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1.
目的研究不同甲烷体积分数对纳米金刚石(NCD)薄膜生长的影响,实现较小晶粒尺寸、高平整度的NCD薄膜的制备。方法采用微波等离子体增强化学气相沉积的方法制备NCD薄膜,以CH4/H2为气源,在生长阶段控制其他条件不变的前提下,探讨不同甲烷体积分数对NCD晶粒尺寸、表面形貌以及表面粗糙度的影响。采用SEM、XRD等观测NCD薄膜的表面形貌和晶粒尺寸大小,并利用Raman对NCD薄膜的不同散射峰进行分析。结果随着甲烷体积分数的增加,薄膜晶粒尺寸有减小的趋势。甲烷体积分数较低时,晶形比较完整,但致密度较小;甲烷体积分数较高时,晶形杂乱无章,但致密度较好。当甲烷体积分数为9%时NCD薄膜平均粒径达到最小,为21.3 nm,表面粗糙度较好,但非晶金刚石成分开始大量生成,NCD薄膜质量开始变差;当甲烷体积分数为8%时其形貌最好,且此时最小表面粗糙度小于20 nm。通过Raman分析可知NCD薄膜中出现了硅峰和石墨烯特征峰。结论甲烷体积分数对NCD薄膜形貌有较大影响,甲烷体积分数为8%时是表面平整度由较差变好再逐渐变差的分界点,且平均晶粒尺寸为23.6 nm,薄膜表面具有较好的平整度。  相似文献   

2.
《硬质合金》2017,(6):407-412
采用直流辉光放电等离子体设备在单晶碳化硅表面沉积高晶取向金刚石薄膜,研究了预处理方法、基片温度以及甲烷浓度(甲烷与氢气的体积比)对金刚石薄膜晶粒取向的影响。用SEM、Raman等测试方法对金刚石薄膜进行表征。结果表明:研磨处理可以提高金刚石形核密度,高的形核密度有利于金刚石薄膜的沉积;过高或过低的基片温度会使得金刚石薄膜表现出(111)面生长的趋势;高甲烷浓度和低甲烷浓度也会使得金刚石薄膜晶粒取向发生改变。最终采用850℃以及5%甲烷浓度这一沉积参数进行金刚石薄膜的沉积,制备出了取向度非常好的(100)面金刚石薄膜。  相似文献   

3.
利用微波等离子体化学气相沉积(MPCVD)法,在CH4/H2的混合反应气源中加入N2进行了金刚石膜的沉积实验,详细研究了N2浓度对金刚石膜生长的影响规律。使用扫描电子显微镜、激光拉曼光谱仪和X射线衍射仪等设备,表征了金刚石薄膜的表面形貌、相组成及晶面取向。实验结果表明:随着N2体积分数的增加(由0%增加到6%),薄膜中的非金刚石相含量逐渐增大,金刚石晶粒尺寸逐渐减小,晶面取向也由较大的晶面(111)转变成较小的晶面(100);当N2体积分数为4%时,沉积的金刚石膜表面为"菜花"状结构;低体积分数(2%)的N2有利于获得高度取向(100)的金刚石膜。  相似文献   

4.
MPCVD快速制备(100)面金刚石薄膜   总被引:1,自引:0,他引:1  
孙祁  汪建华  翁俊  罗曼 《硬质合金》2013,(1):8-13,18
利用实验室自主研发的10 kW微波等离子体装置,在直径为75 mm的(100)硅片上快速沉积高质量(100)面金刚石薄膜。实验中,甲烷浓度由1%提高至5%,金刚石薄膜的沉积速率由1μm/h增至8.2μm/h。随着金刚石薄膜生长速率的增加,薄膜质量下降,晶型杂乱,非金刚石相含量增加。在气源中加入氧气以提高高速生长下金刚石薄膜的质量。不同氧气浓度对金刚石薄膜的半高宽(Full Width at Half Maximum,FWHM)有较大影响:氧气浓度为0.1%~0.5%时,金刚石薄膜的FWHM随着氧气浓度的增加而减小;0.6%~1.2%时,薄膜FWHM值随着氧气浓度的增加而增大;浓度大于1.2%时,FWHM值保持不变。在H2流量为300 cm3/min,CH4浓度为5%,O2浓度为0.5%的条件下,制备出了(100)面完整,晶型完整,有台阶生长状的金刚石薄膜。  相似文献   

5.
通过热丝化学气相沉积法,在硅基上沉积硼掺杂金刚石薄膜,研究硼源流量对硼掺杂金刚石薄膜的导电性能、晶粒尺寸、晶面方向及残余应力等的影响。结果表明:随硼流量增加,金刚石薄膜电阻迅速降低;超过一定流量后,薄膜的缺陷和杂质增多,阻碍了电阻的进一步下降。硼流量在0~25 mL/min内逐渐升高时,金刚石薄膜平均晶粒尺寸从3.5 μm增长到8.3 μm,硼元素促进了(111)晶面的生长;硼流量继续增大到35 mL/min时,对(111)晶面的促进作用减弱,晶粒尺寸减小且晶粒表面缺陷增多而失去完整性。X射线衍射分析表明:随硼流量增加,金刚石薄膜(111)晶面和(110)晶面的衍射峰面积比,呈先增加后减少的趋势,在硼流量为20 mL/min时达到最大值;且硼掺杂金刚石薄膜残余应力为压应力。在硼源流量小于10 mL/min时,应力随流量的增加而减小;当硼流量大于30 mL/min时,应力随流量的增加而增大。   相似文献   

6.
采用直流热阴极等离子体化学气相沉积方法,用甲烷、氢气、氮气的混合气体在Mo基底上成功制备了金刚石薄膜.分别采用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、拉曼光谱仪(Raman)对不同流量氮气氛下生长金刚石薄膜的形貌、取向、质量进行了表征.结果表明:适量氮气的加入,不仅可以促进金刚石薄膜的生长速率,还可以促进金刚...  相似文献   

7.
采用热丝化学气相沉积法(HFCVD),以甲烷和氢气为反应气体,在综合性能良好的Mo-40%Re(摩尔分数)合金基体上沉积金刚石薄膜.采用X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)和显微激光拉曼光谱仪(Raman)分别对金刚石薄膜相组成、表面形貌、晶粒大小和质量等进行检测分析,研究CVD沉积参数,如基体温度(θs)、碳源浓度(R,Cn4的体积分数)和沉积压强(p),对金刚石形核、生长和金刚石成膜的影响.结果表明在合适的基体预处理条件下,当θs=750℃,R=-3%,p=3.5kPa时,薄膜平均线生长速率高达1μm/h,得到的金刚石膜完整致密,晶粒大小均匀,纯度较高,具有明显的(111)织构.  相似文献   

8.
采用中频反应磁控溅射技术,以高纯Ti(99.99%)为靶材,以高纯氮气(99.99%)为反应气体,在铝合金基片上沉积Ti/TiN复合纳米膜层。通过XRD、SEM、EDS等分析Ti/TiN复合纳米膜层微观组织和物相结构,研究基片负偏压对Ti/TiN复合纳米薄膜择优取向生长的影响。研究表明,将片加上-150 V负偏压时,Ti/TiN薄膜优先沿(111)面生长;将基片加上-200 V负偏压时,Ti/TiN薄膜优先沿(220)面生长;将基片加上-350 V负偏压时,Ti/TiN薄膜优先沿(200)面生长。继续增大基片负偏压时,由于薄膜中Ar离子浓度大幅增长,高能离子长时间轰击破坏晶粒取向性,使薄膜呈无择优取向。  相似文献   

9.
采用直流反应溅射在304不锈钢表面沉积CrN薄膜。利用X射线衍射仪(XRD),扫描电子显微镜(SEM),原子力显微镜(AFM),显微硬度计,磨损试验机与三维轮廓仪等表征氮气流量对CrN薄膜组织结构与摩擦性能的影响。结果表明,随着氮气流量的增加,CrN(200)晶面呈择优取向,薄膜的沉积速率随着氮气流量的增加逐渐降低。另外,薄膜的表面粗糙度随着氮气流量的增加呈先降低后增加的趋势。随着氮气流量从15 cm~3/min增加至30 cm~3/min时,薄膜的显微硬度HV先从5273 MPa增加至10422 MPa,当氮气流量再增加至35 cm~3/min时,薄膜的显微硬度却降低至9180 MPa。磨损试验表明,当氮气流量为30 cm~3/min时薄膜具有最小的摩擦系数0.93和磨损率2.02×10-15 m~3·(N·m)~(-1),显示最佳的磨损性能。  相似文献   

10.
磁过滤等离子体制备TiN薄膜中沉积条件对薄膜织构的影响   总被引:2,自引:0,他引:2  
在室温条件下,利用自行设计的平面"S"形磁过滤等离子体设备,在(111)面单晶硅上制备TiN薄膜,通过改变基底偏压和反应气体成分,即通过改变氮气和氩气的气体流量来改变沉积离子的能量和密度,从离子轰击的角度研究了沉积条件对TiN薄膜织构的影响.对薄膜的表面形貌进行观察,用(θ~2θ)和1.5°掠入射2种X射线衍射方法对薄膜晶体结构和晶面取向进行了分析,对薄膜进行了电子衍射研究.结果显示磁过滤等离子制备的TiN薄膜表面平整光滑,颗粒尺寸为20~70 nm,且基底偏压和氩气流量的增大促使薄膜发生(111)面的择优取向,且(111)晶面与膜表面平行,而在高氩气流量的情况下,(200)和(220)面在薄膜平面也发生了定向排列.  相似文献   

11.
吴玉梅  熊晓云  靳蓉  孙敬民  杨林  罗晓星 《金属学报》2005,10(10):1100-1103
目的: 观察本实验室合成的一种治疗阿尔茨海默氏症(AD)的药物(1-二甲基磷酰基-2, 2, 2 -三氯)-乙基-1-醇烟酸醋(NMF),对体外培养的皮层神经细胞活性的影响以及对海人藻酸(KA)所致的神经损伤的保护作用。方法: 采用体外培养皮层神经元的方法,解剖分离 15 d胚胎小鼠皮层神经细胞, 接种于 96孔板,48 h 后加药并培养 72 h,以 MIT 法 观察 NMF 对小鼠皮层神经细胞活性的影响;同时将接种于 24 孔板的细胞预先给予 NMF,d 3 时加或不加KA处理后,以台盼蓝染色鉴别并计数死、活细胞,可得出细胞的存活率。结果: NMF 明显促进胎鼠皮层神经元活性,其中 NMF1、0. 1、10nmol·L-1促进神经元活性增殖率分别高达 34.7%、37.4%、36. 7%, NMF 明显促进正常胎鼠皮层神经元存活卒,与对照组比较,10nmol·L-1 NMF 对皮层神经元的存活率分别提高 39.3%、73.5%。 NMF能显著 对抗 KA 所致的神经元损伤,与 KA 损伤组相比, NMF0.1、10、10nmol·L-1对损伤皮层神经元的保护率分别为 77.30%、80.10%、84.15%。结论: NMF 明 显促进胎鼠皮层神经元的洁性、提高正常皮层神经元,的存活卒,并能有效地保护KA所致的神经元损伤,提示 NMF 是一种很有潜力的治疗 AD 的药物。  相似文献   

12.
Coherent second phase often exhibits anisotropic morphology with specifi c orientations with respect to both the second and the matrix phases. As a key feature of microstructure, the morphology of the coherent particles is essential for understanding the second-phase strengthening eff ect in various industrial alloys. This letter reports anisotropic growth of coherent ferrite from austenite matrix in pure iron based on molecular dynamics simulation. We found that the ferrite grain tends to grow into an elongated plate-like shape, independent of its initial confi guration. The fi nal shape of the ferrite is closely related to the misfi t between the two phases, with the longest direction and the broad facet of the plate being, respectively, consistent with the best matching direction and the best matching plane calculated via the Burgers vector content(BVC) method. The strain energy calculation in the framework of Eshelby's inclusion theory verifi es that the simulated orientation of the coherent ferrite is energetically favorable. It is anticipated that the BVC method will be applicable in analysis of anisotropic growth and morphology of coherent second phase in other phase transformation systems.  相似文献   

13.
The rheology feature of Sb, Bi melt and alloys was studied using coaxial cylinder high-temperature viscometer. The results showed that the curve of torsion-rotational speed for Sb melt presents a linear relation in all measured temperature ranges, whereas for the Bi melt, the curve presents obvious non-Newtonian feature within the low temperature range and at relative high shear stress. The rheology feature of Sb80Bi20 and Sb20Bi80 alloy melts was well correlated with that of Sb and Bi, respectively. It is considered that the rheology behavior of Sb melt plays a crucial role in Sb80Bi20 alloy and that of Bi melt plays a crucial role in Sb20Bi80 alloy.  相似文献   

14.
The effect of short-time aging in the temperature range between 400 and 1000 °C on the pitting corrosion behavior and mechanical property of a novel lean duplex stainless steel(LDSS) 2002 was investigated through the potentiostatic critical pitting temperature(CPT) tests and the Charpy impact tests. Both the pitting corrosion resistance and the toughness of aged specimens degraded due to the precipitation of detrimental secondary phases and the most significant reduction of CPT and impact energy emerged at 650 °C concurrently. The CPT of LDSS 2002 specimen aged at 650 °C decreased by 28 °C, and the impact energy dropped from 69 to 29 J/cm~2 compared with the solution-annealed sample. Transmission electron microscopy characterization showed that the main precipitates in LDSS 2002 were Cr_2N and M_(23)C_6 along the ferrite–austenite grain boundaries.  相似文献   

15.
《中国铸造》2014,(6):537-538
The invention provides a method of making a mold which can reduce SOx generation rate while preventing decrease in hardening rate in the case of using sulfuric acid for a hardener composition. The method has a mixture step in which fire-resistant particles, a hardener composition and a binder composition are mixed to obtain a composition for a mold. The hardener composition contains sulfuric acid. In the mixture step, sodium carbonate is added. A molar ratio of the sulfuric acid to the sodium carbonate is 0.5 or more and 4.0 or less.  相似文献   

16.
《中国铸造》2014,(6):542-546
China Foundry Week, hosted by the Foundry Institution of Chinese Mechanical Engineering Society (FICMES) each year, is a large academic event in China. It is one of the ten high-impact activities sponsored by the Chinese Mechanical Engineering Society.  相似文献   

17.
正1.Contents In order to promote the academic exchanges and technical communication of the research in the field of fluid power transmission and control,fluid control engineering specialized committee of the Chinese Society of Theoretical and Applied Mechanics will hold the 17th Conference of Hydrodynamic and Electromechanical Control Engineering on July 27-29,2014 in Tibet,Lhasa city.  相似文献   

18.
正The Transactions of Nonferrous Metals Society of China,founded in 1991 and sponsored by The Nonferrous Metals Society of China,is published monthly now and mainly contains reports of original research which reflect the new progresses in the field of nonferrous metals science and technology,including mineral processing,extraction metallurgy,metallic materials and heat treatments,metal working,physical metallurgy,powder metallurgy,with the emphasis  相似文献   

19.
Preface     
<正>We are pleased to present this Special Issue of Transactions of Nonferrous Metals Society of China containing selected papers from the First Asian Conference on Aluminum Alloys(ACAA-2013),held in Beijing,China,13–17 October 2013.This conference has been initiated,with approval of  相似文献   

20.
The Transactions of Nonferrous Metals Society of China, founded in 1991 and sponsored by The Nonferrous Metals Society of China, is published monthly now and mainly contains reports of original research which reflect the new progresses in the field of nonferrous metals science and technology, including mineral processing, extraction metallurgy, metallic materials and heat treatments, metal working, physical metallurgy, powder metallurgy, with the emphasis on fundamental science. It is the unique preeminent publication in English for scientists, engineers, under/post-graduates on the field of nonferrous metals industry. This journal is covered by many famous abstract/index systems and databases such as SCI Expanded, Ei Compendex Plus, 1NSPEC, CA, METADEX, AJ and JICST.  相似文献   

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