A study on the analysis of grinding mechanism and development of dressing system by using optimum in-process electrolytic dressing

In recent years, grinding techniques for precision machining of brittle materials used in electric, optical and die parts have been improved by using superabrasive wheels and precision grinding machines. The completion of optimum dressing of superabrasive wheels makes possible the effective precision grinding of brittle materials, but the present dressing system cannot provide sufficient control for optimum dressing of the wheels. In this study, a new and grinding technique of optimum in-process electrolytic dressing is proposed. This system can carry out optimum in-process dressing of superabrasive wheels, and give very effective control according to unstable current and gap increase. Therefore, the optimum in-process electrolytic dressing is a good method to efficiently obtain and mirror-like grind brittle materials.     

在线电解修整(ELID)超精密磨削中的金刚石磨具特性研究

ELID(Electrolytic In-process Dressing)磨削技术是在电化学加工、电解磨削原理基础上发展起来的一项磨削新技术,主要用于硬脆材料超精密磨削过程中金属基结合剂超硬微细磨粒砂轮的在线修整.本文以金刚石微粉砂轮在线电解修整(ELID)磨削氮化硅陶瓷为例,着重研究了磨具特性对硬脆材料超精密磨削过程的影响.研究表明,磨具组织沿砂轮圆周的不均匀性将会导致砂轮表面钝化膜状态的不一致,这将直接影响砂轮局部参与切削的磨粒数量,影响单个磨料的实际磨削厚度.这首先将对工件表面的磨削质量,特别是对表面粗糙度产生直接影响,同时也非常不利于实现材料的高效去除.     

Mirror surface grinding for brittle materials with in-process electrolytic dressing

Use of a diamond wheel with superabrasive is required for mirror-like surface grinding of brittle materials. However, conventional dressing methods cannot apply to the diamond wheel with superabrasive. Recently, an electrolytic dressing method was developed for use with a cast iron-bonded diamond wheel and superabrasive. This technique can replace lapping and polishing. Using electrolytic dressing, surface roughness of the workpiece was improved significantly, and the grinding force was very low and the continuity of the grinding force was also improved. The purpose of this study was to achieve mirror-like surface grinding of ferrite with electrolytic dressing of a metal-bonded diamond wheel. For application of ultraprecision grinding for brittle material, superabrasive, air spindle, and in-process electrolytic dressings were used. Additionally, the effects of pick current and pulse width on ground surface were investigated, and suitable dressing conditions for ferrite were determined.     

GCr15钢的ELID磨削性能实验研究

为了探讨GCr15钢的ELID（Electrolytic In-process Dressing）磨削性能，在基于大量实验的基础上，对GCr15钢采用ELID磨削时磨削力的变化规律进行了详细分析，并将磨削力、磨削表面粗糙度与普通磨削进行了比较。结果表明，采用铸铁结合剂CBN砂轮进行ELID磨削时磨削力几乎不随时间的变化而变化，而采用白刚玉砂轮进行磨削时的磨削力随时间的变化不断增大，在线电解修整使CBN砂轮在磨削过程中始终保持良好的磨削性能，有利于节省砂轮修整时间，提高加工效率。在ELID磨削中，采用微细砂轮进行磨削可以获得很低的表面粗糙度，实现对GCr15钢的超精密镜面磨削。     

应用ELID技术进行微晶玻璃超精密磨削

由于微晶玻璃具有优良的物理、机械性能，在光学等领域得到了越来越多的应用。ELID磨削利用在线．电解的方法修整超细粒度的金刚石砂轮，可以有效地实现硬脆材料的超精密加工。本文将ELID磨削技术应用于微晶玻璃的超精密加工，通过改进ELID磨削的关键技术，包括砂轮电火花整形、电解修整电源和ELID磨削液的改进，实现了微晶玻璃的超精密磨削加工，同时通过采用原子力显微镜对不同磨削参数下的工件表面进行分析，以保证在塑性状态下对微晶玻璃进行磨削。因此提高了ELID磨削的质量。获得了Ra2．308nm的较好表面质量。     

氧化铝陶瓷ELID高效磨削技术的研究

陶瓷材料具有优异的机械性能，其应用越来越广泛。然而由于陶瓷的高硬度及其易碎性使其难于加工。在线电解修整磨削技术已经被应用于硬脆材料的超精密加工，由于可以实现砂轮的在线修整，尤其被广泛应用于细粒度砂轮的磨削中。本文在平面磨床上应用铸铁结合剂金刚石砂轮与ELID磨削技术进行高效磨削研究。实验结果表明，在同样的磨削条件下，采用ELID磨削时的磨削力约为使用树脂结合剂砂轮磨削力的2／5～3／5。实验结果说明采用ELID磨削技术加工效率可以得到极大提高。而且，在线电解修整作用可以保持砂轮的锋锐性，有利于保持硬脆材料高效磨削的连续性。     

ELID grinding of silicon wafers: A literature review

Silicon wafers are the most widely used substrates for fabricating integrated circuits. There have been continuous demands for higher quality silicon wafers with lower prices, and it becomes more and more difficult to meet these demands using current manufacturing processes. In recent years, research has been done on electrolytic in-process dressing (ELID) grinding of silicon wafers to explore its potential to become a viable manufacturing process. This paper reviews the literature on ELID grinding, covering its set-ups, wheel dressing mechanism, and experimental results. It also discusses the technical barriers that have to be overcome before ELID grinding can be used in manufacturing.     

Surface characteristics on the ductile mode grinding of MgO single crystal with optimum inprocess electrolytic dressing system

MgO single crystal is widely used as a material of high-temperature resistance, but is difficult to grind because of brittleness and crack generation. Superabrasive diamond wheels are therefore required for ductile mode grinding of this material. This study describes a newly proposed optimum in-process electrolytic dressing system for carrying out effective dressing of superabrasive diamond wheels. Using this system the ground surfaces of MgO single crystals were improved, the grinding force was reduced and cracks were eliminated. In conclusion, this system enables efficient and ductile mode grinding to be obtained without cracking of MgO single crystals.     

非导电陶瓷特种加工复合磨削技术

概述了国内外非导电陶瓷磨削加工技术的研究进展.对延性域磨削和半延展性磨削、在线电解修整磨削、电化学在线控制修整磨削等精密、超精密磨削加工技术及超声波辅助磨削、激光预热辅助磨削、机械电解电火花复合磨削、电火花磨削等特种加工复合磨削技术的原理、特点进行了分析评述.提出了非导电陶瓷的电火花诱导可控烧蚀磨削加工技术,并介绍了其...     

Precision surface grinding of Mn–Zn ferrite with in-process electro-discharge dressing (IEDD)

Ferrite is widely used as a material for hard disk magnetic heads, but is difficult to grind because of its high hardness and brittleness. Therefore, a superabrasive (diamond) wheel is used for precision surface grinding of this material. But the conventional dressing method cannot be applied to the diamond wheel. This study describes a newly proposed method for carrying out effective in-process electro-discharge dressing (IEDD) of a diamond wheel. Using IEDD, the surface roughness of Mn–Zn ferrite was improved and the grinding force was reduced. IEDD is a good method to obtain efficient grinding and surface grinding of ferrite.