效时间无关;增碳层最高含碳量由析出碳化物的类型、成分及紧靠熔合界面奥氏体钢中的  相似文献   

10.
用双对向靶溅射方法制备了具有非晶磁性的「Co/Ti」30,「Co/Cu(Ni)30」两组多层膜,分别用X射线衍射,透射电镜和振动样品磁强计做了结构和磁性测量,在以非晶Co和Ciu-Ni合金构成的「Co/Cu(Ni)」多层膜中,发现饱和磁化强度Ms随非磁性层厚度ds的增国发生振荡变化;在以非晶Co和Ti构成的「Co/Ti」多层膜中,MS和则随ds的增加而减小。  相似文献   

11.
钢表面离子束改性类金刚石膜层性能   总被引:1,自引:0,他引:1  
离子束沉积类金刚石膜是钢表面改性的一项新技术。类金刚石改性膜层显微硬度和表面电阻率在特定轰击能量下出现峰值 ;双离子束轰击混合界面可以提高膜层显微硬度 ,并使峰值向低能量方向偏移 ,而且大大增强膜基结合强度。在大气环境中 ,改性膜层对钢的摩擦系数达到 0 0 80~ 0 1 80 ,在摩擦过程中起减摩作用。另一方面 ,类金刚石膜层显著提高钢的耐磨性 ,试验表明 ,40Cr钢表面镀膜后其磨损量是镀膜前的 1 /2 74。类金刚石膜由于使 2Cr1 3不锈钢在 3 5%NaCl溶液中的自然电位Ecorr和点蚀击穿电位Eb 增大 ,因而明显增强钢的抗点蚀能力。  相似文献   

12.
The subjects of the presented paper are to develop a laser surface treatment technology for the protective coatings of glass-molding dies and to better understand the interaction between laser beam and materials coated on the die surface. A variety of alloy films, including Ir-25 at.% Pt, Ir-50 at.% Pt, Ir-75 at.% Pt, Ir-25 at.% Ni, Ir-50 at.% Ni, and Ir-75 at.% Ni compositions are deposited by the ion source assisted magnetron sputtering system (ISAMSS). A Cr layer that functioned as a buffer layer is deposited between the alloy film and die surface. After an alloy film and the buffer Cr layer were sequentially coated on tungsten carbide (WC) surface, Nd:YAG laser was directly applied in the writing process. The temperature profile of the film stack structure is simulated by ANSYS software. The surface roughness was analyzed by atomic force microscopy (AFM) to compare the coating surface roughness before and after the laser surface treatments. The treated coatings for oxidation prevention test were examined by energy dispersive x-ray spectrometry (EDS). Nanoindentation instrument was performed to evaluate microhardness and reduced modulus of the coatings. The cross-sectional structures between the hard coating layer and buffer layer were also inspected by a scanning electron microscope (SEM). The Pt-Ir and Ni-Ir film coatings are unable to withstand the working temperature over 1500 °C, which is considered for quartz molding process and hot embossing process. The films showed high roughness, low microhardness and low reduced modulus because the film oxidation occurred in a high working temperature process.  相似文献   

13.
刘兴光  张凯锋  周晖 《表面技术》2020,49(11):351-357
目的 需要直接测量薄膜的极限形变这一关键参数,来评价某种薄膜在一定服役载荷下的某种基体表面是否能胜任。方法 借助聚焦离子束显微镜/扫描电子显微镜(FIB/SEM)双束显微分析测试系统,提出了一种在微米尺度下、原位进行三点弯曲薄膜测试的方法,同时可以进行实时观测与分析记录。之后,使用磁控溅射技术制备了具有强择优晶体生长取向的CrN薄膜和Cr/CrN多层薄膜,并使用上述三点弯曲测试方法对这两种薄膜进行了弯曲测试。结果 CrN薄膜的极限形变量为(1.8±0.1)%,且其在原位三点弯曲试验中断裂前的变形类型为纯弹性形变,而不是塑性形变或者弹性/塑性混合形变。而Cr/CrN多层薄膜的极限形变达到了9.1%,是纯CrN薄膜的5倍,且对“预裂纹”等缺陷不敏感。结论 将此测试方法与在微米尺度使用FIB测量薄膜残余应力的方法相结合,将可以有效地评估多种薄膜的形变能力及形变特性。所获得的薄膜相关性能数据,对于针对不同基体、不同使用工况(如不同的表面受力状态、变形状态等)的薄膜体系或结构的选择与设计,具有很好的指导意义。  相似文献   

14.
An extensive study of the composition distribution, bonding strength, hardness, and wear resistance of a 0Cr18Ni9 film deposited on a Ti811 titanium alloy surface by ion beam enhanced deposition (IBED) is presented. Shot peening was introduced to post-treat the modified surface to synergistically improve the fretting fatigue resistance of the Ti811 alloy at 350~C. The results indicate that the 0Cr18Ni9 film with high density, small grain size, low void radio, and high bonding strength can be prepared using IBED. As a result, the hardness, wear resistance, and fretting fatigue resistance of the Ti811 alloy are increased to a remarkable extent. Compared with shot peening treatment or IBED 0Cr18Ni9 film alone, the Ti811 titanium alloy with an IBED 0Cr18Ni9 film combined with shot peening shows a higher fretting fatigue resistance at 350℃. This is due to the synergistic effect of the high wear resistance of the film surface and the residual compressive stress induced by shot peening.  相似文献   

15.
微组装Teflon/Si3N4多层膜的结构和微摩擦磨损性能   总被引:2,自引:0,他引:2  
利用离子束增强交替溅射聚四氟乙烯和氮化硅靶的方法制备出微组装的Teflon/Si3N4多层膜,并通过PHI-5300,FT-IR2000,XRD和AFM/FFM等测定了多层膜的结构,力学性能和微观摩擦磨损性能。  相似文献   

16.
低合金钢涂覆类金刚石膜耐蚀性能测试   总被引:1,自引:0,他引:1  
用自制的多功能离子束辅助沉积设备在20Cr和40Cr低合金钢上沉积类金刚石膜,通过失重法,电化学方法研究低合金钢镀膜前后在不同腐蚀介质中的耐蚀行为,实验结果表明,低合金钢沉积类金刚石膜后,腐蚀速度降低,其抗全面腐蚀的性能与2Cr13不锈钢接近,而且类金刚石膜显著提高了低合金钢基抗点蚀的能力,失重法和稳态极化曲线法所得结果吻合。  相似文献   

17.
Cu/Ni多层膜对Ti811合金微动磨损和微动疲劳抗力的影响   总被引:1,自引:0,他引:1  
在Ti811钛合金表面利用离子辅助磁控溅射沉积技术制备20~1200nm不同调制周期的Cu/Ni金属多层膜,分析多层膜的结构,测试膜基结合强度、膜层显微硬度和韧性,对比研究不同调制周期的Cu/Ni多层膜对钛合金基材常温下微动磨损性能和微动疲劳(FF)抗力的影响。结果表明:利用离子辅助磁控溅射技术可以获得致密度高、晶粒细化、膜基结合强度高的Cu/Ni多层膜,该类多层膜具有良好的减摩润滑作用,因而改善了Ti811钛合金常温下抗微动磨损和微动疲劳性能;Cu/Ni多层膜对钛合金FF抗力的改善程度随膜层调制周期呈现非单调变化趋势,调制周期为200nm的Cu/Ni多层膜对钛合金FF抗力的提高程度最大,原因归于该膜层具有良好的强韧和润滑综合性能。  相似文献   

18.
电弧离子镀氧化铬涂层的组织结构及硬度   总被引:4,自引:0,他引:4  
采用电弧离子镀方法在不锈钢基体上沉积Cr2O3薄膜,研究了氧流量和脉冲偏压对薄膜相结构、沉积速率、表面形貌、薄膜硬度的影响。结果表明,氧流量和脉冲偏压对薄膜的相结构有较大的影响,在氧流量为130cm^3/s、脉冲偏压为-100V时,出现Cr2O3{001}面择优取向;氧流量增高,脉冲偏压增大时,薄膜的表面形貌得到改善;在脉冲偏压为-200V、氧流量为130cmf^3/s时,可获得符合Cr2O3化学计量比的薄膜,其硬度达到36GPa。  相似文献   

19.
Characterization and tribological properties of composite 3Cr13/FeS layer   总被引:2,自引:0,他引:2  
The 3Cr13 coating was prepared on the surface of 1045 steel by high velocity arc spraying method, and then treated by low temperature ion sulfuration to obtain the solid lubrication composite 3Cr13/FeS layer. SEM was used to observe the surface, cross-section and worn scar morphologies. XRD was utilized to analyze the phase structure. X-ray stress determinator was utilized to measure its residual stress. The nano-hardness and elastic modulus of composite 3Cr13/FeS layer were surveyed by the nano-indentation tester. The tribological properties were investigated on a ball-on-disk wear tester under dry and oil lubrication conditions. The results showed that the friction coefficient and wear scar depth of the composite 3Cr13/FeS layer were always lower than those of FeS film and 1045 steel under dry and oil lubrication conditions. Therefore the composite 3Cr13/FeS layer had excellent Friction-reduction and anti-wear properties.  相似文献   

20.
Ni80Fe20/Ni48Fe12Cr40 bilayer films and Ni80Fe20 monolayer films were deposited at room temperature on SiO2/Si(100) substrates by electron beam evaporation. The influence of the thickness of the Ni48Fe12Cr40 underlayer on the structure, magnetization, and magnetoresistance of the Ni80Fe20/Ni48Fe12Cr40 bilayer film was investigated. The thickness of the Ni48Fe12Cr40 layer varied from about 1 nm to 18 nm while the Ni80Fe20 layer thickness was fixed at 45 nm. For the as-deposited bilayer films the introducing of the Ni48Fe12Cr40 underlayer promotes both the (111) texture and grain growth in the Ni80Fe20 layer. The Ni48Fe12Cr40 underlayer has no significant influence on the magnetic moment of the Ni80Fe20/Ni48Fe12Cr40 bilayer film. However, the coercivity of the bilayer film changes with the thickness of the Ni48Fe12Cr40 undedayer. The optimum thickness of the Ni48Fe12Cr40 underlayer for improving the anisotropic magnetoresistance effect of the Ni80Fe20/Ni48Fe12Cr40 bilayer film is about 5 nm. With a decrease in temperature from 300 K to 81 K, the anisotropic magnetoresistance ratio of the Ni80Fe20 (45 nm)/Ni48Fe12Cr40 (5 nm) bilayer film increases linearly from 2.1% to 4.8% compared with that of the Ni80Fe20 monolayer film from 1.7% to 4.0%.  相似文献   

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