原子层沉积Al_2O_3保护层氢终端金刚石MISFETs的电学特性（英文）

研究了Zr-Si-N氢终端金刚石(H-diamond)绝缘栅场效应晶体管(MISFET)在有无Al_2O_3保护层情况下的电学特性。分别采用原子层沉积法(ALD)和射频溅射法(RF)制备了Al_2O_3保护层和Zr-Si-N栅介质层。MISFETs的转移特性曲线表明,其栅阈值电压在有无Al_2O_3保护的情况下从-2.5 V变化到3 V,表明器件从常关型转换为常开型。输出和转移特性曲线揭示了氧化铝的存在保护了氢终端,使其免受磁控溅射过程的损伤。     

基于磁过滤技术的热障涂层表面Al2O3 覆盖层抗CMAS腐蚀性能

为了提高热障涂层（TBC）的抗沉积物（主要成分为CaO、MgO、Al₂O₃和SiO₂,简称CMAS）腐蚀性能,采用磁过滤阴极真空电弧（FCVA）技术在TBC表面上制备了致密的Al₂O₃覆盖层,比较和分析了Al₂O₃改性TBC和沉积态TBC的润湿行为和抗CMAS腐蚀性能。结果表明：使用FCVA技术制备Al₂O₃覆盖层的过程对7%（质量分数）氧化钇稳定的氧化锆（7YSZ）相的结构无明显影响,且经Al₂O₃改性的TBC综合性能均优于沉积态TBC。在1250 ℃、CMAS腐蚀条件下,Al₂O₃覆盖层有效地限制了熔融CMAS在TBC表面上的扩散行为。同时,Al₂O₃填充了7YSZ柱状晶之间的间隔并且阻碍了熔融CMAS的渗透,证明了FCVA可作为一种制备Al₂O₃涂层的新方法以提高TBC的抗CMAS腐蚀性能,且Al₂O₃涂层及其制备过程对TBC的热震性能均无消极影响。     

BN/Al2O3 复合粉末及其聚合物基复合材料的制备与导热性能

采用固-液相共混法制备了多种BN/Al₂O₃复合粉末,通过冻融法和表面修饰法对BN进行了改性处理,改变表面修饰剂类型和摩尔比得到了前驱体和烧结态BN/Al₂O₃复合粉末,并利用机械混合法制备了聚合物基BN/Al₂O₃复合材料,并测试分析了其导热性能。结果表明,经冻融处理的BN分散性和界面相容性明显优于未经冻融处理的BN。多巴胺对BN的改性效果优于聚乙二醇。采用多巴胺作为表面修饰剂且BN与Al(NO₃)₃的摩尔比为1:1时,能够得到纳米Al₂O₃均匀包覆的微米BN粉末,即BN/Al₂O₃微纳复合粉末,其聚合物基复合材料的导热系数可达0.62 W·m^-1·K^-1,是纯聚合物导热系数的3倍,是采用纯微米BN粉末制备的聚合物基复合材料导热系数的1.5倍。在BN表面附着的Al₂O₃可以形成层状热传导通道,能够有效提高聚合物基BN/Al₂O₃复合材料的热导率。     

性能优异的SrO改性Pd-Rh双金属催化剂的制备

在浸渍到Al₂O₃载体材料上之前,通过将Sr的前驱体引入到贵金属Pd和Rh的混合盐溶液中,即采用共浸渍法制备了一系列SrO改性的Pd-Rh/Al₂O₃催化剂。结果表明,由于SrO的扩散障碍效应,适量SrO（1%~2%,质量分数）的引入有利于促进Pd,Rh的分散,并且能提高催化剂的水热稳定性。水热老化之后,催化剂能保持更高的Pd,Rh分散度,并且Pd,Rh能稳定在活性更好的氧化态。因此,适量SrO改性的Pd-Rh/Al₂O₃催化剂具有更好的还原性能和三效催化活性。然而,当向催化剂中引入过量的SrO,由于SrO占据了过量的Al₂O₃的表面,而且老化后会出现新的物相SrAl₂O₄,反而会对催化剂的性能产生不利的影响。总的来说,2% SrO改性的催化剂具有最优异的三效催化活性,水热老化之后,相比于空白的Pd-Rh/Al₂O₃催化剂,2%SrO改性的催化剂使CO,HC和NO的起燃温度分别降低了23,15和27 ℃。     

γ-TiAl合金表面Al2O3/Al复合涂层的抗高温熔盐腐蚀性能研究

采用磁控溅射技术于γ-TiAl合金表面制备Al₂O₃/Al复合涂层。在850 °C下、 100 wt.% Na₂SO₄熔盐中观测Al₂O₃/Al复合涂层的高温腐蚀行为。结果表明,Al₂O₃/Al复合涂层具备由Al₂O₃表层、富Al中间层以及互扩散层组成的梯度结构,因而有效地提高了基体γ-TiAl合金的抗高温腐蚀性能。在腐蚀实验后,涂层试样表面相结构为Al₂O₃,TiO₂和TiAl₃。致密的Al₂O₃/Al复合涂层有效地抑制了O_2-,S_-和Na₊对基体γ-TiAl合金的侵蚀。并且,Al₂O₃/Al复合涂层的梯度结构亦使其表现出了优异的抗开裂和抗剥落性能。     

Al2O3微粉添加量对镁合金微弧氧化膜特性影响研究

为了研究添加Al₂O₃微粉对AZ31A镁合金微弧氧化膜特性影响,在不同浓度Al₂O₃微粉电解液中对其进行了微弧氧化处理。利用扫描电镜(SEM)观察微弧氧化膜形貌,能谱仪(EDS)分析了膜层表面Ca、Mg、O、Al元素分布,X射线衍射仪(XRD)分析了相组成,测定了膜厚、硬度和氧化液中Al₂O₃表面电荷,讨论了掺杂改性机理。结果表明,加入Al₂O₃微粉后,氧化电压随Al₂O₃添加量增加先增加后降低;氧化膜表面孔洞数量和尺寸减小,膜层表面Ca元素分布逐渐减少,成膜效率降低,膜层致密度和表面疏松层硬度提高,氧化膜主要由MgO和MgO₄等相组成。     

Fe2O3-CaO-TiO2 体系下铁酸钙的合成过程及TiO2 和CaTiO3 的影响

为了确定高钛型钒钛磁铁矿烧结过程中铁酸钙的生成是受TiO₂还是TiO₂和CaO形成的CaTiO₃影响,首先利用Fe₂O₃和CaO的纯试剂合成了铁酸钙,并研究了TiO₂和CaTiO₃对钛铁酸钙 （FCT） 形成的影响。在Factsage 7.0软件进行热力学计算的基础上,通过在空气气氛下进行烧结,获得了在1023~1423 K温度范围内、不同烧结时间的不同样品。通过X射线衍射和扫描电镜-能谱分析等表征手段,对烧结样品的物相转变和微观结构变化进行了表征。发现FCT的形成过程主要分为2个阶段：前一阶段为1023~1223 K温度范围内Fe₂O₃与CaO之间的反应,合成产物为Ca₂Fe₂O₅,反应方程式为“Fe₂O₃(s)+ 2CaO(s)= Ca₂Fe₂O₅(s)”;后一阶段为1223~1423 K温度范围内Ca₂Fe₂O₅和Fe₂O₃的反应,主要产物为CaFe₂O₄,反应为“Ca₂Fe₂O₅(s)+ Fe₂O₃(s)= 2CaFe₂O₄(s)”,该阶段尤其是温度为1423 K时,反应速率显著加快,随温度的升高CaTiO₃显著增加。然而,Ti元素在铁酸钙中的固溶很难实现,TiO₂与铁酸钙之间的反应不是形成FCT的有效途径。随着保温时间的延长,CaTiO₃和FCT相界中Fe元素含量增加。FCT主要是通过Fe组分在CaTiO₃中固溶形成的,主要反应是“Fe₂O₃+CaTiO₃(s)=FCT(s)”。     

Al2O3/Ti2AlN复合材料在900℃,1000℃和1100℃空气中的氧化行为

利用综合热分析仪、背散射扫描电镜(BSE)和能谱分析(EDS)对Al₂O₃/Ti₂AlN复合材料在900 ℃,1 000 ℃和1 100 ℃/20 h空气中连续氧化20h后的氧化增重及氧化层截面进行了研究。结果表明：Al₂O₃/Ti₂AlN复合材料在空气中的氧化行为符合抛物线规律,在900 ℃,1 000 ℃和1 100 ℃/20 h氧化增重分别为2.78×10_-2 kg/m₂、10.4 ×10_-2 kg/m₂、21.9 ×10_-2 kg/m₂,抛物线速率常数相应为1.08×10_-8 kg₂/m₄s、1.44×10_-7 kg₂/m₄s、6.56×10_-7 kg₂/m₄s,氧化激活能为274 kJ/mol。氧化层主要由TiO₂和Al₂O₃组成的,连续的Al₂O₃次外层可以提高其抗氧化性能。氧化层结构的改变是由于氧化温度对Ti₄₊、Al₃₊由基体表面向外扩散和O_2-向内扩散的影响,以及TiO₂和Al₂O₃在不同温度下的形核生长速率导致的。对Al₂O₃/Ti₂AlN而言,控制材料与氧化气氛的界面是提高该材料抗氧化性能的关键。     

HOPG上ALD沉积Al2O3介电薄膜的生长行为研究

本文采用原子层沉积(ALD)的方法,选择三甲基铝(TMA)和H₂O₂作为反应前驱体,在高定向热解石墨(HOPG)基体上沉积Al₂O₃。系统研究了反应温度和生长周次对Al₂O₃生长行为的影响。研究表明：受HOPG表面饱和成键的影响,Al₂O₃在衬底表面处形核困难,在生长初期主要表现为台阶处择优生长,其形态为线状结构。当沉积100周次Al₂O₃时,其中在沉积温度为50 °C、150 °C和200 °C时呈现为纳米线状结构,而在100 °C时呈现为非连续薄膜。随着生长周次的增加,不同温度下沉积态Al₂O₃都趋于形成连续薄膜,表明其生长行为发生了由三维岛状生长模式向二维平面生长模式的转变。分析认为,生长模式的转变是由纳米线状结构横向生长造成的;横向生长速率主要受生长温度影响。拉曼结果表明：沉积后的石墨烯层结构未受影响,可保留其原有的优越性能。     

Al0.7Sb2Te3三元靶材的结构性能表征

以原子比Al:Sb:Te=0.7:2:3的混和粉为原料,采用真空合成法与烧结-热等静压制备Al_0.7Sb₂Te₃三元靶材,通过XRD、FESEM、EDS、XPS等手段表征其性能,且重点采用XPS研究Al在Al_0.7Sb₂Te₃三元靶材的存在状态。结果表明：Al掺杂后,靶材主相Sb₂Te₃的晶格常数减小,且单质Al弥散相与Al_0.1Sb₂Te₃基体相共存,表明掺杂对靶材的组织结构确有影响;刻蚀深度从0增加至405.9nm,Al价态从以Al₂O₃的化合态为主逐渐过渡至以单质态为主,且Al以Al₂O₃形态为主的区域深度约90nm;刻蚀深度为405.9nm时,来自非氧化物的Al价态与来自AlSb的Sb价态联合表明：Al_0.1Sb₂Te₃中的Al通过有效化合形成AlSb影响着靶材的组织结构。     

Deposition, microstructure and properties of texture-controlled CVD α-Al2O3 coatings

The influence of nucleation on the microstructure and properties of CVD Al₂O₃ was investigated. The experimental α-Al₂O₃ layers were deposited (a) without nucleation control and (b) with nucleation steps resulting in pronounced , and growth textures. The experimental layers were characterised using X-ray diffraction, scanning electron microscopy and transmission electron microscopy. Wear properties of the textured coatings were evaluated in turning. The chemistry of the nucleation surface appeared to be an important factor in pre-determining the phase content and growth textures of the Al₂O₃ layers. Optimised nucleation resulted in substantially improved wear properties and these kinds of α-Al₂O₃ layers were typically composed of relatively small, defect-free grains exhibiting no porosity. The textured α-Al₂O₃ layer showed the best wear resistance.     

Microstructural analysis of YSZ and YSZ/Al2O3 plasma sprayed thermal barrier coatings after high temperature oxidation

Air plasma sprayed TBCs usually include lamellar structure with high interconnected porosities which transfer oxygen from YSZ layer towards bond coat and cause TGO growth and internal oxidation of bond coat.The growth of thermally grown oxide (TGO) at the interface of bond coat and ceramic layer and internal oxidation of bond coat are considered as the main destructive factors in thermal barrier coatings.Oxidation phenomena of two types of plasma sprayed TBC were evaluated: (a) usual YSZ (yttria stabilized zirconia), (b) layer composite of (YSZ/Al₂O₃) which Al₂O₃ is as a top coat over YSZ coating. Oxidation tests were carried out on these coatings at 1100°C for 22, 42 and 100h. Microstructure studies by SEM demonstrated the growth of TGO underneath usual YSZ coating is higher than for YSZ/Al₂O₃ coating. Also cracking was observed in usual YSZ coating at the YSZ/bond coat interface. In addition severe internal oxidation of the bond coat occurred for usual YSZ coating and micro-XRD analysis revealed the formation of the oxides such as NiCr₂O₄, NiCrO₃ and NiCrO₄ which are accompanied with rapid volume increase, but internal oxidation of the bond coat for YSZ/Al₂O₃ coating was lower and the mentioned oxides were not detected.     

MoS2颗粒表面包覆Al2O3及其在镀层中的应用

采用非均匀形核法将Al2O3包覆到MoS2颗粒表面,提高颗粒的亲水性能。研究了溶液pH值、Al(NO3)3的摩尔浓度和预处理工艺对包覆率的影响;采用SEM及EDS分析了包覆前后MoS2颗粒的微观形貌和表面成分;通过测量接触角研究了颗粒表面的亲水性。结果表明,颗粒表面均匀包覆了一层Al(OH)3;溶液pH值对包覆率的影响最大,Al(NO3)3的摩尔浓度次之。最佳工艺为:溶液pH值为5.5,Al(NO3)3浓度为0.15mol/L,预处理过程不添加表面活性剂。随着包覆率的提高,MoS2颗粒的亲水性提高。利用包覆Al2O3的MoS2制得了Ni-P-MoS2化学复合镀层,提高了镀层中沉积粒子的均匀致密性。     

Al2O3陶瓷Ti+Nb/Mo金属化对其与Kovar合金钎焊连接的组织和力学性能的影响

采用磁控溅射在Al₂O₃陶瓷表面沉积了Ti+Nb/Mo金属层,实现了氧化铝陶瓷的金属化,并通过电镀镍提高了金属化效果.采用AgCu28钎料,实现了金属化Al₂O₃陶瓷与Kovar合金的可靠连接.通过扫描电子显微镜和能谱观察了钎缝的微观组织.结果表明,钎料与母材发生了明显的界面反应.Cu元素扩散进入Kovar合金,同时Ni元素扩散进入钎料的富铜区,从而促进AgCu/Kovar连接界面的形成;金属化层在Al₂O₃/AgCu钎料界面处,起到了关键作用,其中铌可以抑制脆性化合物形成,缓解残余应力.金属化层镀镍后,钎缝中AgCu共晶区明显,且钎缝较宽,对提高镀镍试样的钎焊接头强度有一定作用.     

Ti活度对Al2O3/AgCuTi/Fe-Ni-Co钎焊接头机械性能和微观组织结构的影响

采用AgCuTi钎料实现了Al₂O₃陶瓷与Fe-Co-Ni合金的钎焊连接,并调查了不同钛含量的钎料对Al₂O₃/AgCuTi/Fe-Ni-Co钎焊接头机械性能和微观组织结构的影响。扫描电子显微镜(SEM), X射线能量色散光谱仪(EDS), X射线衍射仪(XRD)及电子万能试验机用于分析钎焊接头的机械性能和微观组织结构,结果表明:钛含量的增加明显提高AgCuTi钎料与Al₂O₃陶瓷的相互作用,在Al₂O₃/Ag-Cu-Ti界面生成一层由Ti-Al 和 Ti-O化合物组成的反应层。Al₂O₃/AgCuTi/Fe-Ni-Co钎焊接头的抗拉强度随钛含量的增加而增加,当钛含量提高到8wt.%时,抗拉强度达到最大值78Mpa。通过微观组织结构分析发现,采用AgCu4Ti在890℃保温5min的条件下可以获得较好的钎焊接头,典型接头的微观组织结构为Al₂O₃/TiAl+Ti₃O₅/NiTi+Cu₃Ti+Ag(s,s)/Ag(s,s)+Cu(s,s)+(Cu,Ni)/Fe-Ni-Co。采用AgCu8Ti获得的钎焊接头的界面反应层与AgCu4Ti差异不大,但反应层稍微增厚,并伴有TiO和Ti3Al在Al₂O₃/Ag-Cu-Ti界面生成。     

Examination of wire electrical discharge machining of Al2O3p/6061Al composites

Alumina particle reinforced 6061 aluminum matrix composites (Al₂O₃p/6061Al) have excellent physical and chemical properties than those of a traditional metal; however, their poor machinability lead to worse surface quality and serious cutting tool wear. In this study, wire electrical discharge machining (WEDM) is adopted in machining Al₂O₃p/6061Al composite. In the experiments, machining parameters of pulse-on time were changed to explore their effects on machining performance, including the cutting speed, the width of slit and surface roughness. Moreover, the wire electrode is easily broken during the machining Al₂O₃p/6061Al composite, so this work comprehensively investigates into the locations of the broken wire and the reason of wire breaking.The experimental results indicate that the cutting speed (material removal rate), the surface roughness and the width of the slit of cutting test material significantly depend on volume fraction of reinforcement (Al₂O₃ particles). Furthermore, bands on the machined surface for cutting 20 vol.% Al₂O₃p/6061Al composite are easily formed, basically due to some embedded reinforcing Al₂O₃ particles on the surface of 6061 aluminum matrix, interrupt the machining process. Test results reveal that in machining Al₂O₃p/6061Al composites a very low wire tension, a high flushing rate and a high wire speed are required to prevent wire breakage; an appropriate servo voltage, a short pulse-on time, and a short pulse-off time, which are normally associated with a high cutting speed, have little effect on the surface roughness.     

Ti6Al4V钛合金表面Al2O3颗粒改性微弧氧化涂层制备及性能

微弧氧化技术是一门新的表面处理技术,在很多领域有着广泛的应用前景,但其结构受限于电解液成分。本文通过在磷酸盐电解液中加入Al2O3陶瓷颗粒,使得在Ti6Al4V钛合金表面的微弧氧化涂层结构和性能得到改性。涂层的结构和性能通过扫描电镜和XRD衍射仪进行表征和测试,涂层的抗高温氧化性能和热震性能通过高温热循环氧化试验和热震试验进行测试。结果表明,通过在电解液中添加Al2O3陶瓷颗粒,涂层由Al2TiO5 and TiO2组成,涂层更为致密,表现出更为优异的抗高温氧化和热震性能。电解液中游动的Al2O3陶瓷颗粒在微弧氧化过程中被吸入到样品表面并进入涂层,涂层的结构和性能得到改性。     

Microstructure and mechanical properties of Al2O3-Cr2O3 composite coatings produced by atmospheric plasma spraying

Al₂O₃, Al₂O₃-Cr₂O₃ and Cr₂O₃ coatings were deposited by atmospheric plasma spraying. Phase composition of powders and as-sprayed coatings was determined by X-ray diffraction. Electron probe microanalyzer was employed to investigate the polished and fractured surface morphologies of the coatings. Mechanical properties including microhardness, fracture toughness and bending strength were evaluated. The results indicate that the addition of Cr₂O₃ is conducive to the stabilization of α-Al₂O₃. Compared with the pure Al₂O₃ and Cr₂O₃ coatings, Al₂O₃-Cr₂O₃ composite coatings show lower porosities and denser structures. Heterogeneous nucleation of α-Al₂O₃ occurs over the isostructural Cr₂O₃ lamellae and partial solid solution of Al₂O₃ and Cr₂O₃ might be occurring as well. Furthermore, grain refining and solid solution strengthening facilitate the mechanical property enhancement of Al₂O₃-Cr₂O₃ composite coatings.